JPH09152716A - Developing method, developing device and disk-like recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form pits of the optimum shape with good accuracy by forming a first exposure part according to recording signals in a resist layer, forming a second exposure part according to recording signals in another specified area different from the first area, and stopping development based on the detection results of diffracted light from the second exposure part. SOLUTION: A resist master glass plate 2 is placed on a turntable 8 and a resist layer 2A is washed with pure water PW from a nozzle 15. A nozzle arm 11 is rotated to stop the nozzle 15 at a specified position on the resist layer 2A. Laser light L1 from a laser light source 16 is made to irradiate a monitoring area. A developer DE is sprayed from the nozzle 15 on the resist layer 2A. When pits or grooves as a latent image becomes to have a desired cross-sectional dimension, the signal level of signals S1 from a second detector 18 reaches the level of signals S1 which give the level to stop development. At this time, an electromagnetic valve 13 is controlled to spray pure water PW through the nozzle 15 instead of the developer DE on the resist layer 2A to stop development.

Description

Detailed Description of the Invention

[0001]

[Table of Contents] The present invention will be described in the following order. TECHNICAL FIELD OF THE INVENTION Conventional Technology Problems to be Solved by the Invention Means for Solving the Problems Embodiments of the Invention (1) Configuration of Developing Device According to Examples (FIGS. 1 and 2) (2) Example Operations and Effects (3) Other Embodiments (FIGS. 3 to 6) Effects of the Invention

[0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a developing method, a developing device, and a disk-shaped recording medium, for example, a method for producing an optical disk master (so-called stamper) which is a mold for molding a disk-shaped recording medium such as an optical disk. It is suitable for application to a developing method and a developing device in a developing treatment step among the steps.

[0003]

2. Description of the Related Art Conventionally, in a manufacturing process of a disk-shaped recording medium including an optical disk and a magneto-optical disk, a stamper having a desired concavo-convex pattern (for example, pits and / or grooves) formed on a surface thereof in accordance with a recording signal. And a process of transferring a desired concavo-convex pattern formed on the surface of the stamper onto a disc substrate to commercialize the disc substrate as a disk-shaped recording medium. .

In the step of manufacturing the stamper, first, one surface of the glass plate that has been polished to be extremely smooth is washed and dried, and then a photoresist made of a photosensitive material is applied to the one surface to form a resist layer. (Less than,
Such a glass plate is referred to as a resist master glass plate). Next, after exposing a light beam (for example, a laser beam or the like) based on a desired recording signal to the resist layer and developing the same, an uneven pattern corresponding to the signal recorded in the resist layer is formed on one surface of the glass plate. You.

In practice, such a developing treatment step is performed by supplying a developing solution made of an alkaline aqueous solution such as sodium metasilicate to the resist layer of the resist master glass plate after the exposure treatment step, and exposing the resist layer. The developed portion is dissolved by the developing solution.

Subsequently, a conductive film layer made of silver, nickel, or the like is formed on the surface of the uneven pattern by a method such as sputtering, vapor deposition, or electroless plating. Thereafter, a plating layer made of nickel or the like having a predetermined thickness is formed on the conductive film layer by electroforming. Furthermore, after this, after peeling off the conductive film layer and the plating layer integrally from the glass plate,
This is punched into a predetermined shape. This makes it possible to obtain a stamper in which a concavo-convex pattern corresponding to a recording signal is formed on one surface.

[0007]

By the way, after the recording signal is exposed and recorded on the resist layer of the resist master glass plate using the light beam as described above, the uneven pattern corresponding to the recording signal is formed by developing the recording signal. According to the forming method, a portion corresponding to a pit and / or a groove formed by the concavo-convex pattern (hereinafter, this portion is referred to as a pit and / or a groove corresponding portion) is required to have an exposure accuracy of about 1 micron unit. Therefore, it is necessary to faithfully develop the resist layer.

