JPS6330998Y2 - - Google Patents
Info
- Publication number
- JPS6330998Y2 JPS6330998Y2 JP5533780U JP5533780U JPS6330998Y2 JP S6330998 Y2 JPS6330998 Y2 JP S6330998Y2 JP 5533780 U JP5533780 U JP 5533780U JP 5533780 U JP5533780 U JP 5533780U JP S6330998 Y2 JPS6330998 Y2 JP S6330998Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- substrate
- concave groove
- plate
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 15
- 239000000843 powder Substances 0.000 claims description 7
- 238000002441 X-ray diffraction Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5533780U JPS6330998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-04-24 | 1980-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5533780U JPS6330998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-04-24 | 1980-04-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56157663U JPS56157663U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-11-25 |
| JPS6330998Y2 true JPS6330998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-18 |
Family
ID=29650009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5533780U Expired JPS6330998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-04-24 | 1980-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6330998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220024884A (ko) | 2019-06-28 | 2022-03-03 | 가부시키가이샤 스크린 홀딩스 | 기판 처리 장치 및 기판 처리 방법 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0795011B2 (ja) * | 1985-11-19 | 1995-10-11 | 株式会社島津製作所 | 螢光ｘ線分析装置 |
| JP7005892B2 (ja) * | 2016-10-19 | 2022-01-24 | 住友金属鉱山株式会社 | 粉末試料の分析方法 |
-
1980
- 1980-04-24 JP JP5533780U patent/JPS6330998Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220024884A (ko) | 2019-06-28 | 2022-03-03 | 가부시키가이샤 스크린 홀딩스 | 기판 처리 장치 및 기판 처리 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56157663U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-11-25 |
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