JPS63272981A - Scroll pump - Google Patents

Abstract

PURPOSE:To improve working accuracy in the surfaces of a scroll blade and a holder and thus the efficiency of a pump while facilitating the exchange of scroll blade, by fitting the separately formed scroll blade in a scroll groove provided in the holder to constitute a scroll pump. CONSTITUTION:Both side covers 2, 3 fixed to a main body 1 by bolts 4 support an eccentric shaft 7 through respective bearings 5, 6. Then, a holder 9 divided and formed for example is secure fixedly by bolts 10 to a shaft guide 8 journalled by the eccentric portion of eccentric shaft 7. And while a scroll groove 11 is worked in the holder 9, it is fitted to a scroll blade 12. Then, the scroll blade 12 is formed by bending a sheet metal for example. Also, the scroll blade 12 or holder 9 may be formed of a blank mainly containing Ti alloy for example. Further, the scroll blade 12 or holder 9 may be formed for example by wire cut elecrospark machining.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to a scroll pump having separately processed spiral blades.

[Conventional technology]

When a scroll pump has two spiral blades (scrolls), one fixed side spiral blade and the other movable side spiral blade contact and are driven eccentrically, a crescent-shaped part surrounded by the contact part is formed. The compression space becomes smaller continuously from the outside to the inside to compress the fluid. The spiral blades of this scroll pump are integrated with a holder provided with the spiral blades, and are finished by cutting, grinding, or the like.

[Problem that the invention seeks to solve]

In a scroll pump, the spiral blades on the fixed side and the spiral blades on the movable side are in contact and slide to reduce the compression space and compress the fluid, so there are linear cutting marks on the contact surface between the two. If there are grinding marks, undulations, or a curved part at the base of the holder, the fluid will return from there and the efficiency of the pump will deteriorate. Also, since the two spiral blades are in elastic contact with each other to maintain airtightness,
They are designed to be thin and have elasticity, but when such thin and elastic coiled blades are processed by milling or grinding, the material is damaged during processing due to cutting and grinding resistance. Due to the bending of the apricot feathers, advanced techniques and equipment were required to finish the thin apricot feathers.

In addition, since the spiral blade and its holder are integrally formed, even if the contact surface of the spiral blade wears out, other parts can still be used. The pump has the disadvantage of having to be disposed of, and the object of the present invention is to provide a scroll pump that eliminates these disadvantages.

[Means for solving problems]

Therefore, this invention combines a fixed side spiral blade and a movable side spiral blade, and by rotating and swinging the movable side spiral blade, the contact line of the two spiral blades is moved one after another. The winding blade of a scroll pump that sucks and discharges fluid while pressurizing or depressurizing it is formed by bending or molding a plate-shaped material, or processed by electric discharge machining or wire cut electric discharge machining. . Furthermore, the surfaces of the holder and the spiral blade are provided with surfaces with minute irregularities, and the irregularities are each independent, and a coating layer having irregularities of about 5 μm is melted and hardened using fluid, electric discharge, radar, etc. I decided to set it up.

In the case of wire-cut electrical discharge machining, multiple spiral blades are machined at once within the range where wire electrodes can be installed.
Later, it is cut perpendicular to the axis and separated for use. In this way, a holder with a spiral groove for attaching the spiral blade to which the spiral blade is individually formed is not only formed integrally but also divided into left and right parts to form a divided holder, and the spiral blade is formed in the spiral groove of this divided holder. Once the blade is inserted, the spiral blade and the divided holder are integrated by tightening them with bolts.

In addition, in order to obtain a lightweight, corrosion-resistant, and strong scroll pump, the pump body as well as the spiral blades are molded using conductive synthetic resin, conductive fiber-reinforced synthetic resin (FRP), or ceramics. 7i or Ti-containing A7 alloy, etc., and a wear-resistant hardened layer is provided on the surfaces of the spiral blade, holder, split holder, etc., especially on the sliding surface. A part of the wear-resistant hardened layer is finally finished by wire-cut electrical discharge machining. Its wear-resistant hardened layer is gold f! ! A layer can be obtained by electroforming, welding, etc.
I 203, W CN Ti N -B N, etc., a layer of synthetic resin containing particles with a size of 3μ or less, or a spiral blade made of an alloy containing Ti, such as A/Ti-(iV4). It is obtained by nitriding, carbonizing, boriding the surface of Ti 1 Ti N, or by ion-blating Ti 1 Ti N.

The surface of the spiral blade formed in this way can be formed using wire-cut electric discharge machining or die-sinking electric discharge machining to form a finely uneven surface. A microscopically uneven surface is formed by micro welding, micro welding, etc.

[Effect]

The surface of the spiral blade is made of independent minute irregularities that can be obtained by electric discharge machining, and the fluid flow path is narrowed and compressed.
By creating a labyrinth effect by expanding and sealing, there is no leakage from linear traces associated with conventional cutting and grinding, and there is also less cutting resistance and grinding resistance due to electric discharge machining. It can be processed without bending. This finely uneven surface can also reduce the coefficient of friction, and when a hardened layer such as a TiN layer is applied to the surface, the FJ coefficient becomes even smaller, improving efficiency by approximately 1.6 times compared to conventional scroll pumps. did.

In particular, materials made mainly of 7i alloy have improved corrosion resistance against water, seawater, or gas.

In addition, by manufacturing the spiral blade by wire-cut electrical discharge machining, etc., and removably fixing it to the holder or split holder, it is possible to improve the machining accuracy in areas that require airtightness such as corners and end faces. When the spiral blade becomes worn out, it can be continued to be used by replacing only that spiral blade.