That is, since the depth and width of the pit and / or the groove corresponding portion formed in the resist layer by the development processing step are expressed as the dimension of the cross section perpendicular to the track direction of the irradiated light beam, It is closely related to the accuracy of information detection by laser light in an optical disk system. Therefore, it is necessary that the development process is controlled so that the depth and width of the pit and / or groove equivalent portion (hereinafter, the depth and width are referred to as sectional dimensions) are within a predetermined range. Becomes

Therefore, by utilizing the diffraction development of light due to the unevenness on the flat surface, the resist layer of the glass plate is irradiated with the laser beam for monitoring during the development and is diffracted by the portion corresponding to the pit and / or the groove. It has been proposed to detect the laser beam component and stop the developing process when the intensity of the diffracted light reaches a predetermined value to control the cross-sectional dimension of the pit and / or groove.

In order to embody such a method, a developing device used for producing a stamper for a disk-shaped recording medium such as an optical disk or a magneto-optical (MO) disk will be described.

In this developing device, first, a resist master glass plate formed by previously forming a pit and / or a groove corresponding to a desired recording signal on the resist layer as a latent image is rotated by a master code cutter or the like. Meanwhile, the developing solution is sprayed on the resist layer of the resist master glass plate.

In this state, the latent image corresponding to the pits and / or the grooves formed on the resist layer of the resist master glass plate is gradually dissolved by the developing solution,
At the same time, a laser light source arranged above the resist master glass plate irradiates the latent image formed on the resist layer with laser light for monitoring.

Here, a detector is provided at a predetermined position outside the optical path of the laser light emitted from the laser light source on the side opposite to the laser light source with respect to the resist master glass plate. In this case, since a part of the laser light emitted from the laser light source is diffracted in a predetermined direction by the pits and / or the groove corresponding to the part being formed in the resist layer, the first-order diffracted light of the diffracted laser light is However, after passing through the resist master glass plate, the light enters the detector.

In practice, when the latent image formed on the resist layer of the resist master glass plate is irradiated with the laser beam while developing the latent image of the portion corresponding to the pit and / or the groove, the portion corresponding to the pit and / or the groove is accompanied by the progress of development. Of the first diffracted light diffracted by the portion corresponding to the pit and / or the groove changes accordingly.

Therefore, in this developing device, the light amount of the first-order diffracted light detected by the detector is compared with a preset predetermined light amount, and the development is stopped based on the comparison result. This makes it possible to obtain a pit and / or a groove corresponding portion having a desired depth.

By the way, in recent years, as a disc-shaped recording medium, a writable optical disc (CD), a writable optical disc (disc) in which a discrete information pattern as a pre-format and / or a guiding groove for tracking are formed in advance are provided. MD), or magneto-optical discs (MO) written at 1 ×, 2 × and 4 × density, and digital video discs (DVD).

However, when stampers used as molds for such various disk-shaped recording media are manufactured by using the above-described developing device, the recording areas are different depending on the type of the disk-shaped recording medium. ,
In the development process, there is a problem that it is difficult to set all the irradiation positions of the laser light on the resist master glass plates as the pretreatment stage of these various stampers to the same radial position. Particularly, since the recording areas of the LD and the MD are extremely separated from each other, it is very difficult to make the LD and MD compatible with each other in the installation positions of the laser light source and the detector.

M recorded at double density or quadruple density
Since a disk-shaped recording medium such as an O or a DVD having a high density recording has a different track pitch from a CD having a normal recording density, when the above-described developing device is used, the pits and / or the grooves of the resist master glass plate are used. There is a problem that the diffraction angle of the first-order diffracted light diffracted by the corresponding portion changes, and as a result, the first-order diffracted light does not enter the detector.

Further, since the optimum pit and / or groove sectional size is different for each disk-shaped recording medium, the above-described developing device is used to form the optimum pit and / or groove corresponding to each. Therefore, it is necessary to increase the dynamic range of the detector so as to cope with the change in the amount of the first-order diffracted light diffracted by the pits and / or the grooves corresponding to each resist master glass plate.

Further, a wide groove is latently imaged on a resist master glass plate as a pretreatment step of a stamper used as a mold of a disc-shaped recording medium made of a magneto-optical disc such as MD, and the developing device described above is used. When the wide groove is formed by using, the light amount of the first-order diffracted light diffracted by the wide groove increases immediately after the incidence on the detector, but the rate of increase gradually decreases and after reaching the maximum value, It has the characteristic of gradually decreasing. Therefore, there is a problem that it is very difficult to perform development by the developing method using the above-described developing device that stops the development when the light amount of the first-order diffracted light is equal to or more than the predetermined light amount set in advance.

