JPS63283002A - ＳｉＣ感湿素材およびＳｉＣ感湿センサー - Google Patents
ＳｉＣ感湿素材およびＳｉＣ感湿センサーInfo
- Publication number
- JPS63283002A JPS63283002A JP62117591A JP11759187A JPS63283002A JP S63283002 A JPS63283002 A JP S63283002A JP 62117591 A JP62117591 A JP 62117591A JP 11759187 A JP11759187 A JP 11759187A JP S63283002 A JPS63283002 A JP S63283002A
- Authority
- JP
- Japan
- Prior art keywords
- sic
- moisture
- compounds
- mol
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 150000001875 compounds Chemical class 0.000 claims abstract description 26
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 10
- 150000001342 alkaline earth metals Chemical class 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 9
- 150000003624 transition metals Chemical class 0.000 claims abstract description 9
- 229910052742 iron Inorganic materials 0.000 claims abstract description 7
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 7
- 229910052708 sodium Inorganic materials 0.000 claims abstract description 7
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 6
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 6
- 229910052744 lithium Inorganic materials 0.000 claims abstract description 6
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 6
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 6
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 5
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 8
- 229910052783 alkali metal Inorganic materials 0.000 claims description 7
- 150000001340 alkali metals Chemical class 0.000 claims description 7
- 229910052700 potassium Inorganic materials 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052863 mullite Inorganic materials 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 11
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000002184 metal Substances 0.000 abstract description 7
- 230000006866 deterioration Effects 0.000 abstract description 6
- 230000032683 aging Effects 0.000 abstract 2
- 239000000084 colloidal system Substances 0.000 description 8
- 150000002739 metals Chemical class 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 3
- 239000012266 salt solution Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 2
- -1 lithium chloride Chemical class 0.000 description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- YYAMOMYEENPVSP-UHFFFAOYSA-N 4-[(4-sulfamoylphenyl)methyl]benzenesulfonamide Chemical compound C1=CC(S(=O)(=O)N)=CC=C1CC1=CC=C(S(N)(=O)=O)C=C1 YYAMOMYEENPVSP-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 241000885593 Geisha Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229920001600 hydrophobic polymer Polymers 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62117591A JPS63283002A (ja) | 1987-05-14 | 1987-05-14 | ＳｉＣ感湿素材およびＳｉＣ感湿センサー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62117591A JPS63283002A (ja) | 1987-05-14 | 1987-05-14 | ＳｉＣ感湿素材およびＳｉＣ感湿センサー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63283002A true JPS63283002A (ja) | 1988-11-18 |
| JPH0548921B2 JPH0548921B2 (enrdf_load_stackoverflow) | 1993-07-22 |
Family
ID=14715609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62117591A Granted JPS63283002A (ja) | 1987-05-14 | 1987-05-14 | ＳｉＣ感湿素材およびＳｉＣ感湿センサー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63283002A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5602324A (en) * | 1993-10-05 | 1997-02-11 | Mitsubishi Materials Corporation | Gas sensor and gas discriminating method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60220902A (ja) * | 1984-04-17 | 1985-11-05 | エヌオーケー株式会社 | 感温素子 |
-
1987
- 1987-05-14 JP JP62117591A patent/JPS63283002A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60220902A (ja) * | 1984-04-17 | 1985-11-05 | エヌオーケー株式会社 | 感温素子 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5602324A (en) * | 1993-10-05 | 1997-02-11 | Mitsubishi Materials Corporation | Gas sensor and gas discriminating method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0548921B2 (enrdf_load_stackoverflow) | 1993-07-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB2163970A (en) | Method of manufacturing a humidity-sensing element | |
| WO1993016377A1 (en) | Humidity sensor and its manufacture | |
| JPH0769285B2 (ja) | 高い応答速度を有する抵抗式ガスセンサ用半導体 | |
| US4422129A (en) | Humidity sensor | |
| JPS63283002A (ja) | ＳｉＣ感湿素材およびＳｉＣ感湿センサー | |
| Li et al. | Lacunar pyrochlore-type tungsten oxides as humidity-sensing materials | |
| JP3770456B2 (ja) | ガス濃度の測定方法 | |
| JPH02269948A (ja) | 燃焼制御用センサ | |
| JPH0571534B2 (enrdf_load_stackoverflow) | ||
| JP2677991B2 (ja) | 感湿素子 | |
| JPS6131352A (ja) | 感湿素子の後処理方法 | |
| CA1175676A (en) | Humidity sensor | |
| JPH0122963B2 (enrdf_load_stackoverflow) | ||
| JPS5849001B2 (ja) | 感湿素子 | |
| JPS6355766B2 (enrdf_load_stackoverflow) | ||
| KR920009164B1 (ko) | 감습 저항소자의 제조방법 | |
| JPS59231802A (ja) | 湿度センサ | |
| JPS6313146B2 (enrdf_load_stackoverflow) | ||
| JPS6235058B2 (enrdf_load_stackoverflow) | ||
| JPS58192301A (ja) | 感湿抵抗体 | |
| JPH0348643B2 (enrdf_load_stackoverflow) | ||
| JPH043081B2 (enrdf_load_stackoverflow) | ||
| JPS6210380B2 (enrdf_load_stackoverflow) | ||
| JPS59168354A (ja) | 容量式薄膜湿度センサの製造方法 | |
| JPH03205545A (ja) | 感湿素子 |