JPS6329836B2 - - Google Patents
Info
- Publication number
- JPS6329836B2 JPS6329836B2 JP55036685A JP3668580A JPS6329836B2 JP S6329836 B2 JPS6329836 B2 JP S6329836B2 JP 55036685 A JP55036685 A JP 55036685A JP 3668580 A JP3668580 A JP 3668580A JP S6329836 B2 JPS6329836 B2 JP S6329836B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- type semiconductor
- semiconductor region
- gate
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 39
- 239000002184 metal Substances 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000012535 impurity Substances 0.000 claims description 17
- 238000002347 injection Methods 0.000 claims description 17
- 239000007924 injection Substances 0.000 claims description 17
- 230000004888 barrier function Effects 0.000 claims description 9
- 239000000969 carrier Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 13
- 239000012212 insulator Substances 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005036 potential barrier Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/60—Electrodes characterised by their materials
- H10D64/602—Heterojunction gate electrodes for FETs
Landscapes
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3668580A JPS56133874A (en) | 1980-03-22 | 1980-03-22 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3668580A JPS56133874A (en) | 1980-03-22 | 1980-03-22 | Semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56133874A JPS56133874A (en) | 1981-10-20 |
JPS6329836B2 true JPS6329836B2 (enrdf_load_stackoverflow) | 1988-06-15 |
Family
ID=12476681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3668580A Granted JPS56133874A (en) | 1980-03-22 | 1980-03-22 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56133874A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58180066A (ja) * | 1982-04-16 | 1983-10-21 | Matsushita Electric Ind Co Ltd | 静電誘導型半導体装置 |
JPS59123273A (ja) * | 1982-12-28 | 1984-07-17 | Semiconductor Res Found | シヨツトキ注入電極型半導体装置 |
US4586071A (en) * | 1984-05-11 | 1986-04-29 | International Business Machines Corporation | Heterostructure bipolar transistor |
-
1980
- 1980-03-22 JP JP3668580A patent/JPS56133874A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS56133874A (en) | 1981-10-20 |
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