JPS6320674B2 - - Google Patents

Info

Publication number
JPS6320674B2
JPS6320674B2 JP58193942A JP19394283A JPS6320674B2 JP S6320674 B2 JPS6320674 B2 JP S6320674B2 JP 58193942 A JP58193942 A JP 58193942A JP 19394283 A JP19394283 A JP 19394283A JP S6320674 B2 JPS6320674 B2 JP S6320674B2
Authority
JP
Japan
Prior art keywords
surface plate
workpiece
workpieces
polishing
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58193942A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6085862A (ja
Inventor
Yasuyuki Onomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoshi Machinery Corp
Original Assignee
Fujikoshi Kikai Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoshi Kikai Kogyo KK filed Critical Fujikoshi Kikai Kogyo KK
Priority to JP58193942A priority Critical patent/JPS6085862A/ja
Publication of JPS6085862A publication Critical patent/JPS6085862A/ja
Publication of JPS6320674B2 publication Critical patent/JPS6320674B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP58193942A 1983-10-17 1983-10-17 研磨方法およびその装置 Granted JPS6085862A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58193942A JPS6085862A (ja) 1983-10-17 1983-10-17 研磨方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58193942A JPS6085862A (ja) 1983-10-17 1983-10-17 研磨方法およびその装置

Publications (2)

Publication Number Publication Date
JPS6085862A JPS6085862A (ja) 1985-05-15
JPS6320674B2 true JPS6320674B2 (enrdf_load_stackoverflow) 1988-04-28

Family

ID=16316305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58193942A Granted JPS6085862A (ja) 1983-10-17 1983-10-17 研磨方法およびその装置

Country Status (1)

Country Link
JP (1) JPS6085862A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63123668A (ja) * 1986-11-11 1988-05-27 Nippon Telegr & Teleph Corp <Ntt> 研摩機
JPH01301057A (ja) * 1988-05-26 1989-12-05 Toshin Seiki Kk ポリッシングマシン

Also Published As

Publication number Publication date
JPS6085862A (ja) 1985-05-15

Similar Documents

Publication Publication Date Title
EP0486696B1 (en) Surface grinder for glass plate
JPH0663862A (ja) 研磨装置
TWI278926B (en) Apparatus and method of polishing periphery of device wafer
JP2716653B2 (ja) ウェーハの研磨装置および研磨方法
US4753049A (en) Method and apparatus for grinding the surface of a semiconductor
GB2236970A (en) Edge polisher
JP4256977B2 (ja) 両面研磨装置システム
WO2000069597A1 (fr) Procede et dispositif de polissage double face
CN111113219A (zh) 一种手机壳转台数控砂光机
US5224304A (en) Automated free abrasive machine for one side piece part machining
JP2002144201A (ja) 円板形ワークの外周研磨装置及び研磨方法
KR100519640B1 (ko) 로타리식 자동버핑기
JPH081494A (ja) ウエハー材縁端部研磨装置
JPS6320674B2 (enrdf_load_stackoverflow)
CN211277845U (zh) 一种手机壳转台数控砂光机
JP2021030336A (ja) ウエーハの加工方法
FR2587260A1 (fr) Rectifieuse pour pans de verre a controle numerique
JP2836923B2 (ja) ポリシング仕上げ装置
JP2000326222A (ja) 両面研摩方法及び装置
JPS6125972Y2 (enrdf_load_stackoverflow)
JPS6179557A (ja) 研削装置
JP3230854B2 (ja) 研磨方法及びその装置
JP2569501Y2 (ja) ターンテーブル式搬送研磨装置
JPS6146267B2 (enrdf_load_stackoverflow)
JPH044099B2 (enrdf_load_stackoverflow)