JPS63310772A - Aluminum nitride sintered body - Google Patents
Aluminum nitride sintered bodyInfo
- Publication number
- JPS63310772A JPS63310772A JP62144352A JP14435287A JPS63310772A JP S63310772 A JPS63310772 A JP S63310772A JP 62144352 A JP62144352 A JP 62144352A JP 14435287 A JP14435287 A JP 14435287A JP S63310772 A JPS63310772 A JP S63310772A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- molybdenum
- sintered body
- added
- nitride powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 45
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 22
- 239000011733 molybdenum Substances 0.000 claims abstract description 22
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000000843 powder Substances 0.000 claims abstract description 21
- 239000000654 additive Substances 0.000 claims abstract description 13
- 238000005245 sintering Methods 0.000 claims abstract description 10
- 230000000996 additive effect Effects 0.000 claims abstract description 9
- 239000000203 mixture Substances 0.000 claims abstract description 7
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 7
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 3
- 150000001342 alkaline earth metals Chemical class 0.000 claims abstract description 3
- 238000002156 mixing Methods 0.000 claims abstract 2
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000005078 molybdenum compound Substances 0.000 claims description 9
- 150000002752 molybdenum compounds Chemical class 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 6
- 150000002910 rare earth metals Chemical class 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 abstract description 10
- 239000012299 nitrogen atmosphere Substances 0.000 abstract description 6
- 230000008020 evaporation Effects 0.000 abstract description 2
- 238000001704 evaporation Methods 0.000 abstract description 2
- 238000000859 sublimation Methods 0.000 abstract description 2
- 230000008022 sublimation Effects 0.000 abstract description 2
- 238000009770 conventional sintering Methods 0.000 abstract 1
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 7
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 6
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 6
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 6
- 229910000019 calcium carbonate Inorganic materials 0.000 description 5
- 238000004040 coloring Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000012752 auxiliary agent Substances 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011812 mixed powder Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- -1 rare earth compounds Chemical class 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000001272 pressureless sintering Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は窒化アルミニウム焼結体に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to an aluminum nitride sintered body.
（従来の技術）
従来、半導体集積回路用パッケージ、トランジスタヘッ
ド等の電子部品に使用するセラミックスとしてはアルミ
ナ系のものが一般に使用されている。しかし、近年集積
密度の増大化および大電力半導体素子を搭載する等の傾
向にともない、アルミナ系セラミック以上に高い熱伝導
性を有し、かつ熱膨張係数が半導体素子の熱膨張係数に
より近く、また機械的な強度もより高い材料が要求され
ている。(Prior Art) Conventionally, alumina-based ceramics have been generally used for electronic components such as semiconductor integrated circuit packages and transistor heads. However, in recent years, with the trend toward increased integration density and the mounting of high-power semiconductor devices, it has been found that it has higher thermal conductivity than alumina-based ceramics, and has a thermal expansion coefficient closer to that of semiconductor devices. Materials with higher mechanical strength are also required.
そこで、最近は熱伝導性および機械的強度により優れる
とともに、半導体素子の熱膨張係数により近い熱膨張係
数を有する窒化アルミニウム系のセラミックスが使用さ
れるようになってきた。Therefore, recently, aluminum nitride ceramics have been used which have superior thermal conductivity and mechanical strength, and which have a coefficient of thermal expansion closer to that of semiconductor elements.
この窒化アルミニウム系セラミックスは従来、常圧焼結
法またはホットプレス法によって製造されている。この
うちホットプレス法では複雑な形状を有する焼結体の製
造が困難であり、しかもコストが高い上に生産性に劣る
という問題点がある。This aluminum nitride-based ceramic has conventionally been manufactured by a pressureless sintering method or a hot pressing method. Among these methods, the hot press method has problems in that it is difficult to produce a sintered body having a complicated shape, and it is high in cost and low in productivity.