The present invention has been made in consideration of the above points, and a developing method, a developing device, and a disk capable of accurately forming a pit and / or a groove having an optimum shape regardless of the type of the disk-shaped recording medium. It is intended to propose a recording medium.

[0022]

In order to solve such a problem, in the present invention, a resist layer is formed by applying a photoresist on one surface of a substrate, and the resist layer is the same as the recording signal and the recording signal. Alternatively, the resist master plate that has been exposed based on a similar signal is rotated, and a developing solution is supplied to the resist layer so that the first exposing section based on the recording signal of the resist layer by the developing solution and the recording signal. The amount of diffracted light obtained by irradiating the second exposure portion with laser light is detected while melting the second exposure portion based on the same or similar signal, and development is performed based on the detection result. Try to stop.

In this way, in the resist layer of the resist master plate, not only in the first exposed portion corresponding to the desired recording signal, but also in the predetermined area different from the first exposed portion, the same or the same as the recording signal. The second exposure portion corresponding to a similar signal is also formed, and the development is stopped based on the detection result of the light amount of the diffracted light diffracted by the second exposure portion. Regardless of the type of recording medium, it is possible to accurately form the pit and / or groove having an optimum shape.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings.

(1) Structure of Developing Device According to Embodiment In FIG. 1, reference numeral 1 denotes a developing device as a whole, and a rotary drive unit 3 for rotatably holding a resist master glass plate 2 is a spindle fixed to a base plate 4. 5, the end shaft 5A of the spindle 5 is engaged with the output shaft 7A of the servomotor 7 via the belt 6 below the base plate 4.

A turntable 8 is attached to the end shaft 5B of the spindle 5 on the upper side of the base plate 4, and the resist master glass plate 2 placed on the turntable 8 is suction-held.
Thus, according to the rotational drive of the servo motor 7, the belt 6,
By interlocking the spindle 5 and the turntable 8, the resist master glass plate 2 can be rotated in the direction indicated by the arrow a or in the opposite direction.

Further, a chamber 9 having a predetermined shape is provided around the spindle 5 on the upper surface of the base plate 4, and an arm support 10 is erected and fixed at a position adjacent to the chamber 9. An arm support 10A is rotatably supported at the upper end of the arm support 10 in a direction indicated by an arrow b or in a direction opposite thereto, and the arm support 10A has one end of a nozzle arm 11 and a pipe 12a.
Are attached so that one ends thereof communicate with each other.

An output port of an electromagnetic valve (three-way valve) 13 is connected to the other end of the pipe 12, and a developer DE and pure water PW are externally connected to two input ports of the electromagnetic valve 13.
Further, based on the control of the control unit 14, the solenoid valve 13 has an output port opened and closed and two input ports selectively opened and closed. Thereby, either the developer DE or the pure water PW is selectively supplied into the pipe 12 via the output port.

On the other hand, a nozzle 15 is attached to the other end of the nozzle arm 11, and the developer DE or pure water PW supplied through the pipe 12 and the nozzle arm 11 is sprayed from the tip of the nozzle 15. Has been done.

Thus, after the nozzle 15 is arranged above the resist master glass plate 2 by the rotational driving of the arm supporting portion 10A, the developing solution DE or pure water PW is passed through the pipe 12, the nozzle arm 11 and the nozzle 15. It is sprayed on the resist layer 2A of the resist master glass plate 2. After that, the sprayed developing solution DE or pure water PW flows down on the resist master glass plate 2 and is then collected in the chamber 9.

By the way, in the resist layer 2A of the resist master glass plate 2, a region corresponding to the latent image of the pits and / or grooves corresponding to the pits and / or the grooves which have been subjected to the exposure processing in advance by a master code cutter or the like according to a desired recording signal. (Hereinafter, this is referred to as a recording signal area) is formed. Further, it is a predetermined area different from the recording signal area, and an area corresponding to the latent image of the pit and / or the groove corresponding to the exposed portion according to the signal which is the same as or similar to the recording signal (hereinafter, this area is developed. A monitor area) is formed.

