JPS6331529U - - Google Patents
Info
- Publication number
- JPS6331529U JPS6331529U JP12464886U JP12464886U JPS6331529U JP S6331529 U JPS6331529 U JP S6331529U JP 12464886 U JP12464886 U JP 12464886U JP 12464886 U JP12464886 U JP 12464886U JP S6331529 U JPS6331529 U JP S6331529U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- heat treatment
- semiconductor
- tube body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000009434 installation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12464886U JPS6331529U (enExample) | 1986-08-15 | 1986-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12464886U JPS6331529U (enExample) | 1986-08-15 | 1986-08-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6331529U true JPS6331529U (enExample) | 1988-03-01 |
Family
ID=31016857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12464886U Pending JPS6331529U (enExample) | 1986-08-15 | 1986-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331529U (enExample) |
-
1986
- 1986-08-15 JP JP12464886U patent/JPS6331529U/ja active Pending
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