JPS63237211A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS63237211A JPS63237211A JP7105287A JP7105287A JPS63237211A JP S63237211 A JPS63237211 A JP S63237211A JP 7105287 A JP7105287 A JP 7105287A JP 7105287 A JP7105287 A JP 7105287A JP S63237211 A JPS63237211 A JP S63237211A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- thin film
- gas
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 67
- 239000010409 thin film Substances 0.000 claims abstract description 40
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 229910052742 iron Inorganic materials 0.000 claims abstract description 17
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 13
- 125000004430 oxygen atom Chemical group O* 0.000 claims abstract description 6
- 239000001301 oxygen Substances 0.000 claims abstract description 5
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 4
- 125000004433 nitrogen atom Chemical group N* 0.000 claims abstract description 3
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 22
- 239000010408 film Substances 0.000 abstract description 31
- 239000007789 gas Substances 0.000 abstract description 27
- 238000000034 method Methods 0.000 abstract description 13
- 230000015572 biosynthetic process Effects 0.000 abstract description 12
- 239000000463 material Substances 0.000 abstract description 8
- 238000001704 evaporation Methods 0.000 abstract description 7
- 230000008020 evaporation Effects 0.000 abstract description 7
- 125000004429 atom Chemical group 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 12
- 239000010410 layer Substances 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- -1 argon ions Chemical class 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 6
- 229910001337 iron nitride Inorganic materials 0.000 description 6
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 5
- 235000014113 dietary fatty acids Nutrition 0.000 description 4
- 239000000194 fatty acid Substances 0.000 description 4
- 229930195729 fatty acid Natural products 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 150000004665 fatty acids Chemical class 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 235000010724 Wisteria floribunda Nutrition 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910000920 Fe16N2 Inorganic materials 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 150000002343 gold Chemical class 0.000 description 1
- UCNNJGDEJXIUCC-UHFFFAOYSA-L hydroxy(oxo)iron;iron Chemical compound [Fe].O[Fe]=O.O[Fe]=O UCNNJGDEJXIUCC-UHFFFAOYSA-L 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録媒体に関し、より詳細には錆を生じず
、かつ耐久性に優れる金属薄膜型の磁気記録媒体に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic recording medium, and more particularly to a metal thin film type magnetic recording medium that does not cause rust and has excellent durability.
磁気記録媒体としては、従来より強磁性体粉末?有機バ
インダー中に分散させた磁性塗料上非磁性基体上に塗布
し乾燥させて得た堕布型のものが広く使用されてきてい
る。しかしながら、この塗布型磁気記録媒体は、強磁性
体粉末として主として金属酸化物粉末を用いているため
に飽和磁化が小さく、有機バインダーケ含むために磁性
層中の強磁性体の濃度全土げられず、それにより高密度
記録には適しておらず、また製造工程が複雑であるなど
の欠点を有する。Is ferromagnetic powder used as a magnetic recording medium? A droplet type material obtained by coating a magnetic paint dispersed in an organic binder on a non-magnetic substrate and drying it has been widely used. However, since this coated magnetic recording medium mainly uses metal oxide powder as the ferromagnetic powder, its saturation magnetization is low, and since it contains an organic binder, the entire concentration of ferromagnetic material in the magnetic layer cannot be increased. Therefore, it is not suitable for high-density recording, and has drawbacks such as a complicated manufacturing process.
近年高密度記録への要求が高まり、これに対応して金属
薄膜上非磁性基体上に形成した磁性記録媒体が開発され
、これは真空蒸着、スパッタリング、イオンブレーティ
ング等のペーパーデポジション法、あるいは電気メッキ
、無電解メッキ等のメッキ法によって金属薄膜勿非磁性
基体上に形成するもので、磁性体としては金属に限られ
ないものであるが、金属が代表的であるので、以下これ
ケ有する磁気記録媒体を金属薄膜型磁気記録媒体という
。また、この型式のものは有機バインダーを含有しない
ので非バインダー型磁気記録媒体とも呼ばれる。In recent years, the demand for high-density recording has increased, and in response to this, magnetic recording media formed on a thin metal film on a non-magnetic substrate have been developed. A thin metal film is formed on a non-magnetic substrate by a plating method such as electroplating or electroless plating, and the magnetic material is not limited to metal, but since metal is a typical example, these are included below. The magnetic recording medium is called a metal thin film magnetic recording medium. Furthermore, since this type of magnetic recording medium does not contain an organic binder, it is also called a non-binder type magnetic recording medium.
