JPS63313307A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE:To obtain the manufacture preventing the production of air bubbles incurring the deterioration in the recording and reproducing characteristic by placing a glass plate on the upper face of a base made of a ferromagnetic oxide with a slot formed on the upper face, softening the glass plate and raising the temperature of it while the plate is pressed from the upper side thereby packing the glass to the slot. CONSTITUTION:A high melting point glass plate 14 is placed on the upper face 1a of the base 1 made of a ferromagnetic oxide whose upper face is formed with a tilt slot 2 and with a ferromagnetic thin metallic film 3 such as 'Sendust(R)', etc., coated thereupon and the plate 14 is pressed from the upper side under a pressure F by a crystal glass 16 via a metallic foil 15. The glass plate 14 is softened to a degree of deformation by heating to raise the temperature under vacuum atmosphere in the pressing state and the glass 17 is packed in the tilt slot 2. Then the upper face 1a of the base 1 is shaped flat to remove the glass plate 14 not packed in the tilt slot 2 and excess ferromagnetic thin metallic film. Thus, the high melting point glass is packed in the tilt slot 2 without causing air bubbles.

Description

DETAILED DESCRIPTION OF THE INVENTION INDUSTRIAL APPLICATIONS The present invention relates to a method for manufacturing a magnetic head, and more particularly to a method for filling glass into grooves in a substrate that will become the magnetic core halves.

(b) Conventional technology In recent years, the density of magnetic tapes used in magnetic recording and reproducing devices such as video recorders has been increasing, and magnetic tapes using ferromagnetic metal powders such as F@ and Co5Ni as magnetic powders have been developed. Metal tapes with high magnetic strength are now being used. On the other hand, in a magnetic head that records on this metal tape, the part near the working gap is made of a magnetic material with a higher saturation magnetization than the ferrite used as the magnetic core (for example, permanent magnet, sendust, amorphous magnetic material). A composite magnetic head has been proposed, and this composite magnetic head has excellent characteristics in terms of reliability, magnetic properties, wear resistance, and the like.

As a manufacturing method of this composite type magnetic head, for example, Japanese Patent Application Laid-Open No. 172203/1983 (01) BS/127)
etc. are disclosed.

First, as shown in FIG. 12, the upper surface (1a) of a substrate (1) made of a ferromagnetic oxide such as KMn-Zn single crystal ferrite.
An inclined groove (2) is formed in the groove.

Next, as shown in FIG.
A ferromagnetic metal thin film (3) such as sendust is deposited on a) by sputtering.

Next, as shown in FIG. 18, a glass rod (4) is inserted into the inclined groove (2) and heated in a vacuum atmosphere to raise the temperature to completely melt the glass rod (4), and as shown in FIG. As shown in the figure, the inclined groove (2) is filled with glass (5). after that,
The upper surface (1a) of the substrate (1) is ground and polished to remove the glass and ferromagnetic metal thin film in the portion other than the oblique groove (21) as shown in FIG.

Next, as shown in FIG.
&) is provided with a track width regulating groove (6) parallel to the inclined groove (2).
) is processed to form a gap forming surface αC.

Next, a substrate (1) with a winding groove (7) and a glass rod insertion groove (8) formed on the upper surface (1a) of the substrate (1) and a 15th
The board shown in the figure (1) and the financial information 16 as shown in the figure 8102
The gap forming surfaces fi [are brought into contact with each other so that they face each other via a gap spacer (not shown) such as the like. Then, a glass rod (9) is inserted into the glass rod insertion groove (8), and the track width regulating groove (6) is filled with glass fiυ, which is completely melted by heating and increasing the temperature in a vacuum atmosphere. The substrates (1) and (1) are glass-bonded to form a core block 0 shown in FIG. 17.

Thereafter, as is well known, the core block α3 is cut and the tape sliding surface is rounded and polished to complete the composite head chip.