A laser light source 16 made of a semiconductor laser having a short coherence length is provided at a predetermined position above the resist master glass plate 2, and the laser light L1 from the laser light source 16 causes the resist layer 2A of the resist master glass plate 2 to be irradiated. It is adapted to irradiate the development monitor area formed in the above.

Incidentally, regardless of the size of the surface of the resist master glass plate, that is, the type of the disk-shaped recording medium formed by molding the stamper obtained from the resist master glass plate as a mold, the laser light source 16 The development monitor area is fixed so as to always have a constant radial position.

On the other hand, the laser light source 16 on the side opposite to the laser light source 16 with respect to the resist master glass plate 2.
The first and second detectors 17 are provided at predetermined positions on the optical path of the laser light L1 emitted from the optical path and outside the optical path, respectively.
And 18 are provided.

That is, when the pit and / or the groove corresponding portion is not yet formed in the development monitor area, a part of the laser beam L1 emitted from the laser light source 16 is not diffracted in the development monitor area and is directly processed for the next time. Origami L1
After passing through the resist master glass plate 2 as A, it is incident on the first detector 17.

On the other hand, when a pit and / or a groove corresponding portion is being formed in the development monitor area, a part of the laser beam L1 emitted from the laser light source 16 is diffracted in the predetermined direction in the development monitor area. The first-order diffracted light L1B of the diffracted laser light L1 is incident on the second detector 18 after passing through the resist master glass plate 2.

In this case, first, the second detector 18 is
After detecting the amount of the incident first-order diffracted light L1B, an electric signal S1 as a result of the detection is sent to the comparing unit 19.
The electrical signal S1 and a development stop level signal S2 having a predetermined signal level from the outside are input to the comparison unit 19,
The signal level of the electric signal S1 and the development stop level signal S
By comparing the signal level with the signal level of No. 2, a comparison signal S3, which is the result of the comparison, is sent to the control unit 14.

The control section 14 determines, based on the comparison signal S3,
When the signal level of the electric signal S1 reaches the signal level of the development stop level signal S2, the development stop signal S4 is sent to the solenoid valve 1
3 At this time, since the developing solution DE is scattered on the resist layer 2A of the resist master glass plate 2, the electromagnetic valve 13 has the opening for developing solution DE opened and the opening for pure water PW closed. It is in a broken state.

In this state, when the development stop signal S4 is input to the solenoid valve 13, the solenoid valve 13 causes the developer DE to be discharged.
Are closed and the input port of pure water PW is opened. As a result, the pure water PW is sprinkled on the resist layer 2A of the resist master glass plate 2, so that the developing solution DE sprinkled on the resist layer 2A is washed away by the pure water PW, thus developing Progress will be stopped.

On the other hand, the first detector 17 is
After detecting the light amount of the incident zero-order diffracted light L1A, an electric signal S5, which is the detection result, is sent to the comparison unit 21 in the light amount control unit 20. In the light quantity control unit 20, the electric signal S5 and a reference signal S6 having a predetermined signal level from the outside are input to the comparison unit 19, and the signal level of the electric signal S5 is compared with the signal level of the reference signal S6. By doing so, the comparison signal S7, which is the result of the comparison, is
Send to 2.

The control section 14 determines, based on the comparison signal S7,
The control signal S8 is sent to the laser driver 23 so that the difference between the signal level of the electric signal S5 and the signal level of the reference signal S6 is eliminated and the signal level becomes the same.

The laser driver 23 drives and controls the laser light source 16 based on the control signal S8, so that the light amount of the laser light L1 emitted from the laser light source 16 is always kept stable. As a result, disturbance elements such as fluctuations of floating dust or mist-like developer on the optical path of the laser beam L1 from the laser light source 16 to the development monitor area formed in the resist layer 2A of the resist master glass plate 2. Is present, the first-order diffracted light L1
It is possible to keep the light quantity of B in a stable state without disturbance,
Thus, in the second detector 18, the first-order diffracted light L1
It is possible to prevent the detection accuracy of the light amount of B from being deteriorated.

