JPS63213349A - Resin sealing member of semiconductor device - Google Patents

Resin sealing member of semiconductor device

Info

Publication number
JPS63213349A
JPS63213349A JP4700787A JP4700787A JPS63213349A JP S63213349 A JPS63213349 A JP S63213349A JP 4700787 A JP4700787 A JP 4700787A JP 4700787 A JP4700787 A JP 4700787A JP S63213349 A JPS63213349 A JP S63213349A
Authority
JP
Japan
Prior art keywords
resin
frame
semiconductor
sealing member
viscosity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4700787A
Other languages
Japanese (ja)
Inventor
Tatsuo Mizuno
達夫 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4700787A priority Critical patent/JPS63213349A/en
Publication of JPS63213349A publication Critical patent/JPS63213349A/en
Pending legal-status Critical Current

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  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To prevent air from penetrating and to prevent voids from being generated, by shaping a box on the upper part of frame-shaped resin by adhesion of resin whose viscosity is smaller than that of this frame-shaped resin during fusion. CONSTITUTION:A semiconductor sealing member 8 comprises the following parts: resin which becomes high viscosity liquid during fusion, a frame 6 which surrounds a prescribed range inclusive of a semiconductor chip 4 and a wire 5 on a substrate 3 for a semiconductor device, resin whose viscosity becomes smaller than that of the frame 6 during fusion, and a plate 7 which adheres to the upper surface of the frame 6. When high temperature fusion is performed to seal a semiconductor component, resin 7 on the upper part firstly starts flowing due to its low viscosity so that the semiconductor component 4 is sealed inside the frame-shaped resin 6, and because the frame shaped resin 6 is then high in viscosity, the resin 7 of low viscosity is prevented from sagging so that the semiconductor component 4 is sealed. Hence, voids can be prevented from being generated inside the sealing.

Description

【発明の詳細な説明】 〔産業上の利用分動〕 この発明は、半導体装置用基板上に取り付けらnた1個
または複数個の半導体部品を封止する封止部材に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application] The present invention relates to a sealing member for sealing one or more semiconductor components mounted on a substrate for a semiconductor device.

〔従来の技術〕[Conventional technology]

従来この柚の物用イ封止部材を第5図、第6図、第7図
、第8肉に示すr、IJJJちこれらの肉において、l
は樹脂喋蓋形状の半導体封止部材であり、2はその半導
体部品収納用の空所である。3は半導体装置用基板、4
はこの半導体装置用基板3上の所定の部位に固着した半
導体チップ、5はワイヤである0ζr:a第8図におけ
る1aは半導体チップ4およびワイヤ5を溶融封止後の
半導体封止部材を示O 次に樹脂封止の動作について説明する。まず第6図、第
7図に示すように、半導体装置用基板3上の所定の部位
に、上方から#?導体封止部材1を、半導体チップ4お
よびワイヤ5がそσノ空所2に収納さnるように取り付
ける、次に第8図のように加熱手段(図示しない)によ
り半導体封止部材1を浴融させ、半導体チップ4および
ワイヤ5を封止し、その後、冷却して樹脂を硬化させる
□〔発明が解決しようとする問題点〕 従来の半導体封止部材は以上のように構成さnているの
で、封止部材の加熱溶融時に空気を巻き込み、第8図の
ようにボイドlbが生じたり、封止部材のよ部樹脂が溶
融塊と9って半導体チップ4上に直接落下し、半導体チ
ップ4およびワイヤ5に損傷を与え、また外部へlc 
(/J TxJ(だnて流れ出るなどの問題点がある。
Conventionally, this sealing member for Yuzu products is shown in Figures 5, 6, 7, and 8.
2 is a resin lid-shaped semiconductor sealing member, and 2 is a space for storing the semiconductor component. 3 is a semiconductor device substrate, 4
0ζr:a is a semiconductor chip fixed to a predetermined location on this semiconductor device substrate 3, 5 is a wire 0ζr:a In FIG. O Next, the operation of resin sealing will be explained. First, as shown in FIG. 6 and FIG. 7, a #? The conductor sealing member 1 is attached so that the semiconductor chip 4 and the wire 5 are housed in the space 2. Next, as shown in FIG. 8, the semiconductor sealing member 1 is heated by heating means (not shown). The semiconductor chip 4 and the wires 5 are melted in a bath, and then the semiconductor chip 4 and the wires 5 are sealed, and then the resin is cured by cooling.[Problems to be solved by the invention] Conventional semiconductor sealing members are constructed as described above. As a result, air is drawn in when the sealing member is heated and melted, creating voids lb as shown in Figure 8, or the resin on the side of the sealing member falls directly onto the semiconductor chip 4 as a molten lump, causing the semiconductor damage the chip 4 and wire 5, and
(/J TxJ(There are problems such as it leaking out.

