JPS63275829A - Vibration isolator - Google Patents

Abstract

PURPOSE:To instal the device in the title to any vibrating body easily for making it possible to detect vibration by irradiating a vibrating body with laser beam focusing on it for detecting reflected beam from the vibrating body with an optical detector. CONSTITUTION:When the focus coincides with a refracting surface, a laser beam reflects totally and is refracted in right angle by a half mirror 6 and passing through a lens 18, detected by an optical detector 8 but when the reflecting surface moves owing to vibration, the focus is drifted so no reflected beam becomes to return. So, as signal in the optical detector 8 disappears in this case, the reflecting surface moving passes through the focus of a lens 7 due to vibration movement of a vibrating body 1. Therefore, signal is detected on the optical detector 8 in a series of pulses and output can be obtained and vibration of any vibrating body can be detected easily.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an anti-vibration device that detects imaging occurring in various mechanical devices and performs anti-vibration control.

(Prior art and problems) Conventionally, a device that uses a piezoelectric element or the like to perform image detection has been used for anti-vibration detection. There were limitations on the vibrating body that could be used, and the detection accuracy was low. For this reason, precise anti-vibration control was not possible.

(Means for Solving Problems) In view of the above-mentioned conventional drawbacks, the present invention has made it possible to detect vibrations with high precision using a simple structure without contacting the imaging object. An elastic vibration isolator that detects vibration using a lens that focuses the laser beam of a laser oscillator on the vibrating body and an optical detector that detects the reflected light from the vibrating body, and performs vibration isolation control of the vibrating body. The present invention is characterized in that a control device is provided to control the signal from the optical detector.

〔Example〕

The present invention will be explained below with reference to an embodiment of the drawings.

In FIG. 1, reference numeral 1 denotes a photographing body in which vibrations occur, such as a part of a machine arm, which is supported on a bed fixing part by an elastic vibration isolator 2 made of anti-vibration rubber or the like. Reference numeral 3 denotes a magnetic plate interposed in a laminated manner within an elastic body, which is subjected to restraint control by a vibration isolating coil 4. Reference numeral 5 denotes a Rayleigh optical oscillator that oscillates a visible light rake, for example, 110-No.
m) is used. Reference numeral 6 denotes a half mirror, which focuses the laser beam from the emitter 1 onto the reflective surface of the object 1 through a lens 7 and illuminates the reflected wave onto an optical detector 8! 8. The optical detector 8 uses a CCD Dokabot semiconductor. 9 is a signal amplifier, 10 is a laser beam or speaker for displaying a signal, 1
1 is a differential bar meter, 12 is a differentiation circuit, 13 is an integration circuit, 14 is a variable resistor for setting the comparison standard 110, and 15 is a signal that is connected to a vibration isolating coil 41. ：Supplied signal 1;

During machining work, vibration J is generated and propagated in the vibrating body 1 of the arm cap of the No. 1 Makoto device. Laser oscillation i! :The beam output from I5 passes through the half mirror 6 and is narrowed down by the lens 7.The beam connects to the reflective surface of the vibrating body 1, but
When the vibrating body reflection surface moves due to vibration, the focus of the irradiation beam shifts. Therefore, when the focus coincides with the reflective surface, the laser beam is totally reflected and bent at a right angle by the half mirror 6, and the laser beam is bent at a right angle by the lens 1.
8 and is detected by the optical detector 8, but if the reflecting surface moves due to vibration, the focus will shift and the reflected light will no longer return. Therefore, at this moment, the signal from the optical detector 8 disappears. Then, due to the vibrational movement of the vibrating body 1, the reflecting surface moves and passes the focal point of the lens 7, and a pulse-like signal is detected by the optical detector 8, and the output is +ffJ, which is applied to the bar meter 11 through the differentiating circuit 12. Alternatively, a blind or light indicator may be used in addition to the signal indicator 10. On the other hand, the detection signal of the optical detector 8 is integrated by an integrating circuit 13, and the signal amplified by a comparison amplification 'S15 with a reference value set is applied to the vibration isolation coil 4 to perform vibration isolation control. The laminated magnetic plate 3 in the elastic body is magnetically restrained and controlled by the magnetic field generated by the vibration isolating coil 4!・Vibration control can be performed when the camera moves. When the vibration of the vibrating body 1 is stopped by this anti-vibration control, the reflecting surface coincides with the focal point of the lens 7, and the output of the optical detector 8 increases to amplify 2! The signal applied to i15 is equal to the reference value set in the resistor 14, the amplified output becomes O, and the excitation of the coil 4 is canceled.

Detection of imaging of a vibrating body and anti-vibration control are performed as described above. For example, using a laser in the 8,900 wavelength range, vibration can be detected with an accuracy of about 1 μm when the focal length of the lens is 2.3 m. It was possible to perform anti-vibration control with a response speed of 20KHz.

Incidentally, if a light reflector is provided on the vibrating body and a laser is reflected on the reflector, the vibration of any member that does not have a reflective surface can be detected and controlled. For anti-vibration damping control, elastic rubber can be mixed with magnetic powder or wire, and spring materials, elastic air bags, and similar elastic bodies can be used.

FIG. 2 shows another embodiment, in which the sea 1f beam output from the laser emitter 5 passes through a filter 16 and enters a half mirror 6, and from the half mirror passes through a collimator lens 17 and enters an irradiation lens 7. The reflected wave from the vibrating body 1 is detected by the optical detector 8 through the half mirror 6 and the cylindrical lens 18.

Although not shown, the light can be irradiated onto the reflective surface at a certain inclination angle, and the reflected waves can be detected by photodetectors arranged on the pattern surface.

〔Effect of the invention〕

As described above, the present invention detects vibration using an extremely simple configuration in which a laser beam oscillated by a laser beam detector is focused on a vibrating body using a lens, and the reflected light hitting the photographing body is detected by an optical detector. Since the detection output is displayed by light or sound, it can be easily installed on any vibrating body for vibration detection. In addition, since laser light is detected without contact, there is no restriction on the vibrating body, and detection can be performed with high precision. In addition, by providing a vibration-proof elastic body on the vibrating body and controlling the torque of the elastic body to control vibration-proofing using the detection signal, there is an effect that 1) vibration-proofing control can be performed in response.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration diagram of an embodiment of the present invention, and FIG. 2 is a diagram of an embodiment of a pond. 1...... Vibrating body 2... Elastic vibration isolator 3... Magnetic plate 4... Coil 5...... Laser intercalator 6... Half mirror 7... Lens 8... Optical detector. 10...Display device 15...Amplifier patent application Person: Representative of Donjou G-V-Pax Institute Co., Ltd., Yuki Inoue Figure 1

Claims (1)

[Claims] a laser oscillator, a lens that focuses a laser beam of the laser oscillator on a vibrating body, an optical detector that detects reflected light from the vibrating body, an elastic vibration isolator that performs anti-vibration control on the vibrating body; 1. A vibration isolator comprising: a control device that controls the torque of an elastic vibration isolator based on a signal from the optical detector.