JPS63241153A - Heat-resisting member and its production - Google Patents
Heat-resisting member and its productionInfo
- Publication number
- JPS63241153A JPS63241153A JP62074357A JP7435787A JPS63241153A JP S63241153 A JPS63241153 A JP S63241153A JP 62074357 A JP62074357 A JP 62074357A JP 7435787 A JP7435787 A JP 7435787A JP S63241153 A JPS63241153 A JP S63241153A
- Authority
- JP
- Japan
- Prior art keywords
- coating layer
- base material
- heat
- temp
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000011247 coating layer Substances 0.000 claims abstract description 50
- 239000000463 material Substances 0.000 claims abstract description 39
- 238000005507 spraying Methods 0.000 claims abstract description 13
- 238000007751 thermal spraying Methods 0.000 claims abstract description 8
- 239000000126 substance Substances 0.000 claims description 17
- 238000005260 corrosion Methods 0.000 claims description 9
- 230000007797 corrosion Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- 229910010293 ceramic material Inorganic materials 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 abstract description 11
- 238000000576 coating method Methods 0.000 abstract description 11
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 4
- 241000251468 Actinopterygii Species 0.000 abstract description 2
- 239000010953 base metal Substances 0.000 abstract 1
- 239000007921 spray Substances 0.000 description 11
- 229910052770 Uranium Inorganic materials 0.000 description 8
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000003779 heat-resistant material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は、高温における耐食性を備えたコーティング層
を有する耐熱部材、およびその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a heat-resistant member having a coating layer with corrosion resistance at high temperatures, and a method for manufacturing the same.
（従来の技術）
一般に高温物質と接して設けられる耐熱部材は、物質と
相対する側に高温物質と反応し難い物質からなるコーテ
ィング層を設けることが行オ〕れる。(Prior Art) Generally, a heat-resistant member that is provided in contact with a high-temperature substance is provided with a coating layer made of a substance that does not easily react with the high-temperature substance on the side facing the substance.
基材の材料は、たとえば溶融点の高いｌ’ａ、Ｎｂ等の
金属であり、コーティング層は、たとえば酸化ジルコニ
ウム、酸化イツトリウム等のセラミック材料を溶射等に
よって基材上に施したものが用いられる。The material of the base material is, for example, a metal with a high melting point such as l'a or Nb, and the coating layer is a ceramic material such as zirconium oxide or yttrium oxide applied onto the base material by thermal spraying or the like. .
ここに右いて、たとえばウランの同位体を分離するため
の設備においては、ウランを加熱溶解して蒸発させるた
めのるつぼの開口に接続され、その上方を包囲して発生
したウラン蒸気を誘導するための封入容器が用いられ、
その上方には製品回収板、廃品回収板等が配置されたう
え、これら全体を真空容器の中に収容した構成が用いら
れろ。For example, in equipment for separating uranium isotopes, a crucible is connected to the opening of the crucible for heating and melting and vaporizing the uranium, and is used to surround the crucible above and guide the generated uranium vapor. A sealed container is used,
A configuration may be used in which a product collection plate, a waste product collection plate, etc. are placed above it, and all of these are housed in a vacuum container.
これらの構成部材のうち、封入容器等高温のウラン蒸気
にさらされる板材には上記したような耐熱部材が使用さ
れ、ウラン蒸気に対する耐食性を確保している。Among these structural members, the above-mentioned heat-resistant members are used for plate materials exposed to high-temperature uranium vapor, such as the enclosure container, to ensure corrosion resistance against uranium vapor.
