JPS6331529U - - Google Patents

Info

Publication number

JPS6331529U

JPS6331529U JP12464886U JP12464886U JPS6331529U JP S6331529 U JPS6331529 U JP S6331529U JP 12464886 U JP12464886 U JP 12464886U JP 12464886 U JP12464886 U JP 12464886U JP S6331529 U JPS6331529 U JP S6331529U

Authority

JP

Japan

Prior art keywords

core tube

furnace core

heat treatment

semiconductor

tube body

Prior art date

1986-08-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 10
• 238000010438 heat treatment Methods 0.000 claims description 9
• 238000004519 manufacturing process Methods 0.000 claims description 3
• 230000037431 insertion Effects 0.000 claims description 2
• 238000003780 insertion Methods 0.000 claims description 2
• 239000010453 quartz Substances 0.000 claims description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
• 230000000903 blocking effect Effects 0.000 claims 1
• 238000009434 installation Methods 0.000 description 1