この金へ薄膜型磁気記録媒体においては飽オ0磁化の大
きい5S@性金属τバインダー?含有しない状態で薄膜
として形成させることができるので、塗布型に比して高
保磁力化と薄膜化が行われ、かつ短波長域での減磁の影
響が小さく高密度記録が実現され、しかも製造工程が簡
単化されるため、注目を集めている。Is this gold a 5S @ metal τ binder with large saturation zero magnetization in thin film magnetic recording media? Since it can be formed as a thin film in a non-containing state, it has a higher coercive force and a thinner film than the coated type, has less effect of demagnetization in the short wavelength range, realizes high-density recording, and is easy to manufacture. It is attracting attention because it simplifies the process.
しかし、金属薄膜型磁気記録媒体の金属薄膜は見かけは
均一で平滑な金属の面を有しているが、微細構造では粗
なもので金属微粒子が並んでいるような構造’に!して
いるために、腐蝕され易く、このためこの型の磁気記録
媒体は塗布型磁気記録媒体と比較して耐候性及び耐蝕性
が劣っている。However, although the metal thin film of a metal thin film type magnetic recording medium appears to have a uniform and smooth metal surface, its microstructure is rough and has a structure in which fine metal particles are lined up! As a result, this type of magnetic recording medium is inferior in weather resistance and corrosion resistance compared to coated magnetic recording media.
特にカセットテープやビデオテープ等として用いられる
磁気記録媒体は記録、再生時に該媒体表面が磁気ヘッド
で擦られるため、金属薄膜上に極めてわずかに腐蝕物が
存在していても、摩擦によυそれが脱落してヘッドに目
詰りが生じ、それによシヘッド及び磁気記録媒体に傷が
つく。In particular, the surface of magnetic recording media used as cassette tapes, video tapes, etc. is rubbed by a magnetic head during recording and playback, so even if there is a very small amount of corrosive material on the thin metal film, the friction will cause damage. The magnetic recording medium falls off and clogs the head, thereby damaging the head and the magnetic recording medium.
さらに、金属薄膜型磁気記録媒体は耐久性が劣るという
問題がある。この型の磁気記録媒体では金属薄膜が平滑
であるため摩擦が大きくノ・リツキを起シ易いなどの問
題がおり、VTRにおけるステル耐久性等において塗布
型のものに比して劣っている。Furthermore, metal thin film magnetic recording media have a problem of poor durability. This type of magnetic recording medium has problems such as high friction and easy scratching because the metal thin film is smooth, and is inferior to the coated type in terms of stealth durability in VTRs, etc.
このような金属薄膜型磁気記録媒体の耐候性及び耐久性
全改良する九めに、イオンブレーティングによシ表面窒
化処理奮施す方法(特開昭jO−33tO6号)、スパ
ッタリングにより窒化ケイ素膜を設ける方法(特開昭!
J−jOJOj号)、磁性膜を窒素ガス等の雰囲気中で
の放電にさらして非磁性表面層を形成する方法(特開昭
53−tj≠03号)、磁性金属薄膜上に窒化された金
属薄膜全役ける方法(%開閉jμ−7≠37//号)等
が知られている。また、耐候性にすぐれた非バインダー
型磁気記録媒体としてヨーロツノξ特許r32r号、或
いは特開昭jターr7rOり号に開示されているような
窒化鉄或いは鉄及び窒化鉄よりなる磁性薄膜がある。さ
らに、本出願人は先に非磁性基体上に酸化窒化鉄を主成
分とする磁性薄膜を設けてなる磁気記録媒体(特開昭6
/−j≠023号)全提案したが、この磁性薄膜は次の
組成式
%式%
(ただし、式中0.2!≦X+Y≦0.60である)で
表わされる組成含有するものであった。The ninth method for completely improving the weather resistance and durability of such metal thin film type magnetic recording media is to apply surface nitriding treatment by ion blasting (Japanese Unexamined Patent Publication No. 2003-33306) and to form a silicon nitride film by sputtering. How to set up (Tokukaisho!
