JPS63224378A - Mirror holding mechanism for laser - Google Patents

Abstract

PURPOSE:To hold a hermetical seal from an exterior by flattening the part of a mirror mount in contact with the surface of the vessel side of a mirror, and so mounting the periphery of the mirror as to be in contact with the surface. CONSTITUTION:A mirror 2 is so inserted to the surface 7 (reference surface) of a laser mirror into a mount 1 of a vessel side as to contact at the periphery thereof with the surface 7. A retainer mount 3 of the atmosphere side (outside) is mounted thereon, and an O-ring 4 is disposed on the periphery of the atmosphere side (outside) face of the mirror in an O-ring groove 5. The mounts 3, 1 are contacted through another O-ring 4 and an O-ring groove 6. Accordingly, the mirror 2 is brought into contact directly with the reference surface 7 of the mount 1 of vessel side without O-ring, and when the interior of the vessel is in vacuum. the mirror 2 is pressed to the surface 7 which becomes the reference of the mount 1 of the vessel side. Thus, the dimensional accuracy is improved, the influence of clamping force is eliminated, a hermetical seal is maintained even under vacuum pressure and the atmospheric pressure or higher, thereby improving thermal conduction.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a laser resonator, and particularly to a laser mirror holding mechanism.

(Prior Art) Conventionally, as shown in FIG. 2, a laser mount 1 has an O-ring II5, and an O-ring 4 is disposed within the O-ring II5.

Then, the laser mirror 2 is placed on the O-ring, the laser mirror 2 is held down by a presser metal fitting 3', and the mirror is fixed with a set screw 8 and the O-ring is crushed.

(Problem to be solved by the invention) This structure has the following problems.

When the mirror 2 is placed in the mount 1, the container side of the mirror 2 serves as a reference for alignment, but in this structure, there is an O-ring 4 between the mirror 2 and the mirror mount 1.
A reference surface is not formed on the side surface (inside) of the container of mirror 2.

Since the mirror surface is supported by an O-ring, it changes depending on the tightening force of the screw.

Additionally, when the internal pressure changes from a vacuum to several times atmospheric pressure compared to the external atmospheric pressure, the direction and magnitude of the force applied to the mirror will change, causing the surface of the mirror to move due to loosening of the screws. If the internal pressure is high and the O-ring is not tightly tightened, the mirror will be pushed outward, separating the O-ring from the mirror surface and breaking the airtight seal.

[Structure of the invention]

(Means for solving the problem) In the present invention, the laser mirror is inserted so that the periphery of the mirror 2 is in contact with the surface 7 (reference surface) that contacts the mount 1 on the container side.

There, the presser mount 3 on the atmosphere side (outside) is attached to the O-ring 5.
is an O-ring groove 4, which is arranged on the periphery of the atmosphere-side (outside) surface of the mirror. Further, this presser mount 3 and the container-side mount 1 are in contact with an O-ring 4 and an O-ring groove 6.

These parts are tightened with set screws 8.

(Function) ■ The mirror is aligned with the reference plane of the mirror mount on the container side.
Direct contact without using an O-ring.

■ When there is a vacuum inside the container, the mirror is pressed against the reference surface of the mirror mount on the container side.

The mirror mount on the atmosphere side is pressed against the mirror and the mirror mount on the container side by atmospheric pressure.

■ 0 between the container side mirror mount and the atmosphere side presser mount
Since the ring does not involve a mirror, which is an optical component, mechanical tolerances can be reduced and sufficient tightening can be achieved.

) When the pressure inside the container exceeds atmospheric pressure, pressure is applied to the mirror surface, so the mirror is attached to the presser mount.
The ring is pressed down, creating an airtight seal, and the presser mount is subjected to force, but the action of item (■) firmly tightens the presser mount and container mount, so the airtight seal does not break.

Further, in this example, an O-ring is provided on the container side as a seal between the presser mount and the container-side mount, but this O-ring may be provided on the presser mount side.

【Effect of the invention〕

According to the present invention, (1) the mirror can be installed on the container-side reference surface without intervening an O-ring, etc., so dimensional accuracy is good, there is no influence from tightening force, and alignment of the mirror with respect to the resonator, etc. (
(optical axis alignment) does not shift.

■ Airtightness can be maintained even under vacuum pressure and pressure above atmospheric pressure.

■ Good heat conduction because the mirror and mirror mount are in direct contact.

[Brief explanation of drawings]

FIG. 1 shows a laser mirror holding mechanism of the present invention, and FIG. 2 shows a conventional example thereof. 1...Mount 2...Mirror 3...Presser mount 4...O, ring 7...Reference surface agent Patent attorney Nori Chika Ken Yudo Hirofumi Mitsumata Figure 1, F ridge Figure 2 Inferior? Caltrop L in °]

Claims (1)

[Claims] The part of the mirror mount that is attached to the laser resonator that keeps the inside of the container airtight is flattened, and the part of the mirror that contacts the container side is flattened, and the periphery of the mirror is in contact with that surface. An O-ring and an O-ring groove are arranged on the atmosphere side to seal the area around the mirror, and a holding mount with another pair of O-ring and O-ring groove on the outer periphery is used to maintain airtightness from the outside. Features a laser mirror holding mechanism.