JPS63238273A - Heat pipe roll - Google Patents
Heat pipe rollInfo
- Publication number
- JPS63238273A JPS63238273A JP7183687A JP7183687A JPS63238273A JP S63238273 A JPS63238273 A JP S63238273A JP 7183687 A JP7183687 A JP 7183687A JP 7183687 A JP7183687 A JP 7183687A JP S63238273 A JPS63238273 A JP S63238273A
- Authority
- JP
- Japan
- Prior art keywords
- roll
- heat pipes
- heat pipe
- steel strip
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000831 Steel Inorganic materials 0.000 abstract description 18
- 239000010959 steel Substances 0.000 abstract description 18
- 238000004804 winding Methods 0.000 abstract description 11
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000013000 roll bending Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000002436 steel type Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はヒートパイプロールに関し、例えば連続式真空
蒸着装置の蒸着部に適用される巻付ロール、真空シール
装置のシールロール、するいは連続式焼鈍設備のハース
ロール等に適用できるヒートパイプロールに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a heat pipe roll, such as a winding roll applied to a vapor deposition section of a continuous vacuum evaporation device, a seal roll of a vacuum sealing device, or a continuous heat pipe roll. The present invention relates to a heat pipe roll that can be applied to hearth rolls, etc. of type annealing equipment.
銅帯等の基板に連続的に例えば亜鉛等の金属をめつきす
る手段として連続式真空蒸着装置が使用されているが、
従来の巻付ロールが適用されている従来の連続式真空蒸
着装置の概略構成をs2図によって説明する。Continuous vacuum evaporation equipment is used as a means of continuously plating metals such as zinc onto substrates such as copper strips.
A schematic configuration of a conventional continuous vacuum evaporation apparatus to which a conventional winding roll is applied will be explained with reference to Fig. s2.
図中、1は銅帯(蒸着基板)、2は複数のシール室から
なる真空シール装置、3は蒸着室、4は銅帯1をガイド
して通板させる巻付ロール、5に巻付ロール4を加熱す
るヒータである。7は浴槽で内部には溶融金属(亜鉛等
)6が存在し、該金属6の蒸気6af真空条件下で発生
させ、矢印2で示すようにダクト(チャンネル)8で鋼
帯1まで導く。鋼帯1に蒸着させるに必要な金属蒸気!
(蒸発量)は、浴槽7内に設置し九ヒータ9の電力と、
浴槽7出口に設置し次シャッタ10を例えばシリンダ等
の開閉装置11で開閉して開口部120面積とを変える
ことにより制御できるように構成されている。In the figure, 1 is a copper strip (evaporation substrate), 2 is a vacuum sealing device consisting of a plurality of sealing chambers, 3 is a vapor deposition chamber, 4 is a winding roll that guides the copper strip 1 through it, and 5 is a winding roll. This is a heater that heats 4. Reference numeral 7 designates a bathtub in which molten metal (such as zinc) 6 exists, and vapor 6af of the metal 6 is generated under vacuum conditions and guided to the steel strip 1 through a duct (channel) 8 as shown by arrow 2. Metal vapor necessary to deposit on steel strip 1!
(Amount of evaporation) is determined by the electric power of nine heaters 9 installed in the bathtub 7,
The shutter 10 is installed at the outlet of the bathtub 7 and can be controlled by opening and closing the shutter 10 with an opening/closing device 11 such as a cylinder to change the area of the opening 120.
上記の浴槽7内の溶融金属6は蒸着室3下部の溶解炉1
3から圧力差によりスノーケル14を介して吸引、供給
されている。The molten metal 6 in the bath 7 is melted into the melting furnace 1 at the bottom of the vapor deposition chamber 3.
3 through the snorkel 14 due to the pressure difference.
蒸着室3は、管15及び弁16を介して真空ボング17
に接続され、通常、溶融金属6の飽和蒸気圧力よシ低い
圧力に窒素(N2)等の不活性ガスにより保持されてい
る。The deposition chamber 3 is connected to a vacuum bong 17 via a pipe 15 and a valve 16.
The pressure is normally maintained at a pressure lower than the saturated vapor pressure of the molten metal 6 with an inert gas such as nitrogen (N2).
以上の構成において、運転に際しては製造指令(鋼種、
板幅、板厚、通板速度、目標蒸着量等)に基づいて設定
された蒸着速度(単位面積、単位時間当夛の蒸着量)に
対応して蒸着室3の圧力を設定すると共に、蒸着金属の
所要蒸発量に対応させてヒータ9の電力とシャッタ10
の開度を調整することにより、鋼帯1表面の蒸着量すな
わち蒸着膜厚を目標値に制御する。In the above configuration, during operation, the manufacturing instructions (steel type,
The pressure in the deposition chamber 3 is set in accordance with the deposition rate (deposition amount per unit area, unit time) set based on the sheet width, sheet thickness, sheet passing speed, target deposition amount, etc. The power of the heater 9 and the shutter 10 are adjusted according to the required amount of evaporation of metal.
