JPS63179063A - Winding roll - Google Patents
Winding rollInfo
- Publication number
- JPS63179063A JPS63179063A JP1010687A JP1010687A JPS63179063A JP S63179063 A JPS63179063 A JP S63179063A JP 1010687 A JP1010687 A JP 1010687A JP 1010687 A JP1010687 A JP 1010687A JP S63179063 A JPS63179063 A JP S63179063A
- Authority
- JP
- Japan
- Prior art keywords
- roll
- pipes
- shell
- heat
- temp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 title claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 5
- 229910052802 copper Inorganic materials 0.000 abstract description 10
- 229910000831 Steel Inorganic materials 0.000 abstract description 9
- 238000001704 evaporation Methods 0.000 abstract description 9
- 239000010959 steel Substances 0.000 abstract description 9
- 229910052782 aluminium Inorganic materials 0.000 abstract description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000013000 roll bending Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000002436 steel type Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は連続式真空蒸着装置の蒸着部に適用される巻付
ロールに関し、その他真空シール装置のシールロールや
連続式焼鈍設備のハースロール等にも適用できるロール
構造に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a winding roll that is applied to the deposition section of a continuous vacuum evaporation device, and also to a seal roll of a vacuum sealing device, a hearth roll of a continuous annealing equipment, etc. Regarding the roll structure that can also be applied.
銅帯等の基板に連続的に例えば亜鉛等の金属をめっきす
る手段として連続式真空蒸着装置が使用されているが、
従来の巻付ロールが適用されている従来の連続式真空蒸
着装置の概略構成を第2図によって説明する。Continuous vacuum evaporation equipment is used as a means of continuously plating metals such as zinc on substrates such as copper strips.
The schematic structure of a conventional continuous vacuum evaporation apparatus to which a conventional winding roll is applied will be explained with reference to FIG.
図中、1は銅帯(蒸着基板)、2は複数のシール室から
なる真空V−ル装置、5は蒸着室、4は鋼帯1をガイド
して通板させる巻付ロール、5は巻付ローIv4を加熱
するヒータである。In the figure, 1 is a copper strip (evaporation substrate), 2 is a vacuum V-ru device consisting of a plurality of sealing chambers, 5 is a vapor deposition chamber, 4 is a winding roll that guides the steel strip 1 through it, and 5 is a winding roll. This is a heater that heats the attachment row Iv4.
7は浴槽で、内部には溶融金属(亜鉛等)6が存在し、
該金属6の蒸気6aを真空条件下で発生させ、矢印2で
示すようにダクト(チヤツキA/)8で鋼帯1まで導く
。鋼帯1に蒸着させるに必要な金属蒸気′!k(蒸発量
)は、浴槽7内に設置したし一夕9の電力と、浴槽7出
口に設置したシャッタ10を例えばシリンダ等の開閉装
置11で開閉して開口部12の面積とを変えるととKよ
多制御できるように構成されている。7 is a bathtub, inside of which molten metal (zinc, etc.) 6 exists,
The vapor 6a of the metal 6 is generated under vacuum conditions and guided to the steel strip 1 through a duct (chuck A/) 8 as shown by arrow 2. Metal vapor required to deposit on steel strip 1! k (amount of evaporation) can be calculated by changing the electric power installed in the bathtub 7 and the area of the opening 12 by opening and closing the shutter 10 installed at the outlet of the bathtub 7 with an opening/closing device 11 such as a cylinder. It is configured so that it can be controlled in many ways.
上記の浴槽7内の溶融金属6は、蒸着室3下部の溶解炉
15から圧力差によシスノーケル14を介して吸引、供
給されている。The molten metal 6 in the bath 7 is sucked and supplied from the melting furnace 15 at the bottom of the deposition chamber 3 via a system snorkel 14 due to a pressure difference.
蒸着室5は、管15及び弁16を介して真空ポンプ17
に接続され、通常、溶融金属6の飽和蒸気圧力よシ低い
圧力に窒素(N2)等の不活性ガスによシ保持されてい
る。The vapor deposition chamber 5 is connected to a vacuum pump 17 via a pipe 15 and a valve 16.
It is normally maintained at a pressure lower than the saturated vapor pressure of the molten metal 6 with an inert gas such as nitrogen (N2).