特に、多層配線セラミックパッケージでは内部配線を施
す必要があることから、この方法では製造できない。In particular, multilayer wiring ceramic packages cannot be manufactured using this method because they require internal wiring.
また、常圧焼結法では、原料粉末をグリーンシートに成
形し、金属導体配線を施した後、これらを積層加工する
ことによって複雑な形状を有する焼結体を生産性良く製
造することができるが、窒化アルミニウムを単独で使用
した場合には焼結性が著しく低く、焼結の際に窒化アル
ミニウムが一部昇華してしまい緻密な焼結体が得難いた
めに、一般に焼結助剤としてアルカリ土類化合物、また
は希土類化合物を添加して焼結されている。In addition, with the pressureless sintering method, raw material powder is formed into green sheets, metal conductor wiring is applied, and then these are laminated to produce sintered bodies with complex shapes with high productivity. However, when aluminum nitride is used alone, the sinterability is extremely low, and some of the aluminum nitride sublimes during sintering, making it difficult to obtain a dense sintered body. Therefore, alkali is generally used as a sintering aid. Sintered with the addition of earth compounds or rare earth compounds.
（発明が解決しようとする問題点）
上述したように、最近窒化アルミニウム系セラミックが
電子部品に使用されるようになってきているが、半導体
素子を搭載するような電子部品では光とくに短波長光に
よるソフトエラーを防止するために遮光性が要求される
。しかしながら、上述した方法で製造される窒化アルミ
ニウム焼結体は白色あるいは灰色であり、遮光性が十分
とはいえないという問題点がある。また、従来の窒化ア
ルミニウム焼結体は焼結条件によってその色相が変動し
やすいという問題点がある。(Problems to be Solved by the Invention) As mentioned above, aluminum nitride-based ceramics have recently been used in electronic components, but electronic components mounted with semiconductor elements are sensitive to light, especially short wavelength light. Light-shielding properties are required to prevent soft errors caused by However, the aluminum nitride sintered body produced by the above-described method is white or gray, and has a problem in that it does not have sufficient light-shielding properties. Furthermore, the conventional aluminum nitride sintered body has a problem in that its hue tends to vary depending on the sintering conditions.
そこで、本発明は上記問題点を解消すべくなされたもの
であり、その目的とするところは窒化アルミニウムの焼
結を促進し、しかも安定に着色させる添加剤を混合して
焼結される窒化アルミニウム焼結体を捉供するにある。Therefore, the present invention has been made to solve the above-mentioned problems, and its purpose is to promote the sintering of aluminum nitride and to produce aluminum nitride that is sintered with an additive that stably colors the aluminum nitride. The purpose is to capture the sintered body.
（問題点を解決するための手段） 本発明は上記目的を達成するため次の構成をそなえる。(Means for solving problems) The present invention has the following configuration to achieve the above object.
すなわち、窒化アルミニウム粉末に金属モリブデン、ま
たはモリブデン化合物のうちの一種以上を添加剤として
混合させて焼結したことを特徴とする。That is, it is characterized in that aluminum nitride powder is mixed with one or more of metal molybdenum or a molybdenum compound as an additive and then sintered.
（発明の概要）
従来、窒化アルミニウム焼結体の高密度化にだいしては
、アルミニウム土類元素、または希土類元素、あるいは
これらの化合物（たとえば酸化物、炭化物、ハロゲン化
物、窒化物、酸窒化物、硝酸塩等）の添加が有効である
ことが知られている。(Summary of the Invention) Conventionally, aluminum earth elements, rare earth elements, or compounds thereof (for example, oxides, carbides, halides, nitrides, oxynitrides) have been used to increase the density of aluminum nitride sintered bodies. , nitrates, etc.) is known to be effective.
しかしながら、これらによって得られる焼結体は主とし
て透光性のある白色あるいは灰色のものであり、しかも
焼成条件によって色相が不安定であり、とくに遮光性が
要求されるセラミックパッケージには不適である。However, the sintered bodies obtained by these methods are mainly translucent white or gray, and the hue is unstable depending on the firing conditions, making them particularly unsuitable for ceramic packages that require light-shielding properties.
