JPS63258634A - Chemical liquid pressurizing device - Google Patents
Chemical liquid pressurizing deviceInfo
- Publication number
- JPS63258634A JPS63258634A JP9216787A JP9216787A JPS63258634A JP S63258634 A JPS63258634 A JP S63258634A JP 9216787 A JP9216787 A JP 9216787A JP 9216787 A JP9216787 A JP 9216787A JP S63258634 A JPS63258634 A JP S63258634A
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- valve
- opening
- purging
- pressurizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 title claims abstract description 40
- 239000007788 liquid Substances 0.000 title claims abstract description 36
- 238000010926 purge Methods 0.000 claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 claims abstract description 3
- 239000004065 semiconductor Substances 0.000 claims abstract description 3
- 239000002904 solvent Substances 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 108010081873 Persil Proteins 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Weting (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、半導体を製造する際に用いる薬液加圧装置
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a chemical liquid pressurizing device used when manufacturing semiconductors.
第２図は従来の薬液加圧装置を示す断面図である。図に
おいて、１は薬液、２は加圧口、３は薬液吐出口、４は
配管、４ａは薬液の流れを制御する配管４の開閉弁であ
る。FIG. 2 is a sectional view showing a conventional chemical liquid pressurizing device. In the figure, 1 is a chemical liquid, 2 is a pressurizing port, 3 is a chemical liquid discharge port, 4 is a pipe, and 4a is an on-off valve for the pipe 4 that controls the flow of the chemical liquid.
次に動作について説明する。加圧口２からの薬液加圧に
よって加圧された溶剤などの薬液１は、薬液ビン１ａよ
り薬液吐出口３を通って配管４内へ吐出される。この吐
出された薬液１は開閉弁４ａによって制御され、必要時
に外部へ放出される。Next, the operation will be explained. The chemical liquid 1 such as a solvent pressurized by the chemical liquid pressurization from the pressurizing port 2 is discharged from the chemical liquid bottle 1a into the piping 4 through the chemical liquid discharge port 3. This discharged chemical solution 1 is controlled by an on-off valve 4a and is discharged to the outside when necessary.
その間、加圧タンク５内は加圧口２より常時加圧されて
いる。During this time, the inside of the pressurized tank 5 is constantly pressurized from the pressurizing port 2.
従来の薬液加圧装置は以上のように構成されているので
、吐出時以外タンク内は密封されているため薬液の蒸気
及び析出骨がタンク内壁に付着することがあり、その都
度、清掃しなければならないなどの問題点があった。Conventional chemical liquid pressurization devices are configured as described above, and the inside of the tank is sealed except when dispensing, so chemical vapor and precipitated bones may adhere to the inner wall of the tank, which must be cleaned each time. There were problems such as not being able to do so.
この発明は上記のような問題点を解消するためになされ
たもので、内壁に薬液が付着しないような薬液加圧装置
を得ることを目的とする。This invention was made to solve the above-mentioned problems, and an object of the present invention is to provide a chemical liquid pressurizing device that prevents chemical liquid from adhering to the inner wall.
この発明に係る薬液加圧装置は、加圧タンクに該加圧タ
ンク内の雰囲気をパージするためのパージ口を設け、該
パージ口を薬液吐出口の開、閉と同期させ、閉、開させ
るようにしたものである。In the chemical liquid pressurizing device according to the present invention, a pressurized tank is provided with a purge port for purging the atmosphere inside the pressurized tank, and the purge port is closed and opened in synchronization with opening and closing of a chemical liquid discharge port. This is how it was done.
この発明における加圧タンクは、薬液吐出時以外はその
内部がパージされていることにより、その時に発生した
薬液の蒸気、析出物は外部へ放出される。In the pressurized tank according to the present invention, the interior thereof is purged except when the chemical liquid is discharged, so that the vapor and precipitates of the chemical liquid generated at that time are discharged to the outside.
以下、この発明の一実施例を図について説明する。第１
図において、１ないし５は第２図と同一のものである。An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, numerals 1 to 5 are the same as in FIG.
６はパーシロであり、その開閉弁６ａは配管４の開閉弁
４ａと同期して動作する（配管開閉弁４ａが閉時、パー
シロ開閉弁６ａは開）。Reference numeral 6 denotes a persilo valve, and its on-off valve 6a operates in synchronization with the on-off valve 4a of the pipe 4 (when the pipe on-off valve 4a is closed, the persilo on-off valve 6a is open).
本実施例では、加圧口２からの加圧によって加圧された
溶剤などの薬液ｌは配管４を通って外部へ放出される。In this embodiment, the pressurized chemical solution l such as a solvent is discharged to the outside through the piping 4 by applying pressure from the pressurizing port 2 .