J-jOJOj), a method of forming a non-magnetic surface layer by exposing a magnetic film to discharge in an atmosphere such as nitrogen gas (JP-A-53-tj≠03), nitrided metal on a magnetic metal thin film A method in which the entire thin film is used (% opening/closing jμ-7≠37//) is known. Further, as a non-binder type magnetic recording medium having excellent weather resistance, there is a magnetic thin film made of iron nitride or iron and iron nitride as disclosed in Yorotsuno ξ Patent No. R32R or Japanese Patent Application Laid-Open No. Shoj Tarr R7RO. Furthermore, the applicant has previously proposed a magnetic recording medium (Japanese Unexamined Patent Application Publication No. 6-117) in which a magnetic thin film mainly composed of iron oxynitride is provided on a non-magnetic substrate.
/-j≠No.023), but this magnetic thin film contains the composition expressed by the following compositional formula % (where 0.2!≦X+Y≦0.60). Ta.
しかしながら、前述の方法によれば耐候性は大きく向上
するものの磁性薄膜の耐久性に問題があり、特に、低温
下において磁気ヘッドにより媒体の同一部分全摺動せし
める状態(通常VTRでのスチルモード)に対する耐久
性に劣るという欠点があり改良を望まれていた。However, although the above-mentioned method greatly improves weather resistance, there is a problem with the durability of the magnetic thin film, especially when the same part of the medium is entirely slid by a magnetic head at low temperatures (usually in still mode in VTRs). However, there was a need for improvements due to the drawback of poor durability.
したがって、本発明の目的はとくに低湿でのスチル耐久
性にすぐれる磁気記録媒体ケ提供することにある。Therefore, an object of the present invention is to provide a magnetic recording medium that has excellent still durability, especially at low humidity.
すなわち本発明は、非磁性基体上に形成された鉄ケ主材
料とする強磁性金属薄膜全磁性層として設けでなる磁気
記録媒体において、金属薄膜中に少なくとも窒素原子な
らびに酸素原子が含まれており、かつ該強磁性薄膜子に
含まれる酸素の鉄に対する原子数比率が基体から該薄膜
表面に向って漸増する、すなわち、該強磁性薄膜の深さ
方向において、前記基体から離れるにつれて漸増してい
ることを特徴とする磁気記録媒体に関する。That is, the present invention provides a magnetic recording medium in which a ferromagnetic metal thin film mainly made of iron is provided as an all-magnetic layer formed on a nonmagnetic substrate, in which the metal thin film contains at least nitrogen atoms and oxygen atoms. , and the atomic ratio of oxygen to iron contained in the ferromagnetic thin film gradually increases from the substrate toward the surface of the thin film, that is, gradually increases as the distance from the substrate increases in the depth direction of the ferromagnetic thin film. The present invention relates to a magnetic recording medium characterized by the following.
本発明でいう鉄、窒素、および酸素原子を含有する強磁
性薄膜は純鉄、窒化鉄、酸化鉄缶主成分とする複雑な四
合体あるいは複合体になっている。The ferromagnetic thin film containing iron, nitrogen, and oxygen atoms as used in the present invention is a complex tetramer or composite whose main components are pure iron, iron nitride, and iron oxide.
例えば窒化鉄に関して云えばε−Fe2,3N1γ−F
e4N%Fe16N2 等の結晶構造を取りうるもので
あシ、成膜条件全制御することにより、その組成比率等
tある程度制御しうるものである。For example, regarding iron nitride, ε-Fe2,3N1γ-F
It can have a crystal structure such as e4N%Fe16N2, and its composition ratio can be controlled to a certain extent by fully controlling the film forming conditions.
本発明では、更に該強磁性薄膜の深さ方向において、非
磁性基体から離れるにつれ、薄膜中に含まれる酸素原子
の鉄原子に対する比率全漸増せしめる。この酸素の鉄に
対する原子数比率は、オージェ電子分光法(AES)に
より分析することができ、その深さ方向の情報ケ得る際
には、例えばアルゴンイオンで磁性薄膜?エツチングし
つつ分析する、という方法が広く知られている。In the present invention, furthermore, in the depth direction of the ferromagnetic thin film, the ratio of oxygen atoms to iron atoms contained in the thin film is gradually increased as the distance from the nonmagnetic substrate increases. This atomic ratio of oxygen to iron can be analyzed by Auger electron spectroscopy (AES), and when obtaining information in the depth direction, for example, using argon ions to form a magnetic thin film? A widely known method is to perform analysis while etching.