（発明が解決しようとする問題点）
ここにおいて上述した封入容器等の板材は高真空（〜ｌ
Ｏ−“ｔｏｒｒ）中に置かれており、ウランを溶解して
いるるつぼの熱は輻射乃至は直接の熱伝導によって上記
した板材に伝わる。板材はコーティング層の熱伝導率が
基材のそれよりも低いこと、封入容器等においては輻射
熱は片面にのみ作用すること、その内外の温度差が大き
いことなどの理由によって、温度上昇・下降する過程で
熱変形を生ずる。(Problem to be solved by the invention) Here, the plate material of the above-mentioned enclosure etc. is under high vacuum (~l
The heat of the crucible in which the uranium is melted is transferred to the above-mentioned plate material by radiation or direct heat conduction. Thermal deformation occurs in the process of temperature rise and fall due to the following reasons: radiant heat acts only on one side of a sealed container, etc., and there is a large temperature difference between the inside and outside of the container.
基材が変形してその上に施されたコーティング層が剥離
すると、板材の耐食性が損わ話もで、一般にこのような
板材については基材の板厚を増加したり、複雑なリブ構
造を設けたりして対処しているが、部材全体の重量が増
加するばかりでなく、コーティング層の剥離に対しても
十分な効果は得られなかった。If the base material deforms and the coating layer applied on it peels off, the corrosion resistance of the board may be impaired, and it is generally recommended to increase the thickness of the base material or add a complicated rib structure to the board. However, not only did this increase the weight of the entire member, but it also did not provide a sufficient effect on the peeling of the coating layer.
本発明の目的は、基材の熱的変形に追従してその機能を
十分保持することができる耐熱部材、およびその製造方
法を提供することにある。An object of the present invention is to provide a heat-resistant member that can follow thermal deformation of a base material and sufficiently maintain its functions, and a method for manufacturing the same.
（問題点を解決するための手段）
本発明の第１の発明においては、基材の高温物質と相対
する面に、少なくとも一層のセラミック部材からなる耐
食性のコーティング層を有する耐熱部材に、うろこ状を
なして高温物質に接面するコーティング層を設けた。(Means for Solving the Problems) In the first aspect of the present invention, a scale-like structure is provided on a heat-resistant member having a corrosion-resistant coating layer made of at least one ceramic member on the surface of the base material facing the high-temperature substance. A coating layer was provided that was in contact with the high-temperature substance.
また本発明の第２の発明においては、基材の高温物質と
相対する面に、少なくとも一層のセラミック材からなる
耐食性のコーティング層を溶射して施す耐熱部材の製造
方法において、高温物質に接面するコーティング層を、
溶射角３０度乃至５０度にて溶射する方法を採用した。Further, in the second aspect of the present invention, in the method for producing a heat-resistant member, the method for producing a heat-resistant member includes thermally spraying a corrosion-resistant coating layer made of at least one ceramic material on the surface of the base material facing the high-temperature substance. coating layer,
A method of thermal spraying at a spraying angle of 30 degrees to 50 degrees was adopted.
（作用）
セラミック材からなる完成したコーティング層は、一般
に表面が比較的滑らかで粒子間結合力が高く硬いものと
されるが１本発明は、これをうろこ状とするときわめて
柔軟性の高い被膜層が得られることに着目してなされた
もので、またこれの製造方法として、セラミックス材を
溶射角３０度乃至５０度で基材に溶射することによって
、先行付着粒子の遮蔽現象を利用しうろこ状のコーティ
ング層を得ている。これによって耐熱部材が温度変化を
うけて変形しても、コーティング層は基材の変形によく
追随し、基材から剥離し難くなる。(Function) A completed coating layer made of a ceramic material is generally considered to be hard with a relatively smooth surface and a high interparticle bonding force. However, in the present invention, when this coating layer is made into scales, it becomes an extremely flexible coating layer. This method was developed with a focus on the ability to obtain a scaly shape by thermally spraying a ceramic material onto a base material at a spraying angle of 30 degrees to 50 degrees. A coating layer is obtained. As a result, even if the heat-resistant member is deformed due to temperature changes, the coating layer closely follows the deformation of the base material, making it difficult to peel off from the base material.
