JPS63212211A - Manufacture of piezoelectric resonator - Google Patents
Manufacture of piezoelectric resonatorInfo
- Publication number
- JPS63212211A JPS63212211A JP4648687A JP4648687A JPS63212211A JP S63212211 A JPS63212211 A JP S63212211A JP 4648687 A JP4648687 A JP 4648687A JP 4648687 A JP4648687 A JP 4648687A JP S63212211 A JPS63212211 A JP S63212211A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- base material
- piezoelectric resonator
- resonance
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 21
- 238000000605 extraction Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 abstract description 2
- 239000006185 dispersion Substances 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
く産業上の利用分野〉
この発明は、圧電共振子の製造方法、更に詳しくは、帯
板状の母材基板から短冊状の二端子共振子をカッティン
グによって切出して行くようにした製造方法に関するも
のである。[Detailed Description of the Invention] Industrial Application Fields The present invention relates to a method for manufacturing a piezoelectric resonator, and more specifically, to a method for manufacturing a piezoelectric resonator, in which a strip-shaped two-terminal resonator is cut out from a strip-shaped base material substrate by cutting. The present invention relates to a manufacturing method as described above.
く従来の技術とその問題点〉
エネルギー閉じ込め形の厚みすべりの短冊状二端子共振
子は、第４図に示すように、短冊状に形成した圧電基板
１の両面に、共振電極２．３と、各共振電極２．３に連
なる引出電極４．５を、両共振電極２と３が圧電基板１
を挟んで対向し、引出電極４．５が互いに逆方向に向く
よう引出したパターンで設（プて偶成されている。Prior art and its problems> An energy trapping type thickness-slip strip-shaped two-terminal resonator has resonance electrodes 2.3 and 3 on both sides of a piezoelectric substrate 1 formed in a strip shape, as shown in FIG. , an extraction electrode 4.5 connected to each resonance electrode 2.3, and both resonance electrodes 2 and 3 connected to the piezoelectric substrate 1.
They are arranged in a pattern in which the lead electrodes 4.5 face oppositely to each other and are drawn out in opposite directions.
上記のような短冊状の二端子共振子は、両面に設けた共
１１ｉｉ電ｆｆ１２と３の電極面積によって特性が決定
される。The characteristics of the strip-shaped two-terminal resonator as described above are determined by the area of the electrodes 12 and 3 provided on both sides.
ところで、上記二端子共振子を得る従来の製造方法は、
短冊状に形成した圧電基板１の単体に対し、その両面に
電極パターンを個々に印刷するようにしていたため、印
刷時において、圧電基板と印刷マスクの位置が合わない
と、第４図で示したように圧電基板１の幅方向Ａに対し
て共振電極２又は３に位置ずれが生じ、この結果電極面
積が異なり、各製品ごとの特性が変化するという問題が
ある。By the way, the conventional manufacturing method for obtaining the above two-terminal resonator is as follows:
Since electrode patterns were individually printed on both sides of the piezoelectric substrate 1 formed into a rectangular shape, the position of the piezoelectric substrate and the printing mask did not match during printing, as shown in Figure 4. As such, there is a problem in that the resonant electrode 2 or 3 is misaligned with respect to the width direction A of the piezoelectric substrate 1, and as a result, the electrode area differs and the characteristics of each product change.
〈発明の目的〉
この発明は上記のような問題を解決するためになされた
ものであり、共振電極の面積に変化がなく、特性が常に
一定の製品を得ることができる圧電共振子の￥Ｉ造六方
法提供することを目的とする。<Purpose of the Invention> This invention was made to solve the above-mentioned problems, and provides a piezoelectric resonator with constant characteristics without any change in the area of the resonant electrode. The purpose is to provide six methods of construction.
〈問題点を解決するための手段〉
上記のような問題点を解決するため、この発明は、帯状
板に形成した母材基板の両面に、母材基板の長手方向に
連続する共振電極帯と、この共振電極帯から連なって一
方に引出され、共振電極帯の長手方向に一定の間隔で並
ぶ引出電極とを、共振電極帯が母材基板を挟んで対向し
、Ｃ１出電極が互いに逆方向へ引出された状態で形成し
、この母材基板を各引出電極間の位置において一定の幅
で短冊状にカットするようにしたものである。<Means for Solving the Problems> In order to solve the above-mentioned problems, the present invention provides resonant electrode bands that are continuous in the longitudinal direction of the base material substrate on both sides of the base material substrate formed in the form of a strip plate. , the resonant electrode band is connected to the resonant electrode band and pulled out to one side, and the resonant electrode band is opposed to the resonant electrode band with the base material substrate in between, and the C1 output electrodes are connected to each other in opposite directions. The base material substrate is formed in a drawn state, and the base material substrate is cut into strips with a constant width at positions between the respective extraction electrodes.
