JPS63232960A - Instrumentation polishing device - Google Patents

Instrumentation polishing device

Info

Publication number
JPS63232960A
JPS63232960A JP6258487A JP6258487A JPS63232960A JP S63232960 A JPS63232960 A JP S63232960A JP 6258487 A JP6258487 A JP 6258487A JP 6258487 A JP6258487 A JP 6258487A JP S63232960 A JPS63232960 A JP S63232960A
Authority
JP
Japan
Prior art keywords
polishing
lens
tool
working
slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6258487A
Other languages
Japanese (ja)
Other versions
JP2624248B2 (en
Inventor
Junji Takashita
順治 高下
Makoto Higomura
肥後村　誠
Yukichi Niwa
丹羽　雄吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62062584A priority Critical patent/JP2624248B2/en
Publication of JPS63232960A publication Critical patent/JPS63232960A/en
Application granted granted Critical
Publication of JP2624248B2 publication Critical patent/JP2624248B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/013—Control or regulation of feed movement
    • B23Q15/04—Control or regulation of feed movement according to the final size of the previously-machined workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PURPOSE:To machine and measure a workpiece with one machine, and detect an error with the design value as well as to make the correction so easy, by installing a working tool and a measuring device on the same member. CONSTITUTION:When a lower end of a polishing tool 1 is reached to the specified depth, a motor 3 is stopped and a slider 12 is once upped, rotating a turret plate 5, and a center line of a probe 4 is accorded with that of the polishing tool 1. Next, when the slider 12 is made to go down till a tip of the probe 4 comes into contact with a work surface of a lens 2, an upper end position of the slider 12 is accurately measured by a laser beam measuring apparatus 22. And, the measured value is read in a memory of a central processing unit, and if there is an error between the value and the design value, the work surface is polished till it comes to the right position, and when polishing at the first working point comes to an end, a work turning motor is rotated as far as the specified angle so as to cause a polishing position of the lens 2 to become the next position by the signal of a rotary encoder 13, while the turret plate 5 is rotated so as to have the polishing tool 1 situated in the working in the working position.

Description

【発明の詳細な説明】 （産業上の利用分野〕 本発明は非球面のレンズ、ミラー等の研磨装置に関する
。DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to an apparatus for polishing aspherical lenses, mirrors, etc.

〔従来の技術〕[Conventional technology]

従来のこの種の研磨装置は、加工物を測定する測定子が
研磨袋：ξから独立した別のスライド機構上に設けられ
ていた。In a conventional polishing apparatus of this type, a measuring element for measuring a workpiece was provided on a separate slide mechanism independent from the polishing bag ξ.

（発明が解決しようとする問題点） 上述した従来のレンズ、ミラー等の研磨装置では、測定
子が研磨装置から独立した別のスライド機構上に設けら
れているので、複数のスライドが必要となり、構造が複
雑になるという欠点がある。また、３本以上のスライド
を１つの装置に設けることは、空間スペースの制限上か
らも困難である。(Problems to be Solved by the Invention) In the above-mentioned conventional polishing devices for lenses, mirrors, etc., the probe is provided on a separate slide mechanism independent from the polishing device, so multiple slides are required. The disadvantage is that the structure is complicated. Further, it is difficult to provide three or more slides in one device due to space limitations.

Ｃ問題点を解決するための手段〕 本発明の計測研磨装置は、加工物の被加工面を加工する
工具と、被加工面の位置を計測する手段を同一部材上に
備え、部材を移動させることにより、計測手段を被加工
面上の工具と同一の位置に移動させる機構を備え、さら
に、部材上に複数の工具を設けることも可能である。Means for Solving Problem C] The measuring and polishing apparatus of the present invention includes a tool for processing the surface of the workpiece and a means for measuring the position of the surface to be processed on the same member, and moves the member. Accordingly, it is possible to provide a mechanism for moving the measuring means to the same position as the tool on the workpiece surface, and furthermore, it is possible to provide a plurality of tools on the member.

本発明は、１台の機械で加工および加工物の形状が測定
でき、設計値との誤差を検出して修正を行なうことので
きる装置を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide an apparatus that can process and measure the shape of a workpiece with a single machine, and can detect and correct errors from design values.