After duplicating the resist master glass plate 2 having the pits and / or grooves corresponding to the resist layer 2A thus formed, a conductive film layer made of nickel or the like is formed, and then electroforming is performed. A stamper is manufactured by plating. Using this stamper as a mold, PMMA (polymethylmethacrylate) or PC
By molding a transparent resin such as (polycarbonate), a transparent substrate having pits and / or grooves transferred thereto is formed. A metal film or a magneto-optical film that reflects light is provided on the surface including these pits and / or grooves.
Further, a protective film is provided to protect the signal pits and the reflective film, and thus a disc-shaped recording medium such as a CD, LD or MO is manufactured.

Incidentally, as shown in FIG. 2, a recording signal area A ₁ and a development monitor area A ₂ are formed in the resist layer 2A of the resist master glass plate 2. As a result, the pits of the recording signal area A ₁ have a predetermined cross-sectional dimension, the pits of the development monitor area A ₂ also have a predetermined cross-sectional dimension, and the resist layer 2A of the resist master glass plate 2 has the same shape as shown in FIG. A pattern of interference appears.

(2) Operation and effects of the embodiment With the above-mentioned structure, the resist layer 2A of the resist master glass plate 2 has a latent image of a portion corresponding to a pit and / or a groove, which has been exposed according to a desired recording signal. A latent image of a pit and / or a groove corresponding portion which has been previously formed as a recording signal area and which has been subjected to an exposure process in accordance with a signal which is the same as or similar to the recording signal is developed in a predetermined area different from the recording signal area. It is formed in advance as a monitor area.

In this case, the laser light L1 for monitoring emitted from the laser light source 16 is the resist master glass plate 2
The 0th-order diffracted light L1A, which is transmitted to the development monitor region formed on the resist layer 2A without being diffracted in the development monitor region and the 1st-order diffracted light L1B diffracted in a predetermined direction in the development monitor region, In order to receive light by the first and second detectors 17 and 18, respectively,
Laser light source 16 and first and second detectors 17 and 1
8 and 8 are fixed at predetermined positions.

Here, in the developing device 1, first, the resist master glass plate 2 is placed on the turntable 8 and rotated while spraying pure water PW from the nozzles 15 to wash the resist layer 2A with water. Then, the nozzle arm 11 is rotated to stop the nozzle 15 at a predetermined position on the resist layer 2A, and the laser light L1 is emitted from the laser light source 16 to the development monitor area formed on the resist layer 2A.

Subsequently, while rotating the resist master glass plate 2 in accordance with the rotation of the turntable 8, the nozzle 1
The developer DE from 5 is sprinkled on the resist layer 2A. In this state, when the pit and / or the groove corresponding portion formed of the latent image formed in the development monitor area has a desired cross-sectional dimension, at the same time, the signal level of the electric signal S1 output from the second detector 18 stops development. The signal level of the level signal S2 is reached. At this time, the solenoid valve 13 is controlled to be switched by the control unit 13, and pure water PW is sprayed from the nozzle 15 instead of the developing solution DE onto the resist layer 2A to wash away the developing solution DE and stop the development. Let

As described above, the operation of stopping the development when the portion corresponding to the pit and / or the groove has a desired sectional size is detected by detecting the light amount of the first-order diffracted light L1B diffracted in the development monitor area, not in the recording signal area. By doing so, regardless of the size of the surface of the resist master glass plate, it is possible to always perform the operation of stopping the development. As a result, it is possible to avoid the complexity of moving the arrangement of the laser light source 16 and the first and second detectors 17 and 18 according to the size of the surface of the resist master glass plate.

According to the above construction, the resist layer 2A of the resist master glass plate 2 is not limited to the recording signal area composed of the latent image of the pit and / or the groove corresponding to the desired recording signal, and the recording signal area. A development monitor area, which is a latent image of a pit and / or a groove corresponding to a signal that is the same as or similar to the recording signal, is also formed in a predetermined area different from By stopping the development based on the detection result of the light amount of the folding light L1B, the pits and / or the grooves having the optimum shape can be accurately formed regardless of the type of the disk-shaped recording medium.

