JPS63221204A - Determining method for teaching point by optical displacement gauge - Google Patents

Determining method for teaching point by optical displacement gauge

Info

Publication number
JPS63221204A
JPS63221204A JP5395987A JP5395987A JPS63221204A JP S63221204 A JPS63221204 A JP S63221204A JP 5395987 A JP5395987 A JP 5395987A JP 5395987 A JP5395987 A JP 5395987A JP S63221204 A JPS63221204 A JP S63221204A
Authority
JP
Japan
Prior art keywords
tape
teaching point
coordinates
optical displacement
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5395987A
Other languages
Japanese (ja)
Inventor
Koichi Taguchi
田口 弘一
Takashi Ikeda
隆 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5395987A priority Critical patent/JPS63221204A/en
Publication of JPS63221204A publication Critical patent/JPS63221204A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To accurately determine a teaching point by finding coordinates of two points on a work of specific height from an optical displacement gauge across a tape stuck on the surface of the work at equal intervals, and determining the coordinates of the teaching point under the tape. CONSTITUTION:An optical displacement gauge 1 is used to find the two points on the work 3 where a height detection signal VH' is stable across the tape 3A at equal intervals from a work surface state detection signal VLD'. Namely, coordinates on the work 3 are stored covering a necessary range and the coordinates of the irradiation points 41 and 45 on the work 3 across the tape 3A at equal intervals are found when the tape 3A is detected and when the displacement gauge is put a specific distance from the tape 3A. Then linear approximation between the two points is performed to find the mid-point and the coordinates of the teaching point 5 is computed.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、例えばレーザビーム等を用いてワークを切
断加工する装置のティーチングデータ入力時に使用され
る光変位計による教示点決定方法、特に教示点を精度良
く決定できる方法に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for determining a teaching point using an optical displacement meter, which is used when inputting teaching data to a device that cuts a workpiece using, for example, a laser beam. This invention relates to a method for determining points with high accuracy.

[従来の技術] 第2図は例えば特願昭59−81915号の第4図に示
され、光変位計がワークの表面状態およびワークまでの
距離を検出する仕方を説明する図である。
[Prior Art] FIG. 2 is shown, for example, in FIG. 4 of Japanese Patent Application No. 59-81915, and is a diagram for explaining how an optical displacement meter detects the surface condition of a workpiece and the distance to the workpiece.

図において、(1)は光変位計、(2)はこの光変位計
(1)が内蔵する半導体レーザ(図示しない)から出力
されたレーザ光、(3)はワーク、(3^)はこのワー
ク(3)の表面に貼付されたテープ例えば黒テープ、(
4)はワーク(3)上に投射された光スボッI・である
、なお、この光スポット(4)の受光像は光変位計(1
)によって受光され、内蔵する諸口路(図示しない)に
よって処理される。このような光変位計(1)は、矢印
方向に定速で移動させられると、ワーク(3)の表面の
状態を検出する信号VLDおよび光変位計(1)からワ
ーク(3)の表面までの距離である高さhを検出する信
号■Hを出力する。
In the figure, (1) is an optical displacement meter, (2) is a laser beam output from a semiconductor laser (not shown) built into this optical displacement meter (1), (3) is a workpiece, and (3^) is this Tape affixed to the surface of workpiece (3), such as black tape (
4) is the light spot I projected onto the workpiece (3).The received light image of this light spot (4) is the light displacement meter (1).
) and processed by built-in channels (not shown). When such an optical displacement meter (1) is moved at a constant speed in the direction of the arrow, a signal VLD that detects the condition of the surface of the workpiece (3) and a signal from the optical displacement meter (1) to the surface of the workpiece (3) are transmitted. It outputs a signal ■H that detects the height h which is the distance of .