〔作用〕[Effect]

このように、加工工具と計測手段が装置を構成する要素
の中の同一部材上に設置されているので、加工しながら
一旦加工を停止して測定手段を加工中の加工工具の位置
迄移動させ、加工物の形状を測定して設計値とのずわを
検出し、設計値に基づいてずれを修正することが容易で
ある。また、複数個の加工工具を設けることが可能なの
で、加工能率が向上する。In this way, since the machining tool and the measuring means are installed on the same member among the elements constituting the device, it is possible to temporarily stop machining and move the measuring means to the position of the machining tool that is being machined. It is easy to measure the shape of the workpiece, detect the deviation from the design value, and correct the deviation based on the design value. Furthermore, since it is possible to provide a plurality of processing tools, processing efficiency is improved.

〔実施例〕〔Example〕

次に、本発明の実施例について図面を参照して説明する
。Next, embodiments of the present invention will be described with reference to the drawings.

第１図は本発明の測定研磨装置の要部構造を示す説明図
、第２図は測定研磨装置全体の斜視図である。FIG. 1 is an explanatory view showing the main structure of the measuring and polishing apparatus of the present invention, and FIG. 2 is a perspective view of the entire measuring and polishing apparatus.

上下方向のスライドガイドＩＩ上にスライド体１２が上
下方向に慴動自在に設けられ、スライド体１２にはタレ
ット板５がタレット回転中心１５を軸に回転自在に取付
けられている。タレット板５はタレット板回転モータ１
７（第２図）により駆動される。タレット板５にはモー
タ３によって駆動される研磨工具１と、測定子４か所定
の角度をなして取付けられており、測定子４は測定点に
垂直に、また、研磨工具１は加工点に対して斜めに取付
けられている。また、タレット板５の下方の装置本体３
０（第２図）にはレンズ２を所定の角度に旋回させる旋
回角度用ロータリーエンコーダ１３と加工物回転モータ
１８（第２図）が回転中心１４の軸線上に取付けられて
いる。レンズ２の中心線の延長上には、レンズ２を回転
させる回転用モータ１９（第２図）が設けられている。A slide body 12 is provided on a vertical slide guide II so as to be freely slidable in the vertical direction, and a turret plate 5 is attached to the slide body 12 so as to be freely rotatable about a turret rotation center 15. The turret plate 5 is the turret plate rotation motor 1
7 (FIG. 2). A polishing tool 1 driven by a motor 3 and a contact point 4 are attached to the turret plate 5 at a predetermined angle, with the contact point 4 being perpendicular to the measuring point, and the polishing tool 1 being attached to the processing point. It is installed diagonally. In addition, the device main body 3 below the turret plate 5
0 (FIG. 2), a rotation angle rotary encoder 13 for rotating the lens 2 at a predetermined angle and a workpiece rotation motor 18 (FIG. 2) are mounted on the axis of the rotation center 14. A rotation motor 19 (FIG. 2) for rotating the lens 2 is provided on an extension of the center line of the lens 2.

タレット板回転用モータ１７と加工物旋回用モータ１８
と回転用モータ１９からの各コード１７ａ、　＋８ａ、
　１９ａは電気ボックス２０に接続されている。スライ
ド体１２の上部には光線の方向を１８０°反対方向に反
射させる反射鏡６が取付けられている。また、レーザ測
長器２Ｉと、これから反射されるレーザ光８を直角方向
に反射させる反射鏡７により上下方向測長ユニット１６
が形成され装置本体３０の上部に取付けられている。上
下方向測長ユニット１６からのコード１６ａもまた電気
ボックス２０に接続されている。スライド体１２の上端
にはワイヤ９ａが取付けられ、タレット板５、研磨工具
１、モータ３および測定子４の総重量と匹敵する重量を
もつバランス錘ＩＯが上下方向測長ユニット１６に取付
けられた滑車９を介して取付けられている。電気ボック
ス２０にはＣＰＵが組込まれている。Turret plate rotation motor 17 and workpiece rotation motor 18
and each cord 17a, +8a from the rotation motor 19,
19a is connected to the electrical box 20. A reflecting mirror 6 is attached to the upper part of the slide body 12 to reflect the direction of the light beam 180 degrees in the opposite direction. In addition, the vertical length measuring unit 16 includes a laser length measuring device 2I and a reflecting mirror 7 that reflects the laser beam 8 reflected from the laser beam 8 in the right angle direction.
is formed and attached to the upper part of the device main body 30. A cord 16a from the vertical length measuring unit 16 is also connected to the electrical box 20. A wire 9a was attached to the upper end of the slide body 12, and a balance weight IO having a weight comparable to the total weight of the turret plate 5, polishing tool 1, motor 3, and gauge head 4 was attached to the vertical length measuring unit 16. It is attached via a pulley 9. The electrical box 20 has a built-in CPU.

