JPS63239886A - Metal vapor laser - Google Patents
Metal vapor laserInfo
- Publication number
- JPS63239886A JPS63239886A JP7161187A JP7161187A JPS63239886A JP S63239886 A JPS63239886 A JP S63239886A JP 7161187 A JP7161187 A JP 7161187A JP 7161187 A JP7161187 A JP 7161187A JP S63239886 A JPS63239886 A JP S63239886A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- windows
- mirror
- laser device
- discharge tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims description 13
- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 9
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000010355 oscillation Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 210000004303 peritoneum Anatomy 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/031—Metal vapour lasers, e.g. metal vapour generation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明は金属蒸気レーザ装置に関し、特に放電管内で発
生する熱源の有効利用を図りた金属蒸気レーザ装置に係
わる。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Field of Application) The present invention relates to a metal vapor laser device, and particularly to a metal vapor laser device that aims to effectively utilize a heat source generated within a discharge tube.
（従来の技術）
従来、金属蒸気レーザ装置としては、例えば第１図に示
すものが知られている。(Prior Art) Conventionally, as a metal vapor laser device, one shown in FIG. 1, for example, is known.
図中の１は、レーザ装置本体である。この装置本体１に
は耐熱性材質（例えばセラミックスなど）からなる放電
管２が設けられ、該放電管２の両端には一対の円筒状の
電極３．４が設けられている。1 in the figure is the main body of the laser device. The device main body 1 is provided with a discharge tube 2 made of a heat-resistant material (for example, ceramics), and a pair of cylindrical electrodes 3.4 are provided at both ends of the discharge tube 2.
前記放電管２の内部には、活性媒質である金属蒸気を発
生させる金属レーザ媒′Ｒ５が配置されている。前記レ
ーザ装置本体１の長手方向の両端には、光学研磨した石
英ガラスもしくは光学ガラスなどの窓６，７が夫々設け
られている。これら窓６゜７を通る直線上つまりレーザ
光の発振光路上には、レーザ共振器を形成する高反射ミ
ラー８及び出力ミラー９が夫々設けられている。前記放
電管２の外周及び電極３．４の一部の外周には、断熱材
１０が設けられている。なお、図中の１１は放電管２の
外壁を常温にするための真空断熱層、１２は真空断熱層
シール、１３はセラミックブレーク、１４はレーザ共振
器内光軸である。また、図示しないが、前記レーザ装置
本体１は水冷されている。A metal laser medium 'R5 that generates metal vapor as an active medium is disposed inside the discharge tube 2. Windows 6 and 7 made of optically polished quartz glass or optical glass are provided at both longitudinal ends of the laser device main body 1, respectively. A high reflection mirror 8 and an output mirror 9 forming a laser resonator are provided on a straight line passing through these windows 6.degree. 7, that is, on the oscillation optical path of the laser beam. A heat insulating material 10 is provided around the outer circumference of the discharge tube 2 and a part of the outer circumference of the electrode 3.4. In the figure, 11 is a vacuum insulation layer for keeping the outer wall of the discharge tube 2 at room temperature, 12 is a vacuum insulation layer seal, 13 is a ceramic break, and 14 is an optical axis within the laser resonator. Although not shown, the laser device main body 1 is water-cooled.
こうした構造の装置において、放電管２内を例えば１０
〜２０ＴＯｒｒのバッフ７ガス（）Ｉｅガス）で満たし
、放電させると、放電のエネルギにより放電管２が加熱
され、その温度が壬数百度に達する。この時、上記媒質
の蒸気が所定の圧力に達し、金属蒸気が放電により励起
される。そして、レーザ光は窓６，７を通し、前記出力
ミラー８と全反射ミラー９の間を往復してレーザ発掘す
る。In a device with such a structure, for example, 10
When the tube is filled with ~20 TOrr of buff 7 gas (Ie gas) and discharged, the discharge energy heats the discharge tube 2 and its temperature reaches several hundred degrees. At this time, the vapor of the medium reaches a predetermined pressure, and the metal vapor is excited by discharge. Then, the laser beam passes through the windows 6 and 7 and travels back and forth between the output mirror 8 and the total reflection mirror 9 for laser excavation.
しかしながら、従来装置によれば、レーザ装置本体１に
断熱材１０や真空断熱層１１が設けられ、放電路を高温
にするように工夫されているが、レーザ共振器内光軸１
４には窓６．７で封じられているだけのため、近赤外か
ら赤外の熱線は窓６゜７、出力ミラー８及び全反射ミラ
ー９を通して外部に放射される。従って、それらの熱線
は放電路つまり放電管２内の温度を上昇させるには寄与
せず、あるレーザ出力レベルを達成するにはより多くの
放電入力を加えねばならない゛。However, according to the conventional device, the laser device main body 1 is provided with a heat insulating material 10 and a vacuum heat insulating layer 11 to make the discharge path high temperature.
4 is only closed by a window 6.7, near-infrared to infrared heat rays are radiated to the outside through the window 6.7, the output mirror 8, and the total reflection mirror 9. Therefore, these hot wires do not contribute to increasing the temperature within the discharge path or discharge tube 2, and more discharge input must be applied to achieve a certain laser output level.
（発明が解決しようとする問題点）
本発明は上記事情に鑑みてなされたもので、従来より低
い入力で同様なレーザ出力が得られる金属蒸気レーザ装
置を提供することを目的とする。(Problems to be Solved by the Invention) The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a metal vapor laser device that can obtain a similar laser output with a lower input than the conventional laser device.
［発明の構成］
（問題点を解決するための手段と作用）本発明は、レー
ザ装置本体と、このレーザ装置本体に設けられ内部に金
属レーザ媒質が配置された放電管と、この放電管の両端
に設けられた一対の電極と、前記レーザ装置本体の長手
方向の両端に夫々設けられた窓と、これら窓を通る直線
上に設けられた共振ミラーと、前記両窓又は共振ミラー
にコーティングされ、発振光に対しては無反射でレーザ
光軸方向から放出される熱線のうち大部分の熱線に対し
ては反射する被膜とを具備することを要旨とする。本発
明によれば、レーザ装置本体の長手方向の両端にもうけ
れた窓、あるいは反射ミラー及び出力ミラーに所定の反
射特性を有した被膜をコーティングすることにより、従
来より低い入力で同様なレーザ出力が得られる。[Structure of the Invention] (Means and Effects for Solving Problems) The present invention provides a laser device main body, a discharge tube provided in the laser device main body and having a metal laser medium disposed inside, and a discharge tube of the discharge tube. A pair of electrodes provided at both ends, windows provided at both longitudinal ends of the laser device main body, a resonant mirror provided on a straight line passing through these windows, and a coating on both windows or the resonant mirror. The gist of the present invention is to include a coating that does not reflect oscillation light but reflects most of the heat rays emitted from the direction of the laser optical axis. According to the present invention, by coating the windows provided at both longitudinal ends of the laser device body or the reflection mirror and output mirror with a film having predetermined reflection characteristics, the same laser output can be achieved with a lower input than before. is obtained.
（実施例〉
以下、本発明の一実施例を図を参照して説明する。但し
、同装置は従来装置（第１図）と同部材は同符号を付し
て説明を省略する。(Embodiment) Hereinafter, an embodiment of the present invention will be described with reference to the drawings.However, in the same device, the same members as in the conventional device (FIG. 1) are given the same reference numerals, and the explanation will be omitted.
（実施例１）
本実施例では、表面に第２図に示す反射特性を持つ蒸＠
ＩＡ（誘電体多層膜）をコーティングした窓６．７を用
いた。この蒸着膜は、レーザ発振光の波長では無反射で
あり、かつ近赤外域以上の赤外域では反射する特性を有
している。(Example 1) In this example, a vaporized @
Windows 6.7 coated with IA (dielectric multilayer film) were used. This vapor-deposited film has the property of being non-reflective at the wavelength of the laser oscillation light and reflecting at the infrared region beyond the near-infrared region.
上記実施例１によれば、窓６，７の表面に上記蒸１１１
１をコーティングしたことにより、近赤外域以上の赤外
域の放射光（熱線）が窓６．７で反射され、放電管２内
に戻るため、従来と同じ放電入力でも放電管内の温度を
より高温にすることができる。According to the first embodiment, the vapor 111 is provided on the surfaces of the windows 6 and 7.
By coating 1, synchrotron radiation (heat rays) in the infrared region above the near-infrared region is reflected by the window 6.7 and returns to the inside of the discharge tube 2, so even with the same discharge input as before, the temperature inside the discharge tube can be raised to a higher temperature. It can be done.
（実施例２）
本実施例では、表面に第３図に示す反射特性を持つ第１
蒸着膜をコーティングした全反射ミラー８を用いるとと
もに、第４図に示す如く反射特性を持つ第２蒸着腹膜を
コーティングした出力ミラ−９を用いた。即ち、上記第
１蒸着膜は、レーザ発振波長においてはできるだけ１０
０％近く反射し、かつ近赤外域以上の赤外域では高い反
射率特性を有する。また、前記第２蒸着躾は、レーザ発
振波長に対しては適切な反射率で、かつ近赤外域以上の
赤外域では高い反射率を有する。(Example 2) In this example, a first
A total reflection mirror 8 coated with a vapor deposited film was used, and an output mirror 9 coated with a second vapor deposited peritoneum having reflective properties as shown in FIG. 4 was used. That is, the first vapor-deposited film has a wavelength of 10 as much as possible at the laser oscillation wavelength.
It reflects nearly 0% and has high reflectance characteristics in the infrared region above the near infrared region. Further, the second vapor deposition layer has an appropriate reflectance for the laser oscillation wavelength, and has a high reflectance in the infrared region beyond the near-infrared region.
実施例２によれば、全反射ミラー８の表面に第３図に示
す反射特性を有した第１蒸看膜をコーティングし、かつ
出力ミラー９に第４図に示す反射特性の第２蒸着膜をコ
ーティングすることにより、近赤外域以上の赤外域の放
射光（熱線）が全反射ミラー８及び出力ミラー９で反射
され、放電管２内に戻るため、従来と同じ放電入力でも
放電管内の温度をより高温にすることができる。According to the second embodiment, the surface of the total reflection mirror 8 is coated with a first vaporized film having the reflection characteristics shown in FIG. 3, and the output mirror 9 is coated with a second vaporized film having the reflection characteristics shown in FIG. By coating the infrared radiation (heat rays) in the near-infrared region or higher, the radiation light (heat rays) in the infrared region above the near-infrared region is reflected by the total reflection mirror 8 and the output mirror 9 and returns to the inside of the discharge tube 2. Therefore, even with the same discharge input as before, the temperature inside the discharge tube can be reduced. can be heated to higher temperatures.
なお、上記実施例では、窓、出力ミラー、全反射ミラー
の近赤外及び赤外域の反射率が１００％の場合であるが
、これに限定されるものではない。また、赤外域全域に
わたる必要もない。更に、反射率および反射域の変動は
効率改善の量に寄与するだけで、それをしないときより
は効率は向上する。In the above embodiment, the reflectance of the window, output mirror, and total reflection mirror in the near-infrared and infrared regions is 100%, but the present invention is not limited to this. Further, it is not necessary to cover the entire infrared region. Furthermore, variations in reflectance and reflection area only contribute to the amount of efficiency improvement that would be better than without it.
上記実施例２は共振器として安定形共振器を用いた場合
であるが、例えば出力ミラーの中心にレーザ反射波長に
対して１００％反射、その周囲はＡＲコートが施された
不安定形共振器であっても全反射ミラーの特性は第３図
であり、出力ミラ一部のＡＲコート部の反射特性が第２
図であれば同様の作用をする。The second embodiment above uses a stable resonator as the resonator, but for example, an unstable resonator with 100% reflection for the laser reflection wavelength at the center of the output mirror and an AR coating around the center of the output mirror is used. Even if there is, the characteristics of the total reflection mirror are shown in Figure 3, and the reflection characteristics of the AR coating part of the output mirror are shown in Figure 2.
A diagram has the same effect.
上記実施例では、両窓、あるいは全反射ミラーと出力ミ
ラーに所定の反射特性を有する蒸着膜をコーティングし
た場合であるが、例えば窓６と全反射ミラー、あるいは
窓７と出力ミラーに夫々所定の反射特性を有する蒸着膜
をコーティングする場合等でもよい。In the above embodiment, both windows, or the total reflection mirror and the output mirror are coated with vapor deposited films having predetermined reflection characteristics. It may also be a case where a deposited film having reflective properties is coated.
［発明の効果］
以上詳述した如く本発明によれば、従来より低い入力で
同様なレーザ出力が得られる金属蒸気レーザ装置を提供
できる。[Effects of the Invention] As detailed above, according to the present invention, it is possible to provide a metal vapor laser device that can obtain the same laser output with a lower input than the conventional laser device.
第４図は夫々波長と反射率との関係を示す特性図である
。FIG. 4 is a characteristic diagram showing the relationship between wavelength and reflectance.
１・・・レーザ装置本体、２・・・放電管、３．４・・
・電極、５・・・金属レーザ媒質、６，７・・・窓、８
・・・全反射ミラー、９・・・出力ミラー、１ｏ・・・
断熱材、１１・・・真空断熱層。1...Laser device main body, 2...Discharge tube, 3.4...
・Electrode, 5... Metal laser medium, 6, 7... Window, 8
... Total reflection mirror, 9... Output mirror, 1o...
Insulation material, 11... vacuum insulation layer.
Claims (1)
に金属レーザ媒質が配置された放電管と、この放電管の
両端に設けられた一対の電極と、前記レーザ装置本体の
長手方向の両端に夫々設けられた窓と、これら窓を通る
直線上に設けられた共振ミラーと、前記両窓又は共振ミ
ラーにコーティングされ、発振光に対しては無反射でレ
ーザ光軸方向から放出される熱線のうち大部分の熱線に
対しては反射する被膜とを具備することを特徴とする金
属蒸気レーザ装置。A laser device main body, a discharge tube provided in the laser device main body and having a metal laser medium arranged inside, a pair of electrodes provided at both ends of the discharge tube, and a pair of electrodes provided at both longitudinal ends of the laser device main body, respectively. A window provided, a resonant mirror provided on a straight line passing through these windows, and a heat ray that is coated on both windows or the resonant mirror and is emitted from the laser optical axis direction without reflecting the oscillated light. A metal vapor laser device characterized by comprising a coating that reflects most of the heat rays.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7161187A JPS63239886A (en) | 1987-03-27 | 1987-03-27 | Metal vapor laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7161187A JPS63239886A (en) | 1987-03-27 | 1987-03-27 | Metal vapor laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63239886A true JPS63239886A (en) | 1988-10-05 |
Family
ID=13465618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7161187A Pending JPS63239886A (en) | 1987-03-27 | 1987-03-27 | Metal vapor laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63239886A (en) |
-
1987
- 1987-03-27 JP JP7161187A patent/JPS63239886A/en active Pending
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