JPS63206709A - 埋込み型シングルモ−ド光導波路の製造方法 - Google Patents
埋込み型シングルモ−ド光導波路の製造方法Info
- Publication number
- JPS63206709A JPS63206709A JP62039891A JP3989187A JPS63206709A JP S63206709 A JPS63206709 A JP S63206709A JP 62039891 A JP62039891 A JP 62039891A JP 3989187 A JP3989187 A JP 3989187A JP S63206709 A JPS63206709 A JP S63206709A
- Authority
- JP
- Japan
- Prior art keywords
- ion exchange
- ion
- ions
- glass substrate
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000005342 ion exchange Methods 0.000 claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 239000011521 glass Substances 0.000 claims abstract description 28
- 150000003839 salts Chemical class 0.000 claims abstract description 19
- 239000003513 alkali Substances 0.000 claims abstract description 6
- 150000002500 ions Chemical class 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 22
- 230000003287 optical effect Effects 0.000 claims description 10
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- 229910052700 potassium Inorganic materials 0.000 claims description 2
- 229910001417 caesium ion Inorganic materials 0.000 claims 1
- 230000005684 electric field Effects 0.000 abstract description 11
- 238000011282 treatment Methods 0.000 abstract description 8
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910002651 NO3 Inorganic materials 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62039891A JPS63206709A (ja) | 1987-02-23 | 1987-02-23 | 埋込み型シングルモ−ド光導波路の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62039891A JPS63206709A (ja) | 1987-02-23 | 1987-02-23 | 埋込み型シングルモ−ド光導波路の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63206709A true JPS63206709A (ja) | 1988-08-26 |
| JPH0462644B2 JPH0462644B2 (enrdf_load_stackoverflow) | 1992-10-07 |
Family
ID=12565591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62039891A Granted JPS63206709A (ja) | 1987-02-23 | 1987-02-23 | 埋込み型シングルモ−ド光導波路の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63206709A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5125946A (en) * | 1990-12-10 | 1992-06-30 | Corning Incorporated | Manufacturing method for planar optical waveguides |
| US5139556A (en) * | 1990-03-07 | 1992-08-18 | Cselt - Centro Studi E Laboratori Telecomunicazioni S.P.A. | Method of adjusting the operation characteristics of integrated optical devices |
| US5160360A (en) * | 1989-11-06 | 1992-11-03 | Nippon Sheet Glass Co., Ltd. | Process for producing low-loss embedded waveguide |
| US5359682A (en) * | 1990-03-07 | 1994-10-25 | Cselt-Centro Studi E Laboratori Telecomunicazioni S.P.A. | Method of adjusting the operation characteristics of integrated optical devices |
-
1987
- 1987-02-23 JP JP62039891A patent/JPS63206709A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5160360A (en) * | 1989-11-06 | 1992-11-03 | Nippon Sheet Glass Co., Ltd. | Process for producing low-loss embedded waveguide |
| US5139556A (en) * | 1990-03-07 | 1992-08-18 | Cselt - Centro Studi E Laboratori Telecomunicazioni S.P.A. | Method of adjusting the operation characteristics of integrated optical devices |
| US5359682A (en) * | 1990-03-07 | 1994-10-25 | Cselt-Centro Studi E Laboratori Telecomunicazioni S.P.A. | Method of adjusting the operation characteristics of integrated optical devices |
| US5125946A (en) * | 1990-12-10 | 1992-06-30 | Corning Incorporated | Manufacturing method for planar optical waveguides |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0462644B2 (enrdf_load_stackoverflow) | 1992-10-07 |
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