JPS63176682A - Pump - Google Patents

Abstract

PURPOSE:To enable accuracy to be obtained, by machining a fitting surface and/or a sliding surface of a part, which is mutually fitted or relatively slided, by grinding, wire cut electric discharge machining, etc. CONSTITUTION:A main unit 1, which forms tapers 1a, 1b to be machined by wire cut electric discharge machining or diesinking electric discharge machining, fits a taper 2a, machined in the periphery of a right cover 2, and a taper 3a, machined in the periphery of a left cover 3, to the tapers 1a, 1b. And the covers 2, 3 are secured in such a manner as to be pressed into the respective tapered parts 1a, 1b of the main unit 1 by the head part of a bolt 4 screwed to the main unit 1. Accordingly, a pump of required accuracy can be manufactured by only its assembly through positioning and obtaining accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a fluid pump machined with high precision by grinding, wire-cut electrical discharge machining, die-sinking electrical discharge machining, or the like.

[Conventional technology]

Pumps that require precision, such as scroll pumps, have two spiral blades (scrolls), one on the fixed side and the other on the movable side, when they come into contact and are driven eccentrically. The crescent-shaped compression space becomes smaller continuously from the outside to the inside, compressing the fluid. Conventionally, this scroll pump has been assembled through processes such as cutting, heat treatment such as hardening, and grinding.

[Problem that the invention seeks to solve]

A scroll pump combines a fixed side spiral blade and a movable side spiral blade, and rotates the movable side spiral blade to move the contact line of the two spiral blades one after another, thereby pumping fluid. This is a pump that sucks and discharges water while pressurizing or depressurizing it.

Therefore, if the relative positional relationship between the fixed side spiral blade and the movable side spiral blade is poor, it is impossible to obtain a contact line that moves one after another, and the pump cannot function as a pump. Even if they are assembled so that a line of contact can be obtained, if there are linear cutting marks, grinding marks, or undulations on the contact surfaces between the two, fluid will leak therefrom and the efficiency of the pump will deteriorate. Also, since the two spiral blades are in elastic contact with each other to maintain airtightness, they are finished thin and have elasticity. When blades are processed by cutting or grinding, the cutting and grinding resistance causes the material to bend during processing, so finishing spiral blades requires advanced technology and equipment.

In addition, since the spiral blade and its holder are integrally formed, the scroll pump may be damaged even if the contact surface of the spiral blade wears out, even though other parts can be used. However, it is an object of the present invention to eliminate these drawbacks and provide a pump in which parts are positioned relative to each other and accuracy can be achieved simply by assembling the pump.

(Means for solving the problem) In fluid pumps, such as scroll pumps, which require precision, the fitting surfaces and sliding parts of parts that fit together or slide relative to each other are The movement is machined by wire-cut electric discharge machining or die-sinking electric discharge machining.Four parts or convex parts are provided on the fitting surface, and the uneven parts are fitted to perform relative positioning and When mated with a taper, the mutual centering of the components can be automatically performed.However, by machining the scroll pump's spiral blades using electric discharge machining or wire cut electric discharge machining, The surface of the spiral blade is a surface with minute irregularities due to discharge traces, and each of the irregularities is independent.

In the case of wire-cut electric discharge machining, a plurality of spiral blades are machined at once within a range where a wire electrode can be installed, and then cut in a direction perpendicular to the axis and separated for use.

Also, a lightweight and strong scroll pump! ? In order to
The pump body as well as the spiral blades are made of conductive synthetic resin.
AJ containing conductive fiber-reinforced synthetic resin (FRP) Ti
Manufactured using gold alloy, the surfaces of spiral blades, holders, etc.
In particular, a wear-resistant hardened layer is provided on the sliding surface. A part of the wear-resistant hardened layer is finally finished by wire-cut electrical discharge machining. The wear-resistant hardened layer may be a metal layer obtained by electroforming, welding, etc., or a synthetic resin layer containing particles of 3μ or less in size such as ΔJ203, WClTiN, BN, etc.
It is obtained by using an alloy containing 1, such as ANOTi-6V4, as a material, and nitriding, carbonizing, borating, etc. the surface of the spiral blade, or by ion-blating Tt, T;N. .

