JPS63219571A - 蒸着装置 - Google Patents
蒸着装置Info
- Publication number
- JPS63219571A JPS63219571A JP62051605A JP5160587A JPS63219571A JP S63219571 A JPS63219571 A JP S63219571A JP 62051605 A JP62051605 A JP 62051605A JP 5160587 A JP5160587 A JP 5160587A JP S63219571 A JPS63219571 A JP S63219571A
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- heater
- workpiece
- vacuum chamber
- work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 44
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims description 28
- 239000000155 melt Substances 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 239000000758 substrate Substances 0.000 description 11
- 239000007788 liquid Substances 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052755 nonmetal Inorganic materials 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 150000002843 nonmetals Chemical class 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 4
- 229910000809 Alumel Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910001179 chromel Inorganic materials 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 235000015067 sauces Nutrition 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 241000723438 Cercidiphyllum japonicum Species 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 229910000687 transition metal group alloy Inorganic materials 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62051605A JPS63219571A (ja) | 1987-03-06 | 1987-03-06 | 蒸着装置 |
| EP87310900A EP0271351B1 (en) | 1986-12-10 | 1987-12-10 | Vacuum evaporating apparatus |
| DE8787310900T DE3786237T2 (de) | 1986-12-10 | 1987-12-10 | Vorrichtung fuer vakuumverdampfung. |
| KR1019870014123A KR930007853B1 (ko) | 1986-12-10 | 1987-12-10 | 진공 증발장치 |
| US07/131,009 US4854264A (en) | 1986-12-10 | 1987-12-10 | Vacuum evaporating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62051605A JPS63219571A (ja) | 1987-03-06 | 1987-03-06 | 蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63219571A true JPS63219571A (ja) | 1988-09-13 |
| JPH0541699B2 JPH0541699B2 (cs) | 1993-06-24 |
Family
ID=12891535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62051605A Granted JPS63219571A (ja) | 1986-12-10 | 1987-03-06 | 蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63219571A (cs) |
-
1987
- 1987-03-06 JP JP62051605A patent/JPS63219571A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0541699B2 (cs) | 1993-06-24 |
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