以上の構成において、運転に際しては製造指令(鋼種、
板幅、板厚、通板速度、目標蒸着量等)に基づいて設定
された蒸着速度(単位面積、単位時間当りの蒸着量)K
対応して蒸着室3の圧力を設定すると共に、蒸着金属の
所要蒸発量に対応させてヒータ9の電力とシャッタ10
の開度とを調整することによシ、銅帯1表面の蒸着量す
なわち蒸着膜厚を目標値に制御する。In the above configuration, during operation, the manufacturing instructions (steel type,
Deposition rate (deposition amount per unit area, unit time) K set based on sheet width, sheet thickness, sheet threading speed, target deposition amount, etc.
The pressure of the vapor deposition chamber 3 is set correspondingly, and the power of the heater 9 and the shutter 10 are adjusted correspondingly to the required evaporation amount of the vapor-deposited metal.
By adjusting the opening degree of the copper strip 1, the amount of vapor deposition on the surface of the copper strip 1, that is, the thickness of the vapor deposited film is controlled to a target value.
ところで、上記した従来の巻付ロール4では、亜鉛蒸気
がロール表面に蒸着しないように、ロール内部にヒータ
5を設はロールを約500℃に加熱している。By the way, in the above-mentioned conventional winding roll 4, a heater 5 is installed inside the roll to heat the roll to about 500°C so that zinc vapor is not deposited on the roll surface.
第5図は、この巻付ロール4の横断面を示す図で、ロー
fi−/4の内部に配置されたヒータ5はロール全長に
わたっているのに対して、銅帯10幅は各種寸法の銅帯
を取シ扱うためロールよシもせま<、シかもロール4が
約500℃であるのに対して、鋼帯1の温度はめつき前
適正温度である200〜250℃である。FIG. 5 is a diagram showing a cross section of the winding roll 4, in which the heater 5 disposed inside the low fi-/4 extends over the entire length of the roll, while the width of the copper strip 10 is In order to handle the strip, the temperature of the roll 4 is about 500°C, whereas the temperature of the steel strip 1 is 200 to 250°C, which is the appropriate temperature before plating.
従って、第3図に示したようにロール4表面のうち中央
部の鋼帯1に接触する部分A部は温度が低く、ロール4
端の鋼帯1に接触しない部分B部は温度が高くなってし
まう。Therefore, as shown in FIG. 3, part A of the surface of the roll 4, which is in contact with the steel strip 1 at the center, has a low temperature.
The temperature of the portion B that does not contact the steel strip 1 at the end becomes high.
しかも、鋼帯1に接触しているA部の内でも接触面圧の
不均等によって温度差があるため、ロール4表面に熱変
形が生じ、ロール曲シ、振動を生じて鋼帯1の破断ある
いはめつき面への傷の原因となっていた。Moreover, since there is a temperature difference due to the uneven contact pressure even in part A that is in contact with the steel strip 1, thermal deformation occurs on the surface of the roll 4, causing roll bending and vibration, which causes the steel strip 1 to break. Otherwise, it caused damage to the mating surface.
本発明は、このような欠点のない巻付ロールを提供する
ものである。The present invention provides a winding roll that does not have these drawbacks.
本発明は、シェル内部ロール軸方向に沿って複数本のヒ
ートパイプを埋装し、かつシェル内部端部すなわちヒー
トパイプの端部付近に銅あるいはアルミニウム等の熱伝
導率の大きい材質からなる環状のブロックを埋装した巻
付ロールに関するものである。The present invention has a plurality of heat pipes embedded inside the shell along the axial direction of the roll, and an annular ring made of a material with high thermal conductivity such as copper or aluminum near the inside end of the shell, that is, the end of the heat pipe. This relates to a winding roll in which blocks are embedded.
本発明では、シェル内部ロール軸方向に設けられたと一
トバイデがロール端部の高温部からロール中央の低温部
に熱を輸送し、各ヒートパイプ近傍のローA/温度をそ
の軸方向に均一化する。In the present invention, a tobide provided in the axial direction of the roll inside the shell transports heat from the high temperature part at the end of the roll to the low temperature part in the center of the roll, thereby making the low A/temperature near each heat pipe uniform in the axial direction. do.