なお、表面状態検出信号VLDは、それぞれワーク(3
)、テープ(3八)から光変位計(1)への光の入射量
の相違により、テープ(3^)が存在する所では高レベ
ルのテープ検出信号Bを生じる。また、高さ検出信号V
Hは、光変位計(1)がワーク(3)に対して一定の高
さhで移動させられるので、はぼ一定レベルの信号にな
る。
Note that the surface state detection signal VLD is used for each workpiece (3).
) and the difference in the amount of light incident on the optical displacement meter (1) from the tape (38), a high level tape detection signal B is generated where the tape (3^) is present. In addition, the height detection signal V
Since the optical displacement meter (1) is moved at a constant height h relative to the workpiece (3), H becomes a signal at a nearly constant level.

[発明が解決しようとする問題点] ところが、このような光変位計(1)を用いて教示点を
求める場合に、光スボッ1−(4)がテープ(3^)の
端面に当たる所を教示点にすると、テープ端面の影響を
受けて高さ検出信号vHの値が変動したり、光スポット
(4)の反射光がテープ(3^)の角でさえぎられて光
変位計(1)は受光不足になり、そのなめ測定不能にな
ったりするという問題点がある。
[Problems to be Solved by the Invention] However, when determining the teaching point using such an optical displacement meter (1), it is difficult to teach the point where the optical slot 1-(4) hits the end face of the tape (3^). If it is set to a point, the value of the height detection signal vH will fluctuate due to the influence of the end face of the tape, and the reflected light of the optical spot (4) will be blocked by the corner of the tape (3^), causing the optical displacement meter (1) to There is a problem in that insufficient light is received, making measurement impossible.

また、光スポット(4)がテープ(3^)の上面中央付
近に当たる所を教示点にしても、テープ(3^)の厚み
や貼付具合[例えば、テープ(3^)の貼付が不完全で
テープ(3^)の下面とワーク(3)の表面との間に隙
間が生じている場合]により、誤差を生じる可能性があ
るので、好ましい教示点が得られないという問題点もあ
る。
Furthermore, even if the teaching point is set at a place where the light spot (4) hits near the center of the top surface of the tape (3^), the thickness of the tape (3^) and the degree of application [for example, if the application of the tape (3^) is incomplete, If there is a gap between the lower surface of the tape (3^) and the surface of the workpiece (3), errors may occur, so there is also the problem that preferred teaching points cannot be obtained.

そこで、この発明は、このような問題点を解決するため
になされたもので、好ましい教示点を精度良く決定でき
る、光変位計による教示点決定方法を得ることを目的と
する。
SUMMARY OF THE INVENTION The present invention has been made to solve these problems, and an object of the present invention is to provide a method for determining a teaching point using an optical displacement meter, which can accurately determine a preferred teaching point.

[問題点を解決するための手段] この発明の光変位計による教示点決定方法は、ワークの
表面に貼付されたテープを等間隔に挾みかつ光変位計か
らの高さが安定である、ワーク上の2点の座標を求め、
これら座標から前記テープの下にある教示点の座標を決
定するものである。
[Means for Solving the Problems] The method of determining teaching points using an optical displacement meter of the present invention is such that the tape attached to the surface of the workpiece is sandwiched at equal intervals and the height from the optical displacement meter is stable. Find the coordinates of two points on the workpiece,
From these coordinates, the coordinates of the teaching point under the tape are determined.

[作用] この発明においては、ワークの表面に貼付されたテープ
の厚みを無視するとともに高さ検出信号の値がパラツク
所を除外して精度良く教示点を決定する。
[Operation] In the present invention, the teaching point is determined with high precision by ignoring the thickness of the tape attached to the surface of the workpiece and excluding places where the value of the height detection signal is inconsistent.

[実施例] 第1図はこの発明の光変位計による教示点決定方法の一
実施例を説明する図であり、(1)、(2)、(3)、
(3^)は第2図について説明した通りである。
[Example] FIG. 1 is a diagram illustrating an example of the teaching point determination method using an optical displacement meter of the present invention, and includes (1), (2), (3),
(3^) is as explained in connection with FIG.

図において、(41)〜(45)は光スポット[第2図
中の(4)]の照射位置、(5)は好ましい教示点で、
テープ(3^)の下かつワーク(3)の表面のテープ幅
方向の中心付近にあり、VLD’はVLDに対応し、そ
してvH’は■Hに対応する。
In the figure, (41) to (45) are the irradiation positions of the light spot [(4) in Figure 2], (5) is the preferred teaching point,
It is located below the tape (3^) and near the center of the surface of the workpiece (3) in the tape width direction, VLD' corresponds to VLD, and vH' corresponds to ■H.