・ この発明は上記のような問題点ご解消Tるためになさn
たもので、空気の巻き込みを防ぎ、ボイドの発生を抑制
するとともに、半導体チップおよびワイヤに損傷を与え
ず、かつ外部へのだnも生じない半導体封止部材を得る
ことご目的とする。
・This invention was made to solve the above problems.
It is an object of the present invention to obtain a semiconductor sealing member which prevents air from being entrained, suppresses the generation of voids, does not damage semiconductor chips and wires, and does not cause leakage to the outside.

(問題点を解決T/)ための+段〕 こσノ発明に係る半導体封止部材は、枠状の樹脂上部に
、溶融時にこの枠状樹脂より低粘度の樹脂を接着して箱
形状としたものである。
(Step + for solving the problem T/)] The semiconductor sealing member according to the invention of σ is formed into a box shape by bonding a resin having a lower viscosity than the frame-shaped resin on the upper part of the frame-shaped resin when melted. This is what I did.

〔作用〕[Effect]

この発明における半導体封止部材は、半導体部品を封止
するために高温溶融させる際、ます土部の樹脂が低粘度
なため流れ出して枠状樹脂の内側で半導体部品を封止し
はじめ、かつこの時枠状樹脂は高粘度なため、低粘度の
樹脂の外部へのだnご防ぎ、半導体部品を封止するもの
となる。
In the semiconductor encapsulation member of the present invention, when the semiconductor component is melted at a high temperature for encapsulation, the resin in the clay part flows out due to its low viscosity and begins to encapsulate the semiconductor component inside the frame-shaped resin. Since the time frame resin has a high viscosity, it prevents the low viscosity resin from collapsing to the outside and seals the semiconductor component.

〔実施例〕〔Example〕

以下、この発明の一実施例を(2)について説明する。 An embodiment of the present invention will be described below regarding (2).

第1図、第2図、第8肉において、6Gゴ浴融した際に
高粘度の液状となる樹脂からなり、半導体装置用基板3
上の半導体チップ4およびワイヤ5号含む所定範囲を囲
む枠体であり、半導体チップ4、ワイヤ5を含む半導体
部品より厚く設定されている。7は溶融した際に上記枠
体6より低粘度の樹脂からなり、上記枠体6の土面に接
着し2板である。なお、こnら囲い枠体6と板7により
、半導体封止部材8を構成する。
1, 2, and 8, the semiconductor device substrate 3 is made of a resin that becomes a highly viscous liquid when melted in a 6G bath.
It is a frame that surrounds a predetermined area including the upper semiconductor chip 4 and wire No. 5, and is set thicker than the semiconductor component including the semiconductor chip 4 and wire 5. Reference numeral 7 is made of a resin having a lower viscosity than the frame 6 when melted, and is adhered to the soil surface of the frame 6 to form two plates. Incidentally, the surrounding frame 6 and the plate 7 constitute a semiconductor sealing member 8.

次にその封止動作について説明する。第2図、第8図の
ように、半導体装置用基板3の所定σj部位に上方から
半導体封止部材8を取り付は固層する。次に第4図σ〕
ように・加熱手段(図示しない)により、半導体封止部
材8を溶融させ、半導体チップ4およびワイヤ5を封止
し、その後、冷却して樹脂を硬化させ封止を完了する。
Next, the sealing operation will be explained. As shown in FIGS. 2 and 8, the semiconductor sealing member 8 is attached and fixed at a predetermined σj portion of the semiconductor device substrate 3 from above. Next, Figure 4 σ]
Thus, the semiconductor sealing member 8 is melted by a heating means (not shown) to seal the semiconductor chip 4 and the wires 5, and then it is cooled to harden the resin to complete the sealing.

ところで上記加熱溶融時において、樹脂製板7が低粘度
のため、枠体6の内部に流n込んで封止しはじめるが、
この際枠体6は樹脂の外周部への流n出しを防止するも
のである。
By the way, at the time of heating and melting, since the resin plate 7 has a low viscosity, it starts to flow into the inside of the frame 6 and seal it.
At this time, the frame body 6 prevents the resin from flowing out to the outer periphery.

なお上記実施例では、封止する半導体部品は半導体チッ
プおよびワイヤの場合について説明したが、ワイヤレス
の7リツプチツプや他の半導体部品であってもよい。ま
た枠体6の形状を四角形で示しているが、円筒状や他の
形状でもよいことは勿論である。
In the above embodiments, the semiconductor components to be sealed are semiconductor chips and wires, but they may also be wireless 7-lip chips or other semiconductor components. Further, although the shape of the frame body 6 is shown as a rectangle, it goes without saying that it may be cylindrical or other shapes.

〔開明の効果〕[Effect of enlightenment]

以上のようにこの発明によりは・半導体封止部材として
、溶融時に粘度σ」有、無による二種類の樹脂を接合し
た構成にしたので、外周部に溶融樹脂かだnることかな
く、ま7e封封止部にボイドが生ぜず、かつ封止する半
導体部品に損傷を与えることのない、高信頼性の封止が
得られる効果がある。
As described above, according to the present invention, two types of resins with and without viscosity σ when melted are bonded together as a semiconductor sealing member, so there is no molten resin raft on the outer periphery. 7e There is an effect that highly reliable sealing can be obtained without forming voids in the sealing portion and without damaging the semiconductor components to be sealed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例による半導体封止部材を示
T斜視図、第2図、第8図G1半導体装置用基板への取
付は状態を、示T斜視図と断面図、第4図は半導体装置
用基板への取付は後、加熱溶融し封止した状態を示TP
#面図、第5図は従来の半導体封止部材を示す斜視図、
第6図、褐7図は従来の半導体封止部材の半導体装置用
基板への取付は状態を示す斜視図、第8図は従来の半導
体封止部材の半導体装置用基板への取付は後、加熱浴融
し封止した状態を示す断面図である。 図中、2は空所、3は半導体装置用基板、4は半導体チ
ップ、5はワイヤ、6は尚粘度樹脂製枠体、7は低粘度
樹脂製板、8は半導体封止部材である。 尚、図中同一符号は同一または相当部分を示す。 代理人   大  岩  増  雄 第1図 θ 4  千キ俸う−フフ。 tJ−’ツイヤ 第3図 第4図 第ろ図
1 is a perspective view of a semiconductor sealing member according to an embodiment of the present invention; FIGS. The figure shows the state where the TP is heated and melted and sealed after being attached to a semiconductor device substrate.
#A side view, FIG. 5 is a perspective view showing a conventional semiconductor sealing member,
FIGS. 6 and 7 are perspective views showing the state in which a conventional semiconductor sealing member is attached to a semiconductor device substrate, and FIG. 8 is a perspective view showing a state in which a conventional semiconductor sealing member is attached to a semiconductor device substrate. FIG. 3 is a cross-sectional view showing a state in which the device is melted and sealed in a heating bath. In the figure, 2 is a space, 3 is a substrate for a semiconductor device, 4 is a semiconductor chip, 5 is a wire, 6 is a frame made of a high-viscosity resin, 7 is a plate made of a low-viscosity resin, and 8 is a semiconductor sealing member. Note that the same reference numerals in the figures indicate the same or corresponding parts. Agent Masuo Oiwa Figure 1 θ 4 I'll pay you 1,000 kilos - hehe. tJ-' Tsuiya Figure 3 Figure 4 Figure 4

Claims (2)

【特許請求の範囲】[Claims] (1)半導体装置用基板上に、該基板上の所定部位に取
り付けられた半導体チップ等の半導体部品を収納し得る
固形状の樹脂封止部材を取り付け、この封止部材を所定
の温度まで加熱溶融させて上記半導体部品を封止するよ
うにした封止部材において、上記半導体装置用基板上の
半導体部品を含む所定範囲の外周部を囲み、かつ溶融し
た際に高粘度の液状となる樹脂でなる枠体と、この枠体
の上部に接着され上記樹脂より溶融した際に低粘度の液
状となる樹脂とから構成したことを特徴とする半導体装
置の樹脂封止部材。
(1) A solid resin sealing member capable of accommodating semiconductor components such as semiconductor chips attached to a predetermined location on the substrate is attached to a semiconductor device substrate, and this sealing member is heated to a predetermined temperature. In a sealing member that is melted to seal the semiconductor component, the resin surrounds the outer periphery of a predetermined range including the semiconductor component on the semiconductor device substrate, and becomes a highly viscous liquid when melted. 1. A resin sealing member for a semiconductor device, comprising: a frame; and a resin that is bonded to the upper part of the frame and becomes a low-viscosity liquid when melted from the resin.
(2)溶融した際に高粘度の液状となる樹脂からなる枠
体のよ面にこの枠体より低粘度の樹脂からなる板状樹脂
を接着して凹部箱形状に形成したことを特徴とする特許
請求の範囲第1項記載の半導体装置の樹脂封止部材。
(2) A plate-shaped resin made of a resin having a lower viscosity than the frame is adhered to the side surface of a frame made of a resin that becomes a liquid with high viscosity when melted to form a concave box shape. A resin sealing member for a semiconductor device according to claim 1.
JP4700787A 1987-03-02 1987-03-02 Resin sealing member of semiconductor device Pending JPS63213349A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4700787A JPS63213349A (en) 1987-03-02 1987-03-02 Resin sealing member of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4700787A JPS63213349A (en) 1987-03-02 1987-03-02 Resin sealing member of semiconductor device

Publications (1)

Publication Number Publication Date
JPS63213349A true JPS63213349A (en) 1988-09-06

Family

ID=12763110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4700787A Pending JPS63213349A (en) 1987-03-02 1987-03-02 Resin sealing member of semiconductor device

Country Status (1)

Country Link
JP (1) JPS63213349A (en)

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