JPS63309844A - Inspecting device for nonmetallic inclusion - Google Patents
Inspecting device for nonmetallic inclusionInfo
- Publication number
- JPS63309844A JPS63309844A JP62146553A JP14655387A JPS63309844A JP S63309844 A JPS63309844 A JP S63309844A JP 62146553 A JP62146553 A JP 62146553A JP 14655387 A JP14655387 A JP 14655387A JP S63309844 A JPS63309844 A JP S63309844A
- Authority
- JP
- Japan
- Prior art keywords
- inclusion
- nonmetallic
- inclusions
- image
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 12
- 238000005259 measurement Methods 0.000 abstract description 6
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 abstract description 3
- 150000001875 compounds Chemical class 0.000 abstract 4
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 150000004760 silicates Chemical class 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 235000013351 cheese Nutrition 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、画像処理技術を適用した非金属介在物の検査
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an inspection device for nonmetallic inclusions to which image processing technology is applied.
微小な非金属介在物は、鉄鋼での製造過程において鋼材
の中にわずかに混入する。鋼材の品質は、この非金属介
在物の組成、大きさ9個数等により大きく左右されるの
で、ユーザーに対する出荷検査トラテ、JIS (JI
S−G−0555)およびASTM (ASTM−E4
5)で規定されている顕微鏡による非金属介在物の検査
を行う。この検査は、通常、光学顕微鏡を用いて人が目
視で行なうが、近年、画像処理技術を適用した非金属介
在物の検査装置が出現している。この装置に関しては、
金属(臨時増刊号。Microscopic nonmetallic inclusions are slightly mixed into steel materials during the manufacturing process of steel. The quality of steel materials is greatly affected by the composition, size, number, etc. of these nonmetallic inclusions, so we provide users with shipping inspection strategies, JIS (JI
SG-0555) and ASTM (ASTM-E4
5) Inspect non-metallic inclusions using a microscope as specified in 5). This inspection is usually performed visually by a person using an optical microscope, but in recent years, nonmetallic inclusion inspection devices that apply image processing technology have appeared. Regarding this device,
Metals (special issue.
1980年3月発行)にて、霧島・相用が紹介している
。(March 1980 issue), introduced by Kirishima Ayou.
従来技術としての非金属介在物の検査装置は、JIS規
格で記載されている非金属介在物の分類を全てを弁別で
きないという問題点がある。Conventional nonmetallic inclusion inspection devices have a problem in that they cannot distinguish all the categories of nonmetallic inclusions listed in the JIS standard.
JIS規格での非金属介在物の分類を第6図に示す。加
工によって粘性変形したA系介在物、加工方向に集団を
なして不連続的に粒状に並んでいるB系介在物および粘
性変形をしないで不規則に分散するC系介在物がある。Figure 6 shows the classification of nonmetallic inclusions according to the JIS standard. There are A-based inclusions that are viscously deformed by processing, B-based inclusions that form a group in the processing direction and are discontinuously arranged in granular form, and C-based inclusions that do not undergo viscous deformation but are irregularly dispersed.
この3種類の介在物は、第6図に示すように、各々の介
在物の形状および各々の介在物間の距離がわかれば、分
類できるので従来技術の検査装置で自動的に区分できる
。しかし、同種類の介在物の場合、例えばA系介在物の
場合、介在物の形状が同じであっても、その組成により
、硫化物のAl系、硅酸塩のA2系および複合物のA3
系に分類する必要がある。この分類は、従来技術の検査
装置では弁別する機能がなtl。As shown in FIG. 6, these three types of inclusions can be classified if the shape of each inclusion and the distance between each inclusion are known, and therefore can be automatically classified using a conventional inspection device. However, in the case of inclusions of the same type, for example A-based inclusions, even if the shapes of the inclusions are the same, their compositions vary depending on their composition: Al-based sulfides, A2-based silicates, and A3-based composites.
It is necessary to classify it into a system. Conventional inspection devices do not have the ability to distinguish between these classifications.
