JPS63271744A - Magneto-optical disk medium - Google Patents
Magneto-optical disk mediumInfo
- Publication number
- JPS63271744A JPS63271744A JP10454487A JP10454487A JPS63271744A JP S63271744 A JPS63271744 A JP S63271744A JP 10454487 A JP10454487 A JP 10454487A JP 10454487 A JP10454487 A JP 10454487A JP S63271744 A JPS63271744 A JP S63271744A
- Authority
- JP
- Japan
- Prior art keywords
- recording
- magneto
- films
- optical disk
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 9
- 150000002910 rare earth metals Chemical class 0.000 claims abstract description 9
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 14
- 230000001681 protective effect Effects 0.000 abstract description 11
- 238000010030 laminating Methods 0.000 abstract description 5
- 238000009792 diffusion process Methods 0.000 abstract description 2
- 230000000593 degrading effect Effects 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 34
- 230000000052 comparative effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- -1 glass-photopolymer Polymers 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔概 要〕
本発明は光磁気ディスク媒体において、記録感度を向上
させるため、記録層を希土類金属−遷移金属記録膜と低
熱伝導率を有する誘電体膜とを複数層積層して記録層の
熱伝導を抑えて記録パワーを低くし、ディスクの高速回
転を可能にしたものである。[Detailed Description of the Invention] [Summary] The present invention provides a magneto-optical disk medium in which the recording layer is composed of multiple layers of a rare earth metal-transition metal recording film and a dielectric film having low thermal conductivity in order to improve recording sensitivity. The layered structure suppresses heat conduction in the recording layer, lowers the recording power, and enables the disk to rotate at high speed.
本発明は、光磁気ディスク媒体に関する。光磁気ディス
クは大容量できずほこりの影響が少ないのでファイルメ
モリ等としての応用が期待されているが、そのためには
、データの高速転送が必要であり、記録感度の向上が望
まれているので、本発明はC/N比を低下せしめること
なく記録感度を向上せしめた光磁気ディスク媒体を提供
せんとするものである。The present invention relates to magneto-optical disk media. Magneto-optical disks are expected to be used as file memory because they do not have a large capacity and are less affected by dust, but for this purpose, high-speed data transfer is required, and improved recording sensitivity is desired. It is an object of the present invention to provide a magneto-optical disk medium in which recording sensitivity is improved without reducing the C/N ratio.
従来の光磁気ディスクはポリカーボネート樹脂、ガラス
−フォトポリマ、PMMAなどの基板上に下地層(例え
ば 5tot、 5iO1SiJ4、ZnS、 AIN
)、記録Ji!(例えば TbFe、 TbFeCo、
GdFbFeSTbCo)、及び上地層(例えば 5
iOz、5iO1Si3N4、ZnS。Conventional magneto-optical disks have an underlayer (e.g. 5tot, 5iO1SiJ4, ZnS, AIN) on a substrate made of polycarbonate resin, glass-photopolymer, PMMA, etc.
), Record Ji! (For example, TbFe, TbFeCo,
GdFbFeSTbCo), and the upper layer (e.g. 5
iOz, 5iO1Si3N4, ZnS.
AIN)をこの順に積層して構成されており、下地層に
よる光の干渉を利用して熱を効率よ(利用するものであ
る。It is constructed by laminating layers of AIN) in this order, and efficiently utilizes heat by utilizing light interference from the underlayer.
かかる構造の光磁気ディスクでは構成する材料の物性で
ある熱伝導率と、熱容量によって媒体自体の記録感度が
定まり、下地層を光干渉による反射の小さい膜厚にする
ことによって媒体の記録感度は上がる。しかしながら、
かかる構造の光磁気ディスク媒体では、例えばディスク
を高速回転した場合の記録感度が不十分である。In a magneto-optical disk with such a structure, the recording sensitivity of the medium itself is determined by the thermal conductivity and heat capacity, which are the physical properties of the constituent materials, and the recording sensitivity of the medium is increased by making the underlayer thick enough to reduce reflection due to optical interference. . however,
A magneto-optical disk medium having such a structure has insufficient recording sensitivity when the disk is rotated at high speed, for example.