However, in the case of the above-mentioned conventional manufacturing method, as shown in FIGS. 18 and 19, the glass rod (4) is inserted into the inclined groove (2) and the temperature is increased by heating the inclined groove (2). was filled with glass (5), but in order to completely melt the glass rod (4), it was necessary to
The temperature must be raised to a temperature higher than 300°C. In particular, when using a high melting point glass with a softening point of 500 to 600°C, the temperature must be raised to about 700 to 900°C. When this high melting point glass is melted and filled into the inclined fPr groove (21) at a high temperature, the molten glass may greatly erode the ferromagnetic metal thin film (3) or the ferromagnetic metal thin film (3).
3), the ferromagnetic metal thin film (3)
The edges and surfaces of the parts are deformed, which adversely affects the dimensional accuracy of the working gap. Furthermore, if the glass rod (4) is completely molten before filling, bubbles may be generated from inside the glass or bubbles may be generated due to the contamination of foreign substances, which may worsen the flow of the glass and reduce the yield. This causes a decrease in the temperature.

Further, when the interface of the ferrite forming the substrate (1) is exposed to high temperature while in contact with a ferromagnetic metal material, a reaction occurs at the interface and an altered layer is formed. When such a deteriorated layer is formed, the magnetic resistance at the interface increases, the magnetic properties of the ferrite deteriorate, and the recording/reproducing characteristics of the magnetic head deteriorate.

In addition, in order to suppress the above-mentioned drawbacks, 5i02 and Al2O3
It is conceivable to use a low melting point glass with a reduced amount of high melting point components, such as, but such a low melting point glass is susceptible to cracks etc. due to its weak mechanical strength. Furthermore, since this low melting point glass has a low hardness, it is easily dented, and if a completed magnetic head is used for a long time, the tape sliding surface will wear unevenly, which will adversely affect recording and reproduction.

Furthermore, when forming the track width regulating grooves (6) shown in FIG. 15, burrs may be generated on the ferromagnetic metal thin film (3) as shown in FIG. 20, which may have a negative effect on the gap accuracy. Furthermore, the same drawback as described above occurs when the glass rod (9) is inserted into the glass rod insertion groove (8) in FIG. 16 and the temperature is increased by heating.

(→ Problems to be Solved by the Invention The present invention addresses the drawbacks of the above-mentioned conventional examples.
An object of the present invention is to provide a method for manufacturing a magnetic head, which prevents the generation of bubbles that cause deterioration of recording and reproducing characteristics in the glass even when the grooves of a substrate forming a magnetic core half are filled with high-melting point glass. It is.

(b) Means for solving the problem A groove is formed on the upper surface of a substrate made of ferromagnetic oxide that will become the magnetic core half, a glass plate is placed on the upper surface of the substrate, and the glass plate is applied from above. The groove is filled with glass by softening it by heating it under pressure.

(E) Effect According to the above method, the grooves are filled with glass by raising the temperature of the glass plate to a point where it slightly softens and holding it for a certain period of time, even if the glass plate is not completely melted. Even if melting point glass is used, glass filling can be performed at a relatively low temperature and no bubbles will be generated.

(F) Example Hereinafter, a method for manufacturing a magnetic head of the present invention will be explained in detail with reference to the drawings.

First, as shown in FIG. 2, the upper surface (1a) of a substrate (1) made of a ferromagnetic oxide such as Mn-zn single crystal ferrite
An inclined groove (2) having an inclined surface (2a) is formed on the surface.

Next, as shown in FIG.
), a ferromagnetic metal thin film (3) such as sendust is deposited by sputtering.

Next, the substrate (1) shown in FIG. 5 is placed on the quartz glass substrate (1a) as shown in FIG.
), the surface facing the substrate (1) is the upper surface (1) of the substrate (1).
A high melting point glass plate I having the same shape as a) and a softening point of 520° C. is placed, and a flat surface is placed from above through a metal foil a9 such as PT or OU having a higher melting point than the glass plate (141). High quality quartz glass (5 to 9 layers/- from above due to le)
Pressurize at a pressure F. Then, in this pressurized state, the glass plate α4 is heated to 490° C. in a vacuum atmosphere to soften the glass plate α4 to the extent that it can be deformed and held for about 1 hour, and as shown in FIG. (2) Glass α
Fill with D.

Note that the metal foil fi9 does not bond the glass plate a and the quartz glass ae (1?).

Next, the upper surface (1a) of the substrate (1) is ground to remove the glass plate α4 that is not filled in the inclined groove (2) and the excess ferromagnetic metal thin film, and then mirror polished to remove the fifth As shown in the figure, the ferromagnetic metal thin film (3) deposited on the slope (21L) is exposed.