(3) Other Embodiments In the above-mentioned embodiments, the pits and the pits which have been previously subjected to the exposure processing by the master code cutter or the like according to the signal which is the same as or similar to the desired recording signal on the resist layer. Alternatively, the case where the latent image corresponding to the groove is formed as the development monitor area has been described, but the present invention is not limited to this, and in the exposure processing step for forming the development monitor area, the same as the desired recording signal is obtained. Alternatively, the exposure light amount (hereinafter, referred to as recording light amount) based on a similar signal may be changed.

That is, as shown in FIG. 3, in the exposure process, the recording light amount in the development monitor area is set to 1.0.
[MJ / m], 1.2 [mJ / m], 1.5 [mJ / m] and 1.8
When exposure is performed by setting [mJ / m], the development stop level signal S2 with the lapse of each development time in the development processing step.
Signal level tends to increase in proportion to the magnitude of each recording light quantity.

According to this graph, when the developing time is 30 seconds, the recording light amount in the developing monitor area is 1.0 [mJ /
m], 1.2 [mJ / m], 1.5 [mJ / m] and 1.8 [mJ / m
m], the development stop level signal S2 corresponding to these
It can be read that the signal levels Vb ₁ , Vb ₂ , Vb ₃ and Vb ₄ of the above are 2.4 [V], 4.2 [V], 6.2 [V] and 6.8 [V], respectively. As a result, the development stop level signal S for each recording light amount in the development monitor area
It can be seen that the signal level of 2 depends on the development time.

Thus, by changing the recording light amount in the development monitor area, the signal level of the development stop signal S2 can be changed according to the change in the recording light amount. By the way, in practice, the thickness is generally different depending on the type of the disk-shaped recording medium, and in the development process, the light is diffracted in the development monitor region of the resist layer 2A in proportion to the thickness of the resist layer 2A. There is a feature that the light quantity of the first-order diffracted light L1B increases.

Therefore, in forming the pit and / or the groove corresponding portion having the optimum shape, the signal level of the development stop signal S2 is changed in accordance with the change of the recording light amount in the development monitor area, so that the next time The change in the light amount of the folding light L1B can be suppressed to some extent, and as a result, it is not necessary to increase the dynamic range of the second detector 18.

Further, not only is the amount of recording light in the development monitor area changed in the exposure processing step, but the proportion of the pits formed in the development monitor area (for example, the duty ratio) is also changed. The change in the amount of light can be suppressed to some extent, and the same effect as the above case can be obtained.

Further, in the above-mentioned embodiment, the developing device 1 is mounted on a resist master glass plate corresponding to a disk-shaped recording medium such as a CD having a normal recording density without particularly limiting the target disk-shaped recording medium. The case of application is described, but the present invention is not limited to this, and for example, a resist master glass plate corresponding to a high-density recorded disk-shaped recording medium such as MO or DVD recorded with double density or quadruple density. The developing device 1 may be applied.

In this case, generally, the track pitch is 1.6 [μm] at the normal recording density, but in the resist master glass plate corresponding to the disk-shaped recording medium on which high density recording is performed, the pitch and Or, since the track pitch of the groove-corresponding portion is different, the first-order diffracted light L1 diffracted by the pit and / or the groove-corresponding portion.
The diffraction angle of B will change. Therefore, depending on the degree of change in the diffraction angle of the first-order diffracted light L1B, the second detector 18 may not be able to receive the light.

In order to solve such a problem, the development monitor area is different from the recording signal area. Therefore, in the exposure processing step, the track pitch of the portion corresponding to the groove and groove in the development monitor area is about 1.5 to. 1.7
The first-order diffracted light L1B can be received by the second detector 18 by setting it to [μm] and performing exposure processing. Further, this makes it possible to avoid the complexity of moving the arrangement of the second detector 18 and the laser light source 16, and thus to increase the versatility for various optical disk formats of different track pitches.

Further, in the above-described embodiment, in the developing device 1, the development is stopped when the light amount of the first-order diffracted light L1B reaches the predetermined light amount corresponding to the preset signal level of the development stop level signal S2. However, the present invention is not limited to this, and in the case where the light quantity of the first-order diffracted light L1B does not increase with the passage of time, the light quantity of the first-order diffracted light L1B is detected after a lapse of a predetermined time. May be.