[Effect]

Parts machined by wire-cut electrical discharge machining or die-sinking electrical discharge machining can be machined with an accuracy of 5 μm or less, and the mating surface must be tapered and uneven parts for positioning must be machined on the tapered surface. Since it is possible to align the parts and position them relative to each other simply by assembling them, it is possible to manufacture a pump with high precision in a short time. Using the pump made in this way, a compressor with an efficiency of about 38%, specifically a motor with a specification of
Discharge 1120. I was able to make a d/min compressor.

Furthermore, because the surface of the spiral blade is made independent of minute irregularities that can be obtained by electric discharge machining, there is no leakage from linear traces that are associated with conventional cutting and grinding processes. It can be processed without bending due to resistance or grinding resistance. This finely uneven surface can also reduce the coefficient of friction, and when a hardened layer such as a TiN layer is applied to the surface, the coefficient of friction becomes even smaller, improving efficiency by approximately 1.6 times compared to conventional scroll pumps. . In addition, by manufacturing the spiral blade by wire-cut electric discharge machining or the like and removably fixing it to the holder, it is possible to improve the machining accuracy in areas that require airtightness such as corners and end faces, and the spiral blade can be When it wears out, it can be continued to be used by simply replacing the spiral blade.

〔Example〕

-〇- This invention will be explained based on the illustrative drawings below. FIG. 1 is a sectional view of the scroll pump of the present invention, and FIG. 2 is a sectional view taken along line AA in FIG. Tapers ia and 1b are machined on the main body 1 by wire-cut electrical discharge machining or die-sinking electrical discharge machining, and tapers 2a and 3a machined on the outer periphery of the right cover 2 and left cover 3 are fitted to these tapers, respectively. 1
The head of the bolt 4 screwed into the main body 1 is pushed into each of the tapered portions 1a and 1b to fix the main body 1. An eccentric shaft 7 is rotatably supported by bearings 5 and 6 mounted on the right cover 2 and left cover 3. A shaft guide 8 is rotatably supported on the eccentric shaft portion of the eccentric shaft 7, and a holder 9 is fixed to the shaft guide 8 with a bolt 10. A spiral blade 12 on the flexible side, which is also formed in an involute shape, is fitted into the groove 11 to form an integral structure. A thick shaft portion of an eccentric shaft 14 is rotatably supported on the left cover 3, and a thin shaft portion 14a having the same eccentricity as the eccentric shaft 7 is rotatably inserted into the shaft guide 8. Although not shown, the eccentric shafts 14 are provided at three locations on the left cover 3.

On the other hand, a spiral blade 17 on the fixed side is fitted into a spiral groove 16 provided in the holder 15 and fixed integrally. This holder 1
The outer periphery of 5 is a taper 15a that fits into the taper 1a of the main body 1.
are formed, the two are fitted together, and the holder 15 is pushed with a bolt 18 provided on the right cover 2 and pulled with a bolt 19 to position and fix. As shown in FIG. 4, a recess 15b for positioning is provided on the outer periphery of the holder 15, and is fitted into a recess 1C provided in the main body 1 for positioning.

Similarly, the right cover 2 is fitted into a recess 1C of the main body 1, which is provided with a recess 2b (dotted line in FIG. 1). Further, the left cover 3 is also provided with a positioning protrusion 3b (dotted line portion in FIG. 1), which fits into the recess 1d of the main body 1. The position where each is positioned and fixed in this way is such that the spiral blade 12, which revolves around the eccentric shaft 7 and the eccentric shaft 14, is fixed to the spiral yuzu root 1.
This position is for moving the contact line formed by contacting the pump 7 one after another, so it is an important position that affects the performance of the pump.

FIG. 3 shows the spiral blade 17, and FIG. 4 shows the holder 15 and the convex portion 15a. A hole 20 is provided in the center of the holder 15 and communicates with the discharge port 22 through a groove 21 in the right cover 2. 23 is an inlet.

When the eccentric shaft 7 is rotated by a motor (not shown), the shaft 7
The shaft guide 8, which is pivotally supported by the eccentric shaft 14, is driven eccentrically without being rotated by the eccentric shaft 14. Then, as shown in FIG. 2, the fluid inhaled from the suction port 23 is drawn into the crescent-shaped compression spaces a, b, and c created by the contact between the spiral blades 12 and 17, from the sealed outside to the inside. -+b-+C and its compressed fluid hole 20 which becomes smaller continuously and compresses the fluid.
．． It acts to discharge from the discharge port 22 through the groove 21.