そこで、本発明者らは窒化アルミニウムの焼結性を阻害
せず、かつ有効に安定して着色させることのできる着色
助剤を得るべく実験・検討した結果、とくに金属モリブ
デンまたはモリブデン化合物が窒化アルミニウム焼結体
の着色化用助剤として有効に作用し、安定に着色するこ
とができること、また、これら助剤は単独で使用した際
であっても、従来の助剤と同等かそれ以上の高密度化用
助剤としての作用を有することを見出したものである。Therefore, the present inventors conducted experiments and studies to obtain a coloring aid that does not inhibit the sinterability of aluminum nitride and can effectively and stably color the aluminum nitride. It works effectively as an auxiliary agent for coloring sintered bodies and can provide stable coloring, and even when used alone, these auxiliary agents have a coloring effect equal to or higher than that of conventional auxiliary agents. It was discovered that it has an action as a densification aid.
すなわち、本発明によれば窒化アルミニウム粉末にモリ
ブデンまたはモリブデン化合物を０．０１〜２０重量パ
ーセントの割合で均一に混合し、成形後１気圧の窒素雰
囲気中において１６００°〜２０００’ Ｃで焼成する
ことにより、均一な黒色を有する緻密な焼結体が得られ
る。また、上記モリブデン系添加剤を従来から知られて
いるアルカリ土類元素系、または希土類元素系の化合物
とともに添加し、上記のように焼成しても各々の助剤が
互いの作用を妨害することなく、むしろ相乗的に作用し
て均一な黒色系の色相を呈する焼結体が得られる。That is, according to the present invention, molybdenum or a molybdenum compound is uniformly mixed with aluminum nitride powder at a ratio of 0.01 to 20 weight percent, and after molding, it is fired at 1600° to 2000° C. in a nitrogen atmosphere of 1 atm. As a result, a dense sintered body having a uniform black color can be obtained. Furthermore, even if the above molybdenum-based additive is added together with conventionally known alkaline earth element-based or rare earth element-based compounds and fired as described above, each additive will not interfere with each other's action. Rather, they act synergistically to obtain a sintered body exhibiting a uniform black hue.
また、このようなモリブデン系添加剤を加えた窒化アル
ミニウム粉末および、モリブデン系添加剤にアルカリ上
類元素系、または希土類元素系の化合物を添加した窒化
アルミニウム粉末を用いた場合においては、従来の常圧
焼結法で問題とされていた窒化アルミニウムの昇華およ
び助剤の蒸発にたいして耐性かたかく、１気圧の窒素雰
囲気中であっても窒化アルミニウム粉末の詰め粉を用い
てその中に包埋して焼結する必要がない。In addition, when using aluminum nitride powder containing molybdenum-based additives, or aluminum nitride powder containing molybdenum-based additives and super-alkali element-based or rare-earth element-based compounds, conventional conventional It is highly resistant to the sublimation of aluminum nitride and the evaporation of auxiliary agents, which were problems in the compression sintering method, and can be embedded in aluminum nitride powder even in a nitrogen atmosphere of 1 atm. No need to sinter.
以上のように、本発明は窒化アルミニウムを主成分とし
て、これにモリブデンもしくはモリブデン化合物を金属
モリブデンとして０．０１〜２０重量パ−セント添加し
て焼成することを特徴としており、とくにこの添加物が
着色剤としての作用と高密度化助剤としての作用を同時
に有することから、単独で少量添加することによって所
望の焼結体が得られ、窒化アルミニウムの特性を生かし
たセラミック電子部品材料として好適に使用することが
できる。As described above, the present invention is characterized in that aluminum nitride is the main component, and molybdenum or a molybdenum compound is added thereto in an amount of 0.01 to 20 weight percent as metal molybdenum and then fired. Since it functions as a coloring agent and a densification aid at the same time, a desired sintered body can be obtained by adding a small amount alone, making it suitable as a ceramic electronic component material that takes advantage of the characteristics of aluminum nitride. can be used.