〈作用〉
長細い帯板状に形成された母材基板の両面に、共振電極
帯と引出電極とを、共振電極帯が母材基板を挟んで対向
するパターンで形成し、この母材嘩板を各引出電極の間
において一定の幅にカッティングし、短冊状の圧電基板
を切出せば、この圧電基板の全幅にわたって共振電極が
形成された上極面積の一定化した圧電共振子が得られる
。<Function> A resonant electrode band and an extraction electrode are formed on both sides of a base material substrate formed in the shape of a long thin strip in a pattern in which the resonant electrode band faces each other with the base material substrate in between. By cutting the piezoelectric substrate to a constant width between each extraction electrode and cutting out a rectangular piezoelectric substrate, a piezoelectric resonator with a constant upper electrode area and a resonant electrode formed over the entire width of the piezoelectric substrate can be obtained.
〈実施例〉
以下、この発明の実施例を添付図面の第１図ないし第３
図にもとづいて説明する。<Examples> Examples of the present invention will be described below with reference to Figures 1 to 3 of the accompanying drawings.
This will be explained based on the diagram.
第２図のように先ず、セラミック等の圧電材を用い、長
細い帯板状の母材基板１１を形成し、この母材基板１１
の両面に印刷や蒸着等の手段によって共振電極帯１２．
１３と引出電極１４．１５を各々設ける。As shown in FIG.
The resonant electrode strip 12. is formed by printing or vapor deposition on both sides of the resonant electrode strip 12.
13 and extraction electrodes 14 and 15 are provided, respectively.
上記母材基板１１は、その幅が圧電共振子における圧電
基板の長さとなると共に、共振電極帯１２．１３は母材
基板１１の長手方向に沿って連続する帯状に形成され、
両共振電極帯１２と１３は、母材基板１１の幅方向中央
部において、母材基板１１を挟んで対向するように配置
されている。The width of the base material substrate 11 is equal to the length of the piezoelectric substrate in the piezoelectric resonator, and the resonant electrode bands 12 and 13 are formed in a continuous band shape along the longitudinal direction of the base material substrate 11,
Both resonant electrode bands 12 and 13 are arranged at the center of the base material substrate 11 in the width direction so as to face each other with the base material substrate 11 in between.
引出電極１４．１５は各々の共振電極帯１２．１３から
連なって一方に引出され、共振電極帯１２．１３の長手
方向に一定の間隔で並ぶパターンに形成され、母材基板
１１の両面において、互いに逆方向へ引出された状態の
配置になっている。The extraction electrodes 14.15 are connected to each resonant electrode band 12.13 and pulled out to one side, and are formed in a pattern arranged at regular intervals in the longitudinal direction of the resonant electrode band 12.13, on both sides of the base material substrate 11. They are arranged so that they are pulled out in opposite directions.
次に電極形成俊の母材基板１１を焼成後において、第２
図及び第３図の一点鎖線の如く、平面的に並ぶ引出電極
間の位置で機械的な切断手段を用いて一定の幅にカッテ
ィングし、短冊状の圧電共振子１６を切出す。Next, after firing the base material substrate 11 for electrode formation, the second
As shown by the dashed-dotted lines in the drawings and FIG. 3, a mechanical cutting means is used to cut the piezoelectric resonator 16 into a certain width at a position between the two-dimensionally arranged extraction electrodes, thereby cutting out a rectangular piezoelectric resonator 16.
上記圧電共振子１６は第１図のように母材基板１１から
切出された圧電基板１７が短冊状になり、この圧電基板
１７の両面において、共振電極帯１２．１３により、圧
電基板１７の幅方向全体にわたる共振電極１２ａ、１３
ａとなり、引出電極１４と１５は、圧電基板１７の相反
する端部に達している。As shown in FIG. 1, the piezoelectric resonator 16 has a piezoelectric substrate 17 cut out from the base material substrate 11 into a rectangular shape. Resonant electrodes 12a, 13 throughout the width direction
a, and the extraction electrodes 14 and 15 reach opposite ends of the piezoelectric substrate 17.