〔Example〕

The present invention will be explained based on the drawings illustrating the invention. Figure 1 shows
FIG. 2 is a sectional view of the scroll pump of this invention.
It is an AA sectional view of the figure. A right cover 2 and a left cover 3 are fixed to the main body 1 with bolts 4, and an eccentric shaft is attached to a bearing 5°6 mounted on the right cover 2 and left cover 3.
7 is rotatably supported. A shaft guide 8 is rotatably supported on the eccentric shaft portion of the eccentric shaft 7, and a holder (not shown) formed integrally with the shaft guide 8 or a divided small holder 9 is fixed with a bolt 10. Then, the four thin blades 12 on the movable side, which are also formed in an involute shape, are fitted into the spiral flll formed in an involute shape provided on the divided holder 9, and the divided J holder 9 is connected with the pole (.13). The thick shaft portion of the eccentric shaft 14 is rotatably supported on the left cover 3, and the thin shaft portion 14 having the same eccentricity as the eccentric shaft 7 is connected to the shaft guide 8. Although not shown, three eccentric shafts 14 are provided on the left cover 3.

On the other hand, the spiral blade 17 on the fixed side is fitted into the spiral blade 16 provided on the split holder 15, and the split holder 1 is fitted with the bolt 18.
5 is combined with the spiral blade 17, and this divided holder 15 is fixed to the right cover 2 with bolts 19. FIG. 3 shows the spiral blade 12, and FIG. 4 shows the divided holder 9. A hole 20 is provided in the center of the split holder 15, and a discharge port 22 is inserted through the hole 21 of the right cover 2.
communicate with. 23 is an inlet.

Therefore, as shown in Fig. 5, the spiral blade 12.17
is pulled out from the raw sheet metal coil 25 by pinch rows 526°27. And a pair of rollers 28°29,
The bending roller 30 is moved back and forth toward the rollers 28 and 29 by a numerical control device (not shown) to form an involute shape. Its shape can be a variable volume type in which the space volume of a crescent moon shape formed by combining the spiral blades 12, 17 is different, or it can be processed and formed into a constant volume type with equal space volumes. The spiral blades 12, 17 thus formed are fitted into the holder 11, as shown in FIG. 6(C), and fixed with adhesive or the like. Therefore, as shown in Fig. 6(a), there is no curved part R of the root remaining during cutting, and as shown in Fig. 6(b), there is no curved part R of the root remaining during cutting. If undulations 1 are formed due to wear etc., use spiral blade 1.
2. Remove 17 from groove 11 and replace.

When the eccentric shaft 7 is rotated by a motor (not shown), the shaft 1
The shaft guide 8, which is pivotally supported by the shaft guide 8, is eccentrically driven without being rotated by the eccentric shaft 14. Then, as shown in Fig. 2, the fluid sucked in from the suction port 23 is sealed in the crescent-shaped compression spaces a, b, and c created by the contact between the spiral blades 12 and 17, and the fluid is moved inward from the outside. It becomes smaller continuously from a → b → C and compresses the fluid.

The compressed fluid passes through the hole 20 and the groove 21 to the discharge port 2.
It acts to discharge from 2.

The spiral blades 12 and 17 of this scroll pump as well as the main body 1, right cover 2, left cover 3, etc. are made of lightweight, chemical-resistant, conductive synthetic resin, and conductive 1411 reinforced resin (FRP). Alternatively, the material may be ceramics, metal, graphite, etc. alone or in a mixture and bonded with resin. This material is used in addition to pumps! l1 body, mechanical strength and heat resistance (30
It can be used in places where special characteristics such as corrosion resistance, abrasion resistance, and scratch resistance (approximately 0°C) are required. Generally, resins with high heat resistance are used, such as phenol that can withstand temperatures of 250°C and 260°C.
Polycarbonate for ℃, polyphenylene (PF) for 300℃, polyphenylene sulfide (PPS) for 400℃, polyphenylene oxide for candy for 500℃, polybenzimidazole for 600℃ Resins such as polyimide and polyimide can be used. Other PBT, PPO, PET, PEK, etc.
EK (polyneedle, ether ketone) series, and even ultra-high polymers 1) E series, PEI, imide series, etc., and Cu, A,
f! , 5teal, and further contains aluminum hydroxide, magnesium hydroxide, fiber, carbon fiber, metal fiber, etc., approximately 50 to 80% by volume, and the mixing ratio is selected to control thermal conductivity. It is something. For example, mix molding with 70% Cu #200 and polyimide resin, 51n at 220℃, 9f at 250
/cm2 The thermal conductivity is 1/6 that of copper.
Met. The tensile strength is 22ks/mm2, and the blade used for the scroll pump is 7ks/c112.
High pressure pumps were available. Incidentally, imide resin alone has poor thermal conductivity and is therefore not practical as a pump. This material can also be effectively used as a fluid pump in addition to a scroll pump. If a permanent magnetic material is mixed into the resin, it is not possible to control the flow rate by magnetizing it and determining the flow rate based on the rotation speed.

Ceramics are Si C, Zr C, Zr Si, Z
r5iz, S! 3ZiW are used, 0.1 to 10μ
The size of the layer is about φ and the VO is about 170%.

This material is stable against water, oil, etc., and has a low specific gravity. TiC5TiN to further improve processability
etc. are mixed and used to enable electrical processing.

Br, stainless steel, and MO are used as metals, graphite is also mixed, and MO82, W28, etc. are also mixed. Keramix-based materials can be used for scroll pumps, but they are mainly used for roots-type or piston-type pumps, and can also be used for turbo-type pumps.

Metal-based materials are mainly used for liquid pumps.

