JPS6325700B2 - - Google Patents

Info

Publication number
JPS6325700B2
JPS6325700B2 JP56101088A JP10108881A JPS6325700B2 JP S6325700 B2 JPS6325700 B2 JP S6325700B2 JP 56101088 A JP56101088 A JP 56101088A JP 10108881 A JP10108881 A JP 10108881A JP S6325700 B2 JPS6325700 B2 JP S6325700B2
Authority
JP
Japan
Prior art keywords
diffusion
film
glass film
silicon
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56101088A
Other languages
English (en)
Japanese (ja)
Other versions
JPS583225A (ja
Inventor
Tadashi Kirisako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56101088A priority Critical patent/JPS583225A/ja
Publication of JPS583225A publication Critical patent/JPS583225A/ja
Publication of JPS6325700B2 publication Critical patent/JPS6325700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P32/14—

Landscapes

  • Formation Of Insulating Films (AREA)
JP56101088A 1981-06-29 1981-06-29 半導体装置の製造方法 Granted JPS583225A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56101088A JPS583225A (ja) 1981-06-29 1981-06-29 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56101088A JPS583225A (ja) 1981-06-29 1981-06-29 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS583225A JPS583225A (ja) 1983-01-10
JPS6325700B2 true JPS6325700B2 (member.php) 1988-05-26

Family

ID=14291335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56101088A Granted JPS583225A (ja) 1981-06-29 1981-06-29 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS583225A (member.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02177535A (ja) * 1988-12-28 1990-07-10 Matsushita Electron Corp 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512709A (en) * 1978-07-12 1980-01-29 Toshiba Corp Manufactiring method of semiconductor device

Also Published As

Publication number Publication date
JPS583225A (ja) 1983-01-10

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