（実施例）
以下本発明の一実施例を第１図乃至第５図を参照して説
明する。(Embodiment) An embodiment of the present invention will be described below with reference to FIGS. 1 to 5.
第１図および第２図は、本発明をたとえば垂直方向に配
置された板状の耐熱材に適用した場合の一実施例の、そ
れぞれ部分断面図およびその正面図である。FIGS. 1 and 2 are a partial sectional view and a front view, respectively, of an embodiment in which the present invention is applied to, for example, a plate-shaped heat-resistant material arranged in a vertical direction.
第１図において、Ｔａ製の基材１の高温物質と相対する
側面には、Ｎｂの下地コーティング２を施した上にＺｒ
Ｏ，を溶射（たとえばプラズマ溶射）して形成されたコ
ーティング層３が設けられている。In FIG. 1, the side surface of a base material 1 made of Ta that faces the high-temperature substance is coated with a base coating 2 of Nb and then coated with Zr.
A coating layer 3 is provided which is formed by thermal spraying (for example, plasma spraying) O.
このコーティング層３は先端が下方を向いたあたかも魚
のうろこ状に形成されている。コーティング層３はその
うろこの先端が下向きになるように、すなわちうろこ間
の凹陥部の開口が下向きになるように設けられている。This coating layer 3 is formed in the shape of a fish scale with the tip facing downward. The coating layer 3 is provided so that the tips of its scales face downward, that is, the openings of the recesses between the scales face downward.
下地コーティング２は。Base coating 2.
コーティングＭ３の基材１への付着を容易とするために
通常設けられるものである。This is normally provided to facilitate attachment of the coating M3 to the base material 1.
次にこれの作用について第３図を参照して説明する。Next, the effect of this will be explained with reference to FIG.
常温で作製された耐熱材は高温物質に曝され温度上昇す
ると、コーティング層３の方が基材１よりも熱伝導率が
低いため、第３図中に破線Ｔで示したように基材１の板
厚方向の温度匂配を生じ、表裏で膨張の程度が異なるた
め湾曲し変形する。When a heat-resistant material produced at room temperature is exposed to a high-temperature substance and the temperature rises, the coating layer 3 has a lower thermal conductivity than the base material 1, so as shown by the broken line T in FIG. This creates a temperature gradient in the thickness direction of the plate, and the degree of expansion differs between the front and back sides, causing it to curve and deform.
基材１の湾曲変形が生じた場合、きわめて初期の段爾で
コーティング層３の凹陥部に亀裂４が生じる。変形のご
く初期に亀裂４が生じることで、分断されたコーティン
グ層３に作用する応力は緩和され、基材１からの剥離強
度は、従来のコーティング層３が施されたものに比べて
１０〜５０％程度向上する。When the base material 1 undergoes a curved deformation, cracks 4 occur in the recessed portions of the coating layer 3 at a very early stage. By generating cracks 4 at the very early stage of deformation, the stress acting on the divided coating layer 3 is relaxed, and the peel strength from the base material 1 is 10 to 10% higher than that of a conventional coating layer 3. Improved by about 50%.
また変形の初期に生じる亀裂４はコーティング層３の凹
陥部に発生し、旦つコーティング層３はそのうろこの先
端が下向きになっているので、高温物質がたとえば蒸気
であった場合、コーティング層コ３の表面で液化したと
しても、その液滴５は、第４図および第５図に示すよう
にうろこ状部の先端を流下し、基材１への浸透には至ら
ない。Furthermore, the cracks 4 that occur at the initial stage of deformation occur in the concave parts of the coating layer 3, and since the tips of the scales of the coating layer 3 are directed downward, if the high-temperature substance is steam, for example, the coating layer Even if the droplets 5 liquefy on the surface of the substrate 3, the droplets 5 flow down the tips of the scales as shown in FIGS. 4 and 5, and do not penetrate into the base material 1.