Compared to conventional materials, the materials described above have a lower specific gravity, so there is less vibration, and they are soundproof, so they are quieter. or,
Since the gap between the movable body and the fixed side can be narrowed, the efficiency is improved by about 150 to 200%, and the rust resistance is great. Further, to describe a specific example, one of them is a spiral blade 12.17 formed by casting an epoxy resin containing 60% graphite fibers, with an error of 0.
After finishing with 3IIIllP once, it is washed with water and then degreased with a 10% Na01-1 degreasing solution. This degreased spiral blade 12.17 was further added to 3.5% H (,
l! After pickling with pickling solution, wash with water and dry. Subsequently, 5nc) 21H/ノ and HC720~50
9#17) Apply a sensitive liquid with the same composition to activate 3N to coat it on the surface of the spiral blade 12°17, and lightly rinse with water. An activating solution of Pd C1z 0.5G/N and P113-4 PH adjuster HC is heated to 50°C in a heating layer and supplied, and Sn is replaced with PC+ for the next chemical plating treatment. At this time, a substance that will become the core of plating is deposited on the surface of the spiral blades 12 and 17. After washing with water, the spiral blade 12.17 was completely dried in a drying room, and then chemically plated to a thickness of 0.3μ, and then electroformed to a thickness of approximately 2μ.
A layer of 11IIIN Ni was deposited over approximately 74R.

The spiral blade 12.17 was formed into an involute shape by wire cutting and electrical discharge machining of the Ni layer, and the surface roughness was 3μRma.
Perform finishing processing to the extent of x.

In this way, a wear-resistant hardened layer is formed by electroforming onto the surface of the epoxy resin, or the entire surface of the epoxy resin is coated with particles of 3μ or less, such as A-203, WC, TtN, FAN, or TiC. It can also be obtained by molding with 15% of particles mixed in, or by applying a metal layer of gold 111M, phosphor bronze, stainless steel, etc. containing these particles using a well-known thermal spraying device, and then applying wire-cut discharge to the layer. Finishing can also be done through processing.

In addition, by simply adhering a rolled plate of phosphor bronze, stainless steel, or Ti to the surface of the spiral blade 12.17, a wear-resistant hardened layer can be formed, and it can be used as is, but the surface It can be further hardened by ion blating to improve wear resistance.

Next, we will use alloys containing Ti, which can be used on many sliding surfaces, and create wear-resistant hardened layers by nitriding, carbonizing, or boriding the surface, or by ion-blating the Ti. Next, a case will be described in which a wear-resistant hardened layer is obtained by ion-blating TiN. Ti based on aluminum
When using an alloy containing nitrided surface, generally T
Hardening is large in materials containing 0.1% or more of i by weight; therefore, in this case, N (nitrogen) is 0.025% by weight.
This means that the above is valid. Practically speaking, Ti-6AI-4V is based on Ti-A.
Or, FeTi0,1 or Ar2 with Ti from 12% to 1
A material containing 8% Ti or TiN was used that could be used to directly form a layer of Ti or TiN.

A wear-resistant hardened layer is formed by nitriding the surface of the swirling valley blade 12.17, which is made of Ti-containing alloy, for example, Ti-6A No 4V, and machined into a swirling valley shape by wire-cut electrical discharge machining using gas. (In the case of J, the processed convoluted root 12.17 is placed in a vacuum container (not shown) and treated with air.
Gas and t1e, f-1z or Ar gas are sealed. Then, by using the vortices IIJ 12 and 17 as cathodes, facing the Ta, Ti, Mo, or W plates and using them as anodes, and connecting both to a DC power source of about 1000 V, the vortices can be fixed. N atoms gather on the surface of 12.17, and a nitrided layer, which is a wear-resistant hardened layer, is obtained there. When obtaining a carbonized layer using a similar device, CH4, C21-1s
, ' 03 To 13 gas is enclosed, and C therein participates in carbonization to obtain a boride layer (BC).
By enclosing 3 and 112, B becomes a convoluted root 1
The surface of 2.17 can be borated to form a wear-resistant hardened layer of 1q.

As is well known, ion plating is a combined technology of vacuum evaporation and plasma, and compared to electroplating, vacuum evaporation, and sputtering, it is capable of producing a dense layer with a uniform thickness without pinholes or blisters. It is possible. When obtaining a wear-resistant hardened layer of T1 or TiN using this ion blating, a tungsten filament, etc. in a container (not shown) is heated using a resistance heating method, a high vacuum electron beam method, and a hollow cathode discharge. The metal T1 or TiN is evaporated using an evaporator using a plasma electron beam method or the like, and the evaporation is performed using 5 to 25 IllToR of gas in a container, argon for Ti, and N2 or NH3 for TiN. The process is carried out in an atmosphere sealed at a pressure of 12.17.
When a high negative voltage of oov to 15,000 cm is applied, glow discharge persists around the thin root 12.17, creating a dark space surrounding the spiral root 12.17.

On the other hand, the Ti or TiN metal atoms evaporated in the evaporator repeatedly collide several times with argon, N2, or NH3 gas molecules sealed in the container, and then are accelerated in the dark space and form a spiral root 12. 17, metal atoms of Ti or TiN wrap around and accumulate even in positions where the spiral root 12.17 does not face the evaporator due to the gas scattering effect, resulting in a wear-resistant layer with a uniform thickness. It is possible to obtain a hardened layer with high properties. Further, the surface of the convoluted root 12.17 was coated with crystals forming minute irregularities of a cemented carbide such as WC-CO, which is also a wear-resistant material, to a thickness of about 10 μm by micro-welding. This micro welding process is performed, for example, in Japanese Patent Application Laid-Open No. 58-191
, 2γ4, etc., using the discharge coating method, W
While rotating the electrode C at 15ORPM, 400H7
Contact and release the surface of the root 12.17 in the spiral condition, during which the current value 1 p = 80 A, ton 40 u seconds, ro
A pulse current of ff 40 μsec was applied to weld the WC with minute irregularities. When a micro-welded scroll pump with a spiral root 12.17 of 100 mIllφ is rotated at 90 ORP M, the pressure is 3? /cm2 pressure fluid can be obtained, and the temperature rise of the scroll pump when operated for 1 hour is 12
It was ℃. On the other hand, when machined and formed using an MC (machining center) and using a scroll pump that does not have minute irregularities, the fluid pressure is 2.8 ks/cm.
Similarly, the humidity increased by 15 degrees Celsius when exposed to air for one hour. As shown in FIG. 5, the minute irregularities are formed by forming a concave part 26 and a convex part 21 between the movable part 24 and the fixed part 25, which face each other, to narrow the fluid flow path and seal it by compressing or expanding it. As in obtaining labyrinth fruits, vortex-like roots 12.17
A fine recess 28 and a convex portion 29 are provided on the top and the like. Further, the sealing effect can be further increased by changing the size of the minute irregularities 28 and 29 sequentially or periodically as shown in FIG. The convoluted root 12.17 having such minute irregularities 28.29 can be formed not only by shot blasting, lint blasting, laser machining, micro welding, etc., but also by wire cut electric discharge machining, die-sinking electric discharge machining, etc. It can be directly machined with high precision, and it can also be firmly attached to the convoluted root 12.degree. 17 formed using a mold produced by wire-cut electric discharge machining or die-sinking electric discharge machining.

