JPS63200333U - - Google Patents
Info
- Publication number
- JPS63200333U JPS63200333U JP9068887U JP9068887U JPS63200333U JP S63200333 U JPS63200333 U JP S63200333U JP 9068887 U JP9068887 U JP 9068887U JP 9068887 U JP9068887 U JP 9068887U JP S63200333 U JPS63200333 U JP S63200333U
- Authority
- JP
- Japan
- Prior art keywords
- liquid reservoir
- wafer
- reservoir ring
- developer
- pure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000013013 elastic material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9068887U JPS63200333U (de) | 1987-06-15 | 1987-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9068887U JPS63200333U (de) | 1987-06-15 | 1987-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200333U true JPS63200333U (de) | 1988-12-23 |
Family
ID=30950783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9068887U Pending JPS63200333U (de) | 1987-06-15 | 1987-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200333U (de) |
-
1987
- 1987-06-15 JP JP9068887U patent/JPS63200333U/ja active Pending
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