なおコーティング層３を形成する溶射物質は、ＺｒＯ，
に限らずＹｚ Ｏｓ ｅ １ｌｆ０２ ＊ Ｔｈａｉ
＋ ＭｇＯ等のセラミックスを用いてもよい、また基材
１もＴａ以外の高融点金属を使用することができる。特
に高温物質がウラン蒸気の場合、コーティング層３をＺ
ｒＯ，のうちでも特に８％Ｙ１０３安定化ＺｒＯ，を用
いて形成すると、これは溶融金属との濡れ性が悪いこと
から、上述した液化物（この場合溶融ウラン）の浸透防
止効果は一層顕著に現れる。The sprayed material forming the coating layer 3 is ZrO,
Not limited to Yz Os e 1lf02 *Thai
+ Ceramics such as MgO may be used, and the base material 1 may also be made of a high melting point metal other than Ta. Especially when the high temperature substance is uranium vapor, the coating layer 3 is
When formed using rO, especially 8% Y103 stabilized ZrO, since this has poor wettability with molten metal, the above-mentioned effect of preventing penetration of liquefied material (molten uranium in this case) is even more remarkable. appear.
次に前記した耐熱部材を得るのに好適な製造方法の一実
施例の要部を、第６図を参照して説明する。Next, a main part of an embodiment of a manufacturing method suitable for obtaining the above-mentioned heat-resistant member will be explained with reference to FIG.
第６図においてＴａ１ｌの薄板の基材１の表面には、直
角方向からＮｂ粉末を溶射して下地コーティング２を施
しである。この下地コーティング２の上に、９０度以下
の溶射角θをもたせて配置した溶射ガン６を平行移動さ
せながら、ＺｒＯ，、（８％Ｙ８０．安定化ＺｒＯ，で
あってよい）を溶射しコーティング層３を形成させる６
図中符号７は溶射粒子の飛跡を表す。In FIG. 6, a base coating 2 is applied to the surface of a Ta1l thin plate base material 1 by thermally spraying Nb powder from a right angle direction. On top of this base coating 2, ZrO, (8% Y80, which may be stabilized ZrO,) is thermally sprayed onto the base coating 2 while moving the thermal spray gun 6, which is arranged with a thermal spray angle θ of 90 degrees or less, in parallel. forming layer 3 6
Reference numeral 7 in the figure represents the trajectory of thermal spray particles.
ところで溶射によって板材に薄膜を形成する場合、ち密
な薄膜を得るためにその溶射角度は一般に９０度方向か
ら行なわれ、傾斜を与えるとしても４５度程度までとさ
れている。これは溶射角度を小とすると、溶射初期に板
材に付着した粒子が後から飛来する粒子に対してかげの
部分を作ることとなり、その進路を妨害するいわゆる遮
蔽現象が生ずる。この現象が生じたときの被膜は、従来
非常に被膜の気孔率が高く、且つうねりが生じたきわめ
て劣悪なものとされていた。By the way, when forming a thin film on a plate material by thermal spraying, the spraying angle is generally 90 degrees in order to obtain a dense thin film, and even if an inclination is applied, it is limited to about 45 degrees. This is because if the spraying angle is made small, the particles that adhere to the plate material at the beginning of the spraying will create a shadow area for the particles that fly in later, causing a so-called shielding phenomenon that obstructs the path of the particles. Conventionally, when this phenomenon occurs, the coating has a very high porosity and is considered to be extremely poor in that it has waviness.
しかしながら本実施例においては、上記の溶射角Ｏを３
０度乃至４０度の範囲の一定値を選び、溶射ロボット等
を用いて溶射条件の変動を防止して溶射することにより
、上記した遮蔽現象の効果が顕著に且つ規則的に発揮さ
れ、耐熱・耐食性に優れたうろこ状に重なりあった被膜
からなるコーティング層３が得られる。良好なコーティ
ング層３が得られた溶射条件の一例を第１表に示す。However, in this example, the above-mentioned spray angle O was changed to 3
By selecting a constant value in the range of 0 degrees to 40 degrees and spraying while preventing fluctuations in the spray conditions using a spray robot, etc., the effect of the above-mentioned shielding phenomenon is exhibited noticeably and regularly, and heat resistance and A coating layer 3 consisting of overlapping scale-like films with excellent corrosion resistance is obtained. Table 1 shows an example of thermal spraying conditions under which a good coating layer 3 was obtained.
