JPS63204113A - Magnetoelectric converter element - Google Patents

Abstract

PURPOSE:To eliminate the pitch shift of electric output, by mounting a substrate arranged in almost parallel to the circumferential contact surface of a ring- shaped flux supply body and a plurality of a magnetism-sensitive resistor patterns mounted on the substrate in almost parallel to the flux supply body. CONSTITUTION:A magnetoelectric converter element 2 is used so as to make a pair along with a ring-shaped multipolar magnet 1 wherein m-pieces of poles are magnetized to the circumferential surface thereof at an equal pitch lambda and arranged in parallel to the circumferential contact surface of the magnet 1. The magnetoelectric converter element 2 is constituted so that magnetism- sensitive resistor patterns 3, 4 each formed of a membrane composed of a ferromagnetic material having the anisotropic effect of magnetic resistance such as NiCo or NiFe are formed to the surface of a planar insulating substrate 10 by vapor-depositing of the ferromagnetic material in a rectangular shape. When the pitch of the resistor patterns 3, 4 is set to lambda', the pitch lambda' is shift so as to become a range of lambda/n>lambda'>=lambda/2n with respect to the magnetizing pitch lambda. Herein, (n) is the number of the magnetism-sensitive resistor patterns.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to the structure of a magnetoelectric transducer used for detecting repetitive magnetic signals.

``Prior art'' A magnetoelectric transducer using a conventional ring-shaped multipolar magnet as a magnetic flux supplying body has a magnetoelectric transducer that has n magnetic resistance patterns for each magnetization pitch λ of the multipolar magnet. Magnetoresistive patterns are arranged on the substrate at a pitch of λ/n, and a structure is adopted in which an electrical output that is an integral multiple of the number m of magnetized magnets is obtained for one rotation of the multipolar magnet.

However, while the substrate in this structure is flat,
Since the magnetized part of a ring-shaped multipolar magnet is a curved surface, the magnetic flux is received differently by the resistance pattern at the center and the resistance pattern at the ends of the magneto-sensitive resistance pattern, causing a pitch shift in the electrical output. It had drawbacks.

"Problems to be Solved by the Invention" An object of the present invention is to eliminate the above-mentioned drawbacks and to provide a magnetoelectric conversion element without pitch deviation of electric output.

"Means for Solving Interchange Points" According to the present invention, in a magneto-electric transducer used in a pair with an annular magnetic flux supply body having arbitrary magnetic flux supply parts at approximately equal pitch λ on the circumferential surface. , comprising a substrate disposed substantially parallel to a circumferential surface of the annular magnetic flux supply body, and a plurality (n) of magnetosensitive resistance patterns provided on the substrate substantially parallel to the magnetic flux supply section; , of the magneto-sensitive resistance pattern,
The pitch λ' of at least two magneto-sensitive resistance patterns is set to λ
Provided is a magnetoelectric transducer characterized in that it is arranged in a range of /n>^゛≧^7/2n.

"Operation" According to the above configuration, the magnetic flux supplied from the magnetic flux supply part on the circumferential surface of the annular magnetic flux supplier in the direction perpendicular to the magneto-sensitive resistance patterns arranged in a planar manner is applied to any of the magneto-sensitive resistance patterns. Approximately evenly distributed.

"Example" Next, an example of the present invention will be described with reference to FIGS. 1 to 3.

As shown in FIG. 1, the magnetoelectric conversion element 2 of this embodiment is used in a pair with a ring-shaped multipolar magnet 1, which is magnetized with m poles on the circumferential surface at an equal pitch of ^. It is arranged parallel to the circumferential surface. As shown in FIG. 2, the magnetoelectric transducer 2 has a magnetoresistive pattern formed on the surface of a planar insulating substrate 10 by a thin film of a ferromagnetic material such as nickel cobalt or nickel iron that has an anisotropic effect of magnetoresistive resistance. 3.4 was formed. The magneto-sensitive resistance patterns 3 and 4 are formed by depositing a ferromagnetic material in a rectangular or comb-teeth pattern, or by depositing it on the entire surface and then etching it. When a magnetic flux strong enough to saturate the magneto-sensitive resistance patterns 3.4 is applied in the vertical direction, the resistance value of each resistance pattern 3, 4 changes, and for one rotation of the ring-shaped multipolar magnet 1, the resistance value of each resistance pattern 3, 4 changes. A pulse output that is an integral multiple (in this embodiment, twice) of the number m of magnetized magnets 1 can be obtained. As shown in Figure 2, resistance pattern 3
．． When the pitch of magnet 1 is λ', λ' is shifted from the magnetization pitch λ of magnet 1 so that it falls within the range of the following equation.