いま、被加工物であるレンズ２が所定の位置にセットさ
れて回転用モータ１９により回転され、研磨工具ｌがレ
ンズ２の頂点に接触するようにセットされてモータ３に
より回転が与えられると、研磨が開始される。研磨工具
１の下端が所定の深さに達したとき、モータ３の回転が
止められ、スライド体１２を一旦上昇させ、タレット板
回転用モータ１７によりタレット板５を回転させて測定
子４の中心線を研磨工具１の中心線と一致させる。次に
、スライド体１２を測定子４の先端がレンズ２の被加工
面に接するまで下降させるとレーザ光測定器２１により
スライド体１２の上端位置が正確に測定される。測定値
は電気ボックス２０に組込まれたＣＰＵのメモリに読み
込まれ、設計値との間に誤差があれば再度修正の上、正
しい位置になるまで加工される。最初の加工点の研磨が
終了したときには旋回角度用ロータリーエンコーダ１３
からの信号によって加工物旋回用モータ１８がレンズ２
の研磨位置が次の位置になるように所定の角度だけ旋回
させ、タレット板５は研磨工具１を加工位置に位置させ
るように回転される。このようにしてレンズ２の研磨加
工が順次行なわれていき、その都度研磨工具１の回転が
止められ、測定子４が加工位置に移動されてスライド体
１２の上端位置が正確に測定されるので、レンズ２はＣ
ＰＵに記憶された設計値通りの形状に加工される。バラ
ンス錘１０は、レンズ２上の加工点と測定点に作用する
圧力を調整するためのもので加工圧と測定を同じにして
もよく、錘を交換して加工圧を大きくしてもよい。スラ
イドガイド１１はスライド体１２をレンズ２の加工点に
対し垂直になるように配［ξされている。Now, when the lens 2, which is the workpiece, is set at a predetermined position and rotated by the rotation motor 19, and the polishing tool l is set so as to contact the apex of the lens 2 and is rotated by the motor 3, Polishing begins. When the lower end of the polishing tool 1 reaches a predetermined depth, the rotation of the motor 3 is stopped, the slide body 12 is once raised, and the turret plate 5 is rotated by the turret plate rotation motor 17 to align the center of the measuring tip 4. Align the line with the center line of the polishing tool 1. Next, when the slide body 12 is lowered until the tip of the probe 4 touches the surface to be processed of the lens 2, the upper end position of the slide body 12 is accurately measured by the laser beam measuring device 21. The measured values are read into the memory of the CPU built into the electrical box 20, and if there is an error between them and the designed values, they are corrected again and processed until the correct position is achieved. When the polishing of the first processing point is completed, the rotation angle rotary encoder 13
The workpiece rotation motor 18 is activated by the signal from the lens 2.
is rotated by a predetermined angle so that the polishing position is the next position, and the turret plate 5 is rotated so that the polishing tool 1 is located at the processing position. In this way, the lens 2 is polished one after another, and each time the rotation of the polishing tool 1 is stopped and the probe 4 is moved to the processing position to accurately measure the upper end position of the slide body 12. , lens 2 is C
It is processed into the shape according to the design value stored in the PU. The balance weight 10 is for adjusting the pressure acting on the processing point and the measurement point on the lens 2, and the processing pressure and measurement may be made the same, or the processing pressure may be increased by exchanging the weights. The slide guide 11 is arranged so that the slide body 12 is perpendicular to the processing point of the lens 2.