そして、この配管４はバルブ４ａによってその開閉が制
御される。この開閉バルブ４ａと同期してパーシロ６は
開閉する。その動作はバルブ４ａと逆であり、バルブ４
ａの開時にはパーシロ６は閉じており、バルブ４ａの閉
時にはパーシロ６は開いている。The opening and closing of this pipe 4 is controlled by a valve 4a. The Percillo 6 opens and closes in synchronization with this opening/closing valve 4a. Its operation is opposite to that of valve 4a, and valve 4
When valve 4a is open, Persillo 6 is closed, and when valve 4a is closed, Persillo 6 is open.
このような装置では、薬液１の吐出時以外は加圧タンク
５内はパージされることとなる。これにより、薬液１よ
り蒸発した気体や析出物はパーシロ６より外部へ放出さ
れるため、加圧タンク５内壁への付着を防ぐことができ
る。In such an apparatus, the inside of the pressurized tank 5 is purged except when the chemical liquid 1 is being discharged. As a result, gases and precipitates evaporated from the chemical solution 1 are discharged to the outside from the Persillo 6, so that they can be prevented from adhering to the inner wall of the pressurized tank 5.
なお、上記実施例では独立にパーシロ６を設けたが、こ
れは三方弁等を用いて薬液吐出口３と一体化して構成す
ることも可能である。In the above embodiment, the Persilo 6 is provided independently, but it can also be configured to be integrated with the chemical liquid discharge port 3 using a three-way valve or the like.
以上のように、この発明に係る薬液加圧装置によれば、
加圧タンクに薬液吐出口の開、閉と同期して逆に閉、開
する加圧タンク内の雰囲気をパージするためのパージ口
を設けたので、薬液吐出時以外は加圧タンク内をパージ
でき、加圧タンク内壁の薬液蒸気の付着、析出を防ぐこ
とができる。As described above, according to the chemical liquid pressurizing device according to the present invention,
The pressurized tank is equipped with a purge port to purge the atmosphere inside the pressurized tank, which closes and opens in reverse in synchronization with the opening and closing of the chemical liquid discharge port, so the inside of the pressurized tank can be purged when the chemical liquid is not being discharged. This prevents chemical vapor from adhering to and precipitating on the inner wall of the pressurized tank.
第１図はこの発明の一実施例による薬液加圧装置を示す
断面側面図、第２図は従来の薬液加圧装置を示す断面側
面図である。
１は薬液、２は加圧口、３は薬液吐出口、４は配管、４
ａは配管開閉弁、５は加圧タンク、６はパーシロ、６ａ
はパーシロ開閉弁。
なお図中同一符号は同−又は相当部分を示す。FIG. 1 is a cross-sectional side view showing a chemical liquid pressurizing device according to an embodiment of the present invention, and FIG. 2 is a cross-sectional side view showing a conventional chemical liquid pressurizing device. 1 is a chemical liquid, 2 is a pressurizing port, 3 is a chemical liquid discharge port, 4 is a pipe, 4
a is a piping opening/closing valve, 5 is a pressurized tank, 6 is Persil, 6a
is a persilo on-off valve. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
口及び薬液吐出口を有する薬液加圧装置において、 上記加圧タンクに上記薬液吐出口の開、閉と同期して閉
、開せられる上記加圧タンク内の雰囲気をパージするた
めのパージ口を備えたことを特徴とする薬液加圧装置。(1) In a chemical liquid pressurizing device that is used in the manufacture of semiconductors and has a pressurizing port and a chemical liquid discharge port in its pressurized tank, the pressurized tank is closed and opened in synchronization with the opening and closing of the chemical liquid discharge port. A chemical liquid pressurizing device comprising a purge port for purging the atmosphere inside the pressurized tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9216787A JPS63258634A (en) | 1987-04-15 | 1987-04-15 | Chemical liquid pressurizing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9216787A JPS63258634A (en) | 1987-04-15 | 1987-04-15 | Chemical liquid pressurizing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63258634A true JPS63258634A (en) | 1988-10-26 |
Family
ID=14046875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9216787A Pending JPS63258634A (en) | 1987-04-15 | 1987-04-15 | Chemical liquid pressurizing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63258634A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010280445A (en) * | 2002-05-03 | 2010-12-16 | Advanced Technology Materials Inc | Returnable and reusable, bag-in-drum fluid storage and dispensing container system |
-
1987
- 1987-04-15 JP JP9216787A patent/JPS63258634A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010280445A (en) * | 2002-05-03 | 2010-12-16 | Advanced Technology Materials Inc | Returnable and reusable, bag-in-drum fluid storage and dispensing container system |
| JP2013136416A (en) * | 2002-05-03 | 2013-07-11 | Advanced Technology Materials Inc | Returnable and reusable, bag-in-drum fluid storage, and dispensing container system |
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