JPS63204681A - Heat exchanger fin for excimer laser - Google Patents
Heat exchanger fin for excimer laserInfo
- Publication number
- JPS63204681A JPS63204681A JP3564787A JP3564787A JPS63204681A JP S63204681 A JPS63204681 A JP S63204681A JP 3564787 A JP3564787 A JP 3564787A JP 3564787 A JP3564787 A JP 3564787A JP S63204681 A JPS63204681 A JP S63204681A
- Authority
- JP
- Japan
- Prior art keywords
- zirconium
- heat exchanger
- excimer laser
- exchanger fin
- fin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 18
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 13
- 239000000956 alloy Substances 0.000 claims abstract description 13
- 239000010949 copper Substances 0.000 claims abstract description 12
- 229910052802 copper Inorganic materials 0.000 claims abstract description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 230000007797 corrosion Effects 0.000 abstract description 12
- 238000005260 corrosion Methods 0.000 abstract description 12
- 229910001093 Zr alloy Inorganic materials 0.000 abstract description 6
- 229910052759 nickel Inorganic materials 0.000 abstract description 4
- 229910001257 Nb alloy Inorganic materials 0.000 abstract description 2
- 229910052804 chromium Inorganic materials 0.000 abstract description 2
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- 229910052718 tin Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 5
- 230000005284 excitation Effects 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は優れたエキシマレーザ用熱交換器フィンに関す
る。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to an excellent heat exchanger fin for an excimer laser.
（従来の技術）
Ａｒ、 Ｋｒ、 Ｘｅなどの希ガスは安定な原子で、通
常は分子を作らない。しかし、こういった希ガスでも電
子を１つ外側の軌道に励起すると、Ｎａ、Ｋ。(Prior art) Rare gases such as Ar, Kr, and Xe are stable atoms and do not normally form molecules. However, even in these rare gases, when an electron is excited to one orbit outside, it becomes Na, K.
Ｒｈのように最外殻に電子を１個もつ原子と同様な性質
をもつことが可能となり、分子を形成できる。It becomes possible to have properties similar to atoms with one electron in the outermost shell, such as Rh, and to form molecules.
このような状態をエキシマという。エキシマとはＥｘｃ
ｉｔｅｄ Ｄｉｍｅｒの略称であり、励起状態でしか分
子が存在せず１分子が解離するときに放出される光子を
利用したのがエキシマレーザである。従って、レーザの
下準位が存在しないことになり、高い利得を示す、また
電子遷移の準位を利用するため、波長が紫外域にあり、
大出力、高効率の紫外レーザとして、電子産業、化学産
業、エネルギー産業、生命産業等での種々の応用が期待
されている。エキシマはその結合する原子によって希ガ
スエキシマ（Ｘｓ２ｇ Ａｒｚ ｔ Ｋｒ、など）、希
ガス−酸素エキシマ（ＸｅＯ，ＫｒＯ，ＡｒＯなど）、
希ガス−ハライドゆ
エキシ７ （ＸｅＣＱ、 ＫｒＦ、 ＡｒＦ、 ＸａＦ
、 Ｘｅ、ＣＱ、斌ＣＱｆ、ｄど）、水銀−パライドエ
キシ？（ＩＩｇＢｒ、 ＨｇＣ（１，ＩＩｇＩなど）に
大別される。これらエキシマは既述の如く、励起状態で
しか存在しない。この中で、希ガス−ハライドエキシマ
を使ったレーザは高効率、大出力が達成されやすいこと
から、最も盛んに研究開発されている。主要希ガスハラ
イドエキシマレーザの発振波長はＡｒＦ ； １９３ｎ
ｍ、 ＫｒＣＱ ； ２２２ｎｍ、叩
ＫｒＦ ； ２４９ｎ閣、ＸｅＣＱ ； ３０８ｎｍ、
ＸｅＦ ：’Ｉ（ｌｎｎｍである。This state is called an excimer. What is excimer?Exc
Excimer laser is an abbreviation for ``Ited Dimer'', and excimer laser uses photons emitted when one molecule dissociates when molecules exist only in an excited state. Therefore, the lower level of the laser does not exist, and the wavelength is in the ultraviolet region, showing high gain.
As a high-output, high-efficiency ultraviolet laser, it is expected to have various applications in the electronic industry, chemical industry, energy industry, life industry, etc. Excimers are classified into noble gas excimers (Xs2g Arz t Kr, etc.), noble gas-oxygen excimers (XeO, KrO, ArO, etc.), depending on the atoms they bond to.