前述の如く、従来の光磁気ディスクはディスクを高速回
転した場合に記録感度が不十分であるという問題があっ
た。As mentioned above, conventional magneto-optical disks have a problem in that the recording sensitivity is insufficient when the disk is rotated at high speed.
従って、本発明は、高速回転した場合にも、十分なC/
N比を有しかつ向上した記録感度を有する光磁気ディス
ク媒体を提供することを目的とする。Therefore, the present invention provides sufficient C/
An object of the present invention is to provide a magneto-optical disk medium having a high N ratio and improved recording sensitivity.
本発明に従えば、希土類金属−遷移金属光磁気ディスク
媒体において、希土類金属−遷移金属記録膜と、熱伝導
率が5J/M・S・K以下の低熱伝導率を有する誘電体
膜とを所定の膜厚比でそれぞれ少なくとも2層づつ交互
に積層して成る光磁気ディスク媒体が提供される。According to the present invention, in a rare earth metal-transition metal magneto-optical disk medium, a rare earth metal-transition metal recording film and a dielectric film having a low thermal conductivity of 5 J/M·S·K or less are provided. A magneto-optical disk medium is provided in which at least two layers are alternately laminated at a film thickness ratio of .
以下、本発明を添付図面を参照して以下に更に詳しく説
明する。The present invention will be explained in more detail below with reference to the accompanying drawings.
本発明に従えば、前述の如く、希土類金属(RE)−遷
移金属(TM)光磁気記録媒体においてRE−7M膜と
、熱伝導率が5J/M−3・K以下の低熱伝導率を有す
る誘電体膜とを少なくとも2層ずつ、好ましくは3〜6
層ずつ交互に積層した構造にすることによって前記目的
を達成することができる。According to the present invention, as described above, a rare earth metal (RE)-transition metal (TM) magneto-optical recording medium has an RE-7M film and a low thermal conductivity of 5 J/M-3 K or less. At least 2 layers each, preferably 3 to 6 dielectric films.
The above object can be achieved by forming a structure in which layers are alternately laminated.
本発明において記録膜としては従来公知の任意のRE−
7M膜、例えばTbFeCo、 TbFe、 TbGd
Fe。In the present invention, any conventionally known RE-
7M film, e.g. TbFeCo, TbFe, TbGd
Fe.
TbGdFeCo、 TbCoなどを使用することがで
き、本発明の光磁気ディスク媒体はIN当りの膜厚が好
ましくは100〜300人、更に好ましくは100〜2
00人の記録膜6を2層以上、好ましくは3〜6層、誘
電膜7と交互に常法に従って積層することによって作製
することができる。TbGdFeCo, TbCo, etc. can be used, and the magneto-optical disk medium of the present invention preferably has a film thickness per IN of 100 to 300, more preferably 100 to 2.
It can be produced by laminating two or more layers, preferably three to six layers, of the recording film 6 of 0.000000000000000 films, preferably 3 to 6 layers, alternately with the dielectric film 7 according to a conventional method.
一方、記録膜6を交互に積層して記録層4を構成する誘
電膜7は低熱伝導率、好ましくは5J/M・S・K以下
の熱伝導率を有する材料(例えばZnS、 Sin、、
5iO1ZrO,)を1層当りの膜厚が好ましくは10
〜300人、更に好ましくは50〜200人の誘電膜7
を2層以上、好ましくは3〜6層、記録層6と交互に積
層することによって作製することができる。On the other hand, the dielectric film 7 that constitutes the recording layer 4 by alternately laminating the recording films 6 is made of a material having a low thermal conductivity, preferably a thermal conductivity of 5 J/M・S・K or less (for example, ZnS, Sin, etc.).
5iO1ZrO,), the film thickness per layer is preferably 10
~300 people, more preferably 50-200 people dielectric film 7
It can be produced by laminating two or more layers, preferably three to six layers, alternately with the recording layer 6.
以下実施例に従って本発明を更に詳細に説明するが、本
発明の技術的範囲をこれらの実施例に限定するものでな
いことはいうまでもない。The present invention will be described in more detail below with reference to Examples, but it goes without saying that the technical scope of the present invention is not limited to these Examples.
