JPS63245333A - 位置決め装置 - Google Patents

位置決め装置

Info

Publication number
JPS63245333A
JPS63245333A JP62074399A JP7439987A JPS63245333A JP S63245333 A JPS63245333 A JP S63245333A JP 62074399 A JP62074399 A JP 62074399A JP 7439987 A JP7439987 A JP 7439987A JP S63245333 A JPS63245333 A JP S63245333A
Authority
JP
Japan
Prior art keywords
path
slider
sliders
evacuation
abutment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62074399A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0333456B2 (enrdf_load_stackoverflow
Inventor
Akira Koike
明 小池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62074399A priority Critical patent/JPS63245333A/ja
Publication of JPS63245333A publication Critical patent/JPS63245333A/ja
Publication of JPH0333456B2 publication Critical patent/JPH0333456B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Supply And Installment Of Electrical Components (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Automatic Assembly (AREA)
JP62074399A 1987-03-30 1987-03-30 位置決め装置 Granted JPS63245333A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62074399A JPS63245333A (ja) 1987-03-30 1987-03-30 位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62074399A JPS63245333A (ja) 1987-03-30 1987-03-30 位置決め装置

Publications (2)

Publication Number Publication Date
JPS63245333A true JPS63245333A (ja) 1988-10-12
JPH0333456B2 JPH0333456B2 (enrdf_load_stackoverflow) 1991-05-17

Family

ID=13546069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62074399A Granted JPS63245333A (ja) 1987-03-30 1987-03-30 位置決め装置

Country Status (1)

Country Link
JP (1) JPS63245333A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007149756A (ja) * 2005-11-24 2007-06-14 Mach Eng:Kk アライメント装置
JP2021077734A (ja) * 2019-11-07 2021-05-20 株式会社Ｓｃｒｅｅｎホールディングス チャックピン、基板処理装置、基板処理システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007149756A (ja) * 2005-11-24 2007-06-14 Mach Eng:Kk アライメント装置
JP2021077734A (ja) * 2019-11-07 2021-05-20 株式会社Ｓｃｒｅｅｎホールディングス チャックピン、基板処理装置、基板処理システム

Also Published As

Publication number Publication date
JPH0333456B2 (enrdf_load_stackoverflow) 1991-05-17

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