Specifically, in a disk-shaped recording medium such as a magneto-optical disk such as MD, a wide groove is latently imaged in the development monitor area of the resist layer 2A of the resist master glass plate 2 in the exposure process. The light quantity of the first-order diffracted light L1B diffracted by the wide groove increases from the time t ₀ of incidence on the second detector 18 as shown in FIG. 4, for example, and the increase rate gradually decreases, and after reaching the maximum value. , And gradually decreases to reach a predetermined light amount set in advance at time t ₃ .

In this case, the signal level Vb becomes the same as that at the time point t ₃ at the time point t ₁ , and the developing method using the developing device 1 may stop the development at the time point t ₁ . Therefore, by setting the time from the time point t ₀ to the time point t ₂ as the mask time in the comparison unit 19 in advance, the light amount of the first-order diffracted light L1B is detected after the mask time has elapsed.

Further, in the above-described embodiment, the case where the light quantity control unit 20 is configured as shown in FIG. 1 has been described, but the present invention is not limited to this, and is the same as the corresponding portion to FIG. You may use the light quantity control part 31 like FIG. 5 which attached and shown the code | symbol.

In this case, the developing device 30 in FIG. 5 has substantially the same configuration as that of the developing device 1 shown in FIG. 1 except for the light quantity control section 31. That is, the comparison unit 3 of the light amount control unit 31
An electric signal S5, which is the detection result of the light quantity of the 0th-order diffracted light L1A, is input to the second detector 2, and a reference signal S11, which is a predetermined signal level, is input from the outside. As a result, the comparison unit 32 compares the signal level of the electric signal S5 with the signal level of the reference signal S11, so that the comparison signal S10, which is the comparison result, is output to the control unit 3.
3

Based on the comparison signal S10, the control unit 33 controls the modulator driver 34 so as to eliminate the difference between the signal level of the electric signal S5 and the signal level of the reference signal S11 so as to obtain the same signal level. The signal S12 is transmitted. Here, for example, EO (electro-optical element), liquid crystal, and AOM (acousto-optical deflection) are provided on the optical path of the laser beam L1 from the laser light source 16 to the development monitor region formed in the resist layer 2A of the resist master glass plate 2. A module 35 such as a container is attached.

As a result, the module driver 34 is
By controlling the driving of the laser light source 16 and the modulator 35 based on the control signal S12, the laser light L1 from the laser light source 16 to the development monitor region formed in the resist layer 2A of the resist master glass plate 2 is on the optical path. Even in the presence of disturbance elements such as floating dust and fluctuations of mist-like developer, the light quantity of the first-order diffracted light L1B can be maintained in a stable state without disturbance, and thus the second detector 18 can be used for the next time. It is possible to prevent the detection accuracy of the light amount of the folding light L1B from deteriorating.

Further, in this case, not only the semiconductor laser as in the embodiment but also a helium-neon (He-Ne) laser,
Helium-Cadmium (He-Cd) laser, Argon (A
A gas laser such as r) laser and krypton laser (Kr ⁺ ) laser may be used. In this case, the gas laser is a laser light source whose control response is poorer than that of the semiconductor laser, but by using the modulator 35, the developing device 30
Will be applicable in.

[0068]

As described above, according to the present invention, the first layer corresponding to a desired recording signal is formed on the resist layer of the resist master plate.
Not only the second exposure unit, but also a second exposure unit corresponding to a signal that is the same as or similar to the recording signal is formed in a predetermined area different from the first exposure unit. By stopping the development based on the detection result of the amount of the diffracted light diffracted by, it is possible to accurately form the pits and / or grooves having the optimum shape regardless of the type of the disk-shaped recording medium. The method, the developing device, and the disk-shaped recording medium can be realized.

[Brief description of the drawings]

FIG. 1 is a partial schematic diagram showing an overall configuration of a developing device according to an embodiment.

FIG. 2 is a schematic diagram showing a formation state of a development monitor area according to an embodiment.

FIG. 3 is a graph showing characteristics of recording light amount in a development monitor area according to another embodiment.

FIG. 4 is a graph for explaining a mask time in another example.

FIG. 5 is a partial schematic diagram showing an overall configuration of a developing device according to another embodiment.