本発明は、このような従来技術のもっている問題点を有
利に解決するものであって、非金属介在物を拡大する金
属顕微鏡と、該金属顕微鏡より得られる画像を電気信号
に変換するテレビカメラと、該電気信号を画面の濃淡に
対応して多値化した映像信号に変換する変換器と、該映
像信号を記憶するメモリとを含む画像入出力装置と、該
映像信号から非金属介在物の寸法を計測する装置と非金
属介在物の輝度を計測する装置を含む非金属介在物分類
装置とを備えていることを特徴とする非金属介在物の検
査装置である。The present invention advantageously solves the problems of the prior art, and provides a metallurgical microscope for magnifying non-metallic inclusions, and a television camera for converting images obtained from the metallurgical microscope into electrical signals. , an image input/output device including a converter that converts the electric signal into a multivalued video signal corresponding to the density of the screen, a memory that stores the video signal, and a non-metallic inclusion from the video signal. This is a nonmetallic inclusion inspection device characterized by comprising a device for measuring the dimensions of a nonmetallic inclusion and a nonmetallic inclusion classification device including a device for measuring the brightness of the nonmetallic inclusion.
以下、図面にもとづいて本発明の構成を示す。Hereinafter, the configuration of the present invention will be described based on the drawings.
第1図は、本発明による非金属介在物の検査装置の構成
図である。金属顕微鏡1は、非金属介在物を拡大するも
のであって、光学顕微鏡、走査型電子顕微鏡等を用いる
。テレビカメラ2は、金属顕微鏡1より得られる画像を
電気信号に変換するものである。画像入出力装置3は、
画素としての電気信号を画像の濃淡に対応して多値化し
た映像信号に変換する変換器4と該映像信号を記憶する
メモリ5とを含んでいる。多値化するレベルは、黒レベ
ルから白レベルまで256階調(8ビツト相当)にする
と、第2図に示すように、介在物の大きさ25μmX5
μm以下を除去すると、A系介在物において硫化物での
Al系介在物と硅酸塩でのA2系介在物が分離して認識
できる。このように多値化するレベルは、同じ形状で、
含有成分の異なる分類を行う際に用い、256階調(8
ビツト)以上が望ましい。非金属介在物分類装置6は画
像入出力装置3での多値化した画像信号より寸法計測装
置7と輝度計測装置8から非金属介在物の分類を行う。FIG. 1 is a configuration diagram of a nonmetallic inclusion inspection apparatus according to the present invention. The metallurgical microscope 1 magnifies nonmetallic inclusions, and uses an optical microscope, a scanning electron microscope, or the like. The television camera 2 converts images obtained from the metallurgical microscope 1 into electrical signals. The image input/output device 3 is
It includes a converter 4 that converts an electrical signal as a pixel into a multivalued video signal corresponding to the shading of an image, and a memory 5 that stores the video signal. If the multilevel level is 256 gradations (equivalent to 8 bits) from the black level to the white level, the size of the inclusion will be 25 μm x 5 as shown in Figure 2.
When micrometers or less are removed, the A-based inclusions can be separated into Al-based inclusions in sulfide and A2-based inclusions in silicate. The levels to be multivalued in this way have the same shape,
Used when classifying different contained components, 256 gradations (8
(bit) or higher is desirable. The non-metallic inclusion classification device 6 classifies non-metallic inclusions from the dimension measuring device 7 and the brightness measuring device 8 based on the multivalued image signal from the image input/output device 3.
本発明の一実施例である高級線材用非金属介在物検査装
置の構成を第3図に示す。FIG. 3 shows the configuration of an apparatus for inspecting nonmetallic inclusions for high-grade wire rods, which is an embodiment of the present invention.
(1)画像入力系
エアー背圧方式による自動焦点調整機構とステップモー
タにより駆動されるオートステージ機構をもった金属顕
微鏡1に高解像度TV左カメラを取り付けである。(1) Image input system A high-resolution TV left camera is attached to the metallurgical microscope 1, which has an automatic focus adjustment mechanism using an air backpressure system and an autostage mechanism driven by a step motor.
このため、作業者は、被検査物9上のスタート点を決定
すれば自動点にサンプルが走査されていく。Therefore, once the operator determines the starting point on the object 9 to be inspected, the sample is automatically scanned to the point.
TV左カメラを使用して、画像を画像入出力装置3に入
力する際、撮像管を厳選することは当然であるが、TV
系の垂直同期周波数をハード的な制約のため15Hzと
することにより、映像信号の帯域幅を狭くシ、走査線は
1500本、ノンインターレス方式を採用している。When inputting images to the image input/output device 3 using the TV left camera, it is natural to carefully select the image pickup tube.