Noble gas-halide (XeCQ, KrF, ArF, XaF
, Xe, CQ, Bin CQf, d, etc.), mercury-parideex? (IIgBr, HgC (1, IIgI, etc.)). As mentioned above, these excimers exist only in an excited state. Among these, lasers using rare gas-halide excimers have high efficiency and high output. It is the most actively researched and developed because it is easy to achieve.The oscillation wavelength of the main rare gas halide excimer laser is ArF; 193n
m, KrCQ; 222nm, KrF; 249n, XeCQ; 308nm,
XeF:'I(lnnm.
励起方式としては電子ビーム励起、放電励起などがある
。特に後者の放電励起方式では平均出力が大きく、寿命
が長いことから最近の主流になっている。Excitation methods include electron beam excitation and discharge excitation. In particular, the latter discharge excitation method has become mainstream these days because of its large average output and long life.
以下、最も一般的に用いられているＸｅ（Ｊエキシマレ
ーザを例にとって説明する。 ＸｅＣＱエキシマレーザ
ではＨＣｌ ＋ Ｘｓ ＋Ｎａ （又はＨＣＱ ＋ Ｘ
ｅ ＋ ）Ｉｓ）の混合ガじ、３０８ｎｉ＋のレーザ光
を放出して再び基底状態に戻る。この混合ガスは放電部
で加熱され高温になっている。そこで繰返し動作のため
、該混合ガスを熱交換器に導いて冷却する必要がある。The most commonly used Xe (J excimer laser) will be explained below as an example. In the XeCQ excimer laser, HCl + Xs + Na (or HCQ +
The mixture of e + )Is) emits a laser beam of 308ni+ and returns to the ground state again. This mixed gas is heated in the discharge section and reaches a high temperature. Therefore, for repeated operations, it is necessary to introduce the mixed gas to a heat exchanger to cool it.
従って、熱交換器フィンの材質は熱伝導性の良いものが
好ましい。Therefore, it is preferable that the material of the heat exchanger fins has good thermal conductivity.
従来、熱交換器フィンの材料としては熱伝導性を良くす
るために銅のみか、銅基材に耐食性層としてのＮｉをメ
ッキしたものが、主に用いられている。しかし、Ｃｕ
、 Ｎｉ共にＨＣＱに対する耐食性が十分でなく、特に
調整時に熱交換器を大気にさらした時に、 １Ｉｃｆｆ
ｉと空気中の水とが反応して生じた塩酸が、Ｃｕ及びＮ
ｉメッキをひどく腐食してしまうという問題があった。Conventionally, the materials used for heat exchanger fins are mainly copper alone or a copper base material plated with Ni as a corrosion-resistant layer in order to improve thermal conductivity. However, Cu
Both Ni and Ni have insufficient corrosion resistance against HCQ, and especially when the heat exchanger is exposed to the atmosphere during adjustment, 1Icff
The hydrochloric acid produced by the reaction of i with water in the air, Cu and N
There was a problem in that the i-plating was severely corroded.
このため熱交換器の材質劣化が進み、熱交換効率の低下
、強度低下等を引き起こすという欠点があった。As a result, the material of the heat exchanger deteriorates, resulting in a decrease in heat exchange efficiency and strength.
（発明が解決しようとする問題点）
本発明は、上記問題点を解消するためになされたもので
あり、熱伝導性及び高寿命性を兼ね備えたエキシマレー
ザ用熱交換器フィンを提供することを目的とする。(Problems to be Solved by the Invention) The present invention has been made to solve the above problems, and aims to provide a heat exchanger fin for an excimer laser that has both thermal conductivity and long life. purpose.
（問題点を解決するための手段と作用）本発明のエキシ
マレーザ用熱交換器フィンは。(Means and effects for solving the problems) The heat exchanger fin for excimer laser of the present invention is as follows.
銅基材の表面にジルコニウム又はジルコニウム基合金の
うち少なくとも一つを被覆した材質から構成されている
ことを特徴とする。ここで、ジルコニウム基合金とはＳ
ｎ、 Ｆｅ、 Ｎｉ、 ＣｒまたはＮｂなどを含む合金
であり、具体的にはジルカロイ、オーゼナイト、Ｚｒ
−Ｎｂ合金が挙げられる。これらジルコニウム及びジル
コニウム基合金を被覆する方法としては、クラッド法、
塗布法、溶射法、めっき法。It is characterized by being made of a material in which the surface of a copper base material is coated with at least one of zirconium or a zirconium-based alloy. Here, zirconium-based alloy is S
It is an alloy containing n, Fe, Ni, Cr or Nb, specifically Zircaloy, Auzenite, Zr
-Nb alloy. Methods for coating these zirconium and zirconium-based alloys include cladding method,
Coating method, thermal spraying method, plating method.