なお、窒化アルミニウム粉末に添加するモリブデンもし
くはモリブデン化合物の重量比を０．０１〜２０重量パ
ーセントの範囲に限定した理由は、０．０１重量パーセ
ント未満では色相等で所期の効果が得られず、また２０
重量パーセントを超える場合は窒化アルミニウム本来の
特性に低下をきたすためである。The reason why the weight ratio of molybdenum or molybdenum compound added to the aluminum nitride powder was limited to the range of 0.01 to 20 weight percent is that if it is less than 0.01 weight percent, the desired effect on hue etc. cannot be obtained. 20 again
This is because if the weight percent is exceeded, the original properties of aluminum nitride will deteriorate.
ところで、モリブデン化合物としては酸化物、窒化物、
炭化物、ハロゲン化物の他に無機酸塩、有機酸塩、錯塩
などがあるが、これらのうちで特に分子量が１２００以
上のものでモリブデンカルボニル等は特に添加量を多く
必要とする上にグリーンシートの成形性に悪影響を及ぼ
す場合があるので必ずしも好ましくない。By the way, molybdenum compounds include oxides, nitrides,
In addition to carbides and halides, there are inorganic acid salts, organic acid salts, complex salts, etc. Among these, those with a molecular weight of 1200 or more, such as molybdenum carbonyl, require a particularly large amount of addition and are difficult to prepare for green sheets. This is not necessarily preferable since it may adversely affect moldability.
（実施例） 以下本発明の好適な実施例を詳細に説明する。(Example) Preferred embodiments of the present invention will be described in detail below.
第１表は窒化アルミニウム粉末に添加した添加剤の実施
例１〜６と比較例１．２を示し、それぞれ各添加剤の添
加量および焼結体の色相を示す。Table 1 shows Examples 1 to 6 and Comparative Examples 1.2 of additives added to aluminum nitride powder, and shows the amount of each additive and the hue of the sintered body, respectively.
第１表
添加物 添加量 密度 色相
実施例１ Ｎｏ ３．０ ３．１６
黒色実施例２ ＭＯＯ） １．０ ３
．０６ 黒色実施例３ Ｍｏｂ＞ ３．０
３．１８ 黒色実施例４ ＭｏＯ３５，
０３，２４黒色比較例Ｉ ＣａＣ０，３，０３，１
４灰白色比較例２ Ｙ２０ａ ３．０ ３．
１６ 灰色第１表の実施例５においては７４００）
とＣａＣ０ｒの重量比が２＝３、実施例６においてはＭ
ｏｏｔとＹ、０．の重量比が２：３である。Table 1 Additive Addition amount Density Hue Example 1 No. 3.0 3.16
Black Example 2 MOO) 1.0 3
．． 06 Black Example 3 Mob> 3.0
3.18 Black Example 4 MoO35,
03,24 Black Comparative Example I CaC0,3,03,1
4 Gray-white Comparative Example 2 Y20a 3.0 3.
16 7400 in Example 5 of Gray Table 1)
The weight ratio of CaC0r and CaC0r was 2=3, and in Example 6, M
oot and Y, 0. The weight ratio is 2:3.
実施例１〜４においては、金属モリブデン（Ｎｏ）また
は酸化モリブデン（ＭｏＯｌ）を、平均粒径が２μｍ以
下の窒化アルミニウム粉末に各々第１表に示す割合で添
加し、バインダーを３重量パーセント加え、１ブタノー
ル中で、樹脂製ポットおよびボールにてボールミル混合
した。In Examples 1 to 4, metallic molybdenum (No) or molybdenum oxide (MoOl) was added to aluminum nitride powder with an average particle size of 2 μm or less in the proportions shown in Table 1, and 3% by weight of a binder was added. The mixture was mixed in 1-butanol using a ball mill in a resin pot and ball.