By adjusting the opening of the steel strip 1, the amount of vapor deposition on the surface of the steel strip 1, that is, the thickness of the vapor deposited film is controlled to a target value.
ところで、上記した従来の巻付ロール4では、亜鉛蒸気
がロール表面に蒸着しないように、ロール内部にヒータ
5を設はロールを約SO+、+Cに加熱している。By the way, in the above-mentioned conventional winding roll 4, a heater 5 is provided inside the roll to heat the roll to about SO+, +C so that zinc vapor is not deposited on the roll surface.
第3図は、この巻付ロール4の横断面を示す図で、ロー
ル4の内部に配置され几ヒータ5にロール全長にわ之っ
ているのに対して、銅帯10幅は各種寸法の鋼帯を取り
扱う九めロールよジもせまく、シかもロール4が約50
00であるのに対して、鋼帯1の温度はめつき前適正温
度である200〜250Cである。FIG. 3 is a cross-sectional view of the winding roll 4. The copper strip 10 has a width of various dimensions, while a heater 5 is placed inside the roll 4 and extends over the entire length of the roll. The 9th roll that handles steel strips is narrow, and the 4th roll is about 50.
00C, whereas the temperature of the steel strip 1 is 200 to 250C, which is the appropriate temperature before plating.
従って、第3図に示したようにロール4表面のうち中央
部の鋼帯型に接触する部分A部は温度が低く、ロール4
211の鋼帯1に接触しない部分B部は温度が高くなっ
てしまう。Therefore, as shown in FIG. 3, the temperature of the part A in the center of the surface of the roll 4 that contacts the steel strip mold is low;
The temperature of the portion B of the steel strip 211 that does not come into contact with the steel strip 1 becomes high.
しかも、鋼帯!に接触しているA部の内でも接触面圧の
不均等によって温度差があるため、ロール4全体に熱変
形が生じ、ロール曲り、振動を生じて鋼帯1の破断ある
いはめつき面への傷の原因となっていた。Moreover, it is a steel belt! Since there is a temperature difference due to the uneven contact pressure even in the part A that is in contact with the steel strip 1, thermal deformation occurs in the entire roll 4, causing roll bending and vibration, which may cause breakage of the steel strip 1 or damage to the plating surface. It was causing injuries.
本発明は、このような欠点のない巻付ロールとして適用
できるヒートバイグロールを提供するものである。The present invention provides a heat wrap roll that is free from such drawbacks and can be used as a winding roll.
本発明は、ロールシェル内にロール軸方向に複数本のヒ
ートパイプを設け、各ヒートパイプは適宜個所において
ロール半径方向に中心に向って突起し、かつ連結した個
所を有すること?特徴とするヒートバイ10−ルに関す
るものである。According to the present invention, a plurality of heat pipes are provided in the roll axial direction within the roll shell, and each heat pipe has appropriate locations that protrude toward the center in the roll radial direction and are connected to each other. The present invention relates to the characteristic heatbail 10-1.
本発明では、シェル内部ロール軸方向に設けられたヒー
トパイプがキール端部の高温部からロール中央の低温部
に熱を輸送し、各ヒートパイプ近傍のロール温度をその
軸方向に均一化する。In the present invention, heat pipes provided in the axial direction of the roll inside the shell transport heat from the high temperature part at the keel end to the low temperature part in the center of the roll, thereby making the roll temperature near each heat pipe uniform in the axial direction.
九だし、ヒートパイプ内部には一般に不凝縮ガスが存在
し、ヒートパイ1作動中には、その不凝縮ガスはヒート
パイプ凝縮部に集まるため、不凝縮ガスの集ま・つた部
分すなわち本例ではロール中央の低温部はヒートパイプ
全体の作動温度より数十層〜数百度低くなる虞れがある
。However, non-condensable gas generally exists inside the heat pipe, and when the heat pipe 1 is in operation, the non-condensable gas collects in the condensing part of the heat pipe, so the part where the non-condensable gas collects, that is, in this example, the roll The central low-temperature section may be several tens to hundreds of degrees lower than the operating temperature of the entire heat pipe.
そこで本発明ではヒートパイプの例えば中央部にロール
の半径方向に中心に向う突起部を設けて温度の均一化を
図るのである。すなわち、ロール軸重は軸受支持するた
め一般に水冷されるが、この水冷を軸端のみならずロー
ル中心軸全体に行う構造とすれば、ロール端部中心軸付
近キロール表面付近より温度が低くなる。従つて、上記
ヒートパイプの突起部先端部付近がヒートパイプ全体で
最も低温となるため、この部分に不凝縮ガスが集まり、
皇一層表面付近のヒートパイプ真直部には不凝縮ガスが
なくなシ、ヒートパイプ真直部は均一温度となるのであ
る。Therefore, in the present invention, for example, a protrusion is provided in the center of the heat pipe, which extends toward the center in the radial direction of the roll, in order to make the temperature uniform. That is, the roll axle load is generally water-cooled to support bearings, but if the structure is such that this water cooling is applied not only to the shaft ends but to the entire center axis of the roll, the temperature near the center axis at the end of the roll will be lower than near the surface of the roll. Therefore, the area near the tip of the protrusion of the heat pipe is the lowest temperature in the entire heat pipe, so non-condensable gas gathers in this area.