〔Effect of the invention〕

The present invention separates the spiral-shaped root and the holder, further divides the holder to form a divided holder, and integrally connects the spiral-shaped root formed by bending sheet metal between the two. is now replaceable. Then, the spiral shape root can be processed by wire-cut electrical discharge machining to process multiple pieces at once from the material that has been heat-treated such as quenching, and can be divided and used, and only up to the b end face. We were able to create a surface with independent micro-asperities that creates a labyrinth effect by narrowing the fluid flow path and creating a seal by compressing or expanding it. It was also possible to prevent fluid from leaking from the pump, thereby improving the efficiency of the scroll pump.

Various materials have been invented and used depending on the purpose.For example, when using Ti-based materials for pumps used for water, seawater, and corrosion-resistant gases, in addition to the above-mentioned materials, Ti-based materials can be used in nitrogen plasma. A TiC surface can be formed as a sliding surface in TiN or carbon.

Pure Ti material is used for medical purposes.

Here, graphite is also referred to as a ceramic, and among these ceramics, conductive materials such as borides, carbides, nitrides, and oxides are used. Furthermore, metal fibers and carbon fibers could also be used as composite materials. Ti 4%, 5i
When a scroll pump was manufactured by wire-cut electrical discharge machining of a mixed sintered material of 20% C, 35% TiN, and 35% Y2O, and formed from a plate, the drive shaft was manufactured using SiC.1
It could be used as a solution pump for CU at 050°C.

A scroll pump manufactured by wire-cut electric discharge machining using graphite sintered material (porosity 1.1%) at 2600°C could be used as a pump for a solder bath at 460°C (sintering was used for forming). (It also includes those molded by casting, forging Ti, etc.)

[Brief explanation of drawings]