乾燥後、各混合粉末５ｇを２０Ｋｇ／ ｍｍ ’の圧力
で一軸加圧成形して直径３０ＩＩＩＩｌの圧粉体を得た
。これらの圧粉体のうち、前記金属モリブデンを添加し
た実施例１では窒素雰囲気中において、酸化モリブデン
を添加した実施例２〜４では空気中において、それぞれ
５００°Ｃまで加熱してバインダーを除いた。After drying, 5 g of each mixed powder was uniaxially pressed at a pressure of 20 Kg/mm' to obtain a green compact with a diameter of 30 III. Among these powder compacts, the binder was removed by heating to 500°C in Example 1, in which the metal molybdenum was added, in a nitrogen atmosphere, and in the air, in Examples 2 to 4, in which molybdenum oxide was added. .
次に、これらの各試料を窒化ホウ素粉末をごく薄く敷い
たカーボン板上に栽せ、１気圧の窒素雰囲気中において
１８００°Ｃで３時間焼成した。その結果得られた焼結
体は第１表に示すように、いずれも黒色を呈し、緻密に
焼成された。Next, each of these samples was grown on a carbon plate covered with a very thin layer of boron nitride powder, and fired at 1800°C for 3 hours in a nitrogen atmosphere of 1 atm. As shown in Table 1, the resulting sintered bodies were all black in color and densely fired.
なお、実施例３、実施例４のそれぞれ酸化モリブデンを
３．０重量パーセントおよび５．０重量パーセント添加
したものは、焼結体の表面の平滑性に優れ、光沢を有し
ていた。The sintered bodies of Examples 3 and 4 in which 3.0% by weight and 5.0% by weight of molybdenum oxide were added had excellent surface smoothness and gloss.
実施例５においては、平均粒径２μｍ以下の窒化アルミ
ニウム粉末に、重量比が２対３の酸化アルミニウムと炭
酸カルシウム（ＣａＣＯａ ）の混合粉末を５重量パー
セント添加し、実施例６においては、重量比が２対３の
酸化アルミニウムと酸化イツトリウム（Ｙ２０〕）の混
合粉末を、５重量パーセント添加し、上述した実施例１
〜４と同様にボールミル混合し、加圧成形して同一条件
で焼成した。In Example 5, 5 weight percent of a mixed powder of aluminum oxide and calcium carbonate (CaCOa) in a weight ratio of 2:3 was added to aluminum nitride powder with an average particle size of 2 μm or less, and in Example 6, the weight ratio A mixed powder of aluminum oxide and yttrium oxide (Y20) with a ratio of 2:3 was added in an amount of 5% by weight, and the above-mentioned Example 1 was prepared.
The mixture was mixed in a ball mill in the same manner as in Steps 4 to 4, pressure molded, and fired under the same conditions.
得られた焼結体は第１表に示すように、どちらも黒色を
呈しており、緻密度は酸化モリブデンを単独で加えたも
のおよび炭酸カルシウム、酸化イツトリウムを単独で加
えて焼成したもののいずれよりも優れていた。このうち
、酸化モリブデンと酸化イツトリウムを混合して加えた
実施例６で得られた焼結体は表面の平滑性が良好で光沢
が認められた。As shown in Table 1, the obtained sintered bodies are both black in color, and the density is higher than that of the one with molybdenum oxide added alone and the one with calcium carbonate or yttrium oxide added alone. was also excellent. Among these, the sintered body obtained in Example 6 in which a mixture of molybdenum oxide and yttrium oxide was added had good surface smoothness and gloss.