There is no non-condensable gas in the straight part of the heat pipe near the surface of the Koichi layer, and the temperature in the straight part of the heat pipe becomes uniform.
また本発明では、上記の中心に向う突起部が連結されて
おシ、各ヒートパイプ内の作動流体が相互交換し、各ヒ
ートパイプ内の作動流体温度が均一化してロールの局方
向の温度をも均一化する作用がある。Further, in the present invention, the protrusions toward the center are connected, and the working fluid in each heat pipe is exchanged with each other, so that the temperature of the working fluid in each heat pipe becomes uniform, and the temperature in the local direction of the roll is reduced. It also has a uniformizing effect.
第1図(A)とそのA−A線断面図である第1図(B)
は本発明ヒートパイプロールを巻付口1ルに適用した場
合の一例を示す図である。Figure 1 (A) and Figure 1 (B), which is a sectional view taken along the line A-A.
1 is a diagram showing an example of a case where the heat pipe roll of the present invention is applied to one winding opening.
図において、4はロールシェル、18はヒートパイプ、
21は該ヒートパイプの中央部に設けられたロール半径
方向の中心に向う突起部、22は該突起部の連結部、2
3蝶ヒートバイグ18の真直部、5はロールシェル4を
加熱するヒータである。In the figure, 4 is a roll shell, 18 is a heat pipe,
21 is a protrusion provided at the center of the heat pipe and faces the center in the radial direction of the roll; 22 is a connecting portion of the protrusion; 2
The straight part 5 of the three-butter heat bike 18 is a heater that heats the roll shell 4.
各ヒートパイプ1Bは、その突起部21及び連結部22
以外には不凝縮ガスが滞溜しないので、各ヒートパイプ
18の真直部2゛3は同一温度で作動する。この九めロ
ール4表面全面の温度が均一となる。Each heat pipe 1B has a protrusion 21 and a connecting portion 22.
Since no non-condensable gas is accumulated other than that, the straight portions 2 and 3 of each heat pipe 18 operate at the same temperature. The temperature of the entire surface of this ninth roll 4 becomes uniform.
本発明によればロールシェル内のヒートパイプ真直部が
同一温度で作動するため、ロール表面全体がほぼ均一温
度となり、ロールの熱変形が防止され、銅帯の破断、め
っき面の傷の発生が防止される。According to the present invention, since the straight portions of the heat pipes in the roll shell operate at the same temperature, the entire roll surface has a nearly uniform temperature, preventing thermal deformation of the roll, and preventing breakage of the copper strip and scratches on the plating surface. Prevented.
4因面の簡単な説明
第1図(Al、(Blは本発明ヒートバイ10−ルの一
実施例としての巻付ロールの構造図で、第1図+8>は
第1図+A)のA−A線断面図、第2図は従来の巻付ロ
ールの適用例を説明するための連続式真空蒸着装置の説
明図、第3図は従来の巻付ロールの構造図である。Brief explanation of the four factors Figure 1 (Al, (Bl is a structural diagram of a winding roll as an embodiment of the heat binder 10- of the present invention, Figure 1 + 8> is Figure 1 + A) A- A sectional view taken along line A, FIG. 2 is an explanatory diagram of a continuous vacuum evaporation apparatus for explaining an application example of a conventional wrapping roll, and FIG. 3 is a structural diagram of a conventional wrapping roll.
第1図Figure 1
Claims (1)
を設け、各ヒートパイプは適宜個所においてロール半径
方向に中心に向つて突起し、かつ連結した個所を有する
ことを特徴とするヒートパイプロール。A heat pipe roll characterized in that a plurality of heat pipes are provided in the roll axial direction within the roll shell, each heat pipe protruding toward the center in the roll radial direction at appropriate locations, and having connected locations.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7183687A JPS63238273A (en) | 1987-03-27 | 1987-03-27 | Heat pipe roll |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7183687A JPS63238273A (en) | 1987-03-27 | 1987-03-27 | Heat pipe roll |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63238273A true JPS63238273A (en) | 1988-10-04 |
Family
ID=13472025
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7183687A Pending JPS63238273A (en) | 1987-03-27 | 1987-03-27 | Heat pipe roll |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63238273A (en) |
-
1987
- 1987-03-27 JP JP7183687A patent/JPS63238273A/en active Pending
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