Fig. 1 is a cross-sectional view of the present invention, Fig. 2 is a cross-sectional view taken along line A-A in Fig. 1, Fig. 3 is a perspective view of a spiral root, Fig. 4 is a perspective view of a split holder, and Fig. 5. The manufacturing drawing of the spiral-shaped root, Fig. 6 is a partial sectional view of the holder with the spiral-shaped root installed, and Figs. 7 and 8.
9A and 9B are diagrams for explaining minute irregularities. 1...Body 2...Right cover 3...Left cover 9.15...Divided holder 12 .17...
.....Patent application for the eddy condition Root Representative: Inoue Japax Laboratory Co., Ltd. Kiyoshi I F. 1 Figure 75 Figure O 6 (a) (b) (C) 77th procedure Nerli , jE writing (spontaneous) 1
, Indication of the case 1986 Patent Application No. 282,804M2, Name of the invention Scroll Pump 3, Person making the amendment Relationship to the case Patent applicant Address 5289-4 Michisho, Nagatsuta-cho, Midori-ku, Yokohama-shi, Kanagawa Prefecture, Amendment Subject of the full text and drawings column 5, content of amendments (1) Amend the details as shown in the attached sheet (2)
) Figures 4 and 6 are corrected as shown in the attached sheet, and Figures 10 and 11 are added. -″ゝ・14.ri,
fart . End of tears] Kishi ■RJ 1. Name of the invention Scroll pump 2. Claims (1) Combining the fixed-side spiral-shaped root and the movable-side spiral-shaped root to orbitally swing the movable-side spiral-shaped root. In a scroll pump that moves the contact line of two spiral roots one after another and sucks and discharges fluid while pressurizing or depressurizing the fluid, the spiral roots are fitted with a separately formed spiral root. A scroll pump comprising a holder having a spiral groove, and a spiral root fitted into the spiral groove of the holder. (2) The scroll pump according to claim 1, wherein the spiral root is formed by bending a sheet metal. (3) The scroll pump according to claim 1, wherein the swirling mechanism or holder is made of a material mainly composed of a Ti alloy. (4) The scroll pump according to claim 1, wherein the swirling mechanism or holder is made of metal or synthetic resin mixed with graphite. (5) The scroll pump according to claim 1, wherein the vortex state mechanism or the holder contains a magnetic material in order to obtain a signal. (6) The holder is made of ceramics, has a metal bottom,
or graphophyte singly or arbitrarily selected and mixed, bonded with a synthetic resin and molded. Claim 1
Scroll pump as described in section. (7) The scroll pump according to claim 1, wherein the swirling mechanism or holder includes a solid lubricant or the like. (8) The scroll pump according to claim 1, wherein the spiral mechanism is formed by wire-cut electrical discharge machining of the holder and the spiral groove. (9) The scroll pump according to claim 1, wherein the swirling mechanism has a labyrinth effect in which the surface of the holder seals fluid by minute irregularities. 3. Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a scroll pump having a separately processed spiral root. [Prior Art] When a scroll pump has two spiral roots (scrolls), one fixed spiral root and the other movable spiral root come into contact and are driven eccentrically, the scroll pump is surrounded by a contact portion. The crescent-shaped compression space becomes smaller continuously from the outside to the inside, compressing the fluid. The spiral root of this scroll pump is integrated with a holder provided with the spiral root, and is finished by cutting, grinding, etc. [Problems to be Solved by the Invention] In a scroll pump, the spiral root on the fixed side and the spiral root on the movable side are in contact and slide to reduce the compression space and compress the fluid. If there are linear cutting marks or cutting marks on the contact surface between the two, or if there are undulations or a curved part at the root of the connection with the holder, fluid will leak from there and the efficiency as a pump will deteriorate. Also, since the two spiral roots are in elastic contact with each other to maintain airtightness, they are finished thin and have elasticity. When roots are processed by cutting or grinding, the cutting and grinding resistance causes the material to bend during processing, so finishing the spiral-shaped roots required advanced technology and equipment. In addition, since the spiral root and its holder are integrally formed, even if the contact surface of the spiral root wears out, the scroll pump can still be used, even though other parts can be used. However, it is an object of the present invention to provide a scroll pump that eliminates these drawbacks. [Means for Solving the Problems] Accordingly, the present invention combines a fixed-side spiral root and a movable-side spiral root, and rotates and swings the movable-side spiral root to create two spiral roots. The spiral base of a scroll pump, which moves the contact line of the base one after another to suck and discharge fluid while pressurizing or depressurizing it, is formed by bending, molding, or electrical discharge machining of a plate-shaped material. , or processed by wire cut electrical discharge machining. Furthermore, the surface of the holder and the spiral root are provided with a surface with minute irregularities, and each of the irregularities is independent, thereby creating a labyrinth effect that narrows the fluid flow path and seals by compressing or expanding it. Therefore, a coating layer having melted and hardened irregularities of about 5 μm was provided using electric discharge machining, electric discharge, laser, or the like. In the case of wire-cut electric discharge machining, a plurality of spiral roots and holders are machined at once within a range where wire electrodes can be installed, and then cut perpendicularly to the axis, and separated for use. In this way, the spiral root and the holder are processed and formed separately, and the holder with the spiral groove is processed and formed as one piece, or it is divided into left and right parts, and this divided holder is used. In this case, once the spiral root is inserted into the spiral groove, the spiral root and the divided holder are integrated by tightening them with bolts. In addition, in order to obtain a lightweight, corrosion-resistant, and strong scroll pump, the pump body as well as the spiral root are molded using conductive synthetic resin, conductive fiber-reinforced synthetic resin (FRP), or ceramics. It is manufactured using Ti, Ti, or Al alloy containing Ti, and a wear-resistant hardened layer is provided on the surface of the spiral root, the holder, or the divided holder, especially on the sliding surface. A part of the wear-resistant hardened layer is finally finished by wire-cut electrical discharge machining. The wear-resistant hardened layer is made by electroforming, welding, etc.
No. 203, WC, Tt N, BNgg, etc., are layers of synthetic resin containing particles with a size of 3 μ or less,
4! By nitriding, carbonizing, or borating the surface of a spiral root made of an alloy containing Ti, such as ANO T1-6V4, or by ion plating Ti or TiN. It's another thing. The surface of the spiral root formed in this way and the end face of the boulder can be formed using wire-cut electrical discharge machining or die-sinking electrical discharge machining to provide minute irregularities. The micro-irregular surface is formed by machining, rede machining, micro welding machining, etc. [Operation] The surface of the spiral root and the end face of the holder are processed by electrical discharge machining (
The design is independent of minute irregularities that allow the fluid to expand, and creates a labyrinth effect that narrows the fluid flow path and creates a seal by compressing or expanding it, making it possible to eliminate the conventional cutting process.
There is no leakage from linear traces associated with grinding, and electric discharge machining can be performed without bending due to cutting resistance or grinding resistance. This finely uneven surface can also reduce the coefficient of friction, and when a hardened layer such as a TiN layer is applied to the surface, the coefficient of friction becomes even smaller, improving efficiency by approximately 1.6 times compared to conventional scroll pumps. . In particular, those made mainly of °1 alloy have improved corrosion resistance against water, seawater, or gas.In addition, a spiral shaped root can be manufactured by wire-cut electrical discharge machining, etc., and it can be attached to and removed from a holder or a divided holder. By being fixed, it is possible to improve the precision of processing in areas that require airtightness such as corners and end faces, and when the spiral shape root is worn out, it can be continued to be used by replacing only the spiral shape root. [Example] This invention will be explained based on the drawings illustrating the invention. Figs. 1 and 10 are sectional views of scroll pumps according to different embodiments of the invention, and Figs. 2 and 11 are sectional views showing different embodiments of the scroll pump. 1 and 10, and the same components are given the same reference numerals. A right cover 2 and a left cover 3 are fixed to the main body 1 with bolts 4, Bearings 5 attached to the right cover 2 and left cover 3