非磁性基体上に、本発明の強磁性金属薄膜を形成させる
方法について以下述べる。成膜方法は周知の斜め蒸着法
による。そして、成膜時に窒化あるいは酸化反応奮起こ
させるために、イオンブレーティング法との併用あるい
はイオンビーム照射との併用(いわゆるイオンビームア
シスト蒸着等)がなされる。第1図はその一例を示すも
のであシ、非磁性基体z金、固定し、この上に鉄材料4
.全電子ビーム5.によりg解蒸発せしめて膜堆積せし
める際、同時にイオン銃6.全作動させ酸化窒化鉄膜を
形成する。イオン銃には窒素ならびに酸素原子を含有す
るガス7、(例えばN2ガス、NH3ガス、NOxガス
、02ガス等の組合せ)t−導入し、そのイオン、ラジ
カル、原子等全イオン銃内で作シだし基体コ上に照射せ
しめる。あるいはまた、ガス導入口&よシ雰囲気ガスを
導入して反応雰囲気音質えることもできる。A method for forming the ferromagnetic metal thin film of the present invention on a nonmagnetic substrate will be described below. The film formation method is a well-known oblique vapor deposition method. In order to stimulate nitriding or oxidation reactions during film formation, ion blating or ion beam irradiation (so-called ion beam assisted vapor deposition, etc.) is used in combination. Figure 1 shows an example of this, in which a non-magnetic substrate (gold) is fixed, and an iron material (4) is placed on top of this.
.. Total electron beam5. When the film is deposited by decomposition and evaporation using the ion gun 6. Fully operate to form an iron oxynitride film. A gas 7 containing nitrogen and oxygen atoms (for example, a combination of N2 gas, NH3 gas, NOx gas, 02 gas, etc.) is introduced into the ion gun, and all of the ions, radicals, atoms, etc. are produced in the ion gun. The dashi is irradiated onto the substrate. Alternatively, the sound quality of the reaction atmosphere can be obtained by introducing an atmosphere gas through the gas inlet.
第7図の装置において本発明の薄膜磁性層を得るには、
鉄材料4.の蒸発速度欠一定に保った上で成膜中にイオ
ン銃6.に導入されるガス7、の組成を時間と共に変化
せしめれば良い。例えば、成膜初期でN2100%のガ
スに次第に02ガス混入量を増していく、という方法に
より作成しうる。ちるいはまた、鉄材料4.の蒸発速度
は一定に保ち、かつイオン銃6.も一定に作製させた状
態でガス7゜rNzガスとした条件下において、ガス導
入口8゜から導入される02ガス量を時間と共に増大せ
しめる。第2図には、周知の巻き取り蒸着装置内にイオ
ン銃24.全組み込み、窒化酸化鉄膜の作成を可能とし
たものが示されている。この装置によれば、基体22−
が冷却ドラム23.に沿って搬送される途中において鉄
黒気流ならびに窒素イオンあるいは窒素+酸素イオン流
の照射を受け、磁性膜が形成される。ここで、鉄材料U
の蒸発速度上一定に保ち、か?イオン銃旦の作動もN2
ガスを導入しつつ一定に保ち、ガス導入口30.より適
量の酸素ガスを導入することによシ、本発明の強磁性金
属薄膜を形成せしめることができる。To obtain the thin film magnetic layer of the present invention using the apparatus shown in FIG.
Iron material 4. The ion gun was used during film formation while keeping the evaporation rate constant.6. What is necessary is to change the composition of the gas 7 introduced into the chamber over time. For example, it can be created by a method in which the amount of 02 gas mixed into 100% N2 gas is gradually increased in the initial stage of film formation. Chirui is also an iron material4. The evaporation rate of 6. The amount of 02 gas introduced from the gas inlet 8° is increased over time under the condition that the gas is 7° rNz gas while the gas is kept constant. FIG. 2 shows an ion gun 24. It is shown that a fully integrated iron nitride oxide film can be created. According to this device, the base body 22-
is the cooling drum 23. While being transported along the magnetic field, the magnetic film is irradiated with a flow of iron black air and a flow of nitrogen ions or nitrogen + oxygen ions, thereby forming a magnetic film. Here, iron material U
Keeping the evaporation rate constant above? The operation of the ion gun is also N2
While introducing the gas, keep it constant and open the gas inlet 30. By introducing a more appropriate amount of oxygen gas, the ferromagnetic metal thin film of the present invention can be formed.