第2図(a)及び(b)に示したRFマグネトロンスパ
ッタ装置でフォトポリマー(2P)−ガラス基板(5″
φ)1上に第1図(a)及び(b)に示した構造の光磁
気媒体の試料を作製した。なお、上層保護膜2および下
層保護膜3としては、ZnSを用い、記録層4としては
rbpecoとZnSとを積層した。A photopolymer (2P)-glass substrate (5"
A sample of a magneto-optical medium having the structure shown in FIGS. 1(a) and (b) was prepared on φ)1. Note that ZnS was used as the upper protective film 2 and the lower protective film 3, and rbpeco and ZnS were laminated as the recording layer 4.
真空槽5をl X I Q−’Paまで真空に引き、真
空槽5内にArガスを導入して0.2Paの真空下に、
それぞれの膜を製膜した。上層と下層の保護1g(Zn
S) 2及び3の膜厚は800人とし、また、記録層4
はTbFeCoの記録膜6をioo人、ZnSの誘電膜
7を50人で遂次交互に積層し、記録層4の全体の厚さ
を900人とした。膜の積層は基板1を回転させて交互
に製膜した。このようにしてディスクAを作製した。な
お、第2図において、8は基板ホルダー、9はシャッタ
ー、10は窓である。The vacuum chamber 5 was evacuated to lXIQ-'Pa, and Ar gas was introduced into the vacuum chamber 5 under a vacuum of 0.2 Pa.
Each film was formed. Upper and lower layer protection 1g (Zn
S) The thickness of layers 2 and 3 is 800, and the thickness of recording layer 4 is 800.
The TbFeCo recording film 6 was sequentially and alternately laminated by 100 people and the ZnS dielectric film 7 by 50 people, so that the total thickness of the recording layer 4 was 900 people. The films were stacked alternately by rotating the substrate 1. Disc A was produced in this way. In FIG. 2, 8 is a substrate holder, 9 is a shutter, and 10 is a window.
次に比較例として従来の構造(単純な三層構造)のディ
スクBをZnS保護膜800人、TbFeCo記録層9
00人及びZnS保護膜800人を順次スパッタリング
により製膜して作製した。Next, as a comparative example, disk B with a conventional structure (simple three-layer structure) was coated with a ZnS protective film of 800 layers and a TbFeCo recording layer of 9 layers.
A ZnS protective film of 0.00 and a ZnS protective film of 800 were sequentially formed by sputtering.
更に別の比較例として記録層を単純に薄(シた場合、即
ちZnS保護膜800人、TbFeCo記録層300人
、ZnS保護膜800人のディスクCを作製した。As another comparative example, a disk C was prepared in which the recording layer was simply thin (that is, a ZnS protective film of 800 layers, a TbFeCo recording layer of 300 layers, and a ZnS protective layer of 800 layers).
このようにして作製したそれぞれのディスクA。Each disk A was produced in this way.
B及びCの記録再生特性を測定して、記録感度の目安で
ある最適記録パワー(2次高調波が最低となるときの記
録パワー)およびC,、C2,Nを求めた。The recording and reproducing characteristics of B and C were measured, and the optimum recording power (recording power when the second harmonic is the lowest), which is a guideline for recording sensitivity, and C, , C2, and N were determined.
なお、記録再生特性は、半径R=46mの位置で、90
0rpm、記録周波数I MHzで測定した。得られた
結果を第3図に示す。Note that the recording and reproducing characteristics are 90 m at a radius R = 46 m.
Measurements were made at 0 rpm and a recording frequency of I MHz. The results obtained are shown in FIG.
第3図の結果から明きらかなように、単純に記録層だけ
を薄クシたディスク(ディスクC)でも最適記録パワー
は約3.5mWと本発明のディスクAと同程度に記録感
度が向上するが、C/N (C。As is clear from the results shown in Figure 3, even with a disk in which only the recording layer is simply thinned (disk C), the optimum recording power is approximately 3.5 mW, and the recording sensitivity is improved to the same extent as disk A of the present invention. However, C/N (C.
