JPS6323374Y2 - - Google Patents
Info
- Publication number
- JPS6323374Y2 JPS6323374Y2 JP18108283U JP18108283U JPS6323374Y2 JP S6323374 Y2 JPS6323374 Y2 JP S6323374Y2 JP 18108283 U JP18108283 U JP 18108283U JP 18108283 U JP18108283 U JP 18108283U JP S6323374 Y2 JPS6323374 Y2 JP S6323374Y2
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- loading arm
- loading
- loading device
- samples
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000011068 loading method Methods 0.000 claims description 35
- 230000032258 transport Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- De-Stacking Of Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18108283U JPS6090220U (ja) | 1983-11-24 | 1983-11-24 | ロ−デイング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18108283U JPS6090220U (ja) | 1983-11-24 | 1983-11-24 | ロ−デイング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6090220U JPS6090220U (ja) | 1985-06-20 |
| JPS6323374Y2 true JPS6323374Y2 (enrdf_load_stackoverflow) | 1988-06-27 |
Family
ID=30392475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18108283U Granted JPS6090220U (ja) | 1983-11-24 | 1983-11-24 | ロ−デイング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6090220U (enrdf_load_stackoverflow) |
-
1983
- 1983-11-24 JP JP18108283U patent/JPS6090220U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6090220U (ja) | 1985-06-20 |
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