本発明の磁性層の厚さは、一般には0.02〜t 、
o /j7rt、好ましくはo、or〜コ、0μmであ
る。The thickness of the magnetic layer of the present invention is generally 0.02 to t,
o/j7rt, preferably o, or~ko, 0 μm.
本発明で用いられる非磁性基体としては、ポリエチレン
テレフタレート、ポリイミド、ポリアミド、ポリ塩化ビ
ニール、三酢酸セルロース、ポリカポネート等のプラス
チックスが用いられる。As the nonmagnetic substrate used in the present invention, plastics such as polyethylene terephthalate, polyimide, polyamide, polyvinyl chloride, cellulose triacetate, and polycarbonate are used.
本発明の磁気記録媒体の磁性層上には潤滑層音形成して
もよく、潤滑層としては、炭素数12〜/r個の脂肪酸
、前記脂肪酸の金属塩、シリコーンオイル、炭素数2〜
20個の一塩基脂肪酸と炭素数3〜12個の一例アルコ
ールからなる脂肪酸エステル等が使用される。添加量は
、磁性層上に0、j−20〜/’m2存在させるのが好
ましい。A lubricating layer may be formed on the magnetic layer of the magnetic recording medium of the present invention, and the lubricating layer may include a fatty acid having 12 to /r carbon atoms, a metal salt of the fatty acid, a silicone oil, and a silicone oil having 2 to 2 carbon atoms.
A fatty acid ester consisting of 20 monobasic fatty acids and an example alcohol having 3 to 12 carbon atoms is used. The amount of addition is preferably 0.j-20 to /'m2 on the magnetic layer.
本発明の磁気記録媒体においては、必要により非磁性基
体の磁性層側と反対の面にバック層を設けてもよい。In the magnetic recording medium of the present invention, a back layer may be provided on the surface of the nonmagnetic substrate opposite to the magnetic layer side, if necessary.
また、金属薄膜の磁性層と非磁性基体との間に有機物あ
るいは無機物からなる層を設けてもよい。Furthermore, a layer made of an organic or inorganic material may be provided between the magnetic layer of the metal thin film and the nonmagnetic substrate.
以下、実施例により本発明の詳細な説明するが本開明は
下記実施例に限られるものではない。Hereinafter, the present invention will be explained in detail with reference to examples, but the present invention is not limited to the following examples.
第7図に示した装置?用いて磁性薄膜を作成した。基体
2としてはポリエチレンテレフタレートフィルム(13
μm厚)全使用し、タタ、タチFe1−電子°ビーム5
.によシ溶解蒸発させた。ここで図中には明示されてい
ないが膜厚モニター(水晶発振式)によシ蒸発速度全モ
ニターL ! A / s一定になるようした。同時に
カウフマ/型イオン銃6.にN、2ガスを導入し作動せ
しめた。この時加速電圧0 、 J kVイオン電電流
値7m表し、真空度はこの状態でt x t o 5
T Or r となるようした。更に、ガス導入口
8.より02ガス全導入した。The device shown in Figure 7? A magnetic thin film was created using this method. The substrate 2 is a polyethylene terephthalate film (13
μm thickness) all used, Tata, Tachi Fe1-electron ° beam 5
.. The mixture was dissolved and evaporated. Although it is not clearly shown in the figure, the film thickness monitor (crystal oscillation type) is used to monitor the entire evaporation rate L! A/s was kept constant. At the same time, Kaufuma/type ion gun6. N2 gas was introduced into the reactor and the reactor was operated. At this time, the acceleration voltage is 0, J kV ion current value is 7 m, and the degree of vacuum is t x t o 5 in this state.
It was made to be T Or r. Furthermore, the gas inlet 8. All 02 gas was introduced.
まず、ガス導入口8.よりの02導入を成膜初期から成
膜終了にかけて真空度が5 X16 5 To r r
からJXio 4Torr となるよ2変化せしめ
て厚さが2000Aとなるよう膜形成を行なった。First, gas inlet 8. The degree of vacuum was 5 x 16 5 Tor r from the beginning of film formation to the end of film formation.
The film was formed to have a thickness of 2000A by changing the current from JXio to 4Torr.