−N)が著しく低下している。これに対し、本発明のデ
ィスクAではC/N比を低下せしめることなく、最適記
録パワーが低下する。このように本発明に従って記録層
を積層構造にすることにより、C/N比を低下せしめる
ことなく、記録感度を向上させることができる。-N) has decreased significantly. On the other hand, in the disc A of the present invention, the optimum recording power is reduced without reducing the C/N ratio. As described above, by forming the recording layer into a laminated structure according to the present invention, recording sensitivity can be improved without reducing the C/N ratio.
以上説明したように、本発明に従えば、記録膜と低熱伝
導率の誘電体膜とを交互に積層することにより、熱の拡
散を抑えてC/N比を低下せしめることなく記録感度を
向上せしめることができる。As explained above, according to the present invention, recording films and dielectric films with low thermal conductivity are alternately laminated to suppress heat diffusion and improve recording sensitivity without reducing the C/N ratio. You can force it.
第1図(a)及び(b)は本発明の光磁気ディスク媒体
の構造を模式的に示した断面図であり、第2図(a)及
び(b)は本発明の光磁気ディスク媒体の製造に使用す
ることのできるRFマグネトロンスパッタ装置を示す模
式図であり、第3図は実施例及び比較例の結果を示すグ
ラフ図である。
1・・・基恢、2・・・上層保護膜、3・・・下層保護
膜、4・・・記録層、5・・・真空槽、6・・・記録膜
、7・・・誘電膜、8・・・基板ホルダー、9・・・シ
ャッター、10・・・窓。
(a) (b)
第1図
(a)
2・・・上層保護膜 7・・・誘電膜記録パ
ワー(mW)
第3図
C1:キャリアレベル
C2:2次高調波レベル
N:ノイズレベル1(a) and (b) are cross-sectional views schematically showing the structure of the magneto-optical disk medium of the present invention, and FIGS. 2(a) and (b) are cross-sectional views of the magneto-optical disk medium of the present invention. FIG. 3 is a schematic diagram showing an RF magnetron sputtering apparatus that can be used for manufacturing, and FIG. 3 is a graph diagram showing the results of Examples and Comparative Examples. DESCRIPTION OF SYMBOLS 1... Base, 2... Upper layer protective film, 3... Lower layer protective film, 4... Recording layer, 5... Vacuum chamber, 6... Recording film, 7... Dielectric film , 8... Board holder, 9... Shutter, 10... Window. (a) (b) Figure 1 (a) 2... Upper protective film 7... Dielectric film recording power (mW) Figure 3 C1: Carrier level C2: Second harmonic level N: Noise level
Claims (1)
、希土類金属−遷移金属記録膜と、熱伝導率が5J/M
・S・K以下の低熱伝導率を有する誘電体膜とを所定の
膜厚比でそれぞれ少なくとも2層づつ交互に積層して成
る光磁気ディスク媒体。 2、1層の記録膜の厚さが100〜300Åであり、1
層の誘電体膜の厚さが10〜300Åである特許請求の
範囲第1項記載の光磁気ディスク媒体。[Claims] 1. In a rare earth metal-transition metal magneto-optical disk medium, the rare earth metal-transition metal recording film has a thermal conductivity of 5 J/M.
- A magneto-optical disk medium in which at least two dielectric films each having a low thermal conductivity of S.K or less are laminated alternately at a predetermined film thickness ratio. 2. The thickness of one recording film is 100 to 300 Å, and 1
2. The magneto-optical disk medium according to claim 1, wherein the dielectric film of the layer has a thickness of 10 to 300 Å.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10454487A JPS63271744A (en) | 1987-04-30 | 1987-04-30 | Magneto-optical disk medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10454487A JPS63271744A (en) | 1987-04-30 | 1987-04-30 | Magneto-optical disk medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63271744A true JPS63271744A (en) | 1988-11-09 |
Family
ID=14383424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10454487A Pending JPS63271744A (en) | 1987-04-30 | 1987-04-30 | Magneto-optical disk medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63271744A (en) |
-
1987
- 1987-04-30 JP JP10454487A patent/JPS63271744A/en active Pending
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