（以下余白）
このようにして得られたコーティング層３は気孔に富み
、その充填率は、直角方向から溶射されたものの７０〜
９０％程度となっている。すなわち充填率が低いため粒
子間の結合力が低下し、温度上昇によっ・て湾曲変形を
生じた場合、うろこの根幹に近く被膜が薄い部分で容易
に亀裂が発生することになる。(Left below) The coating layer 3 thus obtained is rich in pores, and its filling rate is 70 to 70% even though it is thermally sprayed from the right angle.
It is about 90%. In other words, because the filling rate is low, the bonding force between particles decreases, and when curved deformation occurs due to temperature rise, cracks easily occur in areas where the coating is thin near the base of the scales.
このコーティング層３の充填率と直角に溶射したものの
充填率の比が、溶射角θによって変化する様子を実験し
た結果を第７図に示す、溶射角が６０度以下になると、
コーティング層３はうろこ状を呈する傾向をみせはじめ
るが完全ではなく、また３０度未満では溶射被膜自体の
形成が困薙になる。Figure 7 shows the results of an experiment to see how the ratio of the filling rate of this coating layer 3 to that of the coating layer sprayed at right angles changes depending on the spraying angle θ.When the spraying angle becomes 60 degrees or less,
The coating layer 3 starts to show a tendency to take on a scaly shape, but it is not perfect, and if the angle is less than 30 degrees, it becomes difficult to form the sprayed coating itself.
したがって溶射角は３０度乃至５０度の範囲が適切であ
る。Therefore, the appropriate thermal spray angle is in the range of 30 degrees to 50 degrees.
次にコーティング層を施した２０（ｄ） ｘ １５０（
ｗ） Ｘ ２（１）膿の試験片の中央に押圧力を加えた
とき、コしたものとの比が、溶射角θによって変化する
様子を実験した結果を８図に示す。この比はやはり溶射
角が４ＩＯ度以下になると上昇を開始し、溶射角が３０
と度で約１．５に達した。Next, a coating layer was applied to 20(d) x 150(
w) X 2 (1) When a pressing force is applied to the center of a test piece of pus, the ratio to that of the pus changes depending on the spray angle θ. The results of an experiment are shown in Figure 8. This ratio also starts to increase when the spray angle becomes less than 4IO degrees, and when the spray angle becomes 30
It reached about 1.5 degrees.
なおコーティング層３を形成する溶射物質は、ＺｒＯ２
に限らず、 Ｙ２Ｏ３，１ｌｆＯ，、Ｔｈｏ２１Ｍｇｏ
等のセラミックスを用いてもよい、また基材１もＴａ以
外の高融点金属を使用することができる。The sprayed material forming the coating layer 3 is ZrO2.
Not limited to Y2O3, 1lfO,, Tho21Mgo
The base material 1 may also be made of a high melting point metal other than Ta.
本発明によれば、耐熱・耐食性のコーティング層を有す
る耐熱部材が繰返し加熱・冷却されても、コーティング
層が剥離し薙い耐熱部材およびその製造方法を提供する
ことができる。According to the present invention, it is possible to provide a heat-resistant member in which the coating layer does not peel off even when the heat-resistant member having a heat-resistant and corrosion-resistant coating layer is repeatedly heated and cooled, and a method for manufacturing the heat-resistant member.
