JPS6322739U - - Google Patents
Info
- Publication number
- JPS6322739U JPS6322739U JP11727886U JP11727886U JPS6322739U JP S6322739 U JPS6322739 U JP S6322739U JP 11727886 U JP11727886 U JP 11727886U JP 11727886 U JP11727886 U JP 11727886U JP S6322739 U JPS6322739 U JP S6322739U
- Authority
- JP
- Japan
- Prior art keywords
- charged beam
- sample
- setting board
- beam tester
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000002123 temporal effect Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11727886U JPS6322739U (enExample) | 1986-07-30 | 1986-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11727886U JPS6322739U (enExample) | 1986-07-30 | 1986-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322739U true JPS6322739U (enExample) | 1988-02-15 |
Family
ID=31002644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11727886U Pending JPS6322739U (enExample) | 1986-07-30 | 1986-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322739U (enExample) |
-
1986
- 1986-07-30 JP JP11727886U patent/JPS6322739U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6322739U (enExample) | ||
| JPH02168164A (ja) | プローブ | |
| JPH0312437U (enExample) | ||
| JPH052869Y2 (enExample) | ||
| JPH0685404B2 (ja) | プロ−ブ装置 | |
| JPH0744205B2 (ja) | プローブカード取付方法 | |
| JPS5883153U (ja) | ウエ−ハ検査装置 | |
| JPS63132370U (enExample) | ||
| JPH0361339U (enExample) | ||
| JPH0430734U (enExample) | ||
| JPS5942707Y2 (ja) | ハンドリング装置の電極子 | |
| JPS6338080U (enExample) | ||
| JPH02103283U (enExample) | ||
| JPS62196339U (enExample) | ||
| JPH0754814B2 (ja) | Ｉｃチツプの試験測定方法 | |
| JPS63115755U (enExample) | ||
| JPS6325385U (enExample) | ||
| JPS58148934U (ja) | 集積回路測定装置 | |
| JPS62141735A (ja) | レ−ザダイオ−ドチツプ試験装置 | |
| JPH01136469U (enExample) | ||
| JPS6393576U (enExample) | ||
| JPS646044U (enExample) | ||
| JPH0187268U (enExample) | ||
| JPS6410678U (enExample) | ||
| JPS63165849U (enExample) |