JPS63285190A - 液相エピタキシャル成長方法 - Google Patents
液相エピタキシャル成長方法Info
- Publication number
- JPS63285190A JPS63285190A JP11925387A JP11925387A JPS63285190A JP S63285190 A JPS63285190 A JP S63285190A JP 11925387 A JP11925387 A JP 11925387A JP 11925387 A JP11925387 A JP 11925387A JP S63285190 A JPS63285190 A JP S63285190A
- Authority
- JP
- Japan
- Prior art keywords
- growth
- solution
- substrate
- epitaxial growth
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 12
- 239000007788 liquid Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 claims description 28
- 239000007791 liquid phase Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000007598 dipping method Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11925387A JPS63285190A (ja) | 1987-05-15 | 1987-05-15 | 液相エピタキシャル成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11925387A JPS63285190A (ja) | 1987-05-15 | 1987-05-15 | 液相エピタキシャル成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63285190A true JPS63285190A (ja) | 1988-11-22 |
| JPH058154B2 JPH058154B2 (enrdf_load_html_response) | 1993-02-01 |
Family
ID=14756750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11925387A Granted JPS63285190A (ja) | 1987-05-15 | 1987-05-15 | 液相エピタキシャル成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63285190A (enrdf_load_html_response) |
-
1987
- 1987-05-15 JP JP11925387A patent/JPS63285190A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058154B2 (enrdf_load_html_response) | 1993-02-01 |
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