上述したように、光スポットがテープ(3^)の端面に
当たる所すなわち照射位置(42)および(44)では
、テープ端面の影響を受けて光変位計(1)の高さ検出
信号VH′の値が変動したり、光スポットの反射光がテ
ープ(3^)の角でさえぎられて測定不能になったりす
る。また、光スポットがテープ(3^)の上面中央付近
に当たる所すなわち照射位! (43)では、テープ(
3^)の厚みや貼付具合のせいで検出信号に誤差が生じ
たりする。
As mentioned above, at the locations where the light spot hits the end face of the tape (3^), that is, at the irradiation positions (42) and (44), the height detection signal VH' of the optical displacement meter (1) is affected by the tape end face. The value may fluctuate, or the reflected light of the light spot may be blocked by the corner of the tape (3^), making measurement impossible. Also, the location where the light spot hits near the center of the top surface of the tape (3^), that is, the irradiation position! (43), the tape (
3^) Errors may occur in the detection signal due to the thickness and attachment condition.

そこで、この発明では、ワーク(3)の表面に貼付され
たテープ(3^)の厚みを無視するとともに、第1図に
示したように高さ検出信号■H′の値がパラツク所であ
る照射位i1J (42)および(44)を除外して精
度良く教示点(5)を決定するために、光変位計(1)
を用いて、ワーク表面状態検出信号VLD’からテープ
(3^)を等間隔に挾みかつ高さ検出信号vH′が安定
である、ワーク(3)上の2点すなわち照射位置(41
)および(45)の座標を求め、これら座標から教示点
(5)の座標を決定するのである。
Therefore, in this invention, the thickness of the tape (3^) attached to the surface of the workpiece (3) is ignored, and the value of the height detection signal In order to accurately determine the teaching point (5) by excluding the irradiation position i1J (42) and (44), an optical displacement meter (1) is used.
is used to sandwich the tape (3^) at equal intervals from the workpiece surface state detection signal VLD' and select two points on the workpiece (3), that is, the irradiation position (41) where the height detection signal vH' is stable.
) and (45), and from these coordinates, the coordinates of the teaching point (5) are determined.

例えば、ワーク(3)上の座標を必要な範囲に亘って記
憶しておき、テープ(3^)を検出した時点及びテープ
(3^)から所定距離だけ離間した時点で、テープ(3
^)を等間隔に挾むワーク(3)上の照射位置(41)
および(45)の座標を求める。そして、2点間を直線
近似して中点を求め、教示点(5)の座標を演算する。
For example, the coordinates on the workpiece (3) are memorized over a necessary range, and when the tape (3^) is detected and when the workpiece (3^) is separated from the tape (3^) by a predetermined distance, the tape (3^) is
Irradiation position (41) on the workpiece (3) that holds the ^) at equal intervals
Find the coordinates of and (45). Then, a midpoint is obtained by linear approximation between the two points, and the coordinates of the teaching point (5) are calculated.

このとき、テープ(3^)を検出するためにワーク表面
状態検出信号VLD’が用いられることは言うまでもな
い。
At this time, it goes without saying that the workpiece surface state detection signal VLD' is used to detect the tape (3^).

[発明の効果] 以上のように、この発明によれば、教示点を決定するに
当たり、テープ自体に少しも依存しない方法にしたので
、教示点を精度良く決定できる効果がある。
[Effects of the Invention] As described above, according to the present invention, since the teaching point is determined in a method that does not depend on the tape itself at all, there is an effect that the teaching point can be determined with high accuracy.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実′施例を説明する図、第2図は
光変位計による検出仕方を説明する図である。 図において、(1)は光変位計、(3)はワーク、(3
^)はテープ、(41)および(45)は照射位置、(
5)は教示点、VLD’はワーク表面状態検出信号、V
l(’は高さ検出信号である。 尚、図中、同一符号は同−又は相当部分を示す。 兇1図 41〜45:照射位1
FIG. 1 is a diagram for explaining one embodiment of the present invention, and FIG. 2 is a diagram for explaining a detection method using an optical displacement meter. In the figure, (1) is an optical displacement meter, (3) is a workpiece, and (3) is an optical displacement meter.
^) is the tape, (41) and (45) are the irradiation positions, (
5) is the teaching point, VLD' is the workpiece surface state detection signal, V
l(' is a height detection signal. In the figures, the same reference numerals indicate the same or corresponding parts. 兇1Figures 41 to 45: Irradiation position 1