．． An eccentric shaft 7 is rotatably supported by the shaft 6 . A shaft guide 8 is rotatably supported on the eccentric shaft portion of the eccentric shaft 7, and the shaft guide 8 has a holder 9' integrally formed therein as shown in FIG. 10 and FIG. 4(b).
Alternatively, the divided holder 9 shown in FIGS. 1 and 4(a) is fixed with bolts 10, and this integrated holder 9'
In the split holder 9, an involute spiral groove consisting of a concave groove 11 and a through hole r1411' is machined by wire cut electric discharge machining, die-sinking electric discharge machining, or cutting. It is constructed by fitting a spiral root 12 formed in an involute shape into 11' and bonding or welding it. In addition, the divided holder 9
By connecting with bolts 13, the spiral root 12
A holder 9 integrally formed with the other and integrally formed with the other.
In the case of ', the spiral roots 12 inserted into n spiral grooves 11' are fixed by adhesive or welding to form an integral structure. A thick shaft portion of an eccentric shaft 14 is rotatably supported on the left cover 3, and a thin shaft portion 14' having the same eccentricity as the eccentric shaft 7 is rotatably inserted into the shaft guide 8. Although not shown, the eccentric shafts 14 are provided at three locations on the left cover 3. On the other hand, the other holders 15 and 15' are formed with concave grooves 1111B and through grooves 16' by wire cut electric discharge machining, die-sinking electric discharge machining, or cutting, and these spiral grooves 16 and 16' The fixed side convoluted root 17 is fitted and inserted, and then glued or welded.
In the case of a divided holder 15, it is necessary to connect them with bolts 18. However, in any case, this holder 15
and 15' are fixed to the right cover 2 with bolts 19. FIG. 3 shows the spiral root 12, and FIG. 4(a) shows the divided holder 9, and FIG. 4(b) shows the holder 9' formed integrally. A hole 20 is provided in the center of the holder 15, 15' and communicates with the outlet 22 through a groove 21 in the right cover 2. 23 is an inlet. Therefore, as shown in Figure 5, the eddy root 12.17
is pulled out from the raw sheet metal coil 25 by pinch rollers 26 and 27. And a pair of rollers 28°29,
Part 1"-528, 29 is processed and formed into an involute shape by a bending roller 30 that is moved back and forth by a numerical control device (not shown). Its shape can be a variable volume type with different crescent-shaped space volumes formed by combining the spiral roots 12 and 17, or a constant volume type with equal space volumes. The spiral root 12.17 formed in this way is shown in Fig. 6 (c) (d
) in the spiral groove 11.11' of the holder.
Fit, fit, and secure with adhesive, etc. Therefore, as shown in Fig. 6(a), there is no root curve R in the remaining part during cutting, and as shown in Fig. 6(b), when an undulation 1'' is formed due to wear etc. Remove the roots 12.17 from the spiral grooves 11°11' and 16.16' and replace them. When the eccentric shaft 7 is rotated by a motor (not shown), the shaft 7
The shaft guide 8, which is pivotally supported by the shaft guide 8, is eccentrically driven by the eccentric shaft 14 without rotating. Then, as shown in Fig. 2, the fluid inhaled from the suction port 23 is sealed in the crescent-shaped compression spaces a, b, and c created by the contact between the spiral roots 12 and 17, and the fluid is drawn inward from the outside. It becomes smaller continuously from a to b-+c and compresses the fluid. The compressed fluid passes through the hole 20 and the groove 21 to the discharge port 2.
It acts to discharge from 2. This scroll pump spiral condition root 12.17 holder 9
．． 9', 15.15', main body 1, right cover 2
, the left cover 3 is made of lightweight, chemical-resistant, conductive synthetic resin, conductive fiber-reinforced resin (FRP), or made of ceramics, metal, graphite, etc. alone or in combination. The material is made by bonding with resin. This material is used for sliding bodies used in pumps, mechanical strength, heat resistance (approximately 300℃), corrosion resistance, abrasion resistance, and abrasion resistance.
! It can be used where properties such as abrasion resistance are required. Therefore, resins with high heat resistance are generally used, such as phenol that can withstand temperatures of 250°C, polycarbonate that can withstand temperatures of 260°C, polyphenylene (PF) that can withstand temperatures of 300°C, and resins that can withstand temperatures of 400°C.
For, the borifenirensphid (r'Ps), 5
For 00℃, polyphenylene, 1↑side, 60
For temperatures of 0° C., resins such as polybenzimidazole and polyimide can be used. Other PBT, PPO
, PET, P[:EK, or PEEK (polyether, ether ketone), and even ultra-high molecular weight PE, PE
Select the mixing rate by mixing I, imide, etc., Ctl, A, 5teal, and furthermore, aluminum hydroxide, magnesium hydroxide, fiber, carbon fiber, metal fiber, etc. at a volume ratio of about 50 to 80%. This is done to control thermal conductivity. For example, if 70% of CU #200 is mixed and molded with polyimide resin, 22%
The thermal conductivity was 1/6 that of copper when carried out at 0° C. and under a pressure of 5 akin 1250 ksf /cm 2 . It had a tensile strength of 22 to 9/mm2, and when used in a scroll pump, it could be used as a high pressure pump of 7 kt/cm2. Incidentally, imide resin alone has poor thermal conductivity and is therefore not practical as a pump. In addition, this material can be effectively used in fluid pumps as well as scroll pumps. If permanent magnetic material is mixed into the resin,
It can be controlled so that the flow rate is determined by magnetization and the number of rotations. Ceramics are Si C, Zr C, Zr St, Z
r Si 2 , Sf 3 Z4, etc. are used, 0.
It is used with a size of about 1 to 10 μmφ and a VO of about 170%. This material is stable against water, oil, etc., and has the effect of having a low specific gravity. ■I C1T to further improve workability
iN? 17 are mixed and used for electrical processing. The metal used is Qr, stainless steel, or MO. Graphite is also mixed in, and MOS2, Wz8, etc. are also mixed in. Ceramic materials can be used for scroll pumps, but they are mainly used for roots-type or piston-type pumps, and can also be used for turbo-type pumps. Metal-based materials are mainly used for liquid pumps. Compared to conventional materials, the materials described above have a lower specific gravity, so there is less vibration, and they are soundproof, so they are quieter. or,
Since the gap between the movable body and the fixed side can be narrowed, the efficiency is improved by about 150 to 200%, and there are other effects such as greater rust resistance. Further, to explain concrete examples, one of them is a convoluted root 12.11 formed by casting an epoxy resin containing 60% graphite mH, with an error of 0.
After finishing at around 3mm, wash with water, then 10%
NaO! -1 Degrease with degreasing solution. The degreased spiral roots 12.17 were further pickled with a 3.5% 1-IC pickling solution, washed with water, and dried. Subsequently, a sensitive solution having a composition of SnC 2109/n and HC 20~509/n is supplied to transform Sn into eddy roots 1.
Apply activation treatment to the surface of 2゜17 and wash lightly with water. Next, an activating solution of PdCJ20.5G/N and PH3~4 Pl + adjuster 1''C is heated to 50℃ in a heating layer and supplied, and 5N is replaced with Pd for the next chemical plating. 12. During processing, the material that will become the core of the plating is removed from the eddy root.12.
17. And after washing with water, the roots are in a eddy state 12
．． After completely drying 17 in a drying room, chemical plating is applied to 06
A 3μ thick plating was applied, followed by electroforming to deposit a Ni layer of about 2mm over a period of about 74 hours. The Ni layer was wire-cut into an involute shape with a roughness of 3μRma.
Perform finishing processing to the extent of x. - In addition to obtaining a wear-resistant hardened layer by electroforming as described above, Alz O3, WC, Ti can be applied to the surface portion or the entire surface of the epoxy resin to be cast.
It can also be obtained by mixing N, BN, etc. particles with a size of 3μ or less, or TiC particles at 15% and molding, or a metal layer containing these particles or a metal layer of phosphor bronze, stainless steel, etc. It is also possible to apply the layer by a well-known thermal spraying device and finish the layer by wire-cut electrical discharge machining. In addition, by simply adhering a rolled plate of phosphor bronze, stainless steel, or Ti to the surface of the convoluted root 12.17, a wear-resistant hardened layer can be formed, and it can be used as is, but the surface can be further hardened by ion plating, which will be described later, to improve wear resistance. Next, use an alloy containing T1, which can be used for many sliding surfaces, and obtain a wear-resistant hardened layer by nitriding, carbonizing, or boriding the surface, or by ion-blating Ti. A hardened layer with wear resistance is obtained by ion-blating TiN. When using an aluminum-based alloy containing Ti with its surface nitrided, generally T1
