JPS6324538A - 質量分析装置用イオン源 - Google Patents

質量分析装置用イオン源

Info

Publication number
JPS6324538A
JPS6324538A JP62178499A JP17849987A JPS6324538A JP S6324538 A JPS6324538 A JP S6324538A JP 62178499 A JP62178499 A JP 62178499A JP 17849987 A JP17849987 A JP 17849987A JP S6324538 A JPS6324538 A JP S6324538A
Authority
JP
Japan
Prior art keywords
sample
porous member
particle beam
liquid
argon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62178499A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373102B2 (enrdf_load_stackoverflow
Inventor
Daido Ishii
大道 石井
Masashi Goto
正志 後藤
Toyohide Takeuchi
竹内　豊英
Sukiaki Itou
伊藤　透朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62178499A priority Critical patent/JPS6324538A/ja
Publication of JPS6324538A publication Critical patent/JPS6324538A/ja
Publication of JPH0373102B2 publication Critical patent/JPH0373102B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP62178499A 1987-07-17 1987-07-17 質量分析装置用イオン源 Granted JPS6324538A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62178499A JPS6324538A (ja) 1987-07-17 1987-07-17 質量分析装置用イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62178499A JPS6324538A (ja) 1987-07-17 1987-07-17 質量分析装置用イオン源

Publications (2)

Publication Number Publication Date
JPS6324538A true JPS6324538A (ja) 1988-02-01
JPH0373102B2 JPH0373102B2 (enrdf_load_stackoverflow) 1991-11-20

Family

ID=16049529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62178499A Granted JPS6324538A (ja) 1987-07-17 1987-07-17 質量分析装置用イオン源

Country Status (1)

Country Link
JP (1) JPS6324538A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163135A (ja) * 1982-03-20 1983-09-27 Nippon Denshi Zairyo Kk イオン源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163135A (ja) * 1982-03-20 1983-09-27 Nippon Denshi Zairyo Kk イオン源

Also Published As

Publication number Publication date
JPH0373102B2 (enrdf_load_stackoverflow) 1991-11-20

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