JPS63201333U - - Google Patents
Info
- Publication number
- JPS63201333U JPS63201333U JP9361687U JP9361687U JPS63201333U JP S63201333 U JPS63201333 U JP S63201333U JP 9361687 U JP9361687 U JP 9361687U JP 9361687 U JP9361687 U JP 9361687U JP S63201333 U JPS63201333 U JP S63201333U
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- cassette
- view
- plan
- side plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9361687U JPS63201333U (de) | 1987-06-17 | 1987-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9361687U JPS63201333U (de) | 1987-06-17 | 1987-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63201333U true JPS63201333U (de) | 1988-12-26 |
Family
ID=30956345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9361687U Pending JPS63201333U (de) | 1987-06-17 | 1987-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63201333U (de) |
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1987
- 1987-06-17 JP JP9361687U patent/JPS63201333U/ja active Pending