比較例１．２は、平均粒径２μｍ以下の窒化アルミニウ
ム粉末に炭酸カルシウムまたは酸化イツトリウムをそ九
ぞれ単独で添加して、上述した実施例１〜４と同様な処
理を行い、同一の条件にて焼成を行ったものである。得
られた焼結体はいずれも緻密であったが、色相は炭酸カ
ルシウムを添加した比較例１が灰白色、酸化イツトリウ
ムを添加した比較例２が灰色を呈した。In Comparative Example 1.2, calcium carbonate or yttrium oxide was added alone to aluminum nitride powder with an average particle size of 2 μm or less, and the same treatment as in Examples 1 to 4 described above was carried out under the same conditions. It was fired at. All of the obtained sintered bodies were dense, but Comparative Example 1, in which calcium carbonate was added, was grayish-white, and Comparative Example 2, in which yttrium oxide was added, was gray.
以上、実施例１〜６と比較例１．２の結果かられかるよ
うに、窒化アルミニウムに金属モリブデンあるいはモリ
ブデン酸化物を添加することによって得られた焼結体は
、色相が黒色で緻密性に優れ、窒化アルミニウム本来の
特性を有しており、電子部品用材料として好適に使用す
ることができる。As can be seen from the results of Examples 1 to 6 and Comparative Example 1.2, the sintered bodies obtained by adding metal molybdenum or molybdenum oxide to aluminum nitride have a black hue and a high density. It has excellent properties and properties inherent to aluminum nitride, and can be suitably used as a material for electronic components.
（発明の効果）
本発明の窒化アルミニウム焼結体はその色相が黒色を呈
して遮光性に優れるとともに、緻密性が良好であり、か
つ窒化アルミニウ１１本来の特性を維持しており、電子
部品用セラミックパッケージ等に好適に使用することが
できる。(Effects of the Invention) The aluminum nitride sintered body of the present invention has a black hue and has excellent light shielding properties, has good density, and maintains the original characteristics of aluminum nitride 11, and is suitable for electronic components. It can be suitably used for ceramic packages and the like.
また、この窒化アルミニウムを焼成する際、モリブデン
またはモリブデン化合物を添加することによりこれらが
着色助剤として作用するとともに焼結助剤として作用し
、少量添加によって黒色で緻密な焼結体を得ることがで
きる。In addition, when firing this aluminum nitride, by adding molybdenum or a molybdenum compound, these act as coloring aids and sintering aids, and by adding a small amount, it is possible to obtain a black, dense sintered body. can.
また、アルカリ土類金属、希土類金属、あるいはこれら
の化合物と上記添加剤をともに添加することにより、さ
らに緻密性が良く、黒色の焼結体を得ることができると
いう著効を奏する。Further, by adding an alkaline earth metal, a rare earth metal, or a compound thereof together with the above-mentioned additives, a sintered body with even better density and black color can be obtained.
以上、本発明について好適な実施例を挙げて種々説明し
たが、本発明はこの実施例に限定されるものではなく、
発明の精神を逸脱しない範囲内で多くの改変を施し得る
のはもちろんのことである。The present invention has been variously explained above using preferred embodiments, but the present invention is not limited to these embodiments.
Of course, many modifications can be made without departing from the spirit of the invention.