By setting the vertical synchronization frequency of the system to 15 Hz due to hardware constraints, the bandwidth of the video signal is narrowed, the number of scanning lines is 1500, and a non-interlaced system is adopted.
被検査物9の形状は5.5mm X 11mmの長方形
状であり、被検査物内の非金属介在物の大きさは数μm
から数十μmのオーダーである。測定精度を標準偏差で
0.5μm以内として、画像処理する視野をテレビカメ
ラの1画面当り、1428 X 1428画素で、1被
検査物当り242画面とする。そらに多値化処理するた
めに1画素当り8ビツト処理を行う。The object to be inspected 9 has a rectangular shape of 5.5 mm x 11 mm, and the size of nonmetallic inclusions within the object to be inspected is several μm.
It is on the order of several tens of μm. The measurement accuracy is set to within 0.5 μm in standard deviation, and the field of view for image processing is 1428×1428 pixels per screen of a television camera, which is 242 screens per inspected object. Furthermore, 8-bit processing is performed per pixel in order to perform multi-value processing.
第3図における画像入力系として、オートステージ、オ
ートフォーカス機構10.オートフォーカスコントロー
ラ11およびオートステージコントローラ12は、画像
の焦点を合せる自動焦点機能を有する。エアー源・エア
ー清浄器13は、被検査物9のゴミ等をクリーニングす
るものである。The image input system in FIG. 3 includes an auto stage and an auto focus mechanism 10. The autofocus controller 11 and the autostage controller 12 have an autofocus function to focus an image. The air source/air cleaner 13 is used to clean dust and the like from the object 9 to be inspected.
防振台14は、本装置に何らかの振動があっても画像に
ぶれが生じないようにするものである。The vibration isolation table 14 prevents the image from being blurred even if there is some kind of vibration in the apparatus.
(2)画像解析系
画像入出力装置3において、TVカメラの信号は、ここ
で入力され変換器4で1440 X 1440 X 8
ビツトのデジタル信号に変換され、メモリ5に入れられ
る。非金属介在物分類装置6に、画像入出力装置3に記
憶された画像データが転送され、装M6が介在物とバッ
クグラウンドの信号の大きさにより介在物の抽出を行う
。(2) In the image analysis system image input/output device 3, the signal from the TV camera is inputted here and converted to 1440 x 1440 x 8 by the converter 4.
It is converted into a bit digital signal and stored in the memory 5. The image data stored in the image input/output device 3 is transferred to the nonmetallic inclusion classification device 6, and the device M6 extracts the inclusion based on the magnitude of the inclusion and background signals.
画像データをヒストグラム処理で第4図に示すように走
査線方向にn分割して、各セクタ毎の縦ヒストグラムを
取る。縦ヒストグラムより、各セクタ毎の介在物の存在
場所を抽出しく第4図のAl、A2.A3.A4)、続
いて、上記各セクタの縦ヒストグラムを全セクタについ
てOR(論理和:オア)処理する(第4図のB)。The image data is divided into n parts in the scanning line direction by histogram processing as shown in FIG. 4, and a vertical histogram is obtained for each sector. From the vertical histogram, the locations of inclusions in each sector are extracted from Al, A2. A3. A4) Then, the vertical histogram of each sector is ORed for all sectors (B in FIG. 4).
次にエリア(イ)、(ロ)、(ハ)順に横ヒストグラム
を作成する(第4図のCI、C2,C3)。得られた縦
ヒストグラム(AI、A2.A3.A4)と横ヒストグ
ラム(C1,C2,C3)との整合をとり、介在物にラ
ベリング(1)、 (2)、(3)、(4)を付け、各
介在物毎の長さ2幅および座標の読込みを行う。Next, horizontal histograms are created in the order of areas (a), (b), and (c) (CI, C2, and C3 in FIG. 4). The obtained vertical histograms (AI, A2.A3.A4) and horizontal histograms (C1, C2, C3) are matched, and inclusions are labeled (1), (2), (3), and (4). The length, width, and coordinates of each inclusion are read.
また、抽出された介在物は、その信号の大きさにより第
5図で示す処理フローで分類される。非金属介在物の種
類は、A系、B系、C系の3種類であるが、更にA系介
在物はAI系(硫化物)。Furthermore, the extracted inclusions are classified according to the magnitude of the signal according to the processing flow shown in FIG. There are three types of nonmetallic inclusions: A-based, B-based, and C-based, and A-based inclusions are AI-based (sulfide).