The spiral blades 12 and 17 of this scroll pump, as well as the main body 1, right cover 2, left cover 3, etc., are made of lightweight, chemical-resistant, and conductive synthetic resin or conductive fiber-reinforced resin (F RP'). or an alloy containing Ti -6AJ! -4V or the like, and a wear-resistant hardened layer can be provided on the surface. Now, let us explain further specific examples of the spiral blade 12.17 as a representative example. One of them is the spiral blade 12.17.
A piece formed by casting an epoxy resin containing 60% graphite fiber is finished with an error of about 0.3 mm, washed with water, and then degreased with a 10% Na 0f-1 degreasing solution. This degreased spiral blade 12.17 is further pickled with a 3.5% HC pickling solution, washed with water, and dried. Subsequently, Sn C122109/
ノと1-ICノ20〜509/j! Activation treatment is performed to deposit Sn on the surfaces of the spiral blades j2 and 17 by supplying a sensitive liquid having the composition, followed by light washing with water. Then pd
cJ! An activation solution of 20.5 $/N and a pH adjuster HC with a pH of 3 to 4 was heated to 50°C in a heating tank and supplied.
is replaced with Pd, and a substance that will become the plating core during the next chemical plating process is deposited on the surface of the spiral blade 12.17. After washing with water, the spiral blade 12.17 was completely dried in a drying room, and then chemically plated with a thickness of 0.3μ.
Thereafter, a Ni layer of about 2 mm was electroformed over a period of about 74 hours. The spiral blade 12.17 was formed into an involute shape by wire-cut electrical discharge machining of the Ni layer, and the roughness was 3 μR.
Process to the maximum degree.

In addition to obtaining a wear-resistant hardened layer by electroforming,
A-2 on the surface of the epoxy resin to be cast or on the entire surface.
03. WC, Tt N, BN, etc. particles with a size of 3μ or less,
Alternatively, it can be obtained by mixing 15% TiC particles and molding, or by forming a metal layer containing these particles or a metal layer of phosphor bronze, stainless steel, etc. using a well-known thermal spraying device, and then forming the layer. Finishing can also be done by wire cut electric discharge machining.

In addition, by simply adhering a rolled plate of phosphor bronze, stainless steel, or Ti to the surface of the spiral blade 12.17, a wear-resistant hardened layer can be formed, and it can be used as is, but the surface It can be further hardened by ion blating, which will be described later, and its wear resistance can be improved.

Next, use an alloy containing Ti, which can be used for many sliding surfaces, and obtain a wear-resistant hardened layer by nitriding, carbonizing, or boriding the surface, or ion-blating T1. A hardened layer with wear resistance is obtained by ion-blating TiN. When using an aluminum-based alloy containing Ti with its surface nitrided, generally Ti
Materials containing N (nitrogen) in a weight ratio of 0.1% or more have a high degree of hardening. Therefore, in this case, it is effective to use a material containing N (nitrogen) in a weight ratio of 0.025% or more. Practically speaking, Ti-6 Panor 4V based on Ti-A, FeTi0.1 or A with 12% to 18% Ti.
We decided to use a material that can directly form a layer of Ti or TiN on a material containing .

A wear-resistant hardened layer is formed by nitriding the surface of a spiral blade 12.17 made of an alloy containing Tt, for example, Ti-6Affl-4V, and processed into a spiral shape by wire-cut electric discharge machining using gas. If you want to get
The processed spiral blades 12 and 17 are placed in a vacuum container (not shown), the air is removed, and in place of the exhausted oxygen, N2 gas and I'e, N2 or Ar gas are filled in.

Then, the spiral blade 12.17 is used as a cathode, and T
By placing a, Ti, Mo, or W plates facing each other and using them as anodes, and connecting both to a DC power source of about 1000 V, N atoms gather on the surface of the spiral blade 12.17, and the abrasion resistance increases. A nitrided layer, which is a hardened layer, is obtained. When obtaining a carbonized layer using a similar device, CH4, C2He,
By enclosing C3H5 gas, the C in it
is involved in carbonization to obtain a boride layer, BCC84N2
By enclosing B, the surface of the spiral blade 12, 17 can be boronized to obtain a wear-resistant hardened layer.