[Explanation of symbols]

1, 30 ... Developing device, 2 ... Resist master glass plate, 2A ... Resist layer, 3 ... Rotation drive unit, 13 ...
Solenoid valve, 14 ... Control unit, 15 ... Nozzle, 16 ... Laser light source, 17 ... First detector, 18 ... Second detector, 19 ... Comparison unit, 20, 31 ... Light quantity control unit , DE ... Developer, PW ... Pure water.

Claims (13)

[Claims] 1. A resist master in which a resist layer is formed by applying a photoresist on one surface of a substrate, and the resist layer is exposed on the basis of a recording signal and a signal which is the same as or similar to the recording signal. While the plate is rotated, a developing solution is supplied to the resist layer so that the developing solution supplies the developing solution with the first exposing section based on the recording signal of the resist layer and the second exposing section based on the same or similar signal as the recording signal. The developing method, wherein the amount of diffracted light obtained by irradiating the second exposed portion with a laser beam is detected while melting the exposed portion, and the development is stopped based on the detection result. 2. The developing method according to claim 1, wherein the second exposed portion is provided at a predetermined radial position of the resist layer. 3. The second exposure section is formed by exposing the resist layer so that a light amount distribution of exposure based on a signal that is the same as or similar to the recording signal becomes uniform. 1. The developing method according to 1. 4. The second signal is obtained by changing the ratio of the pits of the signal which is the same as or similar to the recording signal and exposing the second signal.
2. The developing method according to claim 1, wherein the light amount of the diffracted light diffracted by the exposed portion is changed. 5. A detection position is irradiated with the diffracted light diffracted by the second exposure section by changing the track pitch of a signal that is the same as or similar to the recording signal to perform exposure. The developing method according to claim 1. 6. A desired pattern shape is formed on the first exposure section by delaying a timing for detecting a light amount of the diffracted light diffracted by the second exposure section by a predetermined time. The developing method according to claim 1. 7. A resist master formed by applying a photoresist on one surface of a substrate to form a resist layer, and exposing the resist layer based on a recording signal and a signal which is the same as or similar to the recording signal. Rotating means for rotating the plate, developing solution supplying means for supplying a developing solution to the resist layer, and developing means for supplying a developing solution to the resist layer based on the recording signal provided on the resist layer using the developing solution supplied from the developing solution supplying means. Developing means for developing one exposed portion and a second exposed portion based on a signal which is the same as or similar to the recording signal, and the second portion during the development of the resist layer by the developing means.
A laser light source for irradiating the exposure unit with a laser beam, and a light amount detection unit for detecting the amount of diffracted light of the laser beam emitted from the second exposure unit, based on the detection result by the light amount detection unit. A developing device characterized by stopping development. 8. The developing device according to claim 7, wherein the second exposure section is provided at a predetermined radial position of the resist layer. 9. The second exposure section is formed by exposing the resist layer so that the exposure light amount distribution based on a signal that is the same as or similar to the recording signal is uniform. 7. The developing device according to 7. 10. The light quantity of the diffracted light diffracted by the second exposure section is changed by changing the ratio of the pits of a signal that is the same as or similar to the recording signal and performing exposure. The developing device according to claim 7. 11. The detection position is irradiated with the diffracted light diffracted by the second exposure unit by changing and exposing the track pitch of a signal that is the same as or similar to the recording signal. The developing device according to claim 7. 12. A desired pattern shape is formed on the first exposure section by delaying a timing for detecting a light amount of the diffracted light diffracted by the second exposure section by a predetermined time. The developing device according to claim 7. 13. A resist master formed by applying a photoresist on one surface of a substrate to form a resist layer, and exposing the resist layer based on a recording signal and a signal which is the same as or similar to the recording signal. While the plate is rotated, a developing solution is supplied to the resist layer, and the developing solution supplies the developing solution to the first exposure section based on the recording signal of the resist layer and the second exposing section based on a signal that is the same as or similar to the recording signal. The second exposure portion is melted with the exposure portion, and the light amount of the diffracted light obtained by irradiating the second exposure portion with laser light is detected, and the development is stopped based on the detection result. And a disk-shaped recording medium.