この時できた薄膜サンプルAa−A E S分析し、膜
深さ方向の元素含有率分析?行なったところ、第3図に
示す・髪ターンが得られた。次にガス導入口8、よシの
02導入金成膜初期から成膜終了にかけて真空度が7X
7.7−4Torr一定であるよう02導入せしめ、他
の条件は前記と同一にて膜形成會行なった。サンプルB
とする。この薄膜のAES分析結果を第μ図に示す。こ
うしてできた薄膜試料′If″rmxX100yHの大
きさに切シ取り前後にリーダーテープ七接合した上でス
チル耐久性を測定した。試験機は富士写真フィルム製F
UJIX−r2改造し、小片サンプルでもスチル時間を
測定しうるようしたものであ杢。この試験機により23
°Cio%RH雰囲気下にてスチル時間を測定するとサ
ンプルAの試験片が60分以上正常を保つのに対し、サ
ンプルBの試験片は73分で出力がA dB以上低下し
、本発明の磁気記録媒体の低湿下での明らかなスチル耐
久性の向上がみられた。The thin film sample created at this time was analyzed by Aa-AES, and the element content in the film depth direction was analyzed. As a result, the hair turn shown in FIG. 3 was obtained. Next, the gas inlet 8, the vacuum level of 7X from the beginning of the gold film formation to the end of the gold film formation.
02 was introduced to keep the pressure constant at 7.7-4 Torr, and the film formation session was conducted under the same conditions as above. Sample B
shall be. The results of AES analysis of this thin film are shown in Fig. μ. The thin film sample 'If''rm x 100yH was prepared in this way, and the still durability was measured by bonding the leader tape seven times before and after cutting.The test machine was a Fuji Photo Film F
UJIX-r2 has been modified so that it can measure the still time even with small samples. With this testing machine, 23
When the still time is measured in an atmosphere of °Cio%RH, the test piece of sample A maintains its normal state for more than 60 minutes, while the output of the test piece of sample B decreases by more than A dB in 73 minutes. A clear improvement in still durability of the recording medium under low humidity conditions was observed.
本発明の磁気記録媒体は低湿下での磁性薄膜の耐久性、
特にVTRスチルモードでの対磁気ヘッド耐久性に優れ
た窒化鉄薄膜系磁気記録媒体である。The magnetic recording medium of the present invention has excellent durability of the magnetic thin film under low humidity,
This is an iron nitride thin film magnetic recording medium that has excellent durability against magnetic heads, especially in VTR still mode.
第1図ならびに第2図は本発明の磁気記録媒体を作成す
るための装置である。
λ、22:非磁性基体 A、、2g:イオン銃弘、27
:蒸着材料 j、2F:電子ビームt、3O:ガス導
入口 23 : 冷却ドラム第3図は本発明の磁気記
録媒体(サンプルA)のAESプロファイルである。
第弘図は比較例試作品(サンプルB)のAESプロファ
イルである。
特許出願人 富士写真フィルム株式会社第1図
第2図
第3図
第4図1 and 2 show an apparatus for producing the magnetic recording medium of the present invention. λ, 22: Non-magnetic substrate A, 2g: Ion Gunhiro, 27
: Vapor deposition material j, 2F: Electron beam t, 3O: Gas inlet 23: Cooling drum FIG. 3 shows the AES profile of the magnetic recording medium (Sample A) of the present invention. Figure 1 shows the AES profile of a comparative prototype (sample B). Patent applicant: Fuji Photo Film Co., Ltd. Figure 1 Figure 2 Figure 3 Figure 4
Claims (1)
薄膜を磁性層として設けてなる磁気記録媒体において、
該強磁性薄膜中に少なくとも窒素原子ならびに酸素原子
が含まれ、かつ該強磁性薄膜中に含まれる酸素の鉄に対
する原子数比率が、基体から薄膜表面へ向かつて漸増し
ていることを特徴とする磁気記録媒体。In a magnetic recording medium in which a ferromagnetic metal thin film mainly made of iron is formed on a non-magnetic substrate as a magnetic layer,
The ferromagnetic thin film contains at least nitrogen atoms and oxygen atoms, and the atomic ratio of oxygen to iron in the ferromagnetic thin film gradually increases from the substrate to the surface of the thin film. magnetic recording medium.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7105287A JPS63237211A (en) | 1987-03-25 | 1987-03-25 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7105287A JPS63237211A (en) | 1987-03-25 | 1987-03-25 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63237211A true JPS63237211A (en) | 1988-10-03 |
Family
ID=13449364
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7105287A Pending JPS63237211A (en) | 1987-03-25 | 1987-03-25 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63237211A (en) |
-
1987
- 1987-03-25 JP JP7105287A patent/JPS63237211A/en active Pending
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