A2系(硅酸塩)、A3系(複合介在物)の3種類、計
5種類に分類される例を示す。An example of classification into three types, A2 type (silicates) and A3 type (composite inclusions), a total of five types, is shown.
非金属介在物を示す画像データは、まず最初に多値化取
込み(8ビツト256階調)として処理される。それか
ら縦方向および横方向のヒスグラム処理を行い、非金属
介在物の長さ2幅の計測を行う。Image data showing non-metallic inclusions is first processed as multivalued capture (8 bits, 256 gradations). Then, vertical and horizontal histogram processing is performed to measure the length and width of the nonmetallic inclusion.
その後、最初に画像データの多値化レベルによってAl
系介在物と、他のA2系、B系およびC系との分類を行
う。次にAt系介在物以外の介在物において各々の介在
物間の距離を測定し配列チェックを行う。各々の介在物
間の距離(X、Y)が所定値以下でn個以上連続してい
る場合、B系介在物に分類を行う。次に介在物の長さと
幅の比を求め、基準値以下であればA2系介在物と、基
準値以上であるならC系介在物と分類を行う。このよう
に非金属介在物分類装置での測定結果はホストコンピュ
ータ15へ伝送される。After that, first, Al
The inclusions are classified into A2-based, B-based, and C-based inclusions. Next, for inclusions other than At-based inclusions, the distance between each inclusion is measured to check the arrangement. If the distance (X, Y) between each inclusion is less than or equal to a predetermined value and there are n or more consecutive inclusions, the inclusions are classified as B-type inclusions. Next, the length to width ratio of the inclusion is determined, and if it is less than a standard value, it is classified as an A2 inclusion, and if it is more than the standard value, it is classified as a C type inclusion. In this way, the measurement results of the nonmetallic inclusion classification device are transmitted to the host computer 15.
本発明により、非金属介在物の検査装置は同一形状で含
有成分の異なる非金属介在物の弁別が可能となりさらに
、従来の問題点であった、人による測定誤差が解消され
、鋼材の品質保証としての信頼性の向上が可能となる。According to the present invention, a nonmetallic inclusion inspection device can distinguish between nonmetallic inclusions that have the same shape but differ in content.Furthermore, the conventional problem of measurement error caused by humans is eliminated, and the quality of steel materials is guaranteed. This makes it possible to improve the reliability of the system.
第1図は、本発明装置の構成を示すブロック図である。
第2図は、本発明による輝度レベルによってAl系介在
物とA2系介在物を分類したヒストグラムを示すグラフ
である。
第3図は、本発明の一実施例の構成を示すブロック図で
ある。
第4図は、本発明のヒストグラム処理による非金属介在
物の形状測定例を示す正面図である。
第5図は、本発明の装置による非金属介在物の分類過程
を示すフローチャートである。
1:金属顕微鏡 2:テレビカメラ3:画像入出
力装置
4:電気信号を多値化処理変換器
5:メモリ
6:非金属介在物分類装置
7:寸法計測袋w 8:輝度計測装置9:被検査物
=8−
10ニオ−ストステージ、オートフォーカス機構11ニ
オ−ストフォーカスコントローラ12ニオ−トスチーシ
コントローラ
13:ニア−源・ニア−清浄器
14:防振台 15:ホストコンピュータ東4
図
横ヒストグフム
声5図FIG. 1 is a block diagram showing the configuration of the apparatus of the present invention. FIG. 2 is a graph showing a histogram in which Al-based inclusions and A2-based inclusions are classified according to brightness level according to the present invention. FIG. 3 is a block diagram showing the configuration of an embodiment of the present invention. FIG. 4 is a front view showing an example of measuring the shape of a nonmetallic inclusion by the histogram processing of the present invention. FIG. 5 is a flowchart showing the process of classifying nonmetallic inclusions by the apparatus of the present invention. 1: Metallurgical microscope 2: Television camera 3: Image input/output device 4: Electrical signal multivalue processing converter 5: Memory 6: Nonmetallic inclusion classification device 7: Dimension measurement bag w 8: Luminance measurement device 9: Target Inspection object = 8-10 Niost stage, autofocus mechanism 11 Niost focus controller 12 Niost cheese controller 13: Near source/near purifier 14: Vibration isolation table 15: Host computer East 4
Diagram horizontal histoghum voice 5 diagram
Claims (1)
り得られる画像を電気信号に変換するテレビカメラと、
該電気信号を画像の濃淡に対応して多値化した映像信号
に変換する変換器と、該映像信号を記憶するメモリとを
含む画像入出力装置;および、該映像信号から非金属介
在物寸法を計測する装置と非金属介在物の輝度を計測す
る装置を含む非金属介在物分類装置;を備えていること
