JPS6320490Y2 - - Google Patents
Info
- Publication number
- JPS6320490Y2 JPS6320490Y2 JP1979124343U JP12434379U JPS6320490Y2 JP S6320490 Y2 JPS6320490 Y2 JP S6320490Y2 JP 1979124343 U JP1979124343 U JP 1979124343U JP 12434379 U JP12434379 U JP 12434379U JP S6320490 Y2 JPS6320490 Y2 JP S6320490Y2
- Authority
- JP
- Japan
- Prior art keywords
- main shaft
- shaft
- pinion
- intermediate shaft
- screwed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drilling And Boring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979124343U JPS6320490Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-09-08 | 1979-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979124343U JPS6320490Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-09-08 | 1979-09-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5642815U JPS5642815U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-04-18 |
| JPS6320490Y2 true JPS6320490Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-06-07 |
Family
ID=29356243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979124343U Expired JPS6320490Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-09-08 | 1979-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6320490Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7258892B2 (en) | 2003-12-10 | 2007-08-21 | Micron Technology, Inc. | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition |
| US7422635B2 (en) | 2003-08-28 | 2008-09-09 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces |
| US7427425B2 (en) | 2003-02-11 | 2008-09-23 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
| US7481887B2 (en) | 2002-05-24 | 2009-01-27 | Micron Technology, Inc. | Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces |
| US7581511B2 (en) | 2003-10-10 | 2009-09-01 | Micron Technology, Inc. | Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
| US7584942B2 (en) | 2004-03-31 | 2009-09-08 | Micron Technology, Inc. | Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers |
| US7588804B2 (en) | 2002-08-15 | 2009-09-15 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841052Y2 (ja) * | 1975-06-21 | 1983-09-16 | カブシキガイシヤ ナカニシテツコウシヨ | フダンスイジドウセンコウキ |
-
1979
- 1979-09-08 JP JP1979124343U patent/JPS6320490Y2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7481887B2 (en) | 2002-05-24 | 2009-01-27 | Micron Technology, Inc. | Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces |
| US7588804B2 (en) | 2002-08-15 | 2009-09-15 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
| US7427425B2 (en) | 2003-02-11 | 2008-09-23 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
| US7422635B2 (en) | 2003-08-28 | 2008-09-09 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces |
| US7581511B2 (en) | 2003-10-10 | 2009-09-01 | Micron Technology, Inc. | Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
| US7258892B2 (en) | 2003-12-10 | 2007-08-21 | Micron Technology, Inc. | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition |
| US7584942B2 (en) | 2004-03-31 | 2009-09-08 | Micron Technology, Inc. | Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5642815U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-04-18 |