JPS6320428U - - Google Patents

Info

Publication number
JPS6320428U
JPS6320428U JP11338386U JP11338386U JPS6320428U JP S6320428 U JPS6320428 U JP S6320428U JP 11338386 U JP11338386 U JP 11338386U JP 11338386 U JP11338386 U JP 11338386U JP S6320428 U JPS6320428 U JP S6320428U
Authority
JP
Japan
Prior art keywords
wafer
vertical storage
wafers
rows
support plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11338386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249709Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11338386U priority Critical patent/JPH0249709Y2/ja
Publication of JPS6320428U publication Critical patent/JPS6320428U/ja
Application granted granted Critical
Publication of JPH0249709Y2 publication Critical patent/JPH0249709Y2/ja
Expired legal-status Critical Current

Links

JP11338386U 1986-07-25 1986-07-25 Expired JPH0249709Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11338386U JPH0249709Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11338386U JPH0249709Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320428U true JPS6320428U (enrdf_load_stackoverflow) 1988-02-10
JPH0249709Y2 JPH0249709Y2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=30995137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11338386U Expired JPH0249709Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH0249709Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114938U (enrdf_load_stackoverflow) * 1989-03-03 1990-09-14
JP2014060403A (ja) * 2013-09-24 2014-04-03 Kokusai Electric Semiconductor Service Inc 基板保持具及びウェーハ支持方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114938U (enrdf_load_stackoverflow) * 1989-03-03 1990-09-14
JP2014060403A (ja) * 2013-09-24 2014-04-03 Kokusai Electric Semiconductor Service Inc 基板保持具及びウェーハ支持方法

Also Published As

Publication number Publication date
JPH0249709Y2 (enrdf_load_stackoverflow) 1990-12-27

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