化学蒸着法、物理蒸着法等が可能であり、特に限定され
ない、これらジルコニウム及びジルコニウム基合金はそ
の表面に酸化物を形成してあっても良い、酸化の具体的
方法としては大気中酸化、熱水中酸化、水蒸気中酸化も
しくは電気的酸化が挙げられる。Chemical vapor deposition, physical vapor deposition, etc. are possible, and these zirconium and zirconium-based alloys may have oxides formed on their surfaces. Specific oxidation methods include atmospheric oxidation, thermal oxidation, etc. Examples include oxidation in water, oxidation in steam, and electrical oxidation.
本発明のエキシマレーザ用熱交換器フィンは、フィンの
表面、即ち、 ＨＣＩ！ ＋ Ｘｅ ＋ Ｎｅの混合
ガスに接触する面がジルコニウム、ジルコニウム基合金
又はそれらの酸化物で構成されているので、耐食性が極
めて優れている。即ち、ジルコニウム、ジルコニウム基
合金、及びそれらの酸化物はＨＣＱに対する耐食性が良
好であり、長時間使用でも殆ど腐食されない。このため
フィン材質の劣化が殆どなく、レーザ装置寿命が格段に
向上する。The heat exchanger fin for an excimer laser of the present invention has a surface of the fin, that is, HCI! Since the surface that comes into contact with the mixed gas of +Xe + Ne is made of zirconium, a zirconium-based alloy, or an oxide thereof, it has extremely excellent corrosion resistance. That is, zirconium, zirconium-based alloys, and their oxides have good corrosion resistance against HCQ, and are hardly corroded even after long-term use. Therefore, there is almost no deterioration of the fin material, and the life of the laser device is significantly improved.
さらに、混合ガスと接するのはフィン表面のみであるか
ら、少なくとも該表面のみが、ジルコニウム、ジルコニ
ウム基合金、又はそれらの酸化物で構成されておれば良
い、従って、ジルコニウム又はジルコニウム基合金と銅
基材との間には異種材質の中間層があっても良い。Furthermore, since only the fin surface is in contact with the mixed gas, it is sufficient that at least only the surface is composed of zirconium, a zirconium-based alloy, or an oxide thereof. Therefore, zirconium or a zirconium-based alloy and a copper-based There may be an intermediate layer made of different materials between the materials.
なお、ジルコニウムまたはジルコニウム基合金の被覆厚
さは使用条件によっても異なり特に限定されないが、通
常は数ミクロンの厚さで十分である。The coating thickness of zirconium or zirconium-based alloy varies depending on the conditions of use and is not particularly limited, but a thickness of several microns is usually sufficient.
更に、本発明のエキシマレーザ用熱交換器フィンは、そ
の材質の基材が銅であることから、熱伝導性が優れてい
ることは言うまでもない。Furthermore, since the base material of the heat exchanger fin for an excimer laser of the present invention is copper, it goes without saying that it has excellent thermal conductivity.
（実 施 例）
以下１本発明の詳細な説明する。寸法２ｍａ＋Ｘ２０ｍ
ｍ Ｘ ３０ｍｍの銅基材の表面に厚さ５仰のジルコニ
ウムを被覆した板材を用意し、濃度５％の塩酸に３日間
浸漬した後、１日間空気中に放置した。この浸漬・放置
の操作を１００回繰り返した。なお、この操作は実際の
エキシマレーザ用熱交換器フィンの腐食条件をｊＩ；！
擬したものであり、かつ加速腐食条件となっている。上
記、１００回繰り返し後、ジルコニウム表面には腐食の
発生は見られなかった。また、腐食試験前の熱抵抗を実
測した所、板厚方向では９．３ＫＷ−１であった。(Example) The present invention will be described in detail below. Dimensions 2ma+X20m
A plate material having a surface of a copper base material of m x 30 mm coated with zirconium having a thickness of 5 times was prepared, and after immersed in hydrochloric acid with a concentration of 5% for 3 days, it was left in the air for 1 day. This operation of dipping and leaving was repeated 100 times. Note that this operation is based on the actual corrosion conditions of heat exchanger fins for excimer lasers.
It is simulated and has accelerated corrosion conditions. After repeating the above 100 times, no corrosion was observed on the zirconium surface. Furthermore, when the thermal resistance was actually measured before the corrosion test, it was 9.3 KW-1 in the thickness direction.
一方、比較例として、寸法２ ｌｌ＋ａ Ｘ ２０ｍｍ
Ｘ ３０ｍ５＋の銅基材の表面に厚さ５ｇのＮｉを被
覆した板材を用意し、上記実施例と同様な浸漬・放置の
操作を１００回繰り返した。その結果、腐食の発生が認
められた。また、腐食ｎｉｆの熱抵抗は８．７ＫＷ−’
であった。On the other hand, as a comparative example, dimensions 2 ll + a x 20 mm
A plate material whose surface was coated with 5 g of Ni on the surface of a copper base material of 30 m5+ was prepared, and the same immersion and standing operations as in the above example were repeated 100 times. As a result, occurrence of corrosion was observed. Also, the thermal resistance of corrosion nif is 8.7KW-'
Met.
