JPS6327435Y2 - - Google Patents
Info
- Publication number
- JPS6327435Y2 JPS6327435Y2 JP1985165595U JP16559585U JPS6327435Y2 JP S6327435 Y2 JPS6327435 Y2 JP S6327435Y2 JP 1985165595 U JP1985165595 U JP 1985165595U JP 16559585 U JP16559585 U JP 16559585U JP S6327435 Y2 JPS6327435 Y2 JP S6327435Y2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- silicon
- utility
- model registration
- tube according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
Landscapes
- Resistance Heating (AREA)
- Furnace Details (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19752518045 DE2518045C3 (de) | 1975-04-23 | 1975-04-23 | Rohr für Diffusionsprozesse in der Halbleitertechnik aus polykristallinem Silicium |
| DE19752527927 DE2527927C2 (de) | 1975-06-23 | 1975-06-23 | Rohr für Diffusionsprozesse in der Halbleitertechnik aus polykristallinem Silicium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6193994U JPS6193994U (enEXAMPLES) | 1986-06-17 |
| JPS6327435Y2 true JPS6327435Y2 (enEXAMPLES) | 1988-07-25 |
Family
ID=25768800
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51044364A Pending JPS51131268A (en) | 1975-04-23 | 1976-04-19 | Method of forming electric contacts for tubular furnace heated directly |
| JP1985165595U Expired JPS6327435Y2 (enEXAMPLES) | 1975-04-23 | 1985-10-28 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51044364A Pending JPS51131268A (en) | 1975-04-23 | 1976-04-19 | Method of forming electric contacts for tubular furnace heated directly |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4007369A (enEXAMPLES) |
| JP (2) | JPS51131268A (enEXAMPLES) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4980133A (en) * | 1988-03-16 | 1990-12-25 | Ltv Aerospace & Defense Company | Apparatus comprising heat pipes for controlled crystal growth |
| US5335310A (en) * | 1993-01-05 | 1994-08-02 | The Kanthal Corporation | Modular heating assembly with heating element support tubes disposed between hangers |
| US7193193B2 (en) * | 2002-03-01 | 2007-03-20 | Board Of Control Of Michigan Technological University | Magnetic annealing of ferromagnetic thin films using induction heating |
| WO2003075368A2 (en) * | 2002-03-01 | 2003-09-12 | Board Of Control Of Michigan Technological University | Method and apparatus for induction heating of thin films |
| EP2316286A1 (en) * | 2009-10-29 | 2011-05-04 | Philip Morris Products S.A. | An electrically heated smoking system with improved heater |
| CN104896947A (zh) * | 2015-05-04 | 2015-09-09 | 周玉红 | 一种中频炉电热发生器 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2768277A (en) * | 1956-10-23 | Electric furnace | ||
| US2851579A (en) * | 1955-04-04 | 1958-09-09 | Western Electric Co | Resistance heated solder pot |
| JPS4317208Y1 (enEXAMPLES) * | 1965-01-14 | 1968-07-17 | ||
| US3436171A (en) * | 1965-06-25 | 1969-04-01 | Biolog Research Inc | Device for sterilizing inoculation needles and loops |
| US3776809A (en) * | 1968-02-22 | 1973-12-04 | Heraeus Schott Quarzschmelze | Quartz glass elements |
| US3641249A (en) * | 1970-01-14 | 1972-02-08 | Courtaulds Ltd | Tube furnace |
| US3823685A (en) * | 1971-08-05 | 1974-07-16 | Ncr Co | Processing apparatus |
| CH545577A (enEXAMPLES) * | 1971-11-19 | 1974-01-31 | ||
| US3962670A (en) * | 1972-10-31 | 1976-06-08 | Siemens Aktiengesellschaft | Heatable hollow semiconductor |
| DE2340225A1 (de) * | 1973-08-08 | 1975-02-20 | Siemens Ag | Verfahren zum herstellen von aus halbleitermaterial bestehenden, direkt beheizbaren hohlkoerpern |
-
1976
- 1976-04-13 US US05/676,618 patent/US4007369A/en not_active Expired - Lifetime
- 1976-04-19 JP JP51044364A patent/JPS51131268A/ja active Pending
-
1985
- 1985-10-28 JP JP1985165595U patent/JPS6327435Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6193994U (enEXAMPLES) | 1986-06-17 |
| US4007369A (en) | 1977-02-08 |
| JPS51131268A (en) | 1976-11-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4810526A (en) | Method of coating a recrystallized silicon carbide body with a compact silicon carbide coating | |
| JPS5870833A (ja) | 反応蒸気相内で薄層を溶着させるための装置 | |
| CN110527984A (zh) | 加热炉体和半导体设备 | |
| JPS6327435Y2 (enEXAMPLES) | ||
| JP2725081B2 (ja) | 半導体装置製造用熱処理装置 | |
| JP5653830B2 (ja) | 多結晶シリコン製造装置および多結晶シリコン製造方法 | |
| JP2008509070A (ja) | 珪素製造用反応装置及び方法 | |
| US3781152A (en) | Apparatus for precipitating a layer of semiconductor material from a gaseous compound of the semiconductor material | |
| JP2953744B2 (ja) | 熱処理装置 | |
| US1763229A (en) | Apparatus for the treatment of gases at high temperatures | |
| JP2503077B2 (ja) | 電気ヒ―タ及びそれを用いた加熱方法 | |
| JPH01150096A (ja) | 保温機能を有する導管 | |
| US3970768A (en) | Grid electrodes | |
| JPH0454225Y2 (enEXAMPLES) | ||
| JPH04318923A (ja) | 加熱装置 | |
| JP2001357964A (ja) | 複層セラミックスヒーター | |
| JPH0554690B2 (enEXAMPLES) | ||
| JPS60200895A (ja) | 分子線結晶成長装置の噴出セル構造 | |
| JPH04155822A (ja) | 熱処理装置 | |
| JPH01154487A (ja) | 導管加熱用の保温管 | |
| JPH0545056B2 (enEXAMPLES) | ||
| JP2573102B2 (ja) | 加熱炉の炉壁 | |
| TWI751791B (zh) | 固態加熱器以及製造方法 | |
| CN218329294U (zh) | 一种加热炉和半导体设备 | |
| JPS6113551Y2 (enEXAMPLES) |