JPS63279254A - Developing device - Google Patents

Abstract

PURPOSE:To obviate generation of unequality in development and film thickness of a disk-shaped master disk by coating a discharge port for a developing soln. with a porous body. CONSTITUTION:The master disk 2 is fixed onto a turn table 1. The discharge port 5 provided with many fine pores on the surface is coated with the porous body 6 having a surface parallel with the surface of the master disk 2 and is disposed above the master disk. The developing soln. flowing out of the discharge port 5 passes the fine pores of the porous body 6 and flows uniformly over the entire surface of the master disk 2. The generation of the unequality in the development and film thickness by the nonuniform flow is thereby obviated and since the unequal development by air bubbles is forbidden, the master disk having high quality is manufactured at a high yield.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the mechanism of a photoresist developing device for the production of signal recording glass masters of video discs, audio discs or data files, etc.

[Conventional technology]

Generally, the disk-shaped master is a glass disk or the like, and photoresist is first coated on it, and then a laser beam modulated to the signal to be recorded is focused into a minute spot with a recording lens and recorded by N beams. will be carried out. By developing the master, in the case of a positive photoresist, the portions exposed to the laser beam melt and a signal with a geometric pattern is obtained. In addition to laser recording as described above, this method is also applicable to master discs recorded using electron beams. It can also be applied to the development of semiconductor wafers that are exposed to ultraviolet light through a mask.

The spinning method is currently often used as a developing treatment for master discs as described above, and a conventional developing apparatus for the spinning method has a structure as shown in FIG. This is a method in which a master disc 2 fixed on a turntable 1 is rotated, and a developer 4 is discharged from a nozzle 3 onto the master disc, and the developer is distributed almost uniformly by the centrifugal force caused by the rotation of the master disc, resulting in development. be.

[Problem that the invention seeks to solve]

However, with the above-mentioned conventional technology, firstly, the developer flows out from above at one point, making it difficult to spread the solution uniformly over the entire surface, or the developer is discharged from a nozzle into the developer that has flowed onto the master. Non-uniform areas of liquid occur due to bubbles generated during collision or collision with the master. Due to these reasons, locally insufficient development occurred, that is, uneven development occurred.

Second, the film was significantly thinned at the position where the liquid was dropped, causing uneven film thickness.

There were problems such as:

The present invention is intended to solve these problems, and its purpose is to eliminate uneven development and film thickness in the developing process, improve the yield of the developing process, and achieve high quality. The goal is to get the best product.

[Means for solving problems]

The developing device of the present invention is equipped with a developing device and a turntable in which a master is placed and rotated in the paddle. It is characterized by being placed above the master.

〔Example〕

FIG. 1 is a sectional view of a developing device in an embodiment of the present invention. In FIG. 1, a master disc 2 is fixed to the upper surface of a turntable 1 and rotates at a low speed. Above this master, a second
As shown in the figure, the developer outlet 5, which has many fine holes on its surface, is covered with a porous material having a diameter that is the same as or larger than the diameter required for development of the master, and whose surface is parallel to the surface of the master. It is arranged in a shape. In addition to this embodiment, the diameter of the porous body may be approximately the same as the radius of the master as shown in FIG. 3, with the same effect. The distance between the master and the porous body varies depending on the pressure of the developer flowing out from the discharge port; it is wide when the pressure is high, and narrow when the pressure is low. When developing,
This porous body can be rotated or not rotated; generally, it is not rotated when the master is rotating, and it is rotated when the master is fixed. Specific materials for this porous body include sintered metal materials, alumite-treated aluminum, or polymeric materials such as polyvinyl formal (PVF).

When developing with this structure and configuration, the developer flowing out from the discharge port moves in the direction of the arrow in Figure 1, passes through the fine holes in the porous material, and flows out from the plane parallel to the master. In addition, the air bubbles generated from the developer supply piping system are dispersed by minute holes as they pass through the porous material, and are dispersed evenly over the entire surface of the master disc to perform the development process. becomes.

Furthermore, since the developer that has passed through the porous material has a fine and highly dense distribution, no bubbles are generated when it collides with the master, and even if bubbles are generated by chance, the developing solution is dispersed one after another. It is destroyed by liquid and does not remain on the master for a long time.

〔Effect of the invention〕

In the developing device of the present invention, the porous body that covers the developer discharge port during development is placed above the master disk.
The developer that has passed through the porous material is distributed uniformly over the entire surface of the master for development processing, so uneven development or film thickness unevenness due to uneven distribution does not occur. Since there are no air bubbles, uneven development due to air bubbles does not occur.

For the reasons described above, a high-quality master disk without uneven development or uneven film thickness can be produced at a high yield. Also,
The present invention can also be applied to the pre-wet process for uniformly wetting the master disc during the development process, and the rinsing process with pure water after the original image process, during which the pre-wet solution and pure water are distributed. can.

[Brief explanation of drawings]

FIG. 1 is a sectional view of a developing device in an embodiment of the present invention;
Figure 2 is an enlarged cross-sectional view of section A of the developer discharge port of the same device;
The figure is a sectional view of a developing device according to another embodiment of the present invention.
FIG. 4 is a sectional view of a conventional developing device. l...Turn table 2...Master disc 3...Nozzle 4...Developer solution 5...Developer discharge port 6... ...Porous bodies and above Applicant: Seiko Epson Co., Ltd.

Claims (1)

[Claims] In a developing device equipped with a developing tank and a turntable for placing and rotating a master disc in the tank, a porous body covering the developer discharge port is placed above the master disc during development. A developing device characterized by: