JPS6321306B2 - - Google Patents

Info

Publication number
JPS6321306B2
JPS6321306B2 JP54157672A JP15767279A JPS6321306B2 JP S6321306 B2 JPS6321306 B2 JP S6321306B2 JP 54157672 A JP54157672 A JP 54157672A JP 15767279 A JP15767279 A JP 15767279A JP S6321306 B2 JPS6321306 B2 JP S6321306B2
Authority
JP
Japan
Prior art keywords
voltage
beam current
function
switching element
cathode resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54157672A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5680383A (en
Inventor
Seiichi Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP15767279A priority Critical patent/JPS5680383A/ja
Publication of JPS5680383A publication Critical patent/JPS5680383A/ja
Publication of JPS6321306B2 publication Critical patent/JPS6321306B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP15767279A 1979-12-05 1979-12-05 Beam current control device Granted JPS5680383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15767279A JPS5680383A (en) 1979-12-05 1979-12-05 Beam current control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15767279A JPS5680383A (en) 1979-12-05 1979-12-05 Beam current control device

Publications (2)

Publication Number Publication Date
JPS5680383A JPS5680383A (en) 1981-07-01
JPS6321306B2 true JPS6321306B2 (cs) 1988-05-06

Family

ID=15654850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15767279A Granted JPS5680383A (en) 1979-12-05 1979-12-05 Beam current control device

Country Status (1)

Country Link
JP (1) JPS5680383A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2178203A (en) * 1985-07-26 1987-02-04 Radiation Dynamics Regulating electron beam emission

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5148523Y2 (cs) * 1972-06-24 1976-11-22
JPS507797U (cs) * 1973-05-21 1975-01-27
DE2514805C3 (de) * 1975-04-04 1978-05-18 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Anordnung zur Leistungssteuerung von Hochspannungs-EIektronenstrahlerzeugern

Also Published As

Publication number Publication date
JPS5680383A (en) 1981-07-01

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