JPS6327034U - - Google Patents

Info

Publication number
JPS6327034U
JPS6327034U JP12134186U JP12134186U JPS6327034U JP S6327034 U JPS6327034 U JP S6327034U JP 12134186 U JP12134186 U JP 12134186U JP 12134186 U JP12134186 U JP 12134186U JP S6327034 U JPS6327034 U JP S6327034U
Authority
JP
Japan
Prior art keywords
variable
variable capacitor
coil
detection circuit
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12134186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12134186U priority Critical patent/JPS6327034U/ja
Publication of JPS6327034U publication Critical patent/JPS6327034U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Transmitters (AREA)
JP12134186U 1986-08-07 1986-08-07 Pending JPS6327034U (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12134186U JPS6327034U (2) 1986-08-07 1986-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12134186U JPS6327034U (2) 1986-08-07 1986-08-07

Publications (1)

Publication Number Publication Date
JPS6327034U true JPS6327034U (2) 1988-02-22

Family

ID=31010520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12134186U Pending JPS6327034U (2) 1986-08-07 1986-08-07

Country Status (1)

Country Link
JP (1) JPS6327034U (2)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113599A (en) * 1981-01-06 1982-07-15 Kokusai Electric Co Ltd Automatic matching device for plasma generator
JPS58135600A (ja) * 1982-02-08 1983-08-12 株式会社日立国際電気 プラズマ励起用高周波電力供給装置
JPS61139685A (ja) * 1984-12-10 1986-06-26 Tokuda Seisakusho Ltd 高周波プラズマエツチング装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113599A (en) * 1981-01-06 1982-07-15 Kokusai Electric Co Ltd Automatic matching device for plasma generator
JPS58135600A (ja) * 1982-02-08 1983-08-12 株式会社日立国際電気 プラズマ励起用高周波電力供給装置
JPS61139685A (ja) * 1984-12-10 1986-06-26 Tokuda Seisakusho Ltd 高周波プラズマエツチング装置

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