Next, as shown in FIG. 6, the upper surface (1) of the substrate (1) is
) is provided with a track width regulating groove (6) parallel to the inclined groove (2).
form. At this time, paris (13) is generated in the ferromagnetic metal thin film (3) as shown in FIG.

Next, by the method shown in FIG. 1, the track width regulating groove (6) of the substrate (1) is also covered with a glass plate α as shown in FIG.
The glass (19) is filled by softening the sand.

Next, as in FIG. 6, the upper surface (1a) of the substrate (1) is ground to remove the glass plate α$, and then mirror polished to cover the slope (2a) as shown in FIG. The deposited ferromagnetic metal thin film (3) is exposed to form a gap forming surface (1 (I). At this time, the paris α (generated during the track width regulating groove (6) machining is removed) The substrate (1) has a winding groove (7) orthogonal to the track width regulating groove (6) formed on the upper surface (1a) of the substrate (1) and the substrate (shown in FIG. 8).
1) are brought into contact with each other via a gap spacer such as 8102 (not shown) so that the gap forming surfaces q1 face each other as shown in FIG. The glass (171Q9) is softened and the substrates (1) and (1) are glass-bonded to form the core block (2). After that, the core block (2) is cut in the same manner as in the conventional example, and the tape sliding contact surface 121) is formed. By polishing with R, a pair of magnetic core halves (22a) (221) made of ferromagnetic oxide are formed as shown in FIGS. 10 and 1).
) Ferromagnetic metal thin film (3) near the operating gap (c)
A plurality of composite head chips C2J having (3) are formed.

In the method for manufacturing a magnetic head as described above, wear resistance is achieved near the softening point of the glass plate (1=1)08 by a simple method of heating the glass plate Q41Q8'5 under pressure in a vacuum atmosphere and increasing the temperature. High melting point glass with excellent hardness (191 and 12+ inclined grooves) Rack width regulation groove (6
), the glass (17) (19) erodes the ferromagnetic metal thin film (3), or the ferromagnetic metal thin film (3)
There is no reaction, and the operating gap opening remains highly accurate.

Further, when filling the glass filament with glass, no air bubbles are generated, and no deterioration layer is generated at the interface between the substrate (1) and the ferromagnetic metal thin film (3). Further, the paris a3 generated during machining of the track width regulating groove (6) is removed by the grinding process shown in Fig. g8.

Note that this glass filling method using a glass plate can also be used in the manufacturing method of a ferrite head for a normal video tape recorder in which a ferromagnetic metal thin film is not formed on the top surface of the substrate.
It is effective because it can be filled with high melting point glass without generating bubbles.

(G) Effects of the Invention According to the present invention, it is possible to fill the grooves on the top surface of the substrate with high-hardness, high-melting-point glass having excellent wear resistance at a low temperature near the softening point of the glass. It is possible to provide a method for manufacturing a magnetic head that prevents the generation of bubbles in the glass that would cause deterioration of recording and reproducing characteristics.

[Brief explanation of drawings]

Figures 1 to 1) relate to the present invention;
3, 4, 5, 6, 7, 8, and 9 are diagrams showing the manufacturing method of the magnetic head, respectively, and FIG. 10 shows the magnetic head formed by the above manufacturing method. The first perspective view of the head shows its tape sliding surface. 12th
Figures to Figures 20 relate to conventional examples, and Figures 12, 13,
Fig. 14, Fig. 15, Fig. 16, Fig. 17, Fig. 18,
FIG. 19 and FIG. 20 are diagrams each showing a method of manufacturing a magnetic head. (IHI)...Substrate, (2)...Slanted groove, (6)...
...Track width regulation section, (141 (181-...Glass plate, Uηα3...Glass, (22 &) (221))
...Magnetic core half.

Claims (1)

[Claims] (1) A groove is formed on the upper surface of a substrate made of ferromagnetic oxide that will become the magnetic core half, a glass plate is placed on the upper surface of the substrate, and the glass plate is heated while being pressurized from above. A method of manufacturing a magnetic head, characterized in that the grooves are filled with glass by softening the glass.