As is well known, ion blating is a combined technology of vacuum evaporation and plasma, and compared to electroplating, vacuum evaporation, and sputtering, it is capable of producing a dense layer with a uniform thickness without pinholes or blisters. It is possible. When obtaining a wear-resistant hardened layer of Ti or TiN using this ion blating, a tungsten filament, etc. in a container (not shown) is heated using a resistance heating method, a high vacuum electron beam method, and a hollow cathode discharge method. The metal Ti1 or TiN is evaporated using an evaporation device using a plasma electron beam method, etc., and the evaporation is performed using argon gas for T1 and N2 or NH3 gas for TiN in a container at a pressure of 5 to 25 III TOrr. It is held in an enclosed atmosphere. Inside this container, a spiral blade 12.17 and 15
When a negative high voltage of 00V to -5000V is applied, a glow discharge persists around the spiral blade 12.17, creating a dark space surrounding the spiral blade 12.17.

On the other hand, the Ti1 or TiN metal atoms evaporated in the evaporator collide several times with the argon sealed in the container, or with the N2 or NH3 gas molecules, and then are accelerated in the dark space and formed into the spiral blades 12.17 In order to achieve this, Ti or TiN metal atoms wrap around and accumulate even in positions where the spiral blade 12.17 does not face the evaporator due to the gas scattering effect, resulting in a uniform thickness of wear resistance. It is possible to obtain a hardened layer of.

Further, the surfaces of the spiral blades 12 and 17 were coated with a crystal of a cemented carbide, which is a wear-resistant material such as WC-Co, to a thickness of about 10 μm by micro-welding. This micro welding process utilizes the discharge coating method disclosed in, for example, Japanese Patent Laid-Open No. 58-197,274, and the surface of the spiral blade 12.17 is applied at 4001-1z while rotating the WC electrode at 15 ORPM During contact and separation, current value 1 p = 80A, r on 40u seconds, τof
f A pulse current of 40 μsec was applied to weld the WC so that the welded coating surface had minute irregularities. When a scroll pump having micro-welded 100 mmφ spiral blades 12.17 is rotated at 90 ORPM, a pressure of 3 kt/cm2 (7) JEE power fluid can be obtained, and the scroll after operating for 1 hour The temperature rise of the pump was 12°C. On the other hand, MC
(machining center) and uses a scroll pump that does not have minute irregularities, the fluid pressure is 2-
When operated for 1 hour at 8kS)/cm2, the temperature rise was 15°C.

As shown in FIG. 5, the minute irregularities are sealed by compressing or expanding the fluid flow path by providing recesses 26 and protrusions 27 on corresponding surfaces of the movable part 24 and fixed part 25 by narrowing the fluid flow path. Spiral blades 12.17 to obtain a labyrinth effect
A fine recess 28 and a convex portion 29 are provided on the top and the like. Furthermore, the sealing effect can be further increased by changing the size of the minute irregularities 213.29 sequentially or periodically as shown in FIG. The spiral blades 12 and 17 can be processed by shot blasting, sandblasting, laser machining, micro welding, etc., but they can also be directly processed with high precision by wire cut electric discharge machining or die-sinking electric discharge machining. It can also be indirectly provided on the spiral blades 12 and 17 formed using a mold produced by wire-cut electric discharge machining or die-sinking electric discharge machining.

〔Effect of the invention〕

According to the present invention, heat-treated materials and difficult-to-cut materials can be processed with an accuracy of 5 μm or less by wire-cut electrical discharge machining or die-sinking electrical discharge machining, and for parts that fit together, such as the main body, left and right covers, and fixed holders, Since the fitting portion can be tapered and the tapered portion can be provided with a concave and convex portion for positioning, it is possible to make a pump that requires precision by simply assembling the pump.

