JPS6320426U - - Google Patents

Info

Publication number
JPS6320426U
JPS6320426U JP11479086U JP11479086U JPS6320426U JP S6320426 U JPS6320426 U JP S6320426U JP 11479086 U JP11479086 U JP 11479086U JP 11479086 U JP11479086 U JP 11479086U JP S6320426 U JPS6320426 U JP S6320426U
Authority
JP
Japan
Prior art keywords
vertical
boat
charging shafts
lower plates
vertical charging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11479086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528756Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986114790U priority Critical patent/JPH0528756Y2/ja
Publication of JPS6320426U publication Critical patent/JPS6320426U/ja
Application granted granted Critical
Publication of JPH0528756Y2 publication Critical patent/JPH0528756Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986114790U 1986-07-25 1986-07-25 Expired - Lifetime JPH0528756Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986114790U JPH0528756Y2 (OSRAM) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986114790U JPH0528756Y2 (OSRAM) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320426U true JPS6320426U (OSRAM) 1988-02-10
JPH0528756Y2 JPH0528756Y2 (OSRAM) 1993-07-23

Family

ID=30997847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986114790U Expired - Lifetime JPH0528756Y2 (OSRAM) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH0528756Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07297145A (ja) * 1995-03-02 1995-11-10 Tokyo Electron Tohoku Ltd 熱処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61212014A (ja) * 1985-03-18 1986-09-20 Tokyo Erekutoron Kk 化学的気相成長法による半導体ウエハ処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61212014A (ja) * 1985-03-18 1986-09-20 Tokyo Erekutoron Kk 化学的気相成長法による半導体ウエハ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07297145A (ja) * 1995-03-02 1995-11-10 Tokyo Electron Tohoku Ltd 熱処理装置

Also Published As

Publication number Publication date
JPH0528756Y2 (OSRAM) 1993-07-23

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