タレット板５に複数の工具が取付けられる場合は、すべ
ての工具が加工物の同一点を加工するよう配置される。When a plurality of tools are attached to the turret plate 5, all the tools are arranged to machine the same point on the workpiece.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、１個ないし複数個の加工
工具と加工物の被加工面上の加工位置を計測する手段を
同一部材上に設け、計測手段を加工工具と同一位置に移
動させて位置を計測することにより、加工と計測が同一
装置上で可能となるので、高精度、高能率の加工ができ
、また、単一スライド構成の装置となるため装置の構造
が簡単になって低価格の設備が得られるという効果があ
る。As explained above, the present invention provides one or more machining tools and a means for measuring the machining position on the surface of the workpiece on the same member, and moves the measuring means to the same position as the machining tool. By measuring the position using the same device, machining and measurement can be performed on the same device, resulting in highly accurate and highly efficient machining.Also, the device has a single slide configuration, which simplifies the structure of the device. This has the effect of providing low-cost equipment.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の計測研磨装置の一実施例の要部構造図
、第２図は装置全体の斜視図である。 ！・・・研磨工具、　　　　２・・・レンズ、３・・・
モータ、　　　　　４・・・測定子、５・・・タレット
板、　　　６．７・・・反射鏡、８・・・レーザ光、　
　　９・・・滑車、９ａ・・・ワイヤ、　　　　　１０
・・・バランス錘、１１・・・スライドガイド、１２・
・・スライド体、１３・・・旋回角度用ロータリーエン
コーダ、１４・・・回転中心、　　　１５・・・タレッ
ト回転中心、１６・・・上下方向測長ユニット、 ■７・・・タレット板回転用モータ、 １８・・・加工物旋回用モータ、 １９・・・回転用モータ、　２０・・・電気ボックス、
２１・・・レーザ測長器、　３０・・・装置本体。FIG. 1 is a structural diagram of a main part of an embodiment of the measuring and polishing apparatus of the present invention, and FIG. 2 is a perspective view of the entire apparatus. ! ... Polishing tool, 2... Lens, 3...
Motor, 4... Measuring head, 5... Turret plate, 6.7... Reflector, 8... Laser light,
9... Pulley, 9a... Wire, 10
...Balance weight, 11...Slide guide, 12.
...Slide body, 13...Rotary encoder for turning angle, 14...Rotation center, 15...Turret rotation center, 16...Vertical length measuring unit, ■7...Turret plate rotation motor , 18... Workpiece rotation motor, 19... Rotation motor, 20... Electrical box,
21...Laser length measuring device, 30...Device main body.

Claims (1)

【特許請求の範囲】 １、加工物の被加工面を加工する工具と、該被加工面の
位置を計測する手段を同一部材上に備え、該部材を移動
させることにより、前記計測手段を前記被加工面上の前
記工具と同一の位置に移動させる機構を備えたことを特
徴とする計測研磨装置。 ２、複数の加工工具が前記部材上に設けられた、特許請
求の範囲第１項記載の計測研磨装置。[Scope of Claims] 1. A tool for machining a surface to be machined of a workpiece and a means for measuring the position of the surface to be machined are provided on the same member, and by moving the member, the measuring means A measurement polishing device comprising a mechanism for moving the tool to the same position on the surface to be machined. 2. The measurement and polishing device according to claim 1, wherein a plurality of processing tools are provided on the member.
JP62062584A 1987-03-19 1987-03-19 Measurement polishing equipment Expired - Fee Related JP2624248B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62062584A JP2624248B2 (en) 1987-03-19 1987-03-19 Measurement polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62062584A JP2624248B2 (en) 1987-03-19 1987-03-19 Measurement polishing equipment

Publications (2)

Publication Number Publication Date
JPS63232960A true JPS63232960A (en) 1988-09-28
JP2624248B2 JP2624248B2 (en) 1997-06-25

Family

ID=13204515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62062584A Expired - Fee Related JP2624248B2 (en) 1987-03-19 1987-03-19 Measurement polishing equipment

Country Status (1)

Country Link
JP (1) JP2624248B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998024588A1 (en) * 1996-12-06 1998-06-11 Yoshiaki Nagaura Method and apparatus for manufacture of quartz oscillator
EP2062686A1 (en) * 2007-11-22 2009-05-27 Murata Machinery, Ltd. Machine tool, sensor module, and measuring method
EP2062685A1 (en) * 2007-11-22 2009-05-27 Murata Machinery, Ltd. Machine tool and sensor module
US10675689B2 (en) * 2017-10-31 2020-06-09 Mackay Manufacturing, Inc. Metal lathe and tooling calibration

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60123259A (en) * 1983-12-02 1985-07-01 Nippon Kogaku Kk <Nikon> Lens peripheral edge machining device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60123259A (en) * 1983-12-02 1985-07-01 Nippon Kogaku Kk <Nikon> Lens peripheral edge machining device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998024588A1 (en) * 1996-12-06 1998-06-11 Yoshiaki Nagaura Method and apparatus for manufacture of quartz oscillator
EP2062686A1 (en) * 2007-11-22 2009-05-27 Murata Machinery, Ltd. Machine tool, sensor module, and measuring method
EP2062685A1 (en) * 2007-11-22 2009-05-27 Murata Machinery, Ltd. Machine tool and sensor module
US10675689B2 (en) * 2017-10-31 2020-06-09 Mackay Manufacturing, Inc. Metal lathe and tooling calibration

Also Published As

Publication number Publication date
JP2624248B2 (en) 1997-06-25

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