以上詳述した如く、本発明のエキシマレーザ用熱交換器
フィンは熱伝導性及び耐食性が優れており、熱交換効率
及びレーザ装置寿命を向上させ、工業上極めて有用であ
る。As detailed above, the excimer laser heat exchanger fin of the present invention has excellent thermal conductivity and corrosion resistance, improves heat exchange efficiency and laser device life, and is extremely useful industrially.
代理人 弁理士 則 近 憲 佑 同 竹 花 喜久男Agent: Patent Attorney Noriyuki Chika Same Bamboo Flower Kikuo
Claims (2)
合金のうち少なくとも一つを被覆した材質から構成され
ていることを特徴とするエキシマレーザ用熱交換器フィ
ン。(1) A heat exchanger fin for an excimer laser, characterized in that it is made of a material in which the surface of a copper base material is coated with at least one of zirconium or a zirconium-based alloy.
れらの酸化物を形成して成ることを特徴とする特許請求
の範囲第１項記載のエキシマレーザ用熱交換器フィン。(2) The heat exchanger fin for an excimer laser according to claim 1, wherein an oxide of zirconium or a zirconium-based alloy is formed on the surface of the heat exchanger fin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035647A JP2590087B2 (en) | 1987-02-20 | 1987-02-20 | Heat exchanger fin for excimer laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035647A JP2590087B2 (en) | 1987-02-20 | 1987-02-20 | Heat exchanger fin for excimer laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63204681A true JPS63204681A (en) | 1988-08-24 |
| JP2590087B2 JP2590087B2 (en) | 1997-03-12 |
Family
ID=12447668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62035647A Expired - Fee Related JP2590087B2 (en) | 1987-02-20 | 1987-02-20 | Heat exchanger fin for excimer laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2590087B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129695U (en) * | 1991-05-15 | 1992-11-27 | 株式会社昭和鉛鉄 | Heat exchange equipment for pickling process line |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210309A (en) * | 1975-07-14 | 1977-01-26 | Citizen Watch Co Ltd | Outer part for watches |
| JPS5897282A (en) * | 1981-12-02 | 1983-06-09 | 株式会社豊田中央研究所 | Microheater |
| JPS59227183A (en) * | 1983-06-07 | 1984-12-20 | Hamamatsu Photonics Kk | Rare gas-halogen-excimer laser |
| JPS60256084A (en) * | 1984-06-01 | 1985-12-17 | 住友金属工業株式会社 | Composite type zirconium alloy coated pipe |
| JPS61116889A (en) * | 1984-11-13 | 1986-06-04 | Mitsubishi Electric Corp | Discharge excitation short pulse laser device |
| JPS61137381A (en) * | 1984-12-10 | 1986-06-25 | Mitsubishi Electric Corp | Silent discharge gas laser |
| JPS61279675A (en) * | 1985-06-04 | 1986-12-10 | Hitachi Ltd | Zr-based alloy base material and its production |
| JPS61291958A (en) * | 1985-06-17 | 1986-12-22 | Sumitomo Metal Ind Ltd | Titanium material having high corrosion resistance |
-
1987
- 1987-02-20 JP JP62035647A patent/JP2590087B2/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210309A (en) * | 1975-07-14 | 1977-01-26 | Citizen Watch Co Ltd | Outer part for watches |
| JPS5897282A (en) * | 1981-12-02 | 1983-06-09 | 株式会社豊田中央研究所 | Microheater |
| JPS59227183A (en) * | 1983-06-07 | 1984-12-20 | Hamamatsu Photonics Kk | Rare gas-halogen-excimer laser |
| JPS60256084A (en) * | 1984-06-01 | 1985-12-17 | 住友金属工業株式会社 | Composite type zirconium alloy coated pipe |
| JPS61116889A (en) * | 1984-11-13 | 1986-06-04 | Mitsubishi Electric Corp | Discharge excitation short pulse laser device |
| JPS61137381A (en) * | 1984-12-10 | 1986-06-25 | Mitsubishi Electric Corp | Silent discharge gas laser |
| JPS61279675A (en) * | 1985-06-04 | 1986-12-10 | Hitachi Ltd | Zr-based alloy base material and its production |
| JPS61291958A (en) * | 1985-06-17 | 1986-12-22 | Sumitomo Metal Ind Ltd | Titanium material having high corrosion resistance |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129695U (en) * | 1991-05-15 | 1992-11-27 | 株式会社昭和鉛鉄 | Heat exchange equipment for pickling process line |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2590087B2 (en) | 1997-03-12 |
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