JPS6320428U

JPS6320428U -

Info

Publication number: JPS6320428U
Application number: JP11338386U
Authority: JP
Priority date: 1986-07-25
Filing date: 1986-07-25
Publication date: 1988-02-10
Also published as: JPH0249709Y2

Description

[Brief explanation of the drawing]

第１Ａ図乃至第４Ｂ図はいずれも本考案の各実
施例における縦型収納治具の構成を示し、第１Ａ
図は第１実施例の正面斜視図、第１Ｂ図はその切
断平面図、第２Ａ図は第２実施例の正面図、第２
Ｂ図はその切断平面図、第３Ａ図は第３実施例の
正面断面図、第３Ｂ図はその切断平面図、第４Ａ
図は第４実施例の正面図、第４Ｂ図はその切断平
面図である。第５図は従来技術の縦型収納治具の
構成を示す斜視図である。１０，２０，３０，４０：縦型収納治具、１ａ
，１ｂ，２ａ，２ｂ，３ａ，３ｂ，４ａ，４ｂ：
ウエハ、１１，１２：支持板、１３ａ，１３ｂ，
１４，２５，２６，３７〜３９，４６〜４８：ウ
エハ保持溝、１５〜１７，２１ａ〜２１ｄ，２２
ａ〜２２ｄ，２５〜２６，３１〜３４，４１〜４
３：ウエハ支持部材、１８，１９，２３，２４，
３５，３６，４４，４５：ウエハ保持空間。 Figures 1A to 4B all show the configuration of the vertical storage jig in each embodiment of the present invention.
The figure is a front perspective view of the first embodiment, FIG. 1B is a cutaway plan view thereof, and FIG. 2A is a front view of the second embodiment.
Figure B is a cutaway plan view thereof, Figure 3A is a front sectional view of the third embodiment, Figure 3B is a cutaway plan view thereof, and Figure 4A is a front sectional view of the third embodiment.
The figure is a front view of the fourth embodiment, and FIG. 4B is a cutaway plan view thereof. FIG. 5 is a perspective view showing the structure of a conventional vertical storage jig. 10, 20, 30, 40: Vertical storage jig, 1a
, 1b, 2a, 2b, 3a, 3b, 4a, 4b:
Wafer, 11, 12: Support plate, 13a, 13b,
14, 25, 26, 37-39, 46-48: Wafer holding groove, 15-17, 21a-21d, 22
a~22d, 25~26, 31~34, 41~4
3: Wafer support member, 18, 19, 23, 24,
35, 36, 44, 45: wafer holding space.

Claims

[Scope of Claim for Utility Model Registration] (1) A plurality of wafer support members having wafer holding grooves carved therein are fixed upright between a pair of support plates disposed above and below, and the wafers are sandwiched between the support members. In a vertical storage jig configured to be able to hold a large number of wafers arranged vertically in a space, a plurality of wafer holding spaces are formed between the supporting members, and the wafers are placed in each holding space. A vertical storage jig characterized by a configuration in which wafers can be attached and detached from the outer circumferential direction of a support plate and arranged vertically in a row. (2) The vertical storage jig according to claim 1, wherein a plurality of rows of wafers arranged in the wafer holding space are positioned on both sides of the center axis of the support plate. . (3) such that the wafer peripheral edges of the plurality of wafer rows arranged in the wafer holding space intersect with each other;
The vertical storage jig according to claim 1 or 2, which is configured so that it can be loaded alternately on the left and right sides with the center axis of the support plate in between. (4) Utility model registration claim 1, in which wafer holding grooves are carved on both circumferential sides of at least one support member, and a plurality of wafer rows can be arranged on both sides of the support member. The vertical storage jig according to any one of paragraphs 1 to 3. (5) The vertical storage according to any one of claims 1 to 4, wherein the wafer rows are arranged so as to be slightly inclined toward the center axis of the support plate. jig.