を特徴とする非金属介在物の検査装置。A metallurgical microscope that magnifies nonmetallic inclusions, a television camera that converts images obtained from the metallurgical microscope into electrical signals,
An image input/output device including a converter that converts the electric signal into a multi-valued video signal corresponding to the density of the image, and a memory that stores the video signal; and a non-metallic inclusion size from the video signal. 1. A nonmetallic inclusion inspection device comprising: a nonmetallic inclusion classification device including a device for measuring brightness of the nonmetallic inclusions and a device for measuring the brightness of the nonmetallic inclusions.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62146553A JPS63309844A (en) | 1987-06-12 | 1987-06-12 | Inspecting device for nonmetallic inclusion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62146553A JPS63309844A (en) | 1987-06-12 | 1987-06-12 | Inspecting device for nonmetallic inclusion |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63309844A true JPS63309844A (en) | 1988-12-16 |
JPH0575349B2 JPH0575349B2 (en) | 1993-10-20 |
Family
ID=15410266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62146553A Granted JPS63309844A (en) | 1987-06-12 | 1987-06-12 | Inspecting device for nonmetallic inclusion |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63309844A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03269243A (en) * | 1990-03-19 | 1991-11-29 | Toshiba Eng Co Ltd | Inspecting apparatus for nonmetal enclosure |
JPH03269242A (en) * | 1990-03-19 | 1991-11-29 | Toshiba Eng Co Ltd | Apparatus for inspecting nonmetallic enclosure |
JPH03269241A (en) * | 1990-03-19 | 1991-11-29 | Toshiba Eng Co Ltd | Apparatus for inspecting nonmetallic enclosure |
JPH03117761U (en) * | 1990-03-19 | 1991-12-05 | ||
US5298323A (en) * | 1989-10-11 | 1994-03-29 | Nippon Seiko Kabushiki Kaisha | Bearing steel and rolling bearing made thereof |
JPH08145984A (en) * | 1994-11-21 | 1996-06-07 | Sumitomo Metal Ind Ltd | Inspection device of non-metal inclusion |
JP2008232959A (en) * | 2007-03-23 | 2008-10-02 | Toshiba Solutions Corp | Inclusion discrimination device, inclusion discrimination method, inclusion discrimination program |
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JPS4915837A (en) * | 1972-06-08 | 1974-02-12 | ||
JPS5719883A (en) * | 1980-05-08 | 1982-02-02 | Chesebrough Ponds | Video inspecting system |
-
1987
- 1987-06-12 JP JP62146553A patent/JPS63309844A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4915837A (en) * | 1972-06-08 | 1974-02-12 | ||
JPS5719883A (en) * | 1980-05-08 | 1982-02-02 | Chesebrough Ponds | Video inspecting system |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5298323A (en) * | 1989-10-11 | 1994-03-29 | Nippon Seiko Kabushiki Kaisha | Bearing steel and rolling bearing made thereof |
JPH03269243A (en) * | 1990-03-19 | 1991-11-29 | Toshiba Eng Co Ltd | Inspecting apparatus for nonmetal enclosure |
JPH03269242A (en) * | 1990-03-19 | 1991-11-29 | Toshiba Eng Co Ltd | Apparatus for inspecting nonmetallic enclosure |
JPH03269241A (en) * | 1990-03-19 | 1991-11-29 | Toshiba Eng Co Ltd | Apparatus for inspecting nonmetallic enclosure |
JPH03117761U (en) * | 1990-03-19 | 1991-12-05 | ||
JPH08145984A (en) * | 1994-11-21 | 1996-06-07 | Sumitomo Metal Ind Ltd | Inspection device of non-metal inclusion |
JP2008232959A (en) * | 2007-03-23 | 2008-10-02 | Toshiba Solutions Corp | Inclusion discrimination device, inclusion discrimination method, inclusion discrimination program |
Also Published As
Publication number | Publication date |
---|---|
JPH0575349B2 (en) | 1993-10-20 |
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