第１図は本発明の一実施例を示す側面部分断面図、第２
図は第１図の正面図、第３図は第１図の作用を説明する
ための部分断面図、第４図および第５図はそれぞれ第１
図の結果を説明するための側面部分断面図およびその正
面図、第６図は本発明の製造方法の一実施例を示す側面
部分断面図、第７図および第８図はそれぞれ第６図の効
果を説明するための線図である。
１・・・基材 ２・・・下地コーティング
３・・・コーティング層 ４・・・亀裂５・・・液滴
６・・・溶射ガン代理人 弁理士 則
近 憲 佑
同 三俣弘文
第１図
第２図
第 ６１ＸＪ
第３図
第４図
第５図FIG. 1 is a side partial cross-sectional view showing one embodiment of the present invention, and FIG.
The figure is a front view of Fig. 1, Fig. 3 is a partial sectional view for explaining the action of Fig. 1, and Figs.
6 is a side partial sectional view showing an embodiment of the manufacturing method of the present invention, and FIGS. 7 and 8 are respectively the same as those shown in FIG. 6. FIG. 3 is a diagram for explaining the effect. 1...Base material 2...Base coating 3...Coating layer 4...Crack 5...Droplet 6...Thermal spray gun agent Patent attorney Rules
Yudo Chika Ken Hirofumi MitsumataFigure 1Figure 2Figure 61XJ Figure 3Figure 4Figure 5
Claims (1)
ラミック材からなる耐食性のコーティング層を有する耐
熱部材において、うろこ状をなして前記高温物質に接面
する前記コーティング層を設けたことを特徴とする耐熱
部材。 ２、前記うろこ状をなしたコーティング層はＺｒＯ＿２
、Ｙ＿２Ｏ＿３、ＨｆＯ＿２、ＴｈＯ＿２、ＭｇＯの内
のいずれか１種からなる特許請求の範囲第１項記載の耐
熱部材。 ３、前記高温物質は高温蒸気であり、前記うろこ状をな
したコーティング層の開口方向を、前記うろこ状をなし
たコーティング層の表面に付着した前記高温蒸気の液化
物の流動方向に一致させてなる特許請求の範囲第１項記
載の耐熱部材。 ４、基材の高温物質と相対する面に少なくとも一層のセ
ラミック材からなる耐食性のコーティング層を溶射して
施す耐熱部材の製造方法において前記高温物質に接面す
るコーティング層を溶射角３０度乃至５０度にて溶射す
ることを特徴とする耐熱部材の製造方法。 ５、前記高温物質に接面するコーティング層はＺｒＯ＿
２、Ｙ＿２Ｏ＿３、ＨｆＯ＿２、ＴｈＯ＿２、ＭｇＯの
内のいずれか１種を溶射する特許請求の範囲第４項記載
の耐熱部材の製造方法。[Scope of Claims] 1. In a heat-resistant member having at least one corrosion-resistant coating layer made of a ceramic material on the surface of the base material facing the high-temperature substance, the coating layer has a scale shape and is in contact with the high-temperature substance. A heat-resistant member characterized by being provided with. 2. The scale-shaped coating layer is ZrO_2
, Y_2O_3, HfO_2, ThO_2, and MgO. 3. The high-temperature substance is high-temperature steam, and the opening direction of the scale-shaped coating layer is made to match the flow direction of the liquefied high-temperature steam adhering to the surface of the scale-shaped coating layer. A heat-resistant member according to claim 1. 4. In a method for producing a heat-resistant member, in which a corrosion-resistant coating layer made of at least one ceramic material is thermally sprayed on the surface of a base material facing a high-temperature substance, the coating layer facing the high-temperature substance is sprayed at a spraying angle of 30 degrees to 50 degrees. A method for producing a heat-resistant member, characterized in that thermal spraying is performed at a temperature of 30°C. 5. The coating layer in contact with the high temperature substance is ZrO_
2. The method for manufacturing a heat-resistant member according to claim 4, wherein any one of Y_2O_3, HfO_2, ThO_2, and MgO is thermally sprayed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62074357A JPS63241153A (en) | 1987-03-30 | 1987-03-30 | Heat-resisting member and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62074357A JPS63241153A (en) | 1987-03-30 | 1987-03-30 | Heat-resisting member and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63241153A true JPS63241153A (en) | 1988-10-06 |
Family
ID=13544793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62074357A Pending JPS63241153A (en) | 1987-03-30 | 1987-03-30 | Heat-resisting member and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63241153A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991005886A2 (en) * | 1989-10-20 | 1991-05-02 | Union Carbide Coatings Service Technology Corporation | Thermal barrier coating for substrates and process for producing it |
