JPS63215974A - Handling apparatus - Google Patents

Abstract

PURPOSE:To improve positioning accuracy by detecting the positions of a semiconductor device to be measured and a contact by the same position detector and making both of the positions coincide with each other in a measuring unit. CONSTITUTION:A pallet 11 accommodating a semiconductor device 5 to be measured is set to a product supply unit 1 and pallets 30 and 31 for a nondefective and a defective, respectively, are set to a product sorting/ accommodating unit 3. The position detector 22 of a measuring unit 2 detects the position (X, Y and theta directions) of a contact 21. The semiconductor device 5 in the pallet 11 is attracted by the robot hand 12 of the product supply unit 1 and located on a positioning stage 23, which is elevated up to just below the contact 21 and the position of the semiconductor device 5 is detected by the position detector 22. Then, the stage 23 is moved, the semiconductor device 5 is positioned to the position of the contact 21, the stage 23 is elevated to bring the electrode pad of the semiconductor device 5 into contact with the contact 21 and an electric measurement is conducted by a tester. After the measurement is terminated, nondefectives and defectives are conveyed to and accommodated by the pallets 30 and 31, respectively.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a handling device for electrical measurement and classification of semiconductor devices.

[Conventional technology]

In a conventional handling device for electrical measurement and classification of semiconductor devices, the position of the contact is detected in the measuring section by a detector for detecting the position of the contact, and the position of the semiconductor device is detected in the measuring section and a separate position detecting section. The position of the semiconductor device, which is the object to be measured, is detected by the position detection detector, the semiconductor device whose position has been detected is transported to the measurement section, and the semiconductor device whose position has been detected is transferred to the contactor. Place 111
He carried out integrated electrical measurements and classified and stored the semiconductor devices that were measured based on the measurement results.

[Problems that the invention attempts to address]

In the above-mentioned conventional handling device, a position detecting section separate from the measuring section detects the position of the semiconductor device, which is the object to be measured, using a detector for detecting the position of the semiconductor device, transports it to the measuring section, and transfers it to the measuring section. Electrical measurements were made by aligning the position 'li with the contact whose position it was detected by the position detection detector and bringing it into contact.

There is a drawback that a positional deviation (error) 't- occurs between the aligned semiconductor device and the contactor.

[Means for solving problems]

In order to solve the above problems, the present invention detects the position of the semiconductor device under test and the position of the contactor for making contact with the electrode terminal of this semiconductor device using the same digitizer, and
ft is added.

〔Example〕

Next, one embodiment of the present invention will be explained with reference to the drawings.

FIG. 1 is a schematic perspective view of an embodiment of the present invention.

In No. 1 C, 1 Handling bag of the present invention #c.

Commission supply department 1. It includes a creation section 2 and a product classification storage section 3. First, a rolling pallet 11t containing a semiconductor device lf5, which is an object to be measured, is set on the product setting table of the product supply section 1, an empty pallet 30 is set on the good product storage set table of the product classification storage section 3, and the product An empty pallet 31 is set on the defective product storage set table of the classification storage section 3. The position detector 22 of the measuring section 2 detects the position (X,
Y, θ directions). Semiconductor devices contained in pallets (11) set on a product setting table
The product supply unit (robot hand) 12 of the 5-metal product supply section 1 is dispersed, conveyed to the alignment stage 23 of the measurement section 2, and fixed on the 1 alignment stage 23 by suction.

The positioning stage 23 on which the semiconductor device 5 as the object to be measured is placed and fixed is raised to just below the MD element 21 of the measuring section 2, and the position detector 22 of the measuring section 2 determines the position of the semiconductor device 5 (X, (Y, θ directions) tl-detection, and aligns the alignment stage 23 on which the semiconductor device 5 is mounted in the X, Y,
The semiconductor device 5 is moved in the θ direction to align the semiconductor device 5 to the position of the contact 21.The alignment stage 23i is further raised to bring the contact 21 into contact with the electrode pad t of the semiconductor device 5. Perform targeted measurements. When the electrical measurement is completed, the alignment stage 23 on which the semiconductor device 1It5 is placed is lowered and stopped at the initial position. Product classification storage section 3
The product classification unit (robot hand) 32 scatters the semiconductor gR5 that has been electrically measured on the alignment stage 23, and if it is a non-defective product based on the result of the electrical measurement, the pallet 30 is set on the non-defective product storage set table. transported and housed in
If the product is defective, it is transported and stored on a pallet 31 set on a defective product storage set table.

In the above-described embodiment, the semiconductor device, which is the object to be measured, is aligned with the contact, but the contact may be aligned with the semiconductor device.

〔Effect of the invention〕

As explained above, the present invention has the effect of detecting the positions of the semiconductor device and the contactor of the object to be measured using the same position detector in the measuring section, and by combining the position [11], the first position can be determined with high accuracy. There is.

[Brief explanation of the drawing]

FIG. 1 is a diagram schematically showing an embodiment of the present invention. 1...Product supply section, 11...Pallet, 12...Robot hand, 2...Measurement section, 21...Contact piece, 22...Position detector, 23...Positioning stage, 3...
...Product classification storage section, 30...Pallet for good products, 31...Pallet for defective products, 32...
...Robot hand, 5...Semiconductor device.

Claims (1)

[Claims] A measuring section having an alignment stage on which a semiconductor device as an object to be measured is placed, a contactor for making contact with an electrode terminal of the semiconductor device placed on the stage, and a semiconductor device placed on the measuring section. In the handling device, the handling device has a product supply section and a product classification storage section that sorts and stores semiconductor devices that have been measured in the measurement section, and the measurement section further includes information on the position of the contact and the semiconductor devices on the stage. 1. A handling device comprising a single position detector that detects the position of the device and aligns the two positions.