上記のように、母材基板１１の燐手方向に沿って連続す
る帯状の共振電極帯１２．１３を設け、その後、母材基
板１１を一定の幅にカットして圧電共振子１６を形成す
ると、電極パターンに対するカット位置のずれや、電極
パターンの表裏でのずれがあっても圧電基板１７の幅方
向全長にわたって共振電極１２ａ、１３ａを形成するこ
とができ、カット幅寸法さえ正確であれば共振電極１２
ａと１３８の面積は常に一定となり、製品ごとの特性の
バラツキ発生がなくなる。As described above, the continuous band-shaped resonant electrode bands 12 and 13 are provided along the longitudinal direction of the base material substrate 11, and then the base material substrate 11 is cut to a certain width to form the piezoelectric resonator 16. Even if there is a misalignment of the cut position with respect to the electrode pattern or a misalignment between the front and back of the electrode pattern, the resonant electrodes 12a and 13a can be formed over the entire length of the piezoelectric substrate 17 in the width direction, and as long as the cut width dimension is accurate, resonance can be achieved. electrode 12
The areas of a and 138 are always constant, eliminating variations in characteristics from product to product.
〈効果〉
以上のように、この発明によるとエネルギー閉じ込め形
の厚みすべりの短冊状二端子共振子において、圧電基板
の表面に対し、幅方向の全長にわたって共振電極を形成
することができ、共振電極の面積の変化がなく、圧電基
板のカット幅を正確にするだけで特性の一定した圧電共
振子を得ることができる。<Effects> As described above, according to the present invention, in an energy trapping type thickness-shear strip-shaped two-terminal resonator, a resonant electrode can be formed over the entire length in the width direction on the surface of a piezoelectric substrate. There is no change in the area of the piezoelectric resonator, and it is possible to obtain a piezoelectric resonator with constant characteristics simply by making the cut width of the piezoelectric substrate accurate.
【図面の簡単な説明】
第１図はこの発明の製造方法によって製造した圧電共振
子の斜視図、第２図は製造工程途中の斜視図、第３図は
同平面図、第４図は従来の圧電共振子を示す斜視図であ
る。[Brief Description of the Drawings] Fig. 1 is a perspective view of a piezoelectric resonator manufactured by the manufacturing method of the present invention, Fig. 2 is a perspective view during the manufacturing process, Fig. 3 is a plan view of the same, and Fig. 4 is a conventional piezoelectric resonator. FIG. 2 is a perspective view showing a piezoelectric resonator of FIG.
Claims (1)
方向に連続する共振電極帯と、この共振電極帯から連な
って一方に引出され、共振電極帯の長手方向に一定の間
隔で並ぶ引出電極とを、共振電極帯が母材基板を挟んで
対向し引出電極が互いに逆方向へ引出された状態で形成
し、この母材基板を各引出電極間の位置において一定の
幅で短冊状にカットすることを特徴とする圧電共振子の
製造方法。On both sides of the base material substrate formed in the shape of a strip, there is a resonant electrode band that continues in the longitudinal direction of the base material substrate, and a resonant electrode band that is continuous from this resonant electrode band and is pulled out to one side, and is arranged at regular intervals in the longitudinal direction of the resonant electrode band. The parallel extraction electrodes are formed with the resonant electrode bands facing each other across the base material substrate, and the extraction electrodes are drawn out in opposite directions, and the base material substrate is formed into strips with a constant width at the positions between the respective extraction electrodes. A method for manufacturing a piezoelectric resonator, the method comprising cutting the piezoelectric resonator into shapes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4648687A JPS63212211A (en) | 1987-02-27 | 1987-02-27 | Manufacture of piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4648687A JPS63212211A (en) | 1987-02-27 | 1987-02-27 | Manufacture of piezoelectric resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63212211A true JPS63212211A (en) | 1988-09-05 |
Family
ID=12748534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4648687A Pending JPS63212211A (en) | 1987-02-27 | 1987-02-27 | Manufacture of piezoelectric resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63212211A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0353605A (en) * | 1989-07-20 | 1991-03-07 | Murata Mfg Co Ltd | Manufacture of piezoelectric resonator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5564413A (en) * | 1978-11-08 | 1980-05-15 | Toshiba Corp | Manufacture of piezoelectric ceramic resonator |
| JPS603222A (en) * | 1983-06-20 | 1985-01-09 | Murata Mfg Co Ltd | Piezoelectric resonator and its manufacture |
| JPS61251304A (en) * | 1985-04-30 | 1986-11-08 | Fujitsu Ltd | Manufacture of piezoelectric vibrator |
-
1987
- 1987-02-27 JP JP4648687A patent/JPS63212211A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5564413A (en) * | 1978-11-08 | 1980-05-15 | Toshiba Corp | Manufacture of piezoelectric ceramic resonator |
| JPS603222A (en) * | 1983-06-20 | 1985-01-09 | Murata Mfg Co Ltd | Piezoelectric resonator and its manufacture |
| JPS61251304A (en) * | 1985-04-30 | 1986-11-08 | Fujitsu Ltd | Manufacture of piezoelectric vibrator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0353605A (en) * | 1989-07-20 | 1991-03-07 | Murata Mfg Co Ltd | Manufacture of piezoelectric resonator |
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