In this way, not only the fitting part with a taper,
Bearings can be machined with parallel holes and surfaces, etc., and eccentric shafts can be made by the same processing as described above, including grinding, wire-cut electrical discharge machining, die-sinking electrical discharge machining, and are interchangeable. This made it possible to quickly manufacture a pump that required precision using highly accurate parts. In addition, because the surface of the spiral blade is independent of minute irregularities that can be obtained by electric discharge machining, there is no leakage from linear traces caused by conventional cutting and grinding, and air, oxygen, nitrogen, and He When used to pressurize or depressurize fluids such as gas, oil, water, and liquids in which gas is mixed, the efficiency was improved by approximately 1.6 times compared to conventional methods. The spiral blades can now be made by machining multiple pieces at once using wire-cut electric discharge machining from materials that have undergone heat treatment such as quenching, and then can be divided and used. Since we were able to obtain an independent surface with minute irregularities, we were able to facilitate end face processing and prevent fluid from leaking from the end face, improving the efficiency of the scroll pump. .

Furthermore, spiral blades can be molded from sheet metal, ceramic, or even processed from materials such as resin and metal, resin and ceramic, etc., and scroll pumps can be used as vacuum pumps, compressors, high-temperature gas pumps, etc. It can be used in molten metal high temperature pumps, high pressure hydraulic pumps, etc. In this way, it can be used in scroll pumps that are processed with high precision, have high efficiency, low noise, and are used in a wide range of applications. For example, with a gap of 10 μm, a vacuum pump can be fully utilized up to 10'47r orr, a high temperature pump can be operated at 800°C to 1000°C, a compressor can be operated at 10ks/cm2 in one stage, and 30 to 50ks in multiple stages. /cm2 can be used. Furthermore, the high pressure liquid pump is 30■/Cm2
This is possible with a single machine. The minimum noise is 45 db and the maximum is 60 db, which has the effect of reducing noise.

The efficiency is more than 32% for a small size, about three times that of the conventional model, and has great practical effects. Both can be used with high efficiency without lubrication, and their lifespans are about 5 to 10 times longer than conventional ones.

[Brief explanation of the drawing]

Fig. 1 is a sectional view of the present invention, Fig. 2 is a sectional view taken along the line A-A in Fig. 1, Fig. 3 is a perspective view of the spiral blade, Fig. 4 is a perspective view of the divided holder, and Fig. 5. , FIG. 6, and FIG. 7 are diagrams for explaining minute unevenness. 1...Body 1a, Ib...Taper IC, id...Concavity 2...Right cover 2a ......Taper 2b...Convex portion 3...Left cover 3a...Taper 3b... ...Convex portion 15...Holder 15a...Taper 15b...Protrusion patent applicant Inoue Ja Co., Ltd. Pax Institute Representative Kiyoshi Inoue Figure 3 Figure 4 Figure 5 Figure 1, Display of the case 1988 Patent Application No. 9,242 2, Name of the invention Pump 3, Person making the amendment Relationship with the case Patent applicant address: 5289-4, Michisho, Nagatsuta-cho, Midori-ku, Yokohama-shi, Kanagawa Prefecture Number of inventions to be increased by amendment “0” (1)
The claims of the specification are amended as shown in the attached sheet. (2) In the third line of page 4, [the fitting surface of the sliding part] is amended to read ``approximate transfer, or the fitting surface of the sliding part, approach transfer, transfer, or''. (3) On page 4, lines 5-6, “Concavity or...
...to fit together'' should be corrected to read, ``A concave or convex tapered surface machined with high precision is provided, and the tapered surface that determines its position is fitted.'' Attachment [(1) In pumps that require precision,
Alternatively, the mating surfaces, approaching rolling, rolling contact, or sliding surfaces of relatively close rolling or sliding parts are processed by grinding, wire cut electric discharge machining, or die-sinking electric discharge machining, and this machined surface is Pumps for direct fitting or transferred or sliding fluids. (2) A patent claim in which the fitting surface has a position determined by a taper machined with high precision by wire-cut electrical discharge machining or die-sinking electrical discharge machining, and the position is determined by fitting the tapered surface that determines this position. A pump according to scope 1. (3) The pump according to claim 1, wherein the fitting surface is tabular. ”

Claims (3)

[Claims] (1) In pumps that require precision, grinding the fitting surfaces and sliding surfaces of parts that fit or slide relative to each other,
A fluid pump machined by wire cut electric discharge machining or die-sinking electric discharge machining, and the machined surfaces are directly fitted or slid together. (2) The pump according to claim 1, wherein the fitting surface has an uneven portion machined by wire-cut electric discharge machining or die-sinking electric discharge machining, and the pump is positioned by fitting the uneven portion. (3) The pump according to claim 1, wherein the fitting surface is tapered.