JPS63243819A - 微小振動測定装置 - Google Patents

微小振動測定装置

Info

Publication number
JPS63243819A
JPS63243819A JP7921387A JP7921387A JPS63243819A JP S63243819 A JPS63243819 A JP S63243819A JP 7921387 A JP7921387 A JP 7921387A JP 7921387 A JP7921387 A JP 7921387A JP S63243819 A JPS63243819 A JP S63243819A
Authority
JP
Japan
Prior art keywords
laser
light source
beam splitter
laser light
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7921387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451771B2 (enExample
Inventor
Masayoshi Tanaka
正吉 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Radio Co Ltd
Original Assignee
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Radio Co Ltd filed Critical Japan Radio Co Ltd
Priority to JP7921387A priority Critical patent/JPS63243819A/ja
Publication of JPS63243819A publication Critical patent/JPS63243819A/ja
Publication of JPH0451771B2 publication Critical patent/JPH0451771B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP7921387A 1987-03-31 1987-03-31 微小振動測定装置 Granted JPS63243819A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7921387A JPS63243819A (ja) 1987-03-31 1987-03-31 微小振動測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7921387A JPS63243819A (ja) 1987-03-31 1987-03-31 微小振動測定装置

Publications (2)

Publication Number Publication Date
JPS63243819A true JPS63243819A (ja) 1988-10-11
JPH0451771B2 JPH0451771B2 (enExample) 1992-08-20

Family

ID=13683655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7921387A Granted JPS63243819A (ja) 1987-03-31 1987-03-31 微小振動測定装置

Country Status (1)

Country Link
JP (1) JPS63243819A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007285898A (ja) * 2006-04-17 2007-11-01 Tokai Univ レーザ振動計
JP2024068318A (ja) * 2022-11-08 2024-05-20 セイコーエプソン株式会社 レーザー干渉計

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007285898A (ja) * 2006-04-17 2007-11-01 Tokai Univ レーザ振動計
JP2024068318A (ja) * 2022-11-08 2024-05-20 セイコーエプソン株式会社 レーザー干渉計

Also Published As

Publication number Publication date
JPH0451771B2 (enExample) 1992-08-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees