JPS63238433A - Light processing apparatus - Google Patents
Light processing apparatusInfo
- Publication number
- JPS63238433A JPS63238433A JP7156187A JP7156187A JPS63238433A JP S63238433 A JPS63238433 A JP S63238433A JP 7156187 A JP7156187 A JP 7156187A JP 7156187 A JP7156187 A JP 7156187A JP S63238433 A JPS63238433 A JP S63238433A
- Authority
- JP
- Japan
- Prior art keywords
- light
- measuring mechanism
- illuminance
- processing table
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 abstract description 8
- 230000002441 reversible effect Effects 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
Landscapes
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Light Guides In General And Applications Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、移動可能な照度測定機構を有する光処理装
置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a light processing device having a movable illuminance measuring mechanism.
［従来の技術］ 例えば半導体ウェハのレジスト処理に対して。[Conventional technology] For example, for resist processing of semiconductor wafers.
従来から光処理装置が用いられているにの光処理装置は
、高圧水銀灯等のランプを光源として処理台上にａ置さ
れた半導体ウェハに光照射を行うことによってレジスト
処理を行うものである。この場合、ランプは使用するう
ちに寿命により照度が落ちること等から、処理に必要な
照度を得ているか否か知る必要がある。また、このレジ
スト処理は場合によって加熱処理を行う場合もあり、そ
れに光処理装置の内部はランプから照射される光の他に
熱も発生するので、処理台周辺の温度は５００℃前後に
まで上昇する。その上、この光処理装置の処理台におけ
る光の照度分布はほぼ均一でなければならないという条
件がある。2. Description of the Related Art Optical processing equipment that has been used in the past performs resist processing by irradiating light onto a semiconductor wafer placed on a processing table using a lamp such as a high-pressure mercury lamp as a light source. In this case, it is necessary to know whether the illumination intensity required for the process is being obtained, since the illuminance of the lamp decreases as it is used due to its lifespan. In addition, this resist processing may require heat treatment in some cases, and the inside of the optical processing equipment generates heat in addition to the light irradiated from the lamp, so the temperature around the processing table can rise to around 500 degrees Celsius. do. Moreover, there is a condition that the illuminance distribution of light on the processing table of this optical processing apparatus must be substantially uniform.
［発明か解決しようとする問題点］
上述の如く、光処理装置において効率的な光処理を行う
ためには、処理台の各点における照度を知ることが必要
であるが、従来は装置の内部が狭く、かつ場合によって
は高温のために装置内の処理台の温度を測定することは
困難であるという問題があった。[Problem to be solved by the invention] As mentioned above, in order to perform efficient light processing in a light processing device, it is necessary to know the illuminance at each point on the processing table. There has been a problem in that it is difficult to measure the temperature of the processing table inside the apparatus because it is narrow and, in some cases, high temperature.
この発明はかかる従来の問題点を解決するためになされ
たもので、照度測定機構の出入が可癒な光処理装置を提
供することを目的とする。The present invention was made to solve these conventional problems, and it is an object of the present invention to provide a light processing device in which an illuminance measurement mechanism can be moved in and out.
［問題点を解決するための手段］
上記の目的を達成するために、この発明の光処理装置は
、処理台の照度を測定するために光を導入するライトガ
イドと受光器とアンプとからなる照度測定機構を設け、
この照度測定機構を連結部を介して移動ＩＩＴ ＩＦ、
にする駆動部と接続した構成を有するしのである。[Means for Solving the Problems] In order to achieve the above object, the optical processing device of the present invention includes a light guide for introducing light to measure the illuminance of the processing table, a light receiver, and an amplifier. Equipped with an illuminance measurement mechanism,
This illuminance measurement mechanism is moved via the connecting part IIT IF,
It has a configuration in which it is connected to a drive unit that provides a drive unit.
［作用］
上記の構成を有することにより、ライトガイドを用いて
狭い空間の中を出入することにより、処理台上の各点の
照度を測定することかできる。[Operation] With the above configuration, the illuminance at each point on the processing table can be measured by moving in and out of a narrow space using a light guide.
［実施例］
第１図（ａ）は第１番目の発明の一実施例である光処理
装置における、主として照度測定機構及び駆動部の慨略
を示す断面図であり、ｌは高圧水銀灯等からなるランプ
、２はこのランプの背後に設けられた集光ミラー、３は
半導体ウニへ等を載こするための処理台で、これらラン
プ１及び反射ミラー２からなるランプハウスと処理台３
によって光処理装置の主要部をＪＩｌｉ成している。１
１はランプｌから処理台３に照射される処理台３上の各
点の照度を測定するために設けられた移動可能なライト
ガイド、１２はこのライトガイド１１を介して導入され
た光を充電変換するための受光器、１３はこの受光器１
２からの電気信号を増幅するだめのアンプで、１４はこ
れらライトガイド１１と受光器１２及びアンプ１３から
なる照度測定機構を移動させるために駆動部と連結する
ための連結部である。また、この駆動部はプーリ１５と
ベルト１６．レール１７．モータ１８からなり、１９は
上記照度測定機構の移動位置を検知してモータのスイッ
チをオン−オフするためのセンサ、２０は連結部１４を
停止させるためのストッパである。また、第１図（ｂ）
は同図（ａ）の断面Ａ−Ａ”における側断面図である。[Example] Fig. 1(a) is a cross-sectional view mainly showing the outline of the illuminance measuring mechanism and the driving part in a light processing device which is an example of the first invention, and l is a sectional view showing the outline of the illuminance measuring mechanism and the driving part. 2 is a condensing mirror installed behind this lamp, 3 is a processing table for placing semiconductors, etc., and the lamp house consisting of the lamp 1 and the reflecting mirror 2 and the processing table 3
This makes up the main part of the optical processing device. 1
Reference numeral 1 denotes a movable light guide provided to measure the illuminance of each point on the processing table 3 irradiated from the lamp l to the processing table 3, and 12 charges the light introduced via this light guide 11. A photoreceiver for conversion, 13 is this photoreceiver 1
14 is a connecting part for connecting to a driving part to move the illuminance measurement mechanism consisting of the light guide 11, the light receiver 12, and the amplifier 13. Moreover, this drive section includes a pulley 15 and a belt 16. Rail 17. It consists of a motor 18, 19 a sensor for detecting the moving position of the illuminance measuring mechanism and turning the motor on and off, and 20 a stopper for stopping the connecting part 14. Also, Fig. 1(b)
is a side sectional view taken along section A-A'' in FIG.
また、第３図はライトガイド１１の詳細を示す断面図で
、２６は熱伝導のよい金属（例えば銅）かうなる管で端
部に開孔２９を有し、この開孔２９に対して４５″に設
置された光拡散板２７を設け、この光拡散板２７に照射
するランプ１からの光を拡散し、反射して束ねられた光
ファイバ２８に光を伝送する。FIG. 3 is a cross-sectional view showing the details of the light guide 11. Reference numeral 26 is a tube made of a metal (for example, copper) with good thermal conductivity, and has an opening 29 at the end. A light diffusing plate 27 is provided, and the light from the lamp 1 that is irradiated onto the light diffusing plate 27 is diffused, reflected, and transmitted to the bundled optical fibers 28.
いま、第１ｒｊＵの実線の状態からモータ１８を逐次回
転させると、そのモータ１８の回転に応じ°てブーツ１
５が回転し、ベルト１６を動かして連結部１４がレール
１７上を移動する。それによって連結部１４を紙面右か
ら左へ矢印のように移動させると同時に、ライトガイド
１１を光処理装置のランプハウス内に挿入する。Now, if the motor 18 is sequentially rotated from the state indicated by the solid line of the first rjU, the boot 1 will change depending on the rotation of the motor 18.
5 rotates, moving the belt 16 and moving the connecting portion 14 on the rail 17. As a result, the connecting portion 14 is moved from right to left in the drawing as shown by the arrow, and at the same time, the light guide 11 is inserted into the lamp house of the light processing device.
また、このモータ１８はリバーシブルモータであるが、
照度測定機構のストロークの長い移動なセンサ１９によ
ってその都度検知してオン−オフを創御させれば、処理
台３の各点の照度を小刻みに測定することができる。ま
た、このモータ１８としてリバーシブルモータでなくパ
ルスモータを用いれば、センサ１９を設けなくても処理
台３の各点の照度を小刻みに測定することができる。さ
らに、ストッパ２０はセンサ１９てモータ１８のスイッ
チをオフした後、幾分移動する照度測定機構を確実に停
止させるものである。Furthermore, although this motor 18 is a reversible motor,
If the sensor 19 with a long stroke of the illuminance measuring mechanism detects each time and controls the on-off, the illuminance at each point on the processing table 3 can be measured in small increments. Furthermore, if a pulse motor is used instead of a reversible motor as the motor 18, the illuminance at each point on the processing table 3 can be measured in small increments without providing the sensor 19. Furthermore, the stopper 20 reliably stops the illuminance measuring mechanism, which moves somewhat, after the sensor 19 switches off the motor 18.
そして、照度の測定が終了すると、モータ１８は逆転し
て連結部１４を移動することによってライトガイドｔｉ
はランプハウス内から取出される。When the illuminance measurement is completed, the motor 18 reverses and moves the connecting part 14 to move the light guide ti.
is taken out from inside the lamp house.
また、第２図（ａ）、（ｂ）は第２番目の発明の実施例
を示す断面図及び側断面図で、２１は連結部１４内に設
けたライトガイド冷却用の冷却管であり、その他、第１
図と同一符号は同一または相当部分を示す。Further, FIGS. 2(a) and 2(b) are a cross-sectional view and a side cross-sectional view showing an embodiment of the second invention, and 21 is a cooling pipe for cooling the light guide provided in the connecting portion 14, Others, 1st
The same reference numerals as in the figures indicate the same or corresponding parts.
第２図の光処理装置における測定機構は、処理台３の照
度測定を行う場合、ランプハウス内に挿入されるライト
ガイド１１を高温から保護するために冷却機構を設けて
いる以外は、第１番目の発明と同じ動作をする。When measuring the illuminance of the processing table 3, the measurement mechanism in the light processing apparatus shown in FIG. It works the same as the second invention.
この第２図の光処理装置はランプが光景外にも熱を大量
に出す場合もしくは処理台に加熱手段が設けられている
場合に、冷却管２１内を介して主として水のような冷却
液を連結部１４内に通すことにより、ランプハウス内で
高温になったライトガイド；を冷却する効果がある。即
ち、ライトガイドｉｔを構成する管２６は熱伝導のすぐ
れた金属で構成されているので、冷却された連結部１４
を介してライトガイド１１の昇温を防止することがてき
る。The light processing device shown in FIG. 2 mainly uses a cooling liquid such as water through the cooling pipe 21 when the lamp emits a large amount of heat outside of the scene or when the processing table is equipped with a heating means. Passing the light guide through the connecting portion 14 has the effect of cooling the light guide which has become hot inside the lamp house. That is, since the tube 26 constituting the light guide IT is made of metal with excellent heat conductivity, the cooled connecting portion 14
It is possible to prevent the temperature of the light guide 11 from rising.
尚、この実施例で述べた照度測定は可視光のみの照度で
はなく、紫外領域も含めた広い波長領域の照射光の照度
［Ｗ／ｍ’ ］を測定することである。The illuminance measurement described in this embodiment is not the illuminance of only visible light, but the illuminance [W/m'] of irradiated light in a wide wavelength range including the ultraviolet region.
また、ライ１−ガイド１１が処理台３上の照度を測定す
るために出入する径路は、レジスト処理のために処理台
上に半導体ウェハを搬送するための径路とは互いに直交
する関係を有するものとする。従って、ウェハが処理台
３上にあるときはライトガイド１１の挿入は行われない
。Further, the path through which the lie 1-guide 11 enters and exits in order to measure the illuminance on the processing table 3 has a relationship that is orthogonal to the path for transporting the semiconductor wafer onto the processing table for resist processing. shall be. Therefore, when the wafer is on the processing table 3, the light guide 11 is not inserted.
［発明の効果］
以上詳細に説明したとおり、この発明の光処理装置は、
処理台の照度を測定するために光を導入するライトガイ
ドと受光器とアンプとからなる照度測定機構を設け、こ
の照度測定機構を連結部を介して移動可能にする駆動部
と接続した構成を有するので、狭いスペースのランプハ
ウス内でも充分照度測定することができ、また、駆動機
構を小刻みに動かすことにより処理台りの各点の照度分
布も容易に測定することができるという利点がある。[Effects of the Invention] As explained in detail above, the optical processing device of the present invention has the following features:
In order to measure the illuminance of a processing table, an illuminance measuring mechanism consisting of a light guide, a light receiver, and an amplifier is provided to introduce light, and this illuminance measuring mechanism is connected to a drive part that makes it movable via a connecting part. This has the advantage that illuminance can be sufficiently measured even in a lamp house with a narrow space, and that the illuminance distribution at each point on the processing table can be easily measured by moving the drive mechanism in small increments.
第１図（ａ）は第１番目の発明の一実施例である光処理
装置における、主として照度測定機構及び駆動部の概略
を示す断面図、第１図（ｂ）は同図（ａ）の断面Ａ−Ａ
’における側断面図、第２図（ａ）、（ｂ）は第２番目
の発明の実施例を示す断面図及びＩ断面図、第３図はラ
イトガイドの詳細を示す断面図である。
図中。
１：ランプ ２：集光ミラー
３：処理台 １１ニライトガイド１２：受光器
１３：アンプ
１４：連結部 １５；プーリ
１６：ベルト １７：レール
Ｉ８：モータ １９：センサ
２０：ストツバ ２１．冷却管
代理人 弁理士 １）北 嵩 晴
第１図
′！ｊＳ２図
第３図FIG. 1(a) is a cross-sectional view mainly showing the outline of the illuminance measuring mechanism and drive unit in a light processing device which is an embodiment of the first invention, and FIG. 1(b) is a sectional view of the same as that of FIG. Cross section A-A
2(a) and 2(b) are a sectional view and I sectional view showing the second embodiment of the invention, and FIG. 3 is a sectional view showing details of the light guide. In the figure. 1: Lamp 2: Condensing mirror 3: Processing table 11 Light guide 12: Light receiver
13: Amplifier 14: Connection part 15; Pulley 16: Belt 17: Rail I8: Motor 19: Sensor 20: Stop collar 21. Cooling Pipe Agent Patent Attorney 1) Haru Kitatake Figure 1'! jS2 Figure 3
Claims (3)
スと、光照射処理のための処理台とからなる光処理装置
において、前記処理台の照度を測定するために光を導入
するライトガイドと受光器とアンプとからなる照度測定
機構を設け、この照度測定機構を連結部を介して移動可
能にする駆動部と接続した構成にしたことを特徴とする
光処理装置。(1) In a light processing device consisting of a lamp house having at least one lamp inside and a processing table for light irradiation processing, a light guide that introduces light to measure the illuminance of the processing table and a light receiver. What is claimed is: 1. A light processing device comprising: an illuminance measuring mechanism comprising a device and an amplifier; and a configuration in which the illuminance measuring mechanism is connected via a connecting portion to a movable drive section.
拡散する光拡散板と、この光拡散板からの光を導光する
束ねられた光ファイバとをそれぞれ内部に収納する金属
筒によって構成されたことを特徴とする特許請求の範囲
第（１）項記載の光処理装置。(2) The light guide consists of a metal tube that houses a light diffusion plate that receives, reflects, and diffuses the light from the lamp, and a bundle of optical fibers that guides the light from the light diffusion plate. The optical processing device according to claim (1), characterized in that:
スと光照射処理のための処理台とからなる光処理装置に
おいて、前記処理台の照度を測定するために光を導入す
るライトガイドと受光器とアンプとからなる照度測定機
構を設け、この照度測定機構を連結部を介して移動可能
にする駆動部と、前記連結部にライトガイドを冷却する
冷却機構を設けたことを特徴とする光処理装置。(3) In a light processing device consisting of a lamp house having at least one lamp inside and a processing table for light irradiation processing, a light guide and a light receiver that introduce light to measure the illuminance of the processing table. A light processing device comprising: an illuminance measuring mechanism including an amplifier; a driving section that makes the illuminance measuring mechanism movable via a connecting section; and a cooling mechanism that cools the light guide on the connecting section. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62071561A JP2561899B2 (en) | 1987-03-27 | 1987-03-27 | Light processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62071561A JP2561899B2 (en) | 1987-03-27 | 1987-03-27 | Light processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63238433A true JPS63238433A (en) | 1988-10-04 |
| JP2561899B2 JP2561899B2 (en) | 1996-12-11 |
Family
ID=13464252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62071561A Expired - Fee Related JP2561899B2 (en) | 1987-03-27 | 1987-03-27 | Light processing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2561899B2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60111124A (en) * | 1983-11-21 | 1985-06-17 | Matsushita Electric Ind Co Ltd | Illumination measuring device |
| JPS61265535A (en) * | 1985-05-20 | 1986-11-25 | Matsushita Electric Ind Co Ltd | Apparatus for measuring luminous intensity |
| JPS63201536A (en) * | 1987-02-17 | 1988-08-19 | Sumitomo Electric Ind Ltd | Ultraviolet-ray illuminance measuring instrument of ultraviolet-ray irradiation device for optical fiber drawing device |
-
1987
- 1987-03-27 JP JP62071561A patent/JP2561899B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60111124A (en) * | 1983-11-21 | 1985-06-17 | Matsushita Electric Ind Co Ltd | Illumination measuring device |
| JPS61265535A (en) * | 1985-05-20 | 1986-11-25 | Matsushita Electric Ind Co Ltd | Apparatus for measuring luminous intensity |
| JPS63201536A (en) * | 1987-02-17 | 1988-08-19 | Sumitomo Electric Ind Ltd | Ultraviolet-ray illuminance measuring instrument of ultraviolet-ray irradiation device for optical fiber drawing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2561899B2 (en) | 1996-12-11 |
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