このようなヒートパイプの作用だけでは、ロール周方向
で熱負荷が異なる場合、各ヒートパイプが互いに異なる
作動温度で作動してしまう虞れがあるが、本発明のロー
ル端部すなわちヒートパイプの熱媒体蒸発部付近に埋装
された銅やアルミニウム等の熱伝導率の大きいブロック
がローlv@部を全周にわたってほぼ同一の温度に保つ
ため、全ヒートパイプの熱媒体蒸発部付近はほぼ同一の
温度になる。この結果、全ヒートパイプはほぼ同一の温
度で作動し、ロール全面にわたって温度が均一化される
。If heat loads differ in the circumferential direction of the roll, there is a risk that each heat pipe may operate at different operating temperatures due to the action of the heat pipes alone. Blocks with high thermal conductivity such as copper and aluminum buried near the medium evaporation section keep the low lv@ section at almost the same temperature all around, so the temperature near the heat medium evaporation section of all heat pipes is almost the same. becomes the temperature. As a result, all heat pipes operate at approximately the same temperature, resulting in uniform temperature across the roll.
第1図囚とそのA−A線断面図である第1図(9)は本
発明による巻付ロールの一実施例を示す図である。FIG. 1 (9), which is a cross-sectional view taken along the line A--A of FIG. 1, shows an embodiment of the winding roll according to the present invention.
図において、4はロールシェル、18はヒートパイプ、
20はロール端部に埋装した銅あるいはアルミニウム等
の熱伝導率の大きい材質からなる環状のブロック、5は
ヒータであシ、ロー A/ シェル4を加熱する。In the figure, 4 is a roll shell, 18 is a heat pipe,
20 is an annular block made of a material with high thermal conductivity such as copper or aluminum embedded in the end of the roll; 5 is a heater that heats the shell 4;
各ヒートパイプ18はロール端部(すなわちと−トパイ
プ18の熱媒体蒸発部付近)の環状のブロック20を介
して熱的に連結されておシ、ロール周方向で熱負荷が異
なる場合であっても、全ヒートパイプ18の熱媒体蒸発
部付近の温度は#1ぼ同一となシ、全ヒートパイプ18
がほぼ同一の温度で作動し、従ってロール全面の温度が
均一と々ゐ。Each heat pipe 18 is thermally connected via an annular block 20 at the end of the roll (that is, near the heat medium evaporating part of the heat pipe 18), and the heat load differs in the circumferential direction of the roll. Also, the temperature near the heat medium evaporation part of all heat pipes 18 is almost the same as #1, and all heat pipes 18
The rolls operate at almost the same temperature, so the temperature over the entire surface of the roll is uniform.
本発明によればロールシェル内部の全てのヒートパイプ
が熱的に連結され、はぼ同一温度で作動するため、ロー
ル全体がほぼ均一温度となシ、ロールの熱変形が防止さ
れ、銅帯の破断、めっき面の傷の発生が防止される。According to the present invention, all the heat pipes inside the roll shell are thermally connected and operate at almost the same temperature, so the entire roll has a nearly uniform temperature, preventing thermal deformation of the roll, and preventing the copper strip from deforming. This prevents breakage and scratches on the plated surface.
第1図囚(9)は本発明の一実施例としての巻付ロール
の構造図で、第1図但)は第1図囚のA−A線断面図、
第2図は従来の巻付ロールの適用例を説明するための連
続式真空蒸着装置の説明図、第3図は従来の巻付ロール
の構造図である。Fig. 1 (9) is a structural diagram of a winding roll as an embodiment of the present invention, and Fig. 1 (b) is a sectional view taken along line A-A of Fig. 1;
FIG. 2 is an explanatory diagram of a continuous vacuum evaporation apparatus for explaining an application example of a conventional winding roll, and FIG. 3 is a structural diagram of a conventional winding roll.
Claims (1)
し、かつシェル内部両端に熱伝導率の大きい材質製の環
状のブロックを埋装してなる巻付けロール。A winding roll in which multiple heat pipes are embedded in the axial direction of the roll inside the shell, and annular blocks made of a material with high thermal conductivity are embedded in both ends of the shell.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1010687A JPS63179063A (en) | 1987-01-21 | 1987-01-21 | Winding roll |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1010687A JPS63179063A (en) | 1987-01-21 | 1987-01-21 | Winding roll |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63179063A true JPS63179063A (en) | 1988-07-23 |
Family
ID=11741062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1010687A Pending JPS63179063A (en) | 1987-01-21 | 1987-01-21 | Winding roll |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63179063A (en) |
-
1987
- 1987-01-21 JP JP1010687A patent/JPS63179063A/en active Pending
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