JPS6320428U - - Google Patents
Info
- Publication number
- JPS6320428U JPS6320428U JP11338386U JP11338386U JPS6320428U JP S6320428 U JPS6320428 U JP S6320428U JP 11338386 U JP11338386 U JP 11338386U JP 11338386 U JP11338386 U JP 11338386U JP S6320428 U JPS6320428 U JP S6320428U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vertical storage
- wafers
- rows
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 15
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11338386U JPH0249709Y2 (sh) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11338386U JPH0249709Y2 (sh) | 1986-07-25 | 1986-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6320428U true JPS6320428U (sh) | 1988-02-10 |
| JPH0249709Y2 JPH0249709Y2 (sh) | 1990-12-27 |
Family
ID=30995137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11338386U Expired JPH0249709Y2 (sh) | 1986-07-25 | 1986-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249709Y2 (sh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114938U (sh) * | 1989-03-03 | 1990-09-14 | ||
| JP2014060403A (ja) * | 2013-09-24 | 2014-04-03 | Kokusai Electric Semiconductor Service Inc | 基板保持具及びウェーハ支持方法 |
-
1986
- 1986-07-25 JP JP11338386U patent/JPH0249709Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114938U (sh) * | 1989-03-03 | 1990-09-14 | ||
| JP2014060403A (ja) * | 2013-09-24 | 2014-04-03 | Kokusai Electric Semiconductor Service Inc | 基板保持具及びウェーハ支持方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249709Y2 (sh) | 1990-12-27 |
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