JPS63314431A - 静電容量形差圧伝送器 - Google Patents

静電容量形差圧伝送器

Info

Publication number
JPS63314431A
JPS63314431A JP15171187A JP15171187A JPS63314431A JP S63314431 A JPS63314431 A JP S63314431A JP 15171187 A JP15171187 A JP 15171187A JP 15171187 A JP15171187 A JP 15171187A JP S63314431 A JPS63314431 A JP S63314431A
Authority
JP
Japan
Prior art keywords
chamber
diaphragm
center
seal
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15171187A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0439024B2 (enExample
Inventor
Kenichi Yoshioka
吉岡　賢一
Ryuzo Asada
浅田　龍造
Kiyoto Yoda
清人 依田
Tamaki Ishikawa
環 石川
Hiroshi Takagi
浩 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP15171187A priority Critical patent/JPS63314431A/ja
Publication of JPS63314431A publication Critical patent/JPS63314431A/ja
Publication of JPH0439024B2 publication Critical patent/JPH0439024B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP15171187A 1987-06-18 1987-06-18 静電容量形差圧伝送器 Granted JPS63314431A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15171187A JPS63314431A (ja) 1987-06-18 1987-06-18 静電容量形差圧伝送器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15171187A JPS63314431A (ja) 1987-06-18 1987-06-18 静電容量形差圧伝送器

Publications (2)

Publication Number Publication Date
JPS63314431A true JPS63314431A (ja) 1988-12-22
JPH0439024B2 JPH0439024B2 (enExample) 1992-06-26

Family

ID=15524603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15171187A Granted JPS63314431A (ja) 1987-06-18 1987-06-18 静電容量形差圧伝送器

Country Status (1)

Country Link
JP (1) JPS63314431A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH056344U (ja) * 1991-07-10 1993-01-29 横河電機株式会社 差圧測定装置
JP2014106182A (ja) * 2012-11-29 2014-06-09 Azbil Corp 差圧センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH056344U (ja) * 1991-07-10 1993-01-29 横河電機株式会社 差圧測定装置
JP2014106182A (ja) * 2012-11-29 2014-06-09 Azbil Corp 差圧センサ

Also Published As

Publication number Publication date
JPH0439024B2 (enExample) 1992-06-26

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