JPS6320426U - - Google Patents

Info

Publication number
JPS6320426U
JPS6320426U JP11479086U JP11479086U JPS6320426U JP S6320426 U JPS6320426 U JP S6320426U JP 11479086 U JP11479086 U JP 11479086U JP 11479086 U JP11479086 U JP 11479086U JP S6320426 U JPS6320426 U JP S6320426U
Authority
JP
Japan
Prior art keywords
vertical
boat
charging shafts
lower plates
vertical charging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11479086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528756Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986114790U priority Critical patent/JPH0528756Y2/ja
Publication of JPS6320426U publication Critical patent/JPS6320426U/ja
Application granted granted Critical
Publication of JPH0528756Y2 publication Critical patent/JPH0528756Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986114790U 1986-07-25 1986-07-25 Expired - Lifetime JPH0528756Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986114790U JPH0528756Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986114790U JPH0528756Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320426U true JPS6320426U (enrdf_load_stackoverflow) 1988-02-10
JPH0528756Y2 JPH0528756Y2 (enrdf_load_stackoverflow) 1993-07-23

Family

ID=30997847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986114790U Expired - Lifetime JPH0528756Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH0528756Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07297145A (ja) * 1995-03-02 1995-11-10 Tokyo Electron Tohoku Ltd 熱処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61212014A (ja) * 1985-03-18 1986-09-20 Tokyo Erekutoron Kk 化学的気相成長法による半導体ウエハ処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61212014A (ja) * 1985-03-18 1986-09-20 Tokyo Erekutoron Kk 化学的気相成長法による半導体ウエハ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07297145A (ja) * 1995-03-02 1995-11-10 Tokyo Electron Tohoku Ltd 熱処理装置

Also Published As

Publication number Publication date
JPH0528756Y2 (enrdf_load_stackoverflow) 1993-07-23

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