Materials containing N (nitrogen) in a weight ratio of 0.1% or more have a high degree of hardening. Therefore, in this case, it is effective to use a material containing N (nitrogen) in a weight ratio of 0.025% or more. Practically speaking, Ti-6 Panor 4V based on Ti-A, Fe7i0,1, AI! Ti from 12% to 18
%, which allows a Ti or TiN layer to be directly formed on the material. By using an alloy containing Ti, for example, Ti-6A no 4V, as a material, the surface of the spiral root 12.17 machined into a spiral shape by wire-cut electric discharge machining is nitrided to provide resistance to I? When obtaining an abrasive hardened layer using gas, the processed convoluted root 12.17 was placed in a vacuum container (not shown) to remove air and exhaust oxygen, and N2 was added to the stand.
Gas and He, Hz or Δr gas are sealed. Then, with the spiral root 12.17 as the cathode, Ta, T
By placing Mo or W plates facing each other, using them as anodes, and connecting both to a DC power source of about 1000V,
N atoms gather on the surface of the spiral roots 12.17, and a nitrided layer, which is a hardened layer with a wear resistance of 1', is obtained there. When obtaining a carbonized layer using a similar device, CH4, Cz Hs,
By enclosing O3-H3 gas, the C in it participates in carbonization, and when obtaining a boride layer, BC73 and 1
By enclosing ``2'', 8 becomes a convoluted root 12.1
A wear-resistant hardened layer can be obtained by boriding the surface of 7. As is well known, ion blating is a combined technology of vacuum evaporation and plasma, and compared to electroplating, vacuum evaporation, and sputtering, it is capable of producing a dense layer with a uniform thickness without pinholes or blisters. It is possible. When using this ion brating to create a wear-resistant hardened layer of iN, heat a tungsten filament, etc. in a container (not shown) using a resistance heating method or a high-vacuum electron beam. Fi1 or Ti
The evaporation of N metal is carried out in an atmosphere in which argon for Ti and N2 or N1]3 gas for TIN are sealed in a container at a pressure of 5 to 25 mTorr. When a negative high voltage of -500V to -5000V is applied to the spiral root 12.17 installed in this container at a position opposite to the evaporator, a glow discharge is generated around the spiral root 12.17. sustain,
A dark space is created surrounding the spiral root 12°17. On the other hand, the Ti or TiN metal atoms evaporated in the evaporator are evaporated into argon, N2 or N H3 sealed in a container midway.
After repeated collisions with several gas molecules, it is accelerated in dark space and reaches the vortex state root 12.17.
Under the gas scattering effect, metal atoms of T1 or TiN wrap around and accumulate even in places where the spiral root 12.17 is not in the evaporator, thereby obtaining a wear-resistant hardened layer with a uniform thickness. be able to. In addition, the surface of the convoluted root 12.17 was coated with crystals with a thickness of about 10 .mu.m, which were made of cemented carbide, which is also a wear-resistant material, such as WC-Co, by micro-welding. This micro welding process is, for example, published in Japanese Unexamined Patent Publication No. 58
-Using the discharge coating method disclosed in Publication No. 197,274, etc., while rotating the WC electrode at 15 ORPM,
At 00112, the surface of the spiral root 12.17 was contacted and separated, during which the current value 1p = 80A, ron 40 μ
s, z:ofr WC by applying a pulse current of 40 μs
It is welded so that it has minute irregularities. 12. Micro-welded 1001mφ convoluted root 12.
When a scroll pump with 17 is rotated at 90 ORPM, the pressure is 3? /cm2 of pressure fluid could be obtained, and the temperature rise of the scroll pump after operating for 1 hour was 12°C. On the other hand, when the fluid is machined and formed using an MC (machining center) and a scroll pump with no minute irregularities is used, the pressure of the fluid is 2, l1lk?
/CI, the temperature rise when operating for 1 hour is 1
The temperature reached 5℃. As shown in FIG.
7 is provided with minute recesses 28 and protrusions 29 in the convoluted root 12, 17, etc. so as to narrow the fluid flow path and obtain a labyrinth effect of sealing by compression or expansion. be. Furthermore, the sealing effect can be further increased by changing the contours of the fine irregularities 28 and 29 sequentially or periodically as shown in FIG. Eddy root 12 having such minute irregularities 28,29
．． 17 can be directly processed with high precision by shot blasting, sandblasting, laser machining, micro welding, etc., and particularly by wire cut electric discharge machining, die-sinking electric discharge machining, and wire cut electric discharge machining. It can be indirectly provided on the convoluted root 12°17 formed using a die produced by die-sinking electrical discharge machining. [Effects of the Invention] The present invention separates the spiral root and the holder, and furthermore, when the holder is an integrally formed holder or a divided holder, the spiral root formed by bending a sheet metal can be held between the spiral roots. By integrally connecting the spiral roots with
I became Noh. The spiral roots and holders can now be made by machining multiple pieces at once using wire-cut electric discharge machining from materials that have undergone heat treatment such as quenching, and can be used by dividing them. We were able to obtain a surface with independent micro-roughness that creates a labyrinth effect by narrowing the fluid flow path and compressing or expanding it to create a seal, making end face processing easier and In addition to eliminating the curved part R of the root remaining during cutting, it was also possible to prevent fluid from leaking from the end face, improving the efficiency of the scroll pump. Various materials have been invented and used depending on the purpose.For example, when using Ti-based materials for pumps used for water, seawater, and corrosion-resistant gases, in addition to the above-mentioned materials, Ti-based materials can be used in nitrogen plasma. A TiC surface can be formed as a sliding surface in TiN1 carbon. Pure Ti material is used for medical purposes. Graphite is also referred to as a ceramic here, and electrically conductive ceramics such as borides, carbides, nitrides, and even oxides are used. Furthermore, metal fibers and carbon fibers could also be used as composite materials. Ti 4%, 3i
When a scroll pump was manufactured by wire-cut electrical discharge machining of a mixed sintered material of 20% C, 35% 1iN, and 35% Y2O, and formed from a plate, and the drive shaft was manufactured using SiC.1
It could be used as a solution pump for CU at 050°C. graph? A scroll pump fabricated by wire-cut electrical discharge machining using sintered material (porosity 1.1%) at 2600°C could be used as a pump for a solder bath at 460°C (sintering was used for forming). 4. Brief description of the drawings Figure 1 is a cross-sectional view of the present invention, Figure 2 is a cross-sectional view taken along line A-A in Figure 1, Figure 3 is a perspective view of the root in spiral condition, Figure 4 (a)
is a perspective view of the divided holder, FIG. 4(b) is a perspective view of the holder formed integrally, FIG. 5 is a fabrication drawing of the spiral root, and FIGS. 6(a), (b), (c), and (d). FIG. 7, FIG. 8, and FIG. 9 are diagrams for explaining minute irregularities. FIG. 10 is a cross-sectional view of another embodiment of the present invention. FIG. 11 10 is a cross-sectional view taken along line A-A in FIG. 10. 1...Body 2...Right cover 3...Left cover 9.9', 15.15'... ...Holder 1
1, 11', 16. 16' ・・・・・・・・・
... Spiral Groove 12.17 ... Spiral shape root patent applicant Kiyoshi Inoue Representative of Inoue Ji V-Pax Institute Co., Ltd. 6 Figure 10 Figure 11 Procedure amendment Address shown in 1, I'i'i: 15289 Ajido 4, Nagatsuta-cho, Midori-ku, Yokohama-shi, Kanagawa Prefecture Date of amendment order: May 11, 1988 (Date of dispatch: May 24, 1988)
5. Subject of amendment The date of February 23, 1986 is the content of the amendment between procedural amendments.
1. Indication of the case 1986 Patent application No. 282.804 2. Name of the invention Scroll pump 3. Person making the amendment Relationship to the case Patent applicant address Address Michimasa, Nagatsuta-cho, Midori-ku, Yokohama-shi, Kamiyayo Prefecture 5289 Address 4, Subject of amendment Full text of the specification and drawings column 5, Contents of amendment (1) Amend the specification as shown in the attached sheet (2) No. 4
Figures 10 and 11 have been revised as shown in the attached sheet, and Figures 10 and 11 have been added. However, FIG. 3 and FIG. 5 do not require correction, so they are not corrected.