λ/4≦λ" λ/2 (n) In other words, as shown in Fig. 3, the magnetic flux of the ring-shaped multipolar magnet 1 is transferred to the magnetic flux of the ring-shaped multipolar magnet 1. Since the magnetic flux is received by the conversion element 2, the position of the pole (for example, the N pole) of the magnet 1 when the magnetosensitive resistance pattern 4 receives the vertical magnetic flux Φ is Δθ at the central angle in the direction in which the pseudo magnetization pitch ^ becomes smaller. Therefore, the pitch of resistor patterns 3 and 4 is λ
This deviation Δθ is corrected by making ′ smaller than λ/2 (1/2 of the magnetized pitch). However, in a region where the pitch λ° of the resistor patterns 3.4 is smaller than 1/4 of the magnetization pitch λ, the distance between the magnet 1 and each resistor pattern 3, 4 is too far, causing distortion in the resistance value change. This causes variations in the output pulse waveform after waveform shaping.
It's not realistic. Therefore, as shown in equation (n), the pitch λ′
should be larger than 1/4 of the magnetization pitch λ.

By appropriately selecting the pitch λ' of the resistor pattern 3°4 within the range of (n>), the present inventor succeeded in obtaining the results shown in FIG. 4(a),
As shown in (b), conventionally, the difference in pulse period t/T after waveform shaping was about 5%, but this embodiment was able to improve it to about 1%.

[Other Embodiments] FIGS. 5 and 6 show the configuration of a magnetoelectric transducer with four resistance patterns. In this case, the pitch of the resistance patterns 4.5 at the center of the magnetoelectric conversion element is λ/4, and the pitch of the resistance patterns 3, 4 and 5, 6 at the end of the element is λ/4.
°It's Toshishita. Here, the pitch λ' is within the range of the following equation.

λ/8≦λ' λ/4 (2) However, even in this case, the pitch of the resistor patterns 4 and 5 may be set to a value λ" smaller than λ/4, and in this case, λ', λ The range of '' is (3
).

λ/8≦λ′≦λ″≦λ/4...(3) Similarly, when there are n resistance patterns (4 or more), the resistance pattern RIR
The pitch of 2 is λ'1...The pitch of Rn-1-Rn is λ
'n-4, the pitches λ'...λ'n-1 are within the range of the following equation.

λ/2 n≦λ°1−λ′n−1≦λ°2−λ″n−
2≦...(4) The present invention can also be applied to the magnetoelectric transducer 2 of a rotation detecting device having an annular magnetic flux supply body composed of a magnetic gear 20 and a bias magnet 30 as shown in FIG. can be implemented similarly.

"Effects" As described above, the magnetoelectric transducer of the present invention has the above configuration, and the magnetic flux supply section on the circumferential surface of the annular magnetic flux supply body extends in the direction perpendicular to the magnetosensitive resistance pattern arranged in a planar manner. Since the supplied magnetic flux is applied substantially equally to all magnetosensitive resistance patterns, there is an excellent effect that there is no pitch shift in the electrical output.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing an embodiment of the present invention, Fig. 2 is a front view of the A standard in Fig. 1, Fig. 3 is a top view of the B hood in Fig. 1, and Fig. 4 is a waveform diagram showing experimental results. , FIG. 5 and FIG. 6 are front and top views showing another embodiment, and FIG. 7 is a perspective view showing still another embodiment. 115. Ring-shaped multipolar magnet, 211. magnetoelectric conversion element,
3-611. Magnetoresistance pattern, 10. ,,substrate,2
0, , Magnetic gear, 30, , Bias magnet. Fig. 1 B view 1... Ring-shaped multipolar magnet 2... Magnetoelectric conversion element Fig. 2 1-- Ring-shaped multipolar magnet 2---One magnetoelectric conversion element 3.4... - Magnetoresistance pattern 10 - - Substrate Figure 5 S N, ¥ -
λ' Fig. 6 2--One magnetoelectric conversion element 3 to 6 - Magneto-sensitive resistance pattern No. 70 1--One ring-shaped multipolar magnet 2 - Magnetoelectric conversion element

Claims (1)

[Scope of Claims] In a magnetoelectric transducer used in a pair with an annular magnetic flux supply body having magnetic flux supply parts of arbitrary poles at approximately equal pitches λ on a circumferential surface, substantially parallel to the circumferential contact surface of the annular magnetic flux supply body. a substrate disposed in the magneto-sensitive resistance pattern; and a plurality (n) magneto-sensitive resistance patterns provided on the substrate substantially parallel to the magnetic flux supply section, and at least two of the magneto-sensitive resistance patterns A magnetoelectric transducer characterized in that the pitch λ' of the magnetoresistive pattern is arranged in the range λ/n>λ'≧λ/2n.