Claims (2)

【特許請求の範囲】[Claims] (1)ワークの表面にテープを貼付し、光変位計を用い
て前記テープを含めたワーク表面の状態を検出するワー
ク表面状態検出信号および前記ワーク表面までの距離で
ある高さ検出信号を得、前記ワーク表面状態検出信号か
ら前記テープを等間隔に挾みかつ前記高さ検出信号から
前記高さが安定である、前記ワーク上の2点の座標を求
め、これら座標から前記テープの下にある教示点の座標
を決定することを特徴とする光変位計による教示点決定
方法。
(1) A tape is attached to the surface of the workpiece, and an optical displacement meter is used to obtain a workpiece surface condition detection signal that detects the condition of the workpiece surface including the tape, and a height detection signal that is the distance to the workpiece surface. , find the coordinates of two points on the workpiece where the tape is equally spaced from the workpiece surface condition detection signal and whose height is stable from the height detection signal, and from these coordinates, place the tape under the tape. A teaching point determining method using an optical displacement meter, characterized in that the coordinates of a certain teaching point are determined.
(2)教示点は、テープの幅方向の中心付近にあること
を特徴とする特許請求の範囲第1項記載の光変位計によ
る教示点決定方法。
(2) A teaching point determining method using an optical displacement meter according to claim 1, wherein the teaching point is located near the center of the tape in the width direction.
JP5395987A 1987-03-11 1987-03-11 Determining method for teaching point by optical displacement gauge Pending JPS63221204A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5395987A JPS63221204A (en) 1987-03-11 1987-03-11 Determining method for teaching point by optical displacement gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5395987A JPS63221204A (en) 1987-03-11 1987-03-11 Determining method for teaching point by optical displacement gauge

Publications (1)

Publication Number Publication Date
JPS63221204A true JPS63221204A (en) 1988-09-14

Family

ID=12957229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5395987A Pending JPS63221204A (en) 1987-03-11 1987-03-11 Determining method for teaching point by optical displacement gauge

Country Status (1)

Country Link
JP (1) JPS63221204A (en)

Similar Documents

Publication Publication Date Title
EP0047250B1 (en) Dimension measuring apparatus
EP1828713B1 (en) Thin film thickness measurement method and apparatus
EP0316624A2 (en) Improved imaging and inspection apparatus and method
JPH0123041B2 (en)
JPS63221204A (en) Determining method for teaching point by optical displacement gauge
JPH02162789A (en) Directly drawing method
KR0131526B1 (en) Optical measuring device and its measuring method
US4884888A (en) Method and device for contactless optical measurement of distance changes
JPS6210361B2 (en)
JPH0648190B2 (en) Optical displacement measuring device
JP3192461B2 (en) Optical measuring device
JP2650830B2 (en) Straightness measuring device
JPH06313705A (en) Apparatus and method for detecting shape of billet
JP3149570B2 (en) Non-contact shape measuring device
JP2000111493A (en) Inspection method for surface state
JP3019647B2 (en) Non-contact thickness gauge
JPS59168309A (en) Displacement-quantity measuring device
JPH05149889A (en) Sensitivity control method and test piece for sensitivity control for optical scratch inspection device
JPH07181006A (en) Laser length measuring equipment
JPS60203804A (en) Measuring instrument of straightness
JPS5832103A (en) Noncontacting measuring device
JPS63215904A (en) Detection of marking line with light displacement meter
JPS63127103A (en) Position measuring apparatus
JPH0213807A (en) Height detection with position detector
JPH0450606A (en) Flatness gage