| DE102005050873A1 (en) * | 2005-10-21 | 2007-04-26 | Rolls-Royce Deutschland Ltd & Co Kg | Process to manufacture a ceramic-coated gas turbine engine blade incorporating a regular array of surface irregularities |
| JP2007284758A (en) * | 2006-04-18 | 2007-11-01 | Tosoh Corp | Vacuum device member, its manufacturing method, and vacuum device |
-
1987
- 1987-03-30 JP JP62074357A patent/JPS63241153A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991005886A2 (en) * | 1989-10-20 | 1991-05-02 | Union Carbide Coatings Service Technology Corporation | Thermal barrier coating for substrates and process for producing it |
| DE102005050873A1 (en) * | 2005-10-21 | 2007-04-26 | Rolls-Royce Deutschland Ltd & Co Kg | Process to manufacture a ceramic-coated gas turbine engine blade incorporating a regular array of surface irregularities |
| DE102005050873B4 (en) * | 2005-10-21 | 2020-08-06 | Rolls-Royce Deutschland Ltd & Co Kg | Process for producing a segmented coating and component produced by the process |
| JP2007284758A (en) * | 2006-04-18 | 2007-11-01 | Tosoh Corp | Vacuum device member, its manufacturing method, and vacuum device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5887273A (en) | Parts having ceramic coated layer and their production | |
| US9524888B2 (en) | Stage heater and method of manufacturing shaft | |
| JPH01139988A (en) | Crucible for melting metal | |
| JPS63241153A (en) | Heat-resisting member and its production | |
| WO2004070076A1 (en) | Corrosion-resistant member and method for producing same | |
| KR101088124B1 (en) | Target for sputtering process and method of manufacturing the same | |
| JPS586782B2 (en) | Ceramics scoring method | |
| US5423475A (en) | Diamond coatings for aluminum alloys | |
| JP2011117012A (en) | Executing method of thermal barrier coating, heat-resistant member, and gas turbine | |
| US3265519A (en) | Article comprising several layers of pyrolytic graphite and substrate coated with said layers | |
| KR20130010557A (en) | Hot plate of semiconductor manufacturing apparatus | |
| US6057011A (en) | High temperature and highly corrosive resistant sample containment cartridge and method of fabricating same | |
| JPS63233289A (en) | Crucible for melting uranium | |
| JPH11124662A (en) | Self-repairing heat-insulating film and its production | |
| JPH0379749A (en) | Formation of corrosion resisting coating layer | |
| JPH04201075A (en) | Blasting method and flame coated film manufacturing method and adhesive lamination member | |
| JPS61288060A (en) | Plasma arc thermal spraying method under reduced pressure | |
| Li et al. | Study on the Influence of Vacuum Vapor Phase Soldering Process Technology on SiP Component | |
| JPH0312377A (en) | Coated structural material | |
| JPH01275750A (en) | Thin metallic film manufacturing equipment | |
| JPS6017063A (en) | Ceramic coating layer having high toughness and its production | |
| JPH09175876A (en) | Heat-resistant member and its production | |
| JPH02129035A (en) | Mold for molding optical element | |
| UA30804C2 (en) | A composition for obtaining a protective gradient coating on a metal substrate by electron evaporation and condensation in vacuum | |
| JPH0387346A (en) | Gradient thermal spraying method |