Claims (8)

[Claims] (1) By combining the fixed-side spiral blade and the movable-side spiral blade, the movable-side spiral blade is rotated and oscillated, thereby moving the contact line of the two spiral blades one after another and applying fluid. A scroll pump that suctions and discharges air while applying pressure, decompression, etc. is equipped with a separately formed spiral blade and a holder having a spiral groove into which the spiral blade is fitted, and the spiral blade is inserted into the spiral groove. Scroll pumps that fit together. (2) The scroll pump according to claim 1, wherein the spiral blade is formed by bending a sheet metal. (3) The scroll pump according to claim 1, wherein the spiral blade or the holder is made of a material mainly composed of a Ti alloy. (4) The scroll pump according to claim 1, wherein the spiral blade or the holder is made of metal or synthetic resin mixed with graphite. (5) The scroll pump according to claim 1, wherein the spiral blade or the holder contains a magnetic material in order to obtain a signal. (6) The scroll pump according to claim 1, wherein the spiral blade or the holder is formed by molding ceramics, metal, or graphite singly or arbitrarily selected and mixed together and bonded with a synthetic resin. (7) The scroll pump according to claim 1, wherein the spiral blade or the holder contains a solid lubricant or the like. (8) The scroll pump according to claim 1, wherein the surface of the spiral blade or the holder has a labyrinth effect that seals fluid due to minute irregularities.