Claims (1)
リブデン化合物のうちの一種以上を添加剤として混合さ
せて焼結したことを特徴とする窒化アルミニウム焼結体
。 ２、前記窒化アルミニウム粉末に添加される金属モリブ
デン、またはモリブデン化合物のうちの一種以上を金属
モリブデンに換算して合計０．０１〜２０重量パーセン
ト加えることを特徴とする特許請求の範囲第１項記載の
窒化アルミニウム焼結体。 ３、前記金属モリブデンまたはモリブデン化合物が混合
された粉末混合物に第２添加剤成分としてアルカリ土類
金属、希土類金属またはこれらの化合物のうちの少なく
とも一種以上を加えることを特徴とする特許請求の範囲
第１項記載の窒化アルミニウム焼結体[Claims] 1. An aluminum nitride sintered body, which is obtained by mixing aluminum nitride powder with one or more of metal molybdenum or a molybdenum compound as an additive and sintering the mixture. 2. Claim 1, characterized in that at least one of metal molybdenum or molybdenum compounds added to the aluminum nitride powder is added in a total amount of 0.01 to 20 weight percent in terms of metal molybdenum. aluminum nitride sintered body. 3. Claim 1, characterized in that at least one of an alkaline earth metal, a rare earth metal, or a compound thereof is added as a second additive component to the powder mixture in which the metal molybdenum or a molybdenum compound is mixed. Aluminum nitride sintered body according to item 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62144352A JPS63310772A (en) | 1987-06-10 | 1987-06-10 | Aluminum nitride sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62144352A JPS63310772A (en) | 1987-06-10 | 1987-06-10 | Aluminum nitride sintered body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63310772A true JPS63310772A (en) | 1988-12-19 |
Family
ID=15360107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62144352A Pending JPS63310772A (en) | 1987-06-10 | 1987-06-10 | Aluminum nitride sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63310772A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042663A (en) * | 1990-04-17 | 1992-01-07 | Sumitomo Electric Ind Ltd | Colored aluminum nitride sintered material having high thermal conductivity and production thereof |
| US5147832A (en) * | 1990-08-07 | 1992-09-15 | Sumitomo Electric Industries, Ltd. | Thermal conductive colored aluminum nitride sintered body and method of preparing the same |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50151704A (en) * | 1974-05-28 | 1975-12-05 | ||
| JPS61270262A (en) * | 1985-05-22 | 1986-11-29 | 日本特殊陶業株式会社 | High heat conductive aluminum nitride sintered body |
| JPS61270263A (en) * | 1985-05-24 | 1986-11-29 | 日本特殊陶業株式会社 | Manufacture of high heat conductive aluminum nitride sintered body |
| JPS62223069A (en) * | 1986-03-24 | 1987-10-01 | 株式会社東芝 | High strength aluminum nitride sintered body |
| JPS6360167A (en) * | 1986-08-28 | 1988-03-16 | イビデン株式会社 | Manufacture of aluminum nitride base sintered body |
| JPS63162576A (en) * | 1986-12-25 | 1988-07-06 | 株式会社住友金属セラミックス | Black aluminum nitride sintered body and manufacture |
| JPS63233079A (en) * | 1986-11-13 | 1988-09-28 | 株式会社住友金属セラミックス | Black aluminum nitride sintered body and manufacture |
-
1987
- 1987-06-10 JP JP62144352A patent/JPS63310772A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50151704A (en) * | 1974-05-28 | 1975-12-05 | ||
| JPS61270262A (en) * | 1985-05-22 | 1986-11-29 | 日本特殊陶業株式会社 | High heat conductive aluminum nitride sintered body |
| JPS61270263A (en) * | 1985-05-24 | 1986-11-29 | 日本特殊陶業株式会社 | Manufacture of high heat conductive aluminum nitride sintered body |
| JPS62223069A (en) * | 1986-03-24 | 1987-10-01 | 株式会社東芝 | High strength aluminum nitride sintered body |
| JPS6360167A (en) * | 1986-08-28 | 1988-03-16 | イビデン株式会社 | Manufacture of aluminum nitride base sintered body |
| JPS63233079A (en) * | 1986-11-13 | 1988-09-28 | 株式会社住友金属セラミックス | Black aluminum nitride sintered body and manufacture |
| JPS63162576A (en) * | 1986-12-25 | 1988-07-06 | 株式会社住友金属セラミックス | Black aluminum nitride sintered body and manufacture |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042663A (en) * | 1990-04-17 | 1992-01-07 | Sumitomo Electric Ind Ltd | Colored aluminum nitride sintered material having high thermal conductivity and production thereof |
| US5306679A (en) * | 1990-04-17 | 1994-04-26 | Sumitomo Electric Industries, Ltd. | Heat conductive colored aluminum nitride sintered body |
| US5147832A (en) * | 1990-08-07 | 1992-09-15 | Sumitomo Electric Industries, Ltd. | Thermal